GB1259352A - - Google Patents
Info
- Publication number
- GB1259352A GB1259352A GB1259352DA GB1259352A GB 1259352 A GB1259352 A GB 1259352A GB 1259352D A GB1259352D A GB 1259352DA GB 1259352 A GB1259352 A GB 1259352A
- Authority
- GB
- United Kingdom
- Prior art keywords
- foil
- diaphragm
- april
- adjustable
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011888 foil Substances 0.000 abstract 6
- 239000002245 particle Substances 0.000 abstract 2
- 230000010363 phase shift Effects 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract 1
- 229910002804 graphite Inorganic materials 0.000 abstract 1
- 239000010439 graphite Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000992 sputter etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH558668 | 1968-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1259352A true GB1259352A (enrdf_load_stackoverflow) | 1972-01-05 |
Family
ID=4296050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1259352D Expired GB1259352A (enrdf_load_stackoverflow) | 1968-04-16 | 1969-04-14 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3596090A (enrdf_load_stackoverflow) |
| DE (1) | DE1810818A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1259352A (enrdf_load_stackoverflow) |
| NL (1) | NL170900C (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5814815A (en) * | 1995-12-27 | 1998-09-29 | Hitachi, Ltd. | Phase-contrast electron microscope and phase plate therefor |
| JP3942363B2 (ja) * | 2001-02-09 | 2007-07-11 | 日本電子株式会社 | 透過電子顕微鏡の位相板用レンズシステム、および透過電子顕微鏡 |
| DE102006011615A1 (de) | 2006-03-14 | 2007-09-20 | Carl Zeiss Nts Gmbh | Phasenkontrast-Elektronenmikroskop |
| US8785850B2 (en) * | 2010-01-19 | 2014-07-22 | National Research Counsel Of Canada | Charging of a hole-free thin film phase plate |
| CN106104744B (zh) * | 2014-01-21 | 2019-04-16 | 拉莫特特拉维夫大学有限公司 | 用于调节粒子波束的方法与装置 |
-
1968
- 1968-11-25 DE DE19681810818 patent/DE1810818A1/de not_active Withdrawn
-
1969
- 1969-02-14 NL NLAANVRAGE6902406,A patent/NL170900C/xx not_active IP Right Cessation
- 1969-04-04 US US813629A patent/US3596090A/en not_active Expired - Lifetime
- 1969-04-14 GB GB1259352D patent/GB1259352A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1810818B2 (enrdf_load_stackoverflow) | 1970-12-17 |
| DE1810818A1 (de) | 1969-10-23 |
| NL170900B (nl) | 1982-08-02 |
| US3596090A (en) | 1971-07-27 |
| NL170900C (nl) | 1983-01-03 |
| NL6902406A (enrdf_load_stackoverflow) | 1969-10-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |