DE2117281A1 - Verfahren zur Herstellung eines Halbleiterbauelementes - Google Patents
Verfahren zur Herstellung eines HalbleiterbauelementesInfo
- Publication number
- DE2117281A1 DE2117281A1 DE19712117281 DE2117281A DE2117281A1 DE 2117281 A1 DE2117281 A1 DE 2117281A1 DE 19712117281 DE19712117281 DE 19712117281 DE 2117281 A DE2117281 A DE 2117281A DE 2117281 A1 DE2117281 A1 DE 2117281A1
- Authority
- DE
- Germany
- Prior art keywords
- block
- diffusion
- layer
- carrier
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 39
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 238000000034 method Methods 0.000 title claims description 15
- 238000009792 diffusion process Methods 0.000 claims description 32
- 239000012535 impurity Substances 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000012876 carrier material Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Thyristors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7013263A FR2085357A1 (en, 2012) | 1970-04-13 | 1970-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2117281A1 true DE2117281A1 (de) | 1971-10-28 |
Family
ID=9053866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712117281 Pending DE2117281A1 (de) | 1970-04-13 | 1971-04-08 | Verfahren zur Herstellung eines Halbleiterbauelementes |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE765188A (en, 2012) |
| DE (1) | DE2117281A1 (en, 2012) |
| FR (1) | FR2085357A1 (en, 2012) |
| GB (1) | GB1327710A (en, 2012) |
| NL (1) | NL7104861A (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4276099A (en) | 1978-10-11 | 1981-06-30 | The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland | Fabrication of infra-red charge coupled devices |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL247735A (en, 2012) * | 1959-01-28 | |||
| DE1258983B (de) * | 1961-12-05 | 1968-01-18 | Telefunken Patent | Verfahren zum Herstellen einer Halbleiteranordnung mit epitaktischer Schicht und mindestens einem pn-UEbergang |
| FR1356790A (fr) * | 1962-08-27 | 1964-03-27 | Intermetall | Procédé pour la fabrication d'un corps sous forme de plaque de grande conductibilité avec une couche superficielle mince résistante monocristalline en matière semi-conductrice, et corps conformes à ceux obtenus par ledit procédé ou procédé similaire |
| US3699406A (en) * | 1963-12-26 | 1972-10-17 | Gen Electric | Semiconductor gate-controlled pnpn switch |
-
1970
- 1970-04-13 FR FR7013263A patent/FR2085357A1/fr not_active Withdrawn
-
1971
- 1971-04-02 BE BE765188A patent/BE765188A/xx unknown
- 1971-04-08 DE DE19712117281 patent/DE2117281A1/de active Pending
- 1971-04-13 NL NL7104861A patent/NL7104861A/xx unknown
- 1971-04-19 GB GB2669971*A patent/GB1327710A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1327710A (en) | 1973-08-22 |
| NL7104861A (en, 2012) | 1971-10-15 |
| FR2085357A1 (en, 2012) | 1971-12-24 |
| BE765188A (fr) | 1971-10-04 |
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