DE19903573C2 - Verfahren zum Korrigieren von Reflexionsmessungen eines zu testenden reziproken Elements bei einem Vektornetzwerkanalysator - Google Patents
Verfahren zum Korrigieren von Reflexionsmessungen eines zu testenden reziproken Elements bei einem VektornetzwerkanalysatorInfo
- Publication number
- DE19903573C2 DE19903573C2 DE19903573A DE19903573A DE19903573C2 DE 19903573 C2 DE19903573 C2 DE 19903573C2 DE 19903573 A DE19903573 A DE 19903573A DE 19903573 A DE19903573 A DE 19903573A DE 19903573 C2 DE19903573 C2 DE 19903573C2
- Authority
- DE
- Germany
- Prior art keywords
- reflection
- gate
- load
- measurement
- coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 title claims description 64
- 238000000034 method Methods 0.000 title claims description 23
- 230000005540 biological transmission Effects 0.000 claims description 20
- 238000012360 testing method Methods 0.000 description 33
- 238000012937 correction Methods 0.000 description 15
- 230000006978 adaptation Effects 0.000 description 8
- 238000003149 assay kit Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000012512 characterization method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 241001397173 Kali <angiosperm> Species 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- 241001585676 Orthonama obstipata Species 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 210000002105 tongue Anatomy 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/28—Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/066,801 US6060888A (en) | 1998-04-24 | 1998-04-24 | Error correction method for reflection measurements of reciprocal devices in vector network analyzers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE19903573A1 DE19903573A1 (de) | 1999-11-04 |
| DE19903573C2 true DE19903573C2 (de) | 2002-11-07 |
Family
ID=22071804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19903573A Expired - Fee Related DE19903573C2 (de) | 1998-04-24 | 1999-01-29 | Verfahren zum Korrigieren von Reflexionsmessungen eines zu testenden reziproken Elements bei einem Vektornetzwerkanalysator |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6060888A (enExample) |
| JP (1) | JPH11326413A (enExample) |
| DE (1) | DE19903573C2 (enExample) |
| GB (1) | GB2336686B (enExample) |
Families Citing this family (76)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6380751B2 (en) | 1992-06-11 | 2002-04-30 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US5345170A (en) | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
| US6232789B1 (en) | 1997-05-28 | 2001-05-15 | Cascade Microtech, Inc. | Probe holder for low current measurements |
| US5561377A (en) | 1995-04-14 | 1996-10-01 | Cascade Microtech, Inc. | System for evaluating probing networks |
| US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
| US6002263A (en) | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
| US6188968B1 (en) * | 1998-05-18 | 2001-02-13 | Agilent Technologies Inc. | Removing effects of adapters present during vector network analyzer calibration |
| US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
| US6873827B1 (en) * | 1998-09-28 | 2005-03-29 | Nokia Corporation | Method and apparatus for providing feeder cable insertion loss detection in a transmission system without interfering with normal operation |
| US6578264B1 (en) | 1999-06-04 | 2003-06-17 | Cascade Microtech, Inc. | Method for constructing a membrane probe using a depression |
| US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US6647357B1 (en) * | 2000-02-07 | 2003-11-11 | Avaya Technology Corp. | Method for correcting reciprocity error in two port network measurements |
| US6838890B2 (en) | 2000-02-25 | 2005-01-04 | Cascade Microtech, Inc. | Membrane probing system |
| US6396285B1 (en) * | 2000-08-14 | 2002-05-28 | Agilent Technologies, Inc. | Method and apparatus for efficient measurement of reciprocal multiport devices in vector network analysis |
| US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
| US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US6614237B2 (en) | 2000-09-18 | 2003-09-02 | Agilent Technologies, Inc. | Multiport automatic calibration device for a multiport test system |
| US6920407B2 (en) * | 2000-09-18 | 2005-07-19 | Agilent Technologies, Inc. | Method and apparatus for calibrating a multiport test system for measurement of a DUT |
| DE20114544U1 (de) | 2000-12-04 | 2002-02-21 | Cascade Microtech, Inc., Beaverton, Oreg. | Wafersonde |
| AU2002327490A1 (en) | 2001-08-21 | 2003-06-30 | Cascade Microtech, Inc. | Membrane probing system |
| US6836135B2 (en) | 2001-08-31 | 2004-12-28 | Cascade Microtech, Inc. | Optical testing device |
| US6777964B2 (en) | 2002-01-25 | 2004-08-17 | Cascade Microtech, Inc. | Probe station |
| US7026829B2 (en) * | 2002-05-16 | 2006-04-11 | Koninklijke Philips Electronics N.V. | Method for calibrating and de-embedding, set of devices for de-embedding and vector network analyzer |
| EP1509776A4 (en) | 2002-05-23 | 2010-08-18 | Cascade Microtech Inc | PROBE TO TEST ANY TESTING EQUIPMENT |
| US6836743B1 (en) * | 2002-10-15 | 2004-12-28 | Agilent Technologies, Inc. | Compensating for unequal load and source match in vector network analyzer calibration |
| US6847219B1 (en) | 2002-11-08 | 2005-01-25 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
| US6724205B1 (en) | 2002-11-13 | 2004-04-20 | Cascade Microtech, Inc. | Probe for combined signals |
| US20040100276A1 (en) * | 2002-11-25 | 2004-05-27 | Myron Fanton | Method and apparatus for calibration of a vector network analyzer |
| US7250779B2 (en) | 2002-11-25 | 2007-07-31 | Cascade Microtech, Inc. | Probe station with low inductance path |
| US6861856B2 (en) | 2002-12-13 | 2005-03-01 | Cascade Microtech, Inc. | Guarded tub enclosure |
| US6928373B2 (en) * | 2003-01-30 | 2005-08-09 | Anritsu Company | Flexible vector network analyzer measurements and calibrations |
| US7064555B2 (en) * | 2003-02-18 | 2006-06-20 | Agilent Technologies, Inc. | Network analyzer calibration employing reciprocity of a device |
| US7107170B2 (en) * | 2003-02-18 | 2006-09-12 | Agilent Technologies, Inc. | Multiport network analyzer calibration employing reciprocity of a device |
| US6838885B2 (en) * | 2003-03-05 | 2005-01-04 | Murata Manufacturing Co., Ltd. | Method of correcting measurement error and electronic component characteristic measurement apparatus |
| US7130756B2 (en) * | 2003-03-28 | 2006-10-31 | Suss Microtec Test System Gmbh | Calibration method for carrying out multiport measurements on semiconductor wafers |
| US6823276B2 (en) * | 2003-04-04 | 2004-11-23 | Agilent Technologies, Inc. | System and method for determining measurement errors of a testing device |
| US7221172B2 (en) | 2003-05-06 | 2007-05-22 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
| US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
| US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| WO2006017078A2 (en) | 2004-07-07 | 2006-02-16 | Cascade Microtech, Inc. | Probe head having a membrane suspended probe |
| US7068049B2 (en) * | 2003-08-05 | 2006-06-27 | Agilent Technologies, Inc. | Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration |
| US6997753B2 (en) * | 2003-10-22 | 2006-02-14 | Gore Enterprise Holdings, Inc. | Apparatus, system and method for improved calibration and measurement of differential devices |
| US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
| DE112004002554T5 (de) | 2003-12-24 | 2006-11-23 | Cascade Microtech, Inc., Beaverton | Active wafer probe |
| US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
| EP1754072A2 (en) | 2004-06-07 | 2007-02-21 | CASCADE MICROTECH, INC. (an Oregon corporation) | Thermal optical chuck |
| US7330041B2 (en) | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
| DE202005021435U1 (de) | 2004-09-13 | 2008-02-28 | Cascade Microtech, Inc., Beaverton | Doppelseitige Prüfaufbauten |
| CN101019032A (zh) * | 2004-09-14 | 2007-08-15 | 皇家飞利浦电子股份有限公司 | 检测负载阻抗的电路 |
| US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
| US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
| US7449899B2 (en) | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
| WO2006137979A2 (en) | 2005-06-13 | 2006-12-28 | Cascade Microtech, Inc. | Wideband active-passive differential signal probe |
| FI20065339A0 (fi) * | 2006-05-18 | 2006-05-18 | Nokia Corp | Antennin sovitusmittaus ja vahvistuksen ohjaus |
| DE112007001399T5 (de) | 2006-06-09 | 2009-05-07 | Cascade Microtech, Inc., Beaverton | Messfühler für differentielle Signale mit integrierter Symmetrieschaltung |
| US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
| US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
| US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
| US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
| US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
| US7777497B2 (en) * | 2008-01-17 | 2010-08-17 | Com Dev International Ltd. | Method and system for tracking scattering parameter test system calibration |
| CN101339234B (zh) * | 2008-07-31 | 2012-05-09 | 国网电力科学研究院武汉南瑞有限责任公司 | 便携式cvt误差测试方法及装置 |
| US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
| US8410806B2 (en) | 2008-11-21 | 2013-04-02 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
| US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
| CN101556320B (zh) * | 2009-04-30 | 2011-10-26 | 厦门红相电力设备股份有限公司 | 电容式电压互感器现场校验方法 |
| CN104297711B (zh) * | 2014-10-21 | 2017-04-12 | 中国电子科技集团公司第四十一研究所 | 矢量网络分析仪的不确定度分析方法 |
| US10145930B1 (en) * | 2015-09-30 | 2018-12-04 | Keysight Technologies, Inc. | Method and system for phase synchronization and calibration of a multiport vector network analyzer using a single phase reference |
| US10148316B2 (en) * | 2016-04-26 | 2018-12-04 | Intel Corporation | Technologies for PCB and cable loss characterization and fixture de-embedding |
| CN109375151B (zh) * | 2018-12-24 | 2020-11-10 | 广东电网有限责任公司 | 电能表计量误差在线监测技术的监测通道调度方法及装置 |
| CN109596944B (zh) * | 2019-01-11 | 2021-03-23 | 上海仁童电子科技有限公司 | 线缆检测方法、装置及电子设备 |
| CN111999560B (zh) * | 2020-07-20 | 2024-01-16 | 杭州电子科技大学 | 一种基于阻抗的矢量网络分析仪的校准方法 |
| CN111983431B (zh) * | 2020-08-31 | 2022-11-15 | 中电科思仪科技股份有限公司 | 一种提高矢量网络分析仪端口反射系数模拟精度的方法 |
| CN112564823B (zh) * | 2020-12-03 | 2022-11-01 | 浙江铖昌科技股份有限公司 | 一种基于自校准算法的多端口射频微波校准方法 |
| CN113296039B (zh) * | 2021-04-25 | 2023-01-24 | 中国计量科学研究院 | 一种确定组合体校准因子的方法 |
| CN119044865B (zh) * | 2024-09-02 | 2025-07-25 | 中国计量科学研究院 | 微波毫米波等效源反射系数的测量系统及方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3821575A1 (de) * | 1988-06-25 | 1989-12-28 | Philips Patentverwaltung | Anordnung zur naeherungsweisen bestimmung des ersatzschaltbildes eines elektrischen bzw. elektronischen bauelementes bei hohen frequenzen |
| DE19723087A1 (de) * | 1996-08-01 | 1998-02-05 | Hewlett Packard Co | Fehlerkorrekturverfahren für Transmissionsmessungen in Vektornetzwerkanalysatoren |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4816767A (en) * | 1984-01-09 | 1989-03-28 | Hewlett-Packard Company | Vector network analyzer with integral processor |
| US4845423A (en) * | 1987-09-21 | 1989-07-04 | Hewlett-Packard Company | Electrically short air line for network analyzer calibration |
| US4853613A (en) * | 1987-10-27 | 1989-08-01 | Martin Marietta Corporation | Calibration method for apparatus evaluating microwave/millimeter wave circuits |
| US4858160A (en) * | 1988-03-18 | 1989-08-15 | Cascade Microtech, Inc. | System for setting reference reactance for vector corrected measurements |
| US4982164A (en) * | 1988-04-22 | 1991-01-01 | Rhode & Schwarz Gmbh & Co. K.G. | Method of calibrating a network analyzer |
| JP2866011B2 (ja) * | 1994-08-24 | 1999-03-08 | 日本ヒューレット・パッカード株式会社 | 回路網測定装置の校正方法 |
| DE4435559A1 (de) * | 1994-10-05 | 1996-04-11 | Holger Heuermann | Verfahren zur Durchführung elektrischer Präzisionsmessungen mit Selbstkontrolle |
| US5548538A (en) * | 1994-12-07 | 1996-08-20 | Wiltron Company | Internal automatic calibrator for vector network analyzers |
-
1998
- 1998-04-24 US US09/066,801 patent/US6060888A/en not_active Expired - Fee Related
-
1999
- 1999-01-29 DE DE19903573A patent/DE19903573C2/de not_active Expired - Fee Related
- 1999-04-06 JP JP11098739A patent/JPH11326413A/ja active Pending
- 1999-04-09 GB GB9908189A patent/GB2336686B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3821575A1 (de) * | 1988-06-25 | 1989-12-28 | Philips Patentverwaltung | Anordnung zur naeherungsweisen bestimmung des ersatzschaltbildes eines elektrischen bzw. elektronischen bauelementes bei hohen frequenzen |
| DE19723087A1 (de) * | 1996-08-01 | 1998-02-05 | Hewlett Packard Co | Fehlerkorrekturverfahren für Transmissionsmessungen in Vektornetzwerkanalysatoren |
Also Published As
| Publication number | Publication date |
|---|---|
| US6060888A (en) | 2000-05-09 |
| GB9908189D0 (en) | 1999-06-02 |
| GB2336686B (en) | 2002-03-27 |
| JPH11326413A (ja) | 1999-11-26 |
| DE19903573A1 (de) | 1999-11-04 |
| GB2336686A (en) | 1999-10-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8127 | New person/name/address of the applicant |
Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D.STAATES DELA |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US |
|
| 8339 | Ceased/non-payment of the annual fee |