CA953435A - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
CA953435A
CA953435A CA129,009A CA129009A CA953435A CA 953435 A CA953435 A CA 953435A CA 129009 A CA129009 A CA 129009A CA 953435 A CA953435 A CA 953435A
Authority
CA
Canada
Prior art keywords
electron beam
beam apparatus
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA129,009A
Other versions
CA129009S (en
Inventor
Joel H. Fink
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Application granted granted Critical
Publication of CA953435A publication Critical patent/CA953435A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
CA129,009A 1971-01-20 1971-12-01 Electron beam apparatus Expired CA953435A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10803971A 1971-01-20 1971-01-20

Publications (1)

Publication Number Publication Date
CA953435A true CA953435A (en) 1974-08-20

Family

ID=22319919

Family Applications (1)

Application Number Title Priority Date Filing Date
CA129,009A Expired CA953435A (en) 1971-01-20 1971-12-01 Electron beam apparatus

Country Status (6)

Country Link
US (1) US3727093A (en)
JP (1) JPS5332239Y2 (en)
BE (1) BE778211A (en)
CA (1) CA953435A (en)
DE (1) DE2201832A1 (en)
GB (1) GB1373103A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242591B2 (en) * 1972-12-08 1977-10-25
US4496881A (en) * 1982-09-29 1985-01-29 Tetra Pak Developpement Sa Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly
US4687964A (en) * 1985-05-09 1987-08-18 The United States Of America As Represented By The Administrator National Aeronautics & Space Administration Apparatus for mounting a field emission cathode
EP2729938B1 (en) * 2011-07-04 2018-02-14 Tetra Laval Holdings & Finance SA Cathode housing suspension of an electron beam device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1520674A (en) * 1922-04-10 1924-12-23 Eldridge Francis Layton Sparking plug
US1794950A (en) * 1922-11-07 1931-03-03 Westinghouse Electric & Mfg Co Vacuum-tube device
US2208406A (en) * 1938-08-17 1940-07-16 Westinghouse Electric & Mfg Co Cathode ray tube
US2455381A (en) * 1947-10-01 1948-12-07 Bell Telephone Labor Inc Cathode assembly for electron discharge devices
US2509053A (en) * 1947-11-08 1950-05-23 Bell Telephone Labor Inc Space current device employing mutually bombarded electrodes
US2602907A (en) * 1949-01-14 1952-07-08 Bell Telephone Labor Inc Filament mounting for high power electron discharge devices
US3268305A (en) * 1964-08-17 1966-08-23 Sylvania Electric Prod Composite wire
US3462635A (en) * 1966-10-24 1969-08-19 Ibm Holder for highly reactive cathodes of rare-earth borides such as lanthanum hexaboride,the holder provided with a cooling means opposite to the emissive end of the cathode in order to reduce tendency of holder deterioration

Also Published As

Publication number Publication date
JPS5332239Y2 (en) 1978-08-10
DE2201832A1 (en) 1972-08-03
JPS52106418U (en) 1977-08-13
BE778211A (en) 1972-07-19
GB1373103A (en) 1974-11-06
US3727093A (en) 1973-04-10

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