DE1927410B2 - Korpuskularstrahlgeraet mit mitteln zur daempfung mechanischer schwingungen - Google Patents

Korpuskularstrahlgeraet mit mitteln zur daempfung mechanischer schwingungen

Info

Publication number
DE1927410B2
DE1927410B2 DE19691927410 DE1927410A DE1927410B2 DE 1927410 B2 DE1927410 B2 DE 1927410B2 DE 19691927410 DE19691927410 DE 19691927410 DE 1927410 A DE1927410 A DE 1927410A DE 1927410 B2 DE1927410 B2 DE 1927410B2
Authority
DE
Germany
Prior art keywords
column
pressure
pressure vessels
beam device
corpuscular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19691927410
Other languages
German (de)
English (en)
Other versions
DE1927410C (de
DE1927410A1 (de
Inventor
Hans 1000 Berlin Helwig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19691927410 priority Critical patent/DE1927410B2/de
Priority to NL7000300A priority patent/NL7000300A/xx
Priority to US00039388A priority patent/US3835320A/en
Priority to FR7018723A priority patent/FR2048687A5/fr
Priority to GB1290235D priority patent/GB1290235A/en
Publication of DE1927410A1 publication Critical patent/DE1927410A1/de
Publication of DE1927410B2 publication Critical patent/DE1927410B2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Vibration Prevention Devices (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19691927410 1969-05-28 1969-05-28 Korpuskularstrahlgeraet mit mitteln zur daempfung mechanischer schwingungen Withdrawn DE1927410B2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19691927410 DE1927410B2 (de) 1969-05-28 1969-05-28 Korpuskularstrahlgeraet mit mitteln zur daempfung mechanischer schwingungen
NL7000300A NL7000300A (enExample) 1969-05-28 1970-01-09
US00039388A US3835320A (en) 1969-05-28 1970-05-21 Particle-beam device equipped with means for attenuating mechanical movements
FR7018723A FR2048687A5 (enExample) 1969-05-28 1970-05-22
GB1290235D GB1290235A (enExample) 1969-05-28 1970-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691927410 DE1927410B2 (de) 1969-05-28 1969-05-28 Korpuskularstrahlgeraet mit mitteln zur daempfung mechanischer schwingungen

Publications (2)

Publication Number Publication Date
DE1927410A1 DE1927410A1 (de) 1970-12-03
DE1927410B2 true DE1927410B2 (de) 1972-03-30

Family

ID=5735538

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691927410 Withdrawn DE1927410B2 (de) 1969-05-28 1969-05-28 Korpuskularstrahlgeraet mit mitteln zur daempfung mechanischer schwingungen

Country Status (5)

Country Link
US (1) US3835320A (enExample)
DE (1) DE1927410B2 (enExample)
FR (1) FR2048687A5 (enExample)
GB (1) GB1290235A (enExample)
NL (1) NL7000300A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982000920A1 (en) * 1980-09-01 1982-03-18 Panov A Electron microscope

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4019389A (en) * 1976-02-11 1977-04-26 The Singer Company Viscous damper
USD381031S (en) * 1995-07-03 1997-07-15 Hitachi, Ltd. Electron microscope
EP0763847B1 (en) * 1995-09-14 2002-06-05 Hitachi, Ltd. Electron microscope
DE10102542B4 (de) * 2001-01-19 2009-01-15 Vistec Semiconductor Systems Jena Gmbh Anordnung zur visuellen Inspektion von Substraten
USD671654S1 (en) * 2009-02-20 2012-11-27 Sii Nano Technology Inc. Compound charged particle beam device
USD644258S1 (en) * 2010-02-22 2011-08-30 Hitachi High-Technologies Corporation Electron microscope
USD638046S1 (en) * 2010-02-22 2011-05-17 Hitachi High-Technologies Corporation Electron microscope
USD687475S1 (en) * 2012-05-10 2013-08-06 Hitachi High-Technologies Corporation Electron microscope
USD708245S1 (en) * 2012-11-30 2014-07-01 Hitachi High-Technologies Corporation Cover for an electron microscope
USD708244S1 (en) * 2012-11-30 2014-07-01 Hitachi High-Technologies Corporation Electron microscope
USD711950S1 (en) * 2012-11-30 2014-08-26 Hitachi High-Technologies Corporation Portion of a cover for an electron microscope
JP1593851S (enExample) * 2017-07-25 2017-12-25

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE437593A (enExample) * 1939-01-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982000920A1 (en) * 1980-09-01 1982-03-18 Panov A Electron microscope

Also Published As

Publication number Publication date
GB1290235A (enExample) 1972-09-20
US3835320A (en) 1974-09-10
FR2048687A5 (enExample) 1971-03-19
NL7000300A (enExample) 1970-12-01
DE1927410A1 (de) 1970-12-03

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Legal Events

Date Code Title Description
SH Request for examination between 03.10.1968 and 22.04.1971
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee