GB1203705A - Improvements in or relating to corpuscular beam instruments - Google Patents

Improvements in or relating to corpuscular beam instruments

Info

Publication number
GB1203705A
GB1203705A GB58709/68D GB5870968D GB1203705A GB 1203705 A GB1203705 A GB 1203705A GB 58709/68 D GB58709/68 D GB 58709/68D GB 5870968 D GB5870968 D GB 5870968D GB 1203705 A GB1203705 A GB 1203705A
Authority
GB
United Kingdom
Prior art keywords
foil
thickness
phase
electron
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB58709/68D
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of GB1203705A publication Critical patent/GB1203705A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/153—Correcting image defects, e.g. stigmators
    • H01J2237/1534—Aberrations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Lenses (AREA)
GB58709/68D 1968-06-28 1968-12-11 Improvements in or relating to corpuscular beam instruments Expired GB1203705A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH972468 1968-06-28

Publications (1)

Publication Number Publication Date
GB1203705A true GB1203705A (en) 1970-09-03

Family

ID=4354970

Family Applications (1)

Application Number Title Priority Date Filing Date
GB58709/68D Expired GB1203705A (en) 1968-06-28 1968-12-11 Improvements in or relating to corpuscular beam instruments

Country Status (4)

Country Link
US (1) US3569698A (enrdf_load_stackoverflow)
DE (1) DE1807277A1 (enrdf_load_stackoverflow)
GB (1) GB1203705A (enrdf_load_stackoverflow)
NL (1) NL6900965A (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3869611A (en) * 1969-09-19 1975-03-04 Siemens Ag Particle-beam device of the raster type
USRE29500E (en) * 1970-08-31 1977-12-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Scanning charged beam particle beam microscope
US3857034A (en) * 1970-08-31 1974-12-24 Max Planck Gesellschaft Scanning charged beam particle beam microscope
JP3942363B2 (ja) * 2001-02-09 2007-07-11 日本電子株式会社 透過電子顕微鏡の位相板用レンズシステム、および透過電子顕微鏡
CN101622533B (zh) * 2007-03-06 2012-11-07 皇家飞利浦电子股份有限公司 用于生物传感器的电磁系统
JP4896106B2 (ja) * 2008-09-30 2012-03-14 株式会社日立ハイテクノロジーズ 電子顕微鏡
JP5677081B2 (ja) * 2010-12-28 2015-02-25 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US9953802B2 (en) * 2014-01-21 2018-04-24 Ramot At Tel-Aviv University Ltd. Method and device for manipulating particle beam
JP2016115680A (ja) * 2014-12-17 2016-06-23 アプライド マテリアルズ イスラエル リミテッド 収差補正開孔を有する走査型荷電粒子ビームデバイスおよびその動作方法
JP2016170951A (ja) * 2015-03-12 2016-09-23 日本電子株式会社 位相板およびその製造方法、ならびに電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL280940A (enrdf_load_stackoverflow) * 1961-07-15
DE1489980B2 (de) * 1965-11-19 1970-06-04 Hanßen, Karl-Josef, Dr.rer.nat., 33OO Braunschweig Korpuskularstrahlgerät für Phasenoder Amplitudenobjekte mit einer phasenschiebenden Folie

Also Published As

Publication number Publication date
US3569698A (en) 1971-03-09
DE1807277A1 (de) 1970-01-08
DE1807277B2 (enrdf_load_stackoverflow) 1970-09-17
NL6900965A (enrdf_load_stackoverflow) 1969-12-30

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee