DE1807277B2 - - Google Patents

Info

Publication number
DE1807277B2
DE1807277B2 DE19681807277 DE1807277A DE1807277B2 DE 1807277 B2 DE1807277 B2 DE 1807277B2 DE 19681807277 DE19681807277 DE 19681807277 DE 1807277 A DE1807277 A DE 1807277A DE 1807277 B2 DE1807277 B2 DE 1807277B2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19681807277
Other languages
German (de)
Other versions
DE1807277A1 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE1807277A1 publication Critical patent/DE1807277A1/de
Publication of DE1807277B2 publication Critical patent/DE1807277B2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/153—Correcting image defects, e.g. stigmators
    • H01J2237/1534—Aberrations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Lenses (AREA)
DE19681807277 1968-06-28 1968-11-01 Korpuskularstrahlgeraet zur Untersuchung eines Praeparates mit einer phasendrehenden Folie Withdrawn DE1807277A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH972468 1968-06-28

Publications (2)

Publication Number Publication Date
DE1807277A1 DE1807277A1 (de) 1970-01-08
DE1807277B2 true DE1807277B2 (enrdf_load_stackoverflow) 1970-09-17

Family

ID=4354970

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681807277 Withdrawn DE1807277A1 (de) 1968-06-28 1968-11-01 Korpuskularstrahlgeraet zur Untersuchung eines Praeparates mit einer phasendrehenden Folie

Country Status (4)

Country Link
US (1) US3569698A (enrdf_load_stackoverflow)
DE (1) DE1807277A1 (enrdf_load_stackoverflow)
GB (1) GB1203705A (enrdf_load_stackoverflow)
NL (1) NL6900965A (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3869611A (en) * 1969-09-19 1975-03-04 Siemens Ag Particle-beam device of the raster type
US3857034A (en) * 1970-08-31 1974-12-24 Max Planck Gesellschaft Scanning charged beam particle beam microscope
USRE29500E (en) * 1970-08-31 1977-12-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Scanning charged beam particle beam microscope
JP3942363B2 (ja) * 2001-02-09 2007-07-11 日本電子株式会社 透過電子顕微鏡の位相板用レンズシステム、および透過電子顕微鏡
EP3059583B1 (en) * 2007-03-06 2019-05-15 Koninklijke Philips N.V. An electromagnetic system for biosensors
JP4896106B2 (ja) * 2008-09-30 2012-03-14 株式会社日立ハイテクノロジーズ 電子顕微鏡
JP5677081B2 (ja) * 2010-12-28 2015-02-25 株式会社日立ハイテクノロジーズ 荷電粒子線装置
EP3097577A4 (en) * 2014-01-21 2017-09-20 Ramot at Tel-Aviv University Ltd. Method and device for manipulating particle beam
JP2016115680A (ja) * 2014-12-17 2016-06-23 アプライド マテリアルズ イスラエル リミテッド 収差補正開孔を有する走査型荷電粒子ビームデバイスおよびその動作方法
JP2016170951A (ja) * 2015-03-12 2016-09-23 日本電子株式会社 位相板およびその製造方法、ならびに電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL280940A (enrdf_load_stackoverflow) * 1961-07-15
DE1489980B2 (de) * 1965-11-19 1970-06-04 Hanßen, Karl-Josef, Dr.rer.nat., 33OO Braunschweig Korpuskularstrahlgerät für Phasenoder Amplitudenobjekte mit einer phasenschiebenden Folie

Also Published As

Publication number Publication date
GB1203705A (en) 1970-09-03
US3569698A (en) 1971-03-09
DE1807277A1 (de) 1970-01-08
NL6900965A (enrdf_load_stackoverflow) 1969-12-30

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Legal Events

Date Code Title Description
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee