DE1790178A1 - Kathoden-Zerstaeubungsvorrichtung - Google Patents
Kathoden-ZerstaeubungsvorrichtungInfo
- Publication number
- DE1790178A1 DE1790178A1 DE19681790178 DE1790178A DE1790178A1 DE 1790178 A1 DE1790178 A1 DE 1790178A1 DE 19681790178 DE19681790178 DE 19681790178 DE 1790178 A DE1790178 A DE 1790178A DE 1790178 A1 DE1790178 A1 DE 1790178A1
- Authority
- DE
- Germany
- Prior art keywords
- carrier
- target
- shield
- electrodes
- carrier holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000889 atomisation Methods 0.000 title description 13
- 238000004544 sputter deposition Methods 0.000 claims description 11
- 239000000969 carrier Substances 0.000 claims description 9
- 239000013077 target material Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 description 14
- 239000000463 material Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000011109 contamination Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US67453967A | 1967-10-11 | 1967-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1790178A1 true DE1790178A1 (de) | 1972-01-20 |
Family
ID=24706998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19681790178 Pending DE1790178A1 (de) | 1967-10-11 | 1968-09-24 | Kathoden-Zerstaeubungsvorrichtung |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE1790178A1 (enrdf_load_stackoverflow) |
| FR (1) | FR1588300A (enrdf_load_stackoverflow) |
| GB (1) | GB1241213A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1937175A1 (de) * | 1969-07-22 | 1971-02-04 | Schuermann & Co Heinz | Zwei untereinander verbundene Bauteile |
| DE4010495A1 (de) * | 1990-03-31 | 1991-10-02 | Leybold Ag | Vorrichtung zum beschichten eines substrats mit werkstoffen, beispielweise mit metallen |
| DE4022708A1 (de) * | 1990-07-17 | 1992-04-02 | Balzers Hochvakuum | Aetz- oder beschichtungsanlagen |
| DE4042417A1 (de) * | 1990-07-17 | 1992-05-14 | Balzers Hochvakuum | Aetz- oder beschichtungsanlagen |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2307649B2 (de) * | 1973-02-16 | 1980-07-31 | Robert Bosch Gmbh, 7000 Stuttgart | Anordnung zum Aufstäuben verschiedener Materialien auf einem Substrat |
-
1968
- 1968-09-24 DE DE19681790178 patent/DE1790178A1/de active Pending
- 1968-10-08 FR FR1588300D patent/FR1588300A/fr not_active Expired
- 1968-10-09 GB GB4792568A patent/GB1241213A/en not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1937175A1 (de) * | 1969-07-22 | 1971-02-04 | Schuermann & Co Heinz | Zwei untereinander verbundene Bauteile |
| DE4010495A1 (de) * | 1990-03-31 | 1991-10-02 | Leybold Ag | Vorrichtung zum beschichten eines substrats mit werkstoffen, beispielweise mit metallen |
| DE4022708A1 (de) * | 1990-07-17 | 1992-04-02 | Balzers Hochvakuum | Aetz- oder beschichtungsanlagen |
| DE4042417A1 (de) * | 1990-07-17 | 1992-05-14 | Balzers Hochvakuum | Aetz- oder beschichtungsanlagen |
| US5460707A (en) * | 1990-07-17 | 1995-10-24 | Balzers Aktiengesellschaft | Etching or coating method and a plant therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| FR1588300A (enrdf_load_stackoverflow) | 1970-04-10 |
| GB1241213A (en) | 1971-08-04 |
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