DE19950375A1 - Verdichtung poröser Gebilde durch chemische Dampfphasen-Infiltration - Google Patents
Verdichtung poröser Gebilde durch chemische Dampfphasen-InfiltrationInfo
- Publication number
- DE19950375A1 DE19950375A1 DE19950375A DE19950375A DE19950375A1 DE 19950375 A1 DE19950375 A1 DE 19950375A1 DE 19950375 A DE19950375 A DE 19950375A DE 19950375 A DE19950375 A DE 19950375A DE 19950375 A1 DE19950375 A1 DE 19950375A1
- Authority
- DE
- Germany
- Prior art keywords
- carbon
- toluene
- precursor
- chemical vapor
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 title claims abstract description 72
- 230000008595 infiltration Effects 0.000 title claims abstract description 14
- 238000001764 infiltration Methods 0.000 title claims abstract description 14
- 239000000126 substance Substances 0.000 title claims abstract description 10
- 238000000280 densification Methods 0.000 title description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 9
- 239000000835 fiber Substances 0.000 claims abstract description 9
- 239000002243 precursor Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 25
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 18
- 239000007833 carbon precursor Substances 0.000 claims description 13
- 239000012159 carrier gas Substances 0.000 claims description 9
- 239000012808 vapor phase Substances 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims description 2
- 239000003345 natural gas Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims 1
- 239000002296 pyrolytic carbon Substances 0.000 description 19
- 238000007906 compression Methods 0.000 description 18
- 230000006835 compression Effects 0.000 description 15
- 239000007789 gas Substances 0.000 description 14
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 12
- 239000012071 phase Substances 0.000 description 7
- 239000001294 propane Substances 0.000 description 6
- 230000008033 biological extinction Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 244000027321 Lychnis chalcedonica Species 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 238000005056 compaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
- C04B35/83—Carbon fibres in a carbon matrix
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5001—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with carbon or carbonisable materials
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Chemical Vapour Deposition (AREA)
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9813114A FR2784695B1 (fr) | 1998-10-20 | 1998-10-20 | Densification de structures poreuses par infiltration chimique en phase vapeur |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE19950375A1 true DE19950375A1 (de) | 2000-04-27 |
Family
ID=9531757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19950375A Withdrawn DE19950375A1 (de) | 1998-10-20 | 1999-10-19 | Verdichtung poröser Gebilde durch chemische Dampfphasen-Infiltration |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6410088B1 (enExample) |
| JP (1) | JP2000143368A (enExample) |
| DE (1) | DE19950375A1 (enExample) |
| FR (1) | FR2784695B1 (enExample) |
| GB (1) | GB2342928B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106518091A (zh) * | 2016-10-27 | 2017-03-22 | 西北工业大学 | 一种提高二维碳/碳复合材料力学性能的方法 |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6953605B2 (en) * | 2001-12-26 | 2005-10-11 | Messier-Bugatti | Method for densifying porous substrates by chemical vapour infiltration with preheated gas |
| US20030233977A1 (en) * | 2002-06-20 | 2003-12-25 | Yeshwanth Narendar | Method for forming semiconductor processing components |
| ATE398193T1 (de) * | 2002-10-24 | 2008-07-15 | Goodrich Corp | Verfahren und vorrichtung zur stückweisen und zur kontinuierlichen verdichtung durch chemische dampfphaseninfitration (cvi) |
| US20040115348A1 (en) * | 2002-12-12 | 2004-06-17 | Landini Dennis James | Method for processing silicon-carbide preforms having a high temperature boron nitride coating |
| US6881262B1 (en) | 2002-12-23 | 2005-04-19 | Saint-Gobain Ceramics & Plastics, Inc. | Methods for forming high purity components and components formed thereby |
| US6825123B2 (en) * | 2003-04-15 | 2004-11-30 | Saint-Goban Ceramics & Plastics, Inc. | Method for treating semiconductor processing components and components formed thereby |
| US7501370B2 (en) * | 2004-01-06 | 2009-03-10 | Saint-Gobain Ceramics & Plastics, Inc. | High purity silicon carbide wafer boats |
| US7302989B1 (en) | 2006-06-06 | 2007-12-04 | Siemens Power Generation, Inc. | Modular mold system with ceramic inserts |
| FR2924426B1 (fr) * | 2007-11-30 | 2011-06-03 | Messier Bugatti | Procede de fabrication de pieces en materiau composite a renfort en fibres de carbone. |
| JP5480153B2 (ja) * | 2007-12-20 | 2014-04-23 | クアーズテック，インコーポレイティド | 半導体加工用部品の処理方法およびそれにより形成された部品 |
| WO2011049938A2 (en) * | 2009-10-20 | 2011-04-28 | Saint-Gobain Ceramics & Plastics, Inc. | Microelectronic processing component having a corrosion-resistant layer, microelectronic workpiece processing apparatus incorporating same, and method of forming an article having the corrosion-resistant layer |
| FR2953826B1 (fr) * | 2009-12-16 | 2019-10-11 | Safran Landing Systems | Procede de fabrication d'une piece de friction a base de materiau composite c/c |
| US9776859B2 (en) | 2011-10-20 | 2017-10-03 | Brigham Young University | Microscale metallic CNT templated devices and related methods |
| FR3016306B1 (fr) * | 2014-01-10 | 2018-01-19 | Centre National De La Recherche Scientifique | Comblement des macropores d'un substrat fibreux avec un melange de fluides precurseurs |
| US10648075B2 (en) * | 2015-03-23 | 2020-05-12 | Goodrich Corporation | Systems and methods for chemical vapor infiltration and densification of porous substrates |
| FR3045598B1 (fr) | 2015-12-21 | 2018-01-12 | Centre National De La Recherche Scientifique | Procede de fabrication d'une ceramique a partir d'une reaction chimique |
| EP3697744B1 (fr) | 2017-10-19 | 2021-08-11 | Safran Ceramics | Procédé de fabrication de pyrocarbone de microstructure prédéterminée |
| CN110963815B (zh) * | 2019-10-10 | 2022-01-28 | 福建康碳复合材料科技有限公司 | 一种制备大尺寸碳/碳发热体的工艺方法 |
| CN112028657A (zh) * | 2020-08-03 | 2020-12-04 | 杭州卓导新材料有限公司 | 炭/炭复合材料坩埚的制备方法 |
| US11795114B1 (en) | 2020-10-22 | 2023-10-24 | Witold Kowbel | Process far revolutionary, very thick and very high thermal conductivity carbon-carbon composites |
| CN116444247B (zh) * | 2023-04-27 | 2024-07-16 | 中国科学院重庆绿色智能技术研究院 | 一种基于原位生长法的高纯度人造岩石及其制备方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2516914B1 (fr) * | 1981-11-26 | 1986-03-14 | Commissariat Energie Atomique | Procede de densification d'une structure poreuse |
| US4578287A (en) * | 1984-10-09 | 1986-03-25 | The United States Of America As Represented By The Secretary Of The Navy | Process for producing graphite fiber/aluminum-magnesium matrix composites |
| US5441762A (en) * | 1991-03-22 | 1995-08-15 | E. I. Du Pont De Nemours And Company | Coating a composite article by applying a porous particulate layer and densifying the layer by subsequently applying a ceramic layer |
| US5262198A (en) * | 1991-04-08 | 1993-11-16 | Aluminum Company Of America | Method of producing a carbon coated ceramic membrane and associated product |
| JP3182212B2 (ja) * | 1991-05-21 | 2001-07-03 | アブコウ・コーポレイション | 高密度化多孔質ビレットを製造する方法及び多孔質予備成形体の高密度化方法 |
| US5389152A (en) * | 1992-10-09 | 1995-02-14 | Avco Corporation | Apparatus for densification of porous billets |
| FR2705664B1 (fr) * | 1993-05-24 | 1995-08-25 | Europ Propulsion | Procédé de fabrication d'un matériau composite à interphase en carbone pyrolytique de microtexture lamellaire entre fibres de renfort et matrice, et matériau tel qu'obtenu par le procédé. |
| FR2711647B1 (fr) * | 1993-10-27 | 1996-01-19 | Europ Propulsion | Procédé d'infiltration chimique en phase vapeur d'un matériau au sein d'un substrat poreux à température de surface contrôlée. |
| FR2714076B1 (fr) * | 1993-12-16 | 1996-03-15 | Europ Propulsion | Procédé de densification de substrats poreux par infiltration chimique en phase vapeur de carbure de silicium. |
| US6083560A (en) * | 1995-11-16 | 2000-07-04 | Alliant Techsystems Inc | Process for controlled deposition profile forced flow chemical vapor infiltration |
| US5871805A (en) * | 1996-04-08 | 1999-02-16 | Lemelson; Jerome | Computer controlled vapor deposition processes |
| GB9612882D0 (en) * | 1996-06-20 | 1996-08-21 | Dunlop Ltd | Densification of a porous structure |
| EP0909343B1 (en) * | 1996-06-28 | 2004-03-03 | Ballard Material Products, Inc. | Method for refurbishing brakes |
| FR2760741B1 (fr) * | 1997-03-13 | 1999-05-28 | Europ Propulsion | Procede de densification d'une structure poreuse faisant intervenir un precurseur original et dispositif associe |
| US5771873A (en) * | 1997-04-21 | 1998-06-30 | Ford Global Technologies, Inc. | Carbonaceous deposit-resistant coating for engine components |
| US6051167A (en) * | 1997-06-24 | 2000-04-18 | Materials And Electrochemical Research (Mer) Corporation | Process of making carbon-carbon composites |
-
1998
- 1998-10-20 FR FR9813114A patent/FR2784695B1/fr not_active Expired - Fee Related
-
1999
- 1999-09-29 GB GB9923038A patent/GB2342928B/en not_active Expired - Fee Related
- 1999-10-14 JP JP11292312A patent/JP2000143368A/ja not_active Withdrawn
- 1999-10-19 US US09/420,428 patent/US6410088B1/en not_active Expired - Fee Related
- 1999-10-19 DE DE19950375A patent/DE19950375A1/de not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106518091A (zh) * | 2016-10-27 | 2017-03-22 | 西北工业大学 | 一种提高二维碳/碳复合材料力学性能的方法 |
| CN106518091B (zh) * | 2016-10-27 | 2019-04-19 | 西北工业大学 | 一种提高二维碳/碳复合材料力学性能的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| GB9923038D0 (en) | 1999-12-01 |
| GB2342928A (en) | 2000-04-26 |
| JP2000143368A (ja) | 2000-05-23 |
| FR2784695B1 (fr) | 2001-11-02 |
| US6410088B1 (en) | 2002-06-25 |
| GB2342928B (en) | 2003-06-04 |
| FR2784695A1 (fr) | 2000-04-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8139 | Disposal/non-payment of the annual fee |