JPS5332239Y2 - - Google Patents

Info

Publication number
JPS5332239Y2
JPS5332239Y2 JP1977011225U JP1122577U JPS5332239Y2 JP S5332239 Y2 JPS5332239 Y2 JP S5332239Y2 JP 1977011225 U JP1977011225 U JP 1977011225U JP 1122577 U JP1122577 U JP 1122577U JP S5332239 Y2 JPS5332239 Y2 JP S5332239Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977011225U
Other versions
JPS52106418U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS52106418U publication Critical patent/JPS52106418U/ja
Application granted granted Critical
Publication of JPS5332239Y2 publication Critical patent/JPS5332239Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
JP1977011225U 1971-01-20 1977-02-03 Expired JPS5332239Y2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10803971A 1971-01-20 1971-01-20

Publications (2)

Publication Number Publication Date
JPS52106418U JPS52106418U (ja) 1977-08-13
JPS5332239Y2 true JPS5332239Y2 (ja) 1978-08-10

Family

ID=22319919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977011225U Expired JPS5332239Y2 (ja) 1971-01-20 1977-02-03

Country Status (6)

Country Link
US (1) US3727093A (ja)
JP (1) JPS5332239Y2 (ja)
BE (1) BE778211A (ja)
CA (1) CA953435A (ja)
DE (1) DE2201832A1 (ja)
GB (1) GB1373103A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242591B2 (ja) * 1972-12-08 1977-10-25
US4496881A (en) * 1982-09-29 1985-01-29 Tetra Pak Developpement Sa Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly
US4687964A (en) * 1985-05-09 1987-08-18 The United States Of America As Represented By The Administrator National Aeronautics & Space Administration Apparatus for mounting a field emission cathode
JP6181643B2 (ja) * 2011-07-04 2017-08-16 テトラ ラバル ホールディングス アンド ファイナンス エス エイ 電子ビーム装置のカソードハウジングサスペンション

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1520674A (en) * 1922-04-10 1924-12-23 Eldridge Francis Layton Sparking plug
US1794950A (en) * 1922-11-07 1931-03-03 Westinghouse Electric & Mfg Co Vacuum-tube device
US2208406A (en) * 1938-08-17 1940-07-16 Westinghouse Electric & Mfg Co Cathode ray tube
US2455381A (en) * 1947-10-01 1948-12-07 Bell Telephone Labor Inc Cathode assembly for electron discharge devices
US2509053A (en) * 1947-11-08 1950-05-23 Bell Telephone Labor Inc Space current device employing mutually bombarded electrodes
US2602907A (en) * 1949-01-14 1952-07-08 Bell Telephone Labor Inc Filament mounting for high power electron discharge devices
US3268305A (en) * 1964-08-17 1966-08-23 Sylvania Electric Prod Composite wire
US3462635A (en) * 1966-10-24 1969-08-19 Ibm Holder for highly reactive cathodes of rare-earth borides such as lanthanum hexaboride,the holder provided with a cooling means opposite to the emissive end of the cathode in order to reduce tendency of holder deterioration

Also Published As

Publication number Publication date
DE2201832A1 (de) 1972-08-03
GB1373103A (en) 1974-11-06
US3727093A (en) 1973-04-10
CA953435A (en) 1974-08-20
BE778211A (fr) 1972-07-19
JPS52106418U (ja) 1977-08-13

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