DE19630883A1 - Bauteil mit einem Kondensator - Google Patents

Bauteil mit einem Kondensator

Info

Publication number
DE19630883A1
DE19630883A1 DE19630883A DE19630883A DE19630883A1 DE 19630883 A1 DE19630883 A1 DE 19630883A1 DE 19630883 A DE19630883 A DE 19630883A DE 19630883 A DE19630883 A DE 19630883A DE 19630883 A1 DE19630883 A1 DE 19630883A1
Authority
DE
Germany
Prior art keywords
layer
electrode
al2o3
tio2
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19630883A
Other languages
German (de)
English (en)
Inventor
Mareike Dr Klee
Wolfgang Brand
Wilhelm Dr Hermann
Mathieu J E Ulenaers
Gijsbertus A C M Spierings
Haren Hendrikus Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Original Assignee
Philips Patentverwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH filed Critical Philips Patentverwaltung GmbH
Priority to DE19630883A priority Critical patent/DE19630883A1/de
Priority to EP97202076A priority patent/EP0823718B1/de
Priority to DE59712775T priority patent/DE59712775D1/de
Priority to JP9204686A priority patent/JPH1083934A/ja
Priority to US08/903,143 priority patent/US6125027A/en
Publication of DE19630883A1 publication Critical patent/DE19630883A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/005—Electrodes
    • H01G4/008—Selection of materials
    • H01G4/0085—Fried electrodes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3447—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide
    • C03C17/3452—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide comprising a fluoride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3621—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a fluoride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3668—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties
    • C03C17/3671—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties specially adapted for use as electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/12—Ceramic dielectrics
    • H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
    • H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/33—Thin- or thick-film capacitors (thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Ceramic Capacitors (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Insulating Materials (AREA)
DE19630883A 1996-07-31 1996-07-31 Bauteil mit einem Kondensator Withdrawn DE19630883A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19630883A DE19630883A1 (de) 1996-07-31 1996-07-31 Bauteil mit einem Kondensator
EP97202076A EP0823718B1 (de) 1996-07-31 1997-07-04 Bauteil mit einem Kondensator
DE59712775T DE59712775D1 (de) 1996-07-31 1997-07-04 Bauteil mit einem Kondensator
JP9204686A JPH1083934A (ja) 1996-07-31 1997-07-30 コンデンサを具える構成部品
US08/903,143 US6125027A (en) 1996-07-31 1997-07-30 Component comprising a capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19630883A DE19630883A1 (de) 1996-07-31 1996-07-31 Bauteil mit einem Kondensator

Publications (1)

Publication Number Publication Date
DE19630883A1 true DE19630883A1 (de) 1998-02-05

Family

ID=7801368

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19630883A Withdrawn DE19630883A1 (de) 1996-07-31 1996-07-31 Bauteil mit einem Kondensator
DE59712775T Expired - Fee Related DE59712775D1 (de) 1996-07-31 1997-07-04 Bauteil mit einem Kondensator

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE59712775T Expired - Fee Related DE59712775D1 (de) 1996-07-31 1997-07-04 Bauteil mit einem Kondensator

Country Status (4)

Country Link
US (1) US6125027A (cg-RX-API-DMAC7.html)
EP (1) EP0823718B1 (cg-RX-API-DMAC7.html)
JP (1) JPH1083934A (cg-RX-API-DMAC7.html)
DE (2) DE19630883A1 (cg-RX-API-DMAC7.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6985349B2 (en) * 2001-12-13 2006-01-10 Harris Corporation Electronic module including a low temperature co-fired ceramic (LTCC) substrate with a capacitive structure embedded therein and related methods
US20190237121A1 (en) * 2017-06-14 2019-08-01 Nustorage Technology Co., Ltd. Ferroelectric memory and capacitor structure thereof
CN112661509A (zh) * 2020-12-24 2021-04-16 电子科技大学 一种高Q值MgZrNb2O8基微波介质陶瓷材料及其制备方法
EP3417540B1 (de) * 2016-04-12 2021-11-10 Siemens Energy Global GmbH & Co. KG Elektrischer kondensator

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WO1999054895A2 (en) * 1998-04-20 1999-10-28 Koninklijke Philips Electronics N.V. Thin-film capacitor
JPH11340075A (ja) * 1998-05-27 1999-12-10 Philips Japan Ltd 誘電体磁器組成物
WO2000014754A1 (en) * 1998-09-02 2000-03-16 Koninklijke Philips Electronics N.V. Thin-film capacitor
JP3423232B2 (ja) * 1998-11-30 2003-07-07 三洋電機株式会社 アクティブ型ｅｌ表示装置
DE19902029A1 (de) * 1999-01-20 2000-07-27 Philips Corp Intellectual Pty Spannungsfester Dünnschichtkondensator mit Interdigitalstruktur
DE19931297A1 (de) * 1999-07-07 2001-01-11 Philips Corp Intellectual Pty Volumenwellen-Filter
AU2001234468A1 (en) 2000-01-19 2001-07-31 North Carolina State University Lanthanum oxide-based gate dielectrics for integrated circuit field effect transistors and methods of fabricating same
US6400072B1 (en) * 2000-03-08 2002-06-04 Motorola, Inc. Viewing screen for a display device
US6411492B1 (en) * 2000-05-24 2002-06-25 Conexant Systems, Inc. Structure and method for fabrication of an improved capacitor
AU2001283439A1 (en) * 2000-08-22 2002-03-04 Paratek Microwave, Inc. Combline filters with tunable dielectric capacitors
JP4218350B2 (ja) * 2002-02-01 2009-02-04 パナソニック株式会社 強誘電体薄膜素子およびその製造方法、これを用いた薄膜コンデンサ並びに圧電アクチュエータ
RU2259335C2 (ru) * 2002-10-02 2005-08-27 Дочернее республиканское унитарное производственное предприятие "Монолитрадиокерам" (РУП "Монолитрадиокерам") Шихта полупроводникового керамического материала для терморезисторов и способ получения материала из нее
RU2259334C2 (ru) * 2002-10-02 2005-08-27 Дочернее республиканское унитарное производственное предприятие "Монолитрадиокерам" (РУП "Монолитрадиокерам") Шихта керамического материала для позисторов и способ получения материала из нее
US6917509B1 (en) * 2002-11-21 2005-07-12 Daniel F. Devoe Single layer capacitor with dissimilar metallizations
US6716692B1 (en) * 2003-05-20 2004-04-06 Via Technologies, Inc. Fabrication process and structure of laminated capacitor
US7290315B2 (en) * 2004-10-21 2007-11-06 Intel Corporation Method for making a passive device structure
US7629269B2 (en) * 2005-03-31 2009-12-08 Intel Corporation High-k thin film grain size control
US20060220177A1 (en) * 2005-03-31 2006-10-05 Palanduz Cengiz A Reduced porosity high-k thin film mixed grains for thin film capacitor applications
US7375412B1 (en) * 2005-03-31 2008-05-20 Intel Corporation iTFC with optimized C(T)
US7453144B2 (en) * 2005-06-29 2008-11-18 Intel Corporation Thin film capacitors and methods of making the same
JP5910317B2 (ja) * 2012-05-28 2016-04-27 Tdk株式会社 誘電体磁器組成物および電子部品
JP5772808B2 (ja) * 2012-12-25 2015-09-02 株式会社村田製作所 積層セラミック電子部品
US9370103B2 (en) * 2013-09-06 2016-06-14 Qualcomm Incorported Low package parasitic inductance using a thru-substrate interposer
CN104628378B (zh) * 2015-02-05 2017-02-22 汕头高新区松田实业有限公司 一种可用于铜电极陶瓷电容器的介质及其制备方法
US11037728B2 (en) 2017-12-22 2021-06-15 Samsung Electronics Co., Ltd. Dielectric and capacitor and electronic device
KR102727948B1 (ko) * 2020-06-26 2024-11-11 에스케이하이닉스 주식회사 반도체 장치
US20230301114A1 (en) * 2022-03-15 2023-09-21 Taiwan Semiconductor Manufacturing Company, Ltd. Ferroelectric devices and methods of forming the same

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JPH113834A (ja) * 1996-07-25 1999-01-06 Murata Mfg Co Ltd 積層セラミックコンデンサおよびその製造方法
US5790366A (en) * 1996-12-06 1998-08-04 Sharp Kabushiki Kaisha High temperature electrode-barriers for ferroelectric and other capacitor structures

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6985349B2 (en) * 2001-12-13 2006-01-10 Harris Corporation Electronic module including a low temperature co-fired ceramic (LTCC) substrate with a capacitive structure embedded therein and related methods
EP3417540B1 (de) * 2016-04-12 2021-11-10 Siemens Energy Global GmbH & Co. KG Elektrischer kondensator
US20190237121A1 (en) * 2017-06-14 2019-08-01 Nustorage Technology Co., Ltd. Ferroelectric memory and capacitor structure thereof
US10586582B2 (en) * 2017-06-14 2020-03-10 Nustorage Technology Co., Ltd. Ferroelectric memory and capacitor structure thereof
CN112661509A (zh) * 2020-12-24 2021-04-16 电子科技大学 一种高Q值MgZrNb2O8基微波介质陶瓷材料及其制备方法

Also Published As

Publication number Publication date
DE59712775D1 (de) 2007-01-18
JPH1083934A (ja) 1998-03-31
US6125027A (en) 2000-09-26
EP0823718B1 (de) 2006-12-06
EP0823718A2 (de) 1998-02-11
EP0823718A3 (de) 1999-12-29

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