GB1334767A - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
GB1334767A
GB1334767A GB3987971A GB3987971A GB1334767A GB 1334767 A GB1334767 A GB 1334767A GB 3987971 A GB3987971 A GB 3987971A GB 3987971 A GB3987971 A GB 3987971A GB 1334767 A GB1334767 A GB 1334767A
Authority
GB
United Kingdom
Prior art keywords
electrode
electron
tube
aug
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3987971A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1334767A publication Critical patent/GB1334767A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB3987971A 1970-08-28 1971-08-25 Electron beam apparatus Expired GB1334767A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7012758A NL7012758A (enrdf_load_stackoverflow) 1970-08-28 1970-08-28

Publications (1)

Publication Number Publication Date
GB1334767A true GB1334767A (en) 1973-10-24

Family

ID=19810878

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3987971A Expired GB1334767A (en) 1970-08-28 1971-08-25 Electron beam apparatus

Country Status (6)

Country Link
US (1) US3767927A (enrdf_load_stackoverflow)
CA (1) CA943269A (enrdf_load_stackoverflow)
DE (1) DE2138767A1 (enrdf_load_stackoverflow)
FR (1) FR2106023A5 (enrdf_load_stackoverflow)
GB (1) GB1334767A (enrdf_load_stackoverflow)
NL (1) NL7012758A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE221138C (enrdf_load_stackoverflow) * 1971-04-30
NL7416395A (nl) * 1974-12-17 1976-06-21 Philips Nv Elektronenmikroskoop.
CN112996214B (zh) * 2021-02-19 2023-07-21 中国科学院近代物理研究所 一种磁场稳定性控制系统及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE509097A (enrdf_load_stackoverflow) * 1951-02-10
US3012139A (en) * 1960-03-24 1961-12-05 Merlyn L Hanson Automatic mass spectrometer
US3207982A (en) * 1961-04-19 1965-09-21 High Voltage Engineering Corp Apparatus for measuring and displaying the characteristics of beams of charged particles
US3191027A (en) * 1962-08-24 1965-06-22 Exxon Research Engineering Co Mass spectrometer with means to impress a fluctuating component upon the ion stream and means to detect the same
DE1498936B2 (de) * 1963-12-28 1971-01-14 Nihon Densht K K , Tokio Verfahren und Vorrichtung zur Steue rung der Expositionszeit in einem Massen spektrographen

Also Published As

Publication number Publication date
CA943269A (en) 1974-03-05
DE2138767A1 (de) 1972-03-02
NL7012758A (enrdf_load_stackoverflow) 1972-03-01
US3767927A (en) 1973-10-23
FR2106023A5 (enrdf_load_stackoverflow) 1972-04-28

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee