JPS52106418U - - Google Patents
Info
- Publication number
- JPS52106418U JPS52106418U JP1977011225U JP1122577U JPS52106418U JP S52106418 U JPS52106418 U JP S52106418U JP 1977011225 U JP1977011225 U JP 1977011225U JP 1122577 U JP1122577 U JP 1122577U JP S52106418 U JPS52106418 U JP S52106418U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/301—Arrangements enabling beams to pass between regions of different pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10803971A | 1971-01-20 | 1971-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52106418U true JPS52106418U (ja) | 1977-08-13 |
| JPS5332239Y2 JPS5332239Y2 (ja) | 1978-08-10 |
Family
ID=22319919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977011225U Expired JPS5332239Y2 (ja) | 1971-01-20 | 1977-02-03 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3727093A (ja) |
| JP (1) | JPS5332239Y2 (ja) |
| BE (1) | BE778211A (ja) |
| CA (1) | CA953435A (ja) |
| DE (1) | DE2201832A1 (ja) |
| GB (1) | GB1373103A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5990346A (ja) * | 1982-09-29 | 1984-05-24 | テトラ・パツク・デベロプメント・ソシエテ・アノニム | 電子ビ−ム装置内にて冷陰極を補充する方法および補充可能な冷陰極組立体 |
| JP2014523530A (ja) * | 2011-07-04 | 2014-09-11 | テトラ・ラヴァル・ホールディングス・アンド・ファイナンス・ソシエテ・アノニム | 電子ビーム装置のカソードハウジングサスペンション |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5242591B2 (ja) * | 1972-12-08 | 1977-10-25 | ||
| US4687964A (en) * | 1985-05-09 | 1987-08-18 | The United States Of America As Represented By The Administrator National Aeronautics & Space Administration | Apparatus for mounting a field emission cathode |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1520674A (en) * | 1922-04-10 | 1924-12-23 | Eldridge Francis Layton | Sparking plug |
| US1794950A (en) * | 1922-11-07 | 1931-03-03 | Westinghouse Electric & Mfg Co | Vacuum-tube device |
| US2208406A (en) * | 1938-08-17 | 1940-07-16 | Westinghouse Electric & Mfg Co | Cathode ray tube |
| US2455381A (en) * | 1947-10-01 | 1948-12-07 | Bell Telephone Labor Inc | Cathode assembly for electron discharge devices |
| US2509053A (en) * | 1947-11-08 | 1950-05-23 | Bell Telephone Labor Inc | Space current device employing mutually bombarded electrodes |
| US2602907A (en) * | 1949-01-14 | 1952-07-08 | Bell Telephone Labor Inc | Filament mounting for high power electron discharge devices |
| US3268305A (en) * | 1964-08-17 | 1966-08-23 | Sylvania Electric Prod | Composite wire |
| US3462635A (en) * | 1966-10-24 | 1969-08-19 | Ibm | Holder for highly reactive cathodes of rare-earth borides such as lanthanum hexaboride,the holder provided with a cooling means opposite to the emissive end of the cathode in order to reduce tendency of holder deterioration |
-
1971
- 1971-01-20 US US00108039A patent/US3727093A/en not_active Expired - Lifetime
- 1971-11-22 GB GB5412671A patent/GB1373103A/en not_active Expired
- 1971-12-01 CA CA129,009A patent/CA953435A/en not_active Expired
-
1972
- 1972-01-15 DE DE19722201832 patent/DE2201832A1/de active Pending
- 1972-01-19 BE BE778211A patent/BE778211A/xx unknown
-
1977
- 1977-02-03 JP JP1977011225U patent/JPS5332239Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5990346A (ja) * | 1982-09-29 | 1984-05-24 | テトラ・パツク・デベロプメント・ソシエテ・アノニム | 電子ビ−ム装置内にて冷陰極を補充する方法および補充可能な冷陰極組立体 |
| JP2014523530A (ja) * | 2011-07-04 | 2014-09-11 | テトラ・ラヴァル・ホールディングス・アンド・ファイナンス・ソシエテ・アノニム | 電子ビーム装置のカソードハウジングサスペンション |
Also Published As
| Publication number | Publication date |
|---|---|
| BE778211A (fr) | 1972-07-19 |
| CA953435A (en) | 1974-08-20 |
| US3727093A (en) | 1973-04-10 |
| JPS5332239Y2 (ja) | 1978-08-10 |
| DE2201832A1 (de) | 1972-08-03 |
| GB1373103A (en) | 1974-11-06 |