GB1215902A - Improvement in specimen-carrying devices for electron bombardment - Google Patents

Improvement in specimen-carrying devices for electron bombardment

Info

Publication number
GB1215902A
GB1215902A GB2588069A GB2588069A GB1215902A GB 1215902 A GB1215902 A GB 1215902A GB 2588069 A GB2588069 A GB 2588069A GB 2588069 A GB2588069 A GB 2588069A GB 1215902 A GB1215902 A GB 1215902A
Authority
GB
United Kingdom
Prior art keywords
specimen
electron bombardment
improvement
carrying devices
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2588069A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre de Recherches Metallurgiques CRM ASBL
Original Assignee
Centre de Recherches Metallurgiques CRM ASBL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre de Recherches Metallurgiques CRM ASBL filed Critical Centre de Recherches Metallurgiques CRM ASBL
Publication of GB1215902A publication Critical patent/GB1215902A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2202—Preparing specimens therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2204—Specimen supports therefor; Sample conveying means therefore

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1,215,902. Electron beam apparatus. CENTRE NATIONAL DE RECHERCHES METALLURGIQUES. 21 May, 1969 [27 May, 1968], No. 25880/69. Heading H1D. A specimen holder for a specimen which is to be bombarded by electrons to yield X-rays for anlysis, is in the form of an apertured metal plate disposed between the specimen and the beam source and earthed to maintain a constant potential at the specimen; the plate also conducts away the heat generated in the specimen by electron bombardment. In one example the metal plate is 21 microns thick and has holes 250 microns in diameter occupying 60% of the area of the plate struck by the beam.
GB2588069A 1968-05-27 1969-05-21 Improvement in specimen-carrying devices for electron bombardment Expired GB1215902A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU56149 1968-05-27

Publications (1)

Publication Number Publication Date
GB1215902A true GB1215902A (en) 1970-12-16

Family

ID=19725611

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2588069A Expired GB1215902A (en) 1968-05-27 1969-05-21 Improvement in specimen-carrying devices for electron bombardment

Country Status (5)

Country Link
BE (2) BE732703A (en)
FR (1) FR2009364A1 (en)
GB (1) GB1215902A (en)
LU (1) LU56149A1 (en)
NL (1) NL6907989A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4992661A (en) * 1987-08-20 1991-02-12 Hitachi, Ltd. Method and apparatus for neutralizing an accumulated charge on a specimen by means of a conductive lattice deposited on the specimen
US5892237A (en) * 1996-03-15 1999-04-06 Fujitsu Limited Charged particle beam exposure method and apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4992661A (en) * 1987-08-20 1991-02-12 Hitachi, Ltd. Method and apparatus for neutralizing an accumulated charge on a specimen by means of a conductive lattice deposited on the specimen
US5892237A (en) * 1996-03-15 1999-04-06 Fujitsu Limited Charged particle beam exposure method and apparatus

Also Published As

Publication number Publication date
FR2009364A1 (en) 1970-02-06
BE733121A (en) 1969-11-14
NL6907989A (en) 1969-12-01
LU56149A1 (en) 1970-01-14
BE732703A (en) 1969-11-07

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