JPH11326413A - ネットワ―ク・アナライザにおける測定誤差補正方法 - Google Patents

ネットワ―ク・アナライザにおける測定誤差補正方法

Info

Publication number
JPH11326413A
JPH11326413A JP11098739A JP9873999A JPH11326413A JP H11326413 A JPH11326413 A JP H11326413A JP 11098739 A JP11098739 A JP 11098739A JP 9873999 A JP9873999 A JP 9873999A JP H11326413 A JPH11326413 A JP H11326413A
Authority
JP
Japan
Prior art keywords
reflection
measurement
port
source port
test set
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11098739A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11326413A5 (enExample
Inventor
David V Blackham
デビッド・ブイ・ブラックハム
Jason Chodora
ジェイソン・チョドラ
Joel P Dunsmore
ジョエル・ピー・ダンスモア
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of JPH11326413A publication Critical patent/JPH11326413A/ja
Publication of JPH11326413A5 publication Critical patent/JPH11326413A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/28—Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
JP11098739A 1998-04-24 1999-04-06 ネットワ―ク・アナライザにおける測定誤差補正方法 Pending JPH11326413A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US066,801 1993-05-25
US09/066,801 US6060888A (en) 1998-04-24 1998-04-24 Error correction method for reflection measurements of reciprocal devices in vector network analyzers

Publications (2)

Publication Number Publication Date
JPH11326413A true JPH11326413A (ja) 1999-11-26
JPH11326413A5 JPH11326413A5 (enExample) 2006-05-25

Family

ID=22071804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11098739A Pending JPH11326413A (ja) 1998-04-24 1999-04-06 ネットワ―ク・アナライザにおける測定誤差補正方法

Country Status (4)

Country Link
US (1) US6060888A (enExample)
JP (1) JPH11326413A (enExample)
DE (1) DE19903573C2 (enExample)
GB (1) GB2336686B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004251904A (ja) * 2003-02-18 2004-09-09 Agilent Technol Inc デバイスの相反性を利用するマルチポートネットワークアナライザの校正
CN111983431A (zh) * 2020-08-31 2020-11-24 中电科仪器仪表有限公司 一种提高矢量网络分析仪端口反射系数模拟精度的方法

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6188968B1 (en) * 1998-05-18 2001-02-13 Agilent Technologies Inc. Removing effects of adapters present during vector network analyzer calibration
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6873827B1 (en) * 1998-09-28 2005-03-29 Nokia Corporation Method and apparatus for providing feeder cable insertion loss detection in a transmission system without interfering with normal operation
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6647357B1 (en) * 2000-02-07 2003-11-11 Avaya Technology Corp. Method for correcting reciprocity error in two port network measurements
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6396285B1 (en) * 2000-08-14 2002-05-28 Agilent Technologies, Inc. Method and apparatus for efficient measurement of reciprocal multiport devices in vector network analysis
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6614237B2 (en) 2000-09-18 2003-09-02 Agilent Technologies, Inc. Multiport automatic calibration device for a multiport test system
US6920407B2 (en) * 2000-09-18 2005-07-19 Agilent Technologies, Inc. Method and apparatus for calibrating a multiport test system for measurement of a DUT
DE20114544U1 (de) 2000-12-04 2002-02-21 Cascade Microtech, Inc., Beaverton, Oreg. Wafersonde
AU2002327490A1 (en) 2001-08-21 2003-06-30 Cascade Microtech, Inc. Membrane probing system
US6836135B2 (en) 2001-08-31 2004-12-28 Cascade Microtech, Inc. Optical testing device
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US7026829B2 (en) * 2002-05-16 2006-04-11 Koninklijke Philips Electronics N.V. Method for calibrating and de-embedding, set of devices for de-embedding and vector network analyzer
EP1509776A4 (en) 2002-05-23 2010-08-18 Cascade Microtech Inc PROBE TO TEST ANY TESTING EQUIPMENT
US6836743B1 (en) * 2002-10-15 2004-12-28 Agilent Technologies, Inc. Compensating for unequal load and source match in vector network analyzer calibration
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US20040100276A1 (en) * 2002-11-25 2004-05-27 Myron Fanton Method and apparatus for calibration of a vector network analyzer
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US6928373B2 (en) * 2003-01-30 2005-08-09 Anritsu Company Flexible vector network analyzer measurements and calibrations
US7064555B2 (en) * 2003-02-18 2006-06-20 Agilent Technologies, Inc. Network analyzer calibration employing reciprocity of a device
US6838885B2 (en) * 2003-03-05 2005-01-04 Murata Manufacturing Co., Ltd. Method of correcting measurement error and electronic component characteristic measurement apparatus
US7130756B2 (en) * 2003-03-28 2006-10-31 Suss Microtec Test System Gmbh Calibration method for carrying out multiport measurements on semiconductor wafers
US6823276B2 (en) * 2003-04-04 2004-11-23 Agilent Technologies, Inc. System and method for determining measurement errors of a testing device
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
WO2006017078A2 (en) 2004-07-07 2006-02-16 Cascade Microtech, Inc. Probe head having a membrane suspended probe
US7068049B2 (en) * 2003-08-05 2006-06-27 Agilent Technologies, Inc. Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration
US6997753B2 (en) * 2003-10-22 2006-02-14 Gore Enterprise Holdings, Inc. Apparatus, system and method for improved calibration and measurement of differential devices
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
DE112004002554T5 (de) 2003-12-24 2006-11-23 Cascade Microtech, Inc., Beaverton Active wafer probe
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
EP1754072A2 (en) 2004-06-07 2007-02-21 CASCADE MICROTECH, INC. (an Oregon corporation) Thermal optical chuck
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
DE202005021435U1 (de) 2004-09-13 2008-02-28 Cascade Microtech, Inc., Beaverton Doppelseitige Prüfaufbauten
CN101019032A (zh) * 2004-09-14 2007-08-15 皇家飞利浦电子股份有限公司 检测负载阻抗的电路
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
WO2006137979A2 (en) 2005-06-13 2006-12-28 Cascade Microtech, Inc. Wideband active-passive differential signal probe
FI20065339A0 (fi) * 2006-05-18 2006-05-18 Nokia Corp Antennin sovitusmittaus ja vahvistuksen ohjaus
DE112007001399T5 (de) 2006-06-09 2009-05-07 Cascade Microtech, Inc., Beaverton Messfühler für differentielle Signale mit integrierter Symmetrieschaltung
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7777497B2 (en) * 2008-01-17 2010-08-17 Com Dev International Ltd. Method and system for tracking scattering parameter test system calibration
CN101339234B (zh) * 2008-07-31 2012-05-09 国网电力科学研究院武汉南瑞有限责任公司 便携式cvt误差测试方法及装置
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
CN101556320B (zh) * 2009-04-30 2011-10-26 厦门红相电力设备股份有限公司 电容式电压互感器现场校验方法
CN104297711B (zh) * 2014-10-21 2017-04-12 中国电子科技集团公司第四十一研究所 矢量网络分析仪的不确定度分析方法
US10145930B1 (en) * 2015-09-30 2018-12-04 Keysight Technologies, Inc. Method and system for phase synchronization and calibration of a multiport vector network analyzer using a single phase reference
US10148316B2 (en) * 2016-04-26 2018-12-04 Intel Corporation Technologies for PCB and cable loss characterization and fixture de-embedding
CN109375151B (zh) * 2018-12-24 2020-11-10 广东电网有限责任公司 电能表计量误差在线监测技术的监测通道调度方法及装置
CN109596944B (zh) * 2019-01-11 2021-03-23 上海仁童电子科技有限公司 线缆检测方法、装置及电子设备
CN111999560B (zh) * 2020-07-20 2024-01-16 杭州电子科技大学 一种基于阻抗的矢量网络分析仪的校准方法
CN112564823B (zh) * 2020-12-03 2022-11-01 浙江铖昌科技股份有限公司 一种基于自校准算法的多端口射频微波校准方法
CN113296039B (zh) * 2021-04-25 2023-01-24 中国计量科学研究院 一种确定组合体校准因子的方法
CN119044865B (zh) * 2024-09-02 2025-07-25 中国计量科学研究院 微波毫米波等效源反射系数的测量系统及方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816767A (en) * 1984-01-09 1989-03-28 Hewlett-Packard Company Vector network analyzer with integral processor
US4845423A (en) * 1987-09-21 1989-07-04 Hewlett-Packard Company Electrically short air line for network analyzer calibration
US4853613A (en) * 1987-10-27 1989-08-01 Martin Marietta Corporation Calibration method for apparatus evaluating microwave/millimeter wave circuits
US4858160A (en) * 1988-03-18 1989-08-15 Cascade Microtech, Inc. System for setting reference reactance for vector corrected measurements
US4982164A (en) * 1988-04-22 1991-01-01 Rhode & Schwarz Gmbh & Co. K.G. Method of calibrating a network analyzer
DE3821575A1 (de) * 1988-06-25 1989-12-28 Philips Patentverwaltung Anordnung zur naeherungsweisen bestimmung des ersatzschaltbildes eines elektrischen bzw. elektronischen bauelementes bei hohen frequenzen
JP2866011B2 (ja) * 1994-08-24 1999-03-08 日本ヒューレット・パッカード株式会社 回路網測定装置の校正方法
DE4435559A1 (de) * 1994-10-05 1996-04-11 Holger Heuermann Verfahren zur Durchführung elektrischer Präzisionsmessungen mit Selbstkontrolle
US5548538A (en) * 1994-12-07 1996-08-20 Wiltron Company Internal automatic calibrator for vector network analyzers
US5748000A (en) * 1996-08-01 1998-05-05 Hewlett-Packard Company Error correction method for transmission measurements in vector network analyzers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004251904A (ja) * 2003-02-18 2004-09-09 Agilent Technol Inc デバイスの相反性を利用するマルチポートネットワークアナライザの校正
CN111983431A (zh) * 2020-08-31 2020-11-24 中电科仪器仪表有限公司 一种提高矢量网络分析仪端口反射系数模拟精度的方法

Also Published As

Publication number Publication date
US6060888A (en) 2000-05-09
GB9908189D0 (en) 1999-06-02
GB2336686B (en) 2002-03-27
DE19903573A1 (de) 1999-11-04
DE19903573C2 (de) 2002-11-07
GB2336686A (en) 1999-10-27

Similar Documents

Publication Publication Date Title
JPH11326413A (ja) ネットワ―ク・アナライザにおける測定誤差補正方法
US12320882B2 (en) Integrated vector network analyzer
US6853198B2 (en) Method and apparatus for performing multiport through-reflect-line calibration and measurement
US6882160B2 (en) Methods and computer program products for full N-port vector network analyzer calibrations
US7107170B2 (en) Multiport network analyzer calibration employing reciprocity of a device
US5434511A (en) Electronic microwave calibration device
US5467021A (en) Calibration method and apparatus
US7068049B2 (en) Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration
CN103399286B (zh) 一种多特性阻抗网络的测量校准方法
US6417674B1 (en) Two port self-calibration for an N-port network analyzer
US20090184721A1 (en) Method and system for tracking scattering parameter test system calibration
US7064555B2 (en) Network analyzer calibration employing reciprocity of a device
GB2329478A (en) Automatic calibration of a network analyzer
GB2337604A (en) Network analyzer calibration
US20060103392A1 (en) Calibration techniques for simplified high-frequency multiport differential measurements
US5748000A (en) Error correction method for transmission measurements in vector network analyzers
JP2001521153A (ja) 改善された精度を有する自動マイクロ波試験システム
JP4124841B2 (ja) ネットワーク・アナライザ、高周波周波数特性測定装置および誤差要因測定方法
JPH0843463A (ja) 回路網測定装置及び校正方法
US5734268A (en) Calibration and measurment technique and apparatus for same
US20130317767A1 (en) Measurement error correction method and electronic component characteristic measurement apparatus
JP2006201172A (ja) 最少接続のマルチポートスルー−リフレクト−ライン（Ｔｈｒｏｕｇｈ−Ｒｅｆｌｅｃｔ−Ｌｉｎｅ）較正および測定を行うための方法および装置
US6571187B1 (en) Method for calibrating two port high frequency measurements
US20080010034A1 (en) Method for network analyzer calibration and network analyzer
JP3017367B2 (ja) マルチポート回路のｓパラメータ測定方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060327

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060327

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20081226

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090108

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20090610