DE1628447A1 - Hochvakuum-Pumpeinrichtung - Google Patents
Hochvakuum-PumpeinrichtungInfo
- Publication number
- DE1628447A1 DE1628447A1 DE19671628447 DE1628447A DE1628447A1 DE 1628447 A1 DE1628447 A1 DE 1628447A1 DE 19671628447 DE19671628447 DE 19671628447 DE 1628447 A DE1628447 A DE 1628447A DE 1628447 A1 DE1628447 A1 DE 1628447A1
- Authority
- DE
- Germany
- Prior art keywords
- bell
- working space
- double wall
- wires
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005086 pumping Methods 0.000 title claims description 14
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 13
- 239000010936 titanium Substances 0.000 claims description 13
- 229910052719 titanium Inorganic materials 0.000 claims description 13
- 108010083687 Ion Pumps Proteins 0.000 claims description 9
- 239000006096 absorbing agent Substances 0.000 claims description 9
- 102000006391 Ion Pumps Human genes 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- CZZYITDELCSZES-UHFFFAOYSA-N diphenylmethane Chemical compound C=1C=CC=CC=1CC1=CC=CC=C1 CZZYITDELCSZES-UHFFFAOYSA-N 0.000 claims 1
- 239000007789 gas Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 4
- 239000002826 coolant Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910021536 Zeolite Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000010457 zeolite Substances 0.000 description 2
- 244000025254 Cannabis sativa Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR47568A FR1478404A (fr) | 1966-01-28 | 1966-01-28 | Perfectionnements aux dispositifs de pompage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1628447A1 true DE1628447A1 (de) | 1971-08-19 |
Family
ID=8599969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19671628447 Pending DE1628447A1 (de) | 1966-01-28 | 1967-01-27 | Hochvakuum-Pumpeinrichtung |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE693018A (en, 2012) |
| DE (1) | DE1628447A1 (en, 2012) |
| FR (1) | FR1478404A (en, 2012) |
| GB (1) | GB1159333A (en, 2012) |
| NL (1) | NL6701312A (en, 2012) |
-
1966
- 1966-01-28 FR FR47568A patent/FR1478404A/fr not_active Expired
-
1967
- 1967-01-23 BE BE693018D patent/BE693018A/xx unknown
- 1967-01-27 DE DE19671628447 patent/DE1628447A1/de active Pending
- 1967-01-27 GB GB416167A patent/GB1159333A/en not_active Expired
- 1967-01-27 NL NL6701312A patent/NL6701312A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR1478404A (fr) | 1967-04-28 |
| GB1159333A (en) | 1969-07-23 |
| BE693018A (en, 2012) | 1967-07-24 |
| NL6701312A (en, 2012) | 1967-07-31 |
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