DE1521421A1 - Verfahren zum Aufdampfen duenner Schichten und Vorrichtung zum Durchfuehren dieses Verfahrens - Google Patents
Verfahren zum Aufdampfen duenner Schichten und Vorrichtung zum Durchfuehren dieses VerfahrensInfo
- Publication number
- DE1521421A1 DE1521421A1 DE19661521421 DE1521421A DE1521421A1 DE 1521421 A1 DE1521421 A1 DE 1521421A1 DE 19661521421 DE19661521421 DE 19661521421 DE 1521421 A DE1521421 A DE 1521421A DE 1521421 A1 DE1521421 A1 DE 1521421A1
- Authority
- DE
- Germany
- Prior art keywords
- crucible
- container
- evaporation
- evaporated
- floating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 12
- 238000007740 vapor deposition Methods 0.000 title description 3
- 239000000463 material Substances 0.000 claims description 55
- 238000001704 evaporation Methods 0.000 claims description 27
- 230000008020 evaporation Effects 0.000 claims description 19
- 239000006260 foam Substances 0.000 claims description 8
- 230000000717 retained effect Effects 0.000 claims description 4
- 230000008016 vaporization Effects 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000009834 vaporization Methods 0.000 claims description 3
- 239000012768 molten material Substances 0.000 claims description 2
- 235000014277 Clidemia hirta Nutrition 0.000 claims 1
- 241000069219 Henriettea Species 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 239000011364 vaporized material Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 description 8
- 230000005499 meniscus Effects 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 101150006573 PAN1 gene Proteins 0.000 description 1
- 235000021028 berry Nutrition 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB104965A GB1103211A (en) | 1965-01-08 | 1965-01-08 | Improvements in and relating to vapour deposition and evaporation sources |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1521421A1 true DE1521421A1 (de) | 1969-12-11 |
Family
ID=9715280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19661521421 Pending DE1521421A1 (de) | 1965-01-08 | 1966-01-05 | Verfahren zum Aufdampfen duenner Schichten und Vorrichtung zum Durchfuehren dieses Verfahrens |
Country Status (6)
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000008226A3 (en) * | 1998-08-03 | 2000-12-07 | Coca Cola Co | Vapor deposition system |
| US6223683B1 (en) | 1997-03-14 | 2001-05-01 | The Coca-Cola Company | Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating |
| US6599584B2 (en) | 2001-04-27 | 2003-07-29 | The Coca-Cola Company | Barrier coated plastic containers and coating methods therefor |
| US6720052B1 (en) | 2000-08-24 | 2004-04-13 | The Coca-Cola Company | Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same |
| US6740378B1 (en) | 2000-08-24 | 2004-05-25 | The Coca-Cola Company | Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same |
| US6982119B2 (en) | 2002-04-15 | 2006-01-03 | The Coca-Cola Company | Coating composition containing an epoxide additive and structures coated therewith |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1440921A (en) * | 1972-07-14 | 1976-06-30 | Secr Defence | Evaporation of metals |
| WO2017001910A1 (en) * | 2015-06-29 | 2017-01-05 | Flisom Ag | Evaporation crucible with floater |
-
1965
- 1965-01-08 GB GB104965A patent/GB1103211A/en not_active Expired
-
1966
- 1966-01-04 NL NL6600024A patent/NL6600024A/xx unknown
- 1966-01-04 CH CH7366A patent/CH487263A/de not_active IP Right Cessation
- 1966-01-05 AT AT9766A patent/AT264953B/de active
- 1966-01-05 DE DE19661521421 patent/DE1521421A1/de active Pending
- 1966-01-06 FR FR45048A patent/FR1462913A/fr not_active Expired
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6599569B1 (en) | 1997-03-14 | 2003-07-29 | The Coca-Cola Company | Plastic containers with an external gas barrier coating, method and system for coating containers using vapor deposition, method for recycling coated containers, and method for packaging a beverage |
| US6223683B1 (en) | 1997-03-14 | 2001-05-01 | The Coca-Cola Company | Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating |
| US6279505B1 (en) | 1997-03-14 | 2001-08-28 | The Coca-Cola Company | Plastic containers with an external gas barrier coating |
| US6548123B1 (en) | 1997-03-14 | 2003-04-15 | The Coca-Cola Company | Method for coating a plastic container with vacuum vapor deposition |
| US6251233B1 (en) | 1998-08-03 | 2001-06-26 | The Coca-Cola Company | Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation |
| US6447837B2 (en) | 1998-08-03 | 2002-09-10 | The Coca-Cola Company | Methods for measuring the degree of ionization and the rate of evaporation in a vapor deposition coating system |
| WO2000008226A3 (en) * | 1998-08-03 | 2000-12-07 | Coca Cola Co | Vapor deposition system |
| US6740378B1 (en) | 2000-08-24 | 2004-05-25 | The Coca-Cola Company | Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same |
| US6720052B1 (en) | 2000-08-24 | 2004-04-13 | The Coca-Cola Company | Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same |
| US6808753B2 (en) | 2000-08-24 | 2004-10-26 | The Coca-Cola Company | Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same |
| US6811826B2 (en) | 2000-08-24 | 2004-11-02 | The Coca-Cola Company | Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and UV barrier and method for making same |
| US6599584B2 (en) | 2001-04-27 | 2003-07-29 | The Coca-Cola Company | Barrier coated plastic containers and coating methods therefor |
| US6982119B2 (en) | 2002-04-15 | 2006-01-03 | The Coca-Cola Company | Coating composition containing an epoxide additive and structures coated therewith |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1103211A (en) | 1968-02-14 |
| NL6600024A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1966-07-11 |
| AT264953B (de) | 1968-09-25 |
| FR1462913A (fr) | 1966-12-16 |
| CH487263A (de) | 1970-03-15 |
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