DE1807277A1 - Korpuskularstrahlgeraet zur Untersuchung eines Praeparates mit einer phasendrehenden Folie - Google Patents
Korpuskularstrahlgeraet zur Untersuchung eines Praeparates mit einer phasendrehenden FolieInfo
- Publication number
- DE1807277A1 DE1807277A1 DE19681807277 DE1807277A DE1807277A1 DE 1807277 A1 DE1807277 A1 DE 1807277A1 DE 19681807277 DE19681807277 DE 19681807277 DE 1807277 A DE1807277 A DE 1807277A DE 1807277 A1 DE1807277 A1 DE 1807277A1
- Authority
- DE
- Germany
- Prior art keywords
- phase
- film
- thickness
- corpuscular
- beam device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000002360 preparation method Methods 0.000 title description 7
- 230000004075 alteration Effects 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 7
- 239000011888 foil Substances 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 2
- 208000000474 Poliomyelitis Diseases 0.000 description 7
- 230000010363 phase shift Effects 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 210000000744 eyelid Anatomy 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/263—Contrast, resolution or power of penetration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/153—Correcting image defects, e.g. stigmators
- H01J2237/1534—Aberrations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Lenses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH972468 | 1968-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1807277A1 true DE1807277A1 (de) | 1970-01-08 |
| DE1807277B2 DE1807277B2 (enrdf_load_stackoverflow) | 1970-09-17 |
Family
ID=4354970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19681807277 Withdrawn DE1807277A1 (de) | 1968-06-28 | 1968-11-01 | Korpuskularstrahlgeraet zur Untersuchung eines Praeparates mit einer phasendrehenden Folie |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3569698A (enrdf_load_stackoverflow) |
| DE (1) | DE1807277A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1203705A (enrdf_load_stackoverflow) |
| NL (1) | NL6900965A (enrdf_load_stackoverflow) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3869611A (en) * | 1969-09-19 | 1975-03-04 | Siemens Ag | Particle-beam device of the raster type |
| USRE29500E (en) * | 1970-08-31 | 1977-12-20 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. | Scanning charged beam particle beam microscope |
| US3857034A (en) * | 1970-08-31 | 1974-12-24 | Max Planck Gesellschaft | Scanning charged beam particle beam microscope |
| JP3942363B2 (ja) * | 2001-02-09 | 2007-07-11 | 日本電子株式会社 | 透過電子顕微鏡の位相板用レンズシステム、および透過電子顕微鏡 |
| US8237434B2 (en) * | 2007-03-06 | 2012-08-07 | Koninklijke Philips Electronics N.V. | Electromagnetic system for biosensors |
| JP4896106B2 (ja) * | 2008-09-30 | 2012-03-14 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡 |
| JP5677081B2 (ja) * | 2010-12-28 | 2015-02-25 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| WO2015111049A1 (en) * | 2014-01-21 | 2015-07-30 | Ramot At Tel-Aviv University Ltd. | Method and device for manipulating particle beam |
| JP2016115680A (ja) * | 2014-12-17 | 2016-06-23 | アプライド マテリアルズ イスラエル リミテッド | 収差補正開孔を有する走査型荷電粒子ビームデバイスおよびその動作方法 |
| JP2016170951A (ja) * | 2015-03-12 | 2016-09-23 | 日本電子株式会社 | 位相板およびその製造方法、ならびに電子顕微鏡 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL280940A (enrdf_load_stackoverflow) * | 1961-07-15 | |||
| DE1489980B2 (de) * | 1965-11-19 | 1970-06-04 | Hanßen, Karl-Josef, Dr.rer.nat., 33OO Braunschweig | Korpuskularstrahlgerät für Phasenoder Amplitudenobjekte mit einer phasenschiebenden Folie |
-
1968
- 1968-11-01 DE DE19681807277 patent/DE1807277A1/de not_active Withdrawn
- 1968-12-11 GB GB58709/68D patent/GB1203705A/en not_active Expired
-
1969
- 1969-01-21 NL NL6900965A patent/NL6900965A/xx unknown
- 1969-06-18 US US834316A patent/US3569698A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| GB1203705A (en) | 1970-09-03 |
| DE1807277B2 (enrdf_load_stackoverflow) | 1970-09-17 |
| NL6900965A (enrdf_load_stackoverflow) | 1969-12-30 |
| US3569698A (en) | 1971-03-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| E77 | Valid patent as to the heymanns-index 1977 | ||
| EHJ | Ceased/non-payment of the annual fee |