DE69402352T2 - Diamant/Kohlenstoff/Kohlenstoff-Verbundwerkstoff, verwendbar als integrales dielektrisches Kühlblech, und Verfahren zu seiner Herstellung - Google Patents
Diamant/Kohlenstoff/Kohlenstoff-Verbundwerkstoff, verwendbar als integrales dielektrisches Kühlblech, und Verfahren zu seiner HerstellungInfo
- Publication number
- DE69402352T2 DE69402352T2 DE69402352T DE69402352T DE69402352T2 DE 69402352 T2 DE69402352 T2 DE 69402352T2 DE 69402352 T DE69402352 T DE 69402352T DE 69402352 T DE69402352 T DE 69402352T DE 69402352 T2 DE69402352 T2 DE 69402352T2
- Authority
- DE
- Germany
- Prior art keywords
- carbon
- diamond
- manufacture
- heat sink
- dielectric heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
- C04B35/83—Carbon fibres in a carbon matrix
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5001—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with carbon or carbonisable materials
- C04B41/5002—Diamond
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3732—Diamonds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S427/00—Coating processes
- Y10S427/10—Chemical vapor infiltration, i.e. CVI
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S427/00—Coating processes
- Y10S427/103—Diamond-like carbon coating, i.e. DLC
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2913—Rod, strand, filament or fiber
- Y10T428/2918—Rod, strand, filament or fiber including free carbon or carbide or therewith [not as steel]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2913—Rod, strand, filament or fiber
- Y10T428/2918—Rod, strand, filament or fiber including free carbon or carbide or therewith [not as steel]
- Y10T428/292—In coating or impregnation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Composite Materials (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Ceramic Products (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/044,223 US5389400A (en) | 1993-04-07 | 1993-04-07 | Method for making a diamond/carbon/carbon composite useful as an integral dielectric heat sink |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69402352D1 DE69402352D1 (de) | 1997-05-07 |
DE69402352T2 true DE69402352T2 (de) | 1997-07-10 |
Family
ID=21931161
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69402352T Expired - Fee Related DE69402352T2 (de) | 1993-04-07 | 1994-02-25 | Diamant/Kohlenstoff/Kohlenstoff-Verbundwerkstoff, verwendbar als integrales dielektrisches Kühlblech, und Verfahren zu seiner Herstellung |
Country Status (4)
Country | Link |
---|---|
US (2) | US5389400A (de) |
EP (1) | EP0619282B1 (de) |
JP (1) | JP3535564B2 (de) |
DE (1) | DE69402352T2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007006624A1 (de) * | 2007-02-06 | 2008-08-07 | Schunk Kohlenstofftechnik Gmbh | Elektrischer Leiter und Verfahren zur Herstellung eines elektrischen Leiters |
DE102011050112A1 (de) | 2010-05-05 | 2011-11-10 | Industrieanlagen-Betriebsgesellschaft Mbh | Verfahren und Vorrichtung zur Herstellung beschichteter Partikel |
Families Citing this family (70)
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US5837081A (en) * | 1993-04-07 | 1998-11-17 | Applied Sciences, Inc. | Method for making a carbon-carbon composite |
US6746626B2 (en) | 1994-06-20 | 2004-06-08 | Sgl Technic Inc. | Graphite polymers and methods of use |
US5858537A (en) * | 1996-05-31 | 1999-01-12 | The United States Of America As Represented By The Secretary Of The Navy | Compliant attachment |
JPH10226589A (ja) * | 1997-02-14 | 1998-08-25 | Sumitomo Electric Ind Ltd | ダイヤモンドヒートシンクの製造方法 |
US6066399A (en) * | 1997-03-19 | 2000-05-23 | Sanyo Electric Co., Ltd. | Hard carbon thin film and method of forming the same |
EP0986429A4 (de) | 1997-06-02 | 2001-02-07 | Hitco Carbon Composites Inc | Hochleistungs filter |
US6390304B1 (en) | 1997-06-02 | 2002-05-21 | Hitco Carbon Composites, Inc. | High performance filters comprising inorganic fibers having inorganic fiber whiskers grown thereon |
US6156256A (en) * | 1998-05-13 | 2000-12-05 | Applied Sciences, Inc. | Plasma catalysis of carbon nanofibers |
KR20000046436A (ko) * | 1998-12-31 | 2000-07-25 | 추호석 | 복합재료 밀도화 방법 |
US6155432A (en) | 1999-02-05 | 2000-12-05 | Hitco Carbon Composites, Inc. | High performance filters based on inorganic fibers and inorganic fiber whiskers |
US7132161B2 (en) * | 1999-06-14 | 2006-11-07 | Energy Science Laboratories, Inc. | Fiber adhesive material |
US6913075B1 (en) | 1999-06-14 | 2005-07-05 | Energy Science Laboratories, Inc. | Dendritic fiber material |
US20040009353A1 (en) * | 1999-06-14 | 2004-01-15 | Knowles Timothy R. | PCM/aligned fiber composite thermal interface |
US6684759B1 (en) * | 1999-11-19 | 2004-02-03 | Vladimir Gorokhovsky | Temperature regulator for a substrate in vapor deposition processes |
US6502419B2 (en) | 2000-04-13 | 2003-01-07 | Sun Microsystems, Inc. | Electro-desorption compressor |
JP2002020179A (ja) * | 2000-06-28 | 2002-01-23 | Mitsubishi Pencil Co Ltd | 複合炭素成形体およびその製造方法 |
US6858349B1 (en) | 2000-09-07 | 2005-02-22 | The Gillette Company | Battery cathode |
US20020172867A1 (en) * | 2001-04-10 | 2002-11-21 | Anglin David L. | Battery cathode |
US6620359B1 (en) | 2001-04-11 | 2003-09-16 | Sgl Technic, Inc. | Water based method of making expanded graphite the product produced and expanded graphite polymeric pellets |
US7601251B2 (en) * | 2001-05-10 | 2009-10-13 | Life Technologies Corporation | Methods and apparatus for low resistance electrophoresis of prior-cast, hydratable separation media |
US6884861B2 (en) * | 2001-12-10 | 2005-04-26 | The United States Of America As Represented By The Secretary Of The Navy | Metal nanoparticle thermoset and carbon compositions from mixtures of metallocene-aromatic-acetylene compounds |
US6921462B2 (en) * | 2001-12-17 | 2005-07-26 | Intel Corporation | Method and apparatus for producing aligned carbon nanotube thermal interface structure |
US6891724B2 (en) | 2002-06-12 | 2005-05-10 | Intel Corporation | Increasing thermal conductivity of thermal interface using carbon nanotubes and CVD |
US20040122515A1 (en) * | 2002-11-21 | 2004-06-24 | Xi Chu | Prosthetic valves and methods of manufacturing |
EP1578857A1 (de) * | 2002-12-23 | 2005-09-28 | Dow Global Technologies Inc. | Elektrisch leitfähige zusammensetzungen enthaltend polymerisierte makrozyklische oligomere und kohlenstoffnanofasern |
US7316061B2 (en) | 2003-02-03 | 2008-01-08 | Intel Corporation | Packaging of integrated circuits with carbon nano-tube arrays to enhance heat dissipation through a thermal interface |
US7168484B2 (en) * | 2003-06-30 | 2007-01-30 | Intel Corporation | Thermal interface apparatus, systems, and methods |
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US20070199682A1 (en) * | 2006-02-24 | 2007-08-30 | Ming-Hang Hwang | Dissipation Heat Pipe Structure and Manufacturing Method Thereof |
US20070199677A1 (en) * | 2006-02-24 | 2007-08-30 | Ming-Hang Hwang | Heat Sink Fin Structure and Manufacturing Method Thereof |
US20070199681A1 (en) * | 2006-02-24 | 2007-08-30 | Ming-Hang Hwang | Dissipation Heat Pipe Structure and Manufacturing Method Thereof |
US20070199679A1 (en) * | 2006-02-24 | 2007-08-30 | Ming-Hang Hwang | Chip Heat Dissipation System and Manufacturing Method and Structure of Heat Dissipation Device Thereof |
US20070199678A1 (en) * | 2006-02-24 | 2007-08-30 | Ming-Hang Hwang | Surface Coating Film Structure on Heat Dissipation Metal and Manufacturing Method Thereof |
US20070201203A1 (en) * | 2006-02-24 | 2007-08-30 | Ming-Hang Hwang | Adhesion Material Structure and Process Method Thereof |
US20070201207A1 (en) * | 2006-02-24 | 2007-08-30 | Ming-Hang Hwang | Chip Heat Dissipation System and Structure of Heat Exchange Device and Manufacturing Method Thereof |
US8647512B2 (en) | 2008-06-18 | 2014-02-11 | Board Of Trustees Of The University Of Arkansas | Use of magnetic carbon composites from renewable resource materials for oil spill clean up and recovery |
US20110171108A1 (en) * | 2008-06-18 | 2011-07-14 | Board Of Trustees Of The University Of Arkansas | Microwave-assisted synthesis of nanodiamonds from tannin, lignin, asphalt, and derivatives |
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JP2597497B2 (ja) * | 1988-01-14 | 1997-04-09 | 洋一 広瀬 | 気相法ダイヤモンドの合成法 |
JPH02141494A (ja) * | 1988-07-30 | 1990-05-30 | Kobe Steel Ltd | ダイヤモンド気相合成装置 |
US5008737A (en) * | 1988-10-11 | 1991-04-16 | Amoco Corporation | Diamond composite heat sink for use with semiconductor devices |
US5204167A (en) * | 1989-02-23 | 1993-04-20 | Toshiba Tungaloy Co., Ltd. | Diamond-coated sintered body excellent in adhesion and process for preparing the same |
US4961958A (en) * | 1989-06-30 | 1990-10-09 | The Regents Of The Univ. Of Calif. | Process for making diamond, and doped diamond films at low temperature |
DE69005938T2 (de) * | 1989-07-31 | 1994-05-19 | Matsushita Electric Ind Co Ltd | Vorrichtung zur Herstellung von einer dünnen diamantartigen Kohlenstoffschicht. |
US4958590A (en) * | 1989-09-06 | 1990-09-25 | General Atomics | Microwave traveling-wave diamond production device and method |
US5126206A (en) * | 1990-03-20 | 1992-06-30 | Diamonex, Incorporated | Diamond-on-a-substrate for electronic applications |
JPH04170381A (ja) * | 1990-10-31 | 1992-06-18 | Sumitomo Electric Ind Ltd | 耐アブレーシブ材 |
-
1993
- 1993-04-07 US US08/044,223 patent/US5389400A/en not_active Expired - Lifetime
-
1994
- 1994-02-25 EP EP94301346A patent/EP0619282B1/de not_active Expired - Lifetime
- 1994-02-25 DE DE69402352T patent/DE69402352T2/de not_active Expired - Fee Related
- 1994-04-07 JP JP06968794A patent/JP3535564B2/ja not_active Expired - Fee Related
- 1994-11-01 US US08/332,903 patent/US5604037A/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007006624A1 (de) * | 2007-02-06 | 2008-08-07 | Schunk Kohlenstofftechnik Gmbh | Elektrischer Leiter und Verfahren zur Herstellung eines elektrischen Leiters |
DE102011050112A1 (de) | 2010-05-05 | 2011-11-10 | Industrieanlagen-Betriebsgesellschaft Mbh | Verfahren und Vorrichtung zur Herstellung beschichteter Partikel |
Also Published As
Publication number | Publication date |
---|---|
DE69402352D1 (de) | 1997-05-07 |
EP0619282B1 (de) | 1997-04-02 |
US5389400A (en) | 1995-02-14 |
EP0619282A2 (de) | 1994-10-12 |
JP3535564B2 (ja) | 2004-06-07 |
JPH0710663A (ja) | 1995-01-13 |
US5604037A (en) | 1997-02-18 |
EP0619282A3 (de) | 1995-02-15 |
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