FR2048687A5 - - Google Patents

Info

Publication number
FR2048687A5
FR2048687A5 FR7018723A FR7018723A FR2048687A5 FR 2048687 A5 FR2048687 A5 FR 2048687A5 FR 7018723 A FR7018723 A FR 7018723A FR 7018723 A FR7018723 A FR 7018723A FR 2048687 A5 FR2048687 A5 FR 2048687A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7018723A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR2048687A5 publication Critical patent/FR2048687A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
FR7018723A 1969-05-28 1970-05-22 Expired FR2048687A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691927410 DE1927410B2 (de) 1969-05-28 1969-05-28 Korpuskularstrahlgeraet mit mitteln zur daempfung mechanischer schwingungen

Publications (1)

Publication Number Publication Date
FR2048687A5 true FR2048687A5 (fr) 1971-03-19

Family

ID=5735538

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7018723A Expired FR2048687A5 (fr) 1969-05-28 1970-05-22

Country Status (5)

Country Link
US (1) US3835320A (fr)
DE (1) DE1927410B2 (fr)
FR (1) FR2048687A5 (fr)
GB (1) GB1290235A (fr)
NL (1) NL7000300A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4019389A (en) * 1976-02-11 1977-04-26 The Singer Company Viscous damper
WO1982000920A1 (fr) * 1980-09-01 1982-03-18 Panov A Microscope electronique
USD381031S (en) * 1995-07-03 1997-07-15 Hitachi, Ltd. Electron microscope
DE69621540T2 (de) * 1995-09-14 2003-01-09 Hitachi Ltd Elektronenmikroskop
DE10102542B4 (de) * 2001-01-19 2009-01-15 Vistec Semiconductor Systems Jena Gmbh Anordnung zur visuellen Inspektion von Substraten
JP1593851S (fr) * 2017-07-25 2017-12-25

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE437593A (fr) * 1939-01-17

Also Published As

Publication number Publication date
US3835320A (en) 1974-09-10
DE1927410B2 (de) 1972-03-30
DE1927410A1 (de) 1970-12-03
NL7000300A (fr) 1970-12-01
GB1290235A (fr) 1972-09-20

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Legal Events

Date Code Title Description
ST Notification of lapse