DE2121975C3 - Verfahren zur Entfernung von Verunreinigungen in Kohlenstoffkörpern - Google Patents
Verfahren zur Entfernung von Verunreinigungen in KohlenstoffkörpernInfo
- Publication number
- DE2121975C3 DE2121975C3 DE2121975A DE2121975A DE2121975C3 DE 2121975 C3 DE2121975 C3 DE 2121975C3 DE 2121975 A DE2121975 A DE 2121975A DE 2121975 A DE2121975 A DE 2121975A DE 2121975 C3 DE2121975 C3 DE 2121975C3
- Authority
- DE
- Germany
- Prior art keywords
- impurities
- carbon
- materials
- semiconductor
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 30
- 229910052799 carbon Inorganic materials 0.000 title claims description 25
- 238000000034 method Methods 0.000 title claims description 21
- 239000012535 impurity Substances 0.000 title claims description 19
- 239000000463 material Substances 0.000 claims description 22
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 17
- 239000007789 gas Substances 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 229910052786 argon Inorganic materials 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 238000011109 contamination Methods 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims description 5
- 239000011574 phosphorus Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052787 antimony Inorganic materials 0.000 claims description 4
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052785 arsenic Inorganic materials 0.000 claims description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 239000003245 coal Substances 0.000 claims 5
- 229910052736 halogen Inorganic materials 0.000 claims 3
- 150000002367 halogens Chemical class 0.000 claims 3
- 238000004140 cleaning Methods 0.000 claims 2
- 238000010276 construction Methods 0.000 claims 2
- 238000000746 purification Methods 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 239000003575 carbonaceous material Substances 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 230000008030 elimination Effects 0.000 claims 1
- 238000003379 elimination reaction Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 229920006395 saturated elastomer Polymers 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000004857 zone melting Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 150000002431 hydrogen Chemical class 0.000 description 4
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- -1 Polyethylene Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 241000589614 Pseudomonas stutzeri Species 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/02—Details
- H05B7/06—Electrodes
- H05B7/08—Electrodes non-consumable
- H05B7/085—Electrodes non-consumable mainly consisting of carbon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/145—Carbon only, e.g. carbon black, graphite
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3486670A | 1970-05-04 | 1970-05-04 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2121975A1 DE2121975A1 (de) | 1971-11-18 |
| DE2121975B2 DE2121975B2 (de) | 1973-11-22 |
| DE2121975C3 true DE2121975C3 (de) | 1974-06-20 |
Family
ID=21879076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2121975A Expired DE2121975C3 (de) | 1970-05-04 | 1971-05-04 | Verfahren zur Entfernung von Verunreinigungen in Kohlenstoffkörpern |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3645686A (enExample) |
| JP (1) | JPS535505B1 (enExample) |
| AT (1) | AT336543B (enExample) |
| BE (1) | BE766619A (enExample) |
| CA (1) | CA926092A (enExample) |
| DE (1) | DE2121975C3 (enExample) |
| FR (1) | FR2091112A5 (enExample) |
| GB (1) | GB1326965A (enExample) |
| NL (1) | NL7106051A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4224297A (en) * | 1977-07-22 | 1980-09-23 | Wacker-Chemie Gmbh | Method for reactivating a residue containing elemental silicon |
| US4400232A (en) * | 1981-11-09 | 1983-08-23 | Eagle-Picher Industries, Inc. | Control of oxygen- and carbon-related crystal defects in silicon processing |
| JPS5916617A (ja) * | 1982-07-19 | 1984-01-27 | Nippon Steel Corp | 厚鋼板のオンライン冷却装置 |
| DE3332447A1 (de) * | 1983-09-08 | 1985-03-21 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zur befreiung von siliciumbruchstuecken von verunreinigungen |
| DE102005046703A1 (de) * | 2005-09-29 | 2007-04-05 | Wacker Chemie Ag | Verfahren und Vorrichtung zur Hydrierung von Chlorsilanen |
| JP6824401B2 (ja) | 2016-11-07 | 2021-02-03 | ワッカー ケミー アクチエンゲゼルシャフトＷａｃｋｅｒ Ｃｈｅｍｉｅ ＡＧ | ケイ素含有固体を粉砕する方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2734800A (en) * | 1956-02-14 | Brooks | ||
| US1982821A (en) * | 1933-06-02 | 1934-12-04 | Hygrade Sylvania Corp | Electrode and method of manufacture |
| US2117497A (en) * | 1937-08-27 | 1938-05-17 | Dow Chemical Co | Method of purifying carbon or graphite |
| US2260746A (en) * | 1938-09-02 | 1941-10-28 | Dow Chemical Co | Method of treating carbon or graphite |
| US3387941A (en) * | 1965-03-23 | 1968-06-11 | Carbon Company | Process for desulfurizing carbonaceous materials |
-
1970
- 1970-05-04 US US34866A patent/US3645686A/en not_active Expired - Lifetime
- 1970-12-22 CA CA101260A patent/CA926092A/en not_active Expired
-
1971
- 1971-01-12 JP JP58071A patent/JPS535505B1/ja active Pending
- 1971-04-30 GB GB1234671A patent/GB1326965A/en not_active Expired
- 1971-05-03 FR FR7115848A patent/FR2091112A5/fr not_active Expired
- 1971-05-03 AT AT382071A patent/AT336543B/de not_active IP Right Cessation
- 1971-05-03 BE BE766619A patent/BE766619A/xx unknown
- 1971-05-04 NL NL7106051A patent/NL7106051A/xx unknown
- 1971-05-04 DE DE2121975A patent/DE2121975C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| BE766619A (fr) | 1971-11-03 |
| JPS535505B1 (enExample) | 1978-02-28 |
| AT336543B (de) | 1977-05-10 |
| FR2091112A5 (enExample) | 1972-01-14 |
| ATA382071A (de) | 1976-09-15 |
| DE2121975A1 (de) | 1971-11-18 |
| DE2121975B2 (de) | 1973-11-22 |
| GB1326965A (en) | 1973-08-15 |
| CA926092A (en) | 1973-05-15 |
| US3645686A (en) | 1972-02-29 |
| NL7106051A (enExample) | 1971-11-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) |