CA871893A - Electron beam working apparatus - Google Patents

Electron beam working apparatus

Info

Publication number
CA871893A
CA871893A CA871893A CA871893DA CA871893A CA 871893 A CA871893 A CA 871893A CA 871893 A CA871893 A CA 871893A CA 871893D A CA871893D A CA 871893DA CA 871893 A CA871893 A CA 871893A
Authority
CA
Canada
Prior art keywords
electron beam
working apparatus
beam working
electron
working
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA871893A
Inventor
Maeda Haruo
Nakano Tomoyasu
Teranishi Akio
Miyazaki Eiichi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Akio Teranishi
Eiichi Miyazaki
Haruo Maeda
Tomoyasu Nakano
Matsushita Electric Industrial Co Ltd
Publication date
Application granted granted Critical
Publication of CA871893A publication Critical patent/CA871893A/en
Expired legal-status Critical Current

Links

CA871893A Electron beam working apparatus Expired CA871893A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA871893T

Publications (1)

Publication Number Publication Date
CA871893A true CA871893A (en) 1971-05-25

Family

ID=36357891

Family Applications (1)

Application Number Title Priority Date Filing Date
CA871893A Expired CA871893A (en) Electron beam working apparatus

Country Status (1)

Country Link
CA (1) CA871893A (en)

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