DE1159529B - Isolierschicht zwischen elektrischen Leitern - Google Patents
Isolierschicht zwischen elektrischen LeiternInfo
- Publication number
- DE1159529B DE1159529B DES72197A DES0072197A DE1159529B DE 1159529 B DE1159529 B DE 1159529B DE S72197 A DES72197 A DE S72197A DE S0072197 A DES0072197 A DE S0072197A DE 1159529 B DE1159529 B DE 1159529B
- Authority
- DE
- Germany
- Prior art keywords
- layer
- aluminum intermediate
- sio
- insulating layer
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 title claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 22
- 229910052782 aluminium Inorganic materials 0.000 claims description 21
- 238000007740 vapor deposition Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 4
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 50
- 229910000889 permalloy Inorganic materials 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
- H01F10/30—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers characterised by the composition of the intermediate layers, e.g. seed, buffer, template, diffusion preventing, cap layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/002—Inhomogeneous material in general
- H01B3/004—Inhomogeneous material in general with conductive additives or conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
- H01B3/10—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances metallic oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/06—Thin magnetic films, e.g. of one-domain structure characterised by the coupling or physical contact with connecting or interacting conductors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Conductive Materials (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL273920D NL273920A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1961-01-25 | ||
DES72197A DE1159529B (de) | 1961-01-25 | 1961-01-25 | Isolierschicht zwischen elektrischen Leitern |
CH1113161A CH397803A (de) | 1961-01-25 | 1961-09-25 | Isolierschicht zwischen elektrischen Leitern |
GB295362A GB932146A (en) | 1961-01-25 | 1962-01-25 | Improvements in or relating to insulating layers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES72197A DE1159529B (de) | 1961-01-25 | 1961-01-25 | Isolierschicht zwischen elektrischen Leitern |
Publications (1)
Publication Number | Publication Date |
---|---|
DE1159529B true DE1159529B (de) | 1963-12-19 |
Family
ID=7503026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DES72197A Pending DE1159529B (de) | 1961-01-25 | 1961-01-25 | Isolierschicht zwischen elektrischen Leitern |
Country Status (4)
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1590750B1 (de) * | 1965-10-01 | 1971-04-22 | Texas Instruments Inc | Verfahren zur herstellung von isolierschichten fuer elektrischevorrichtungen |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040017721A1 (en) | 1998-10-30 | 2004-01-29 | Schwabe Nikolai Franz Gregoe | Magnetic storage device |
GB2343308B (en) * | 1998-10-30 | 2000-10-11 | Nikolai Franz Gregor Schwabe | Magnetic storage device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE281110C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | ||||
DE895687C (de) * | 1941-11-11 | 1953-11-05 | Siemens Ag | Verfahren zur Herstellung von Schichten aus Metalloxyden |
-
0
- NL NL273920D patent/NL273920A/xx unknown
-
1961
- 1961-01-25 DE DES72197A patent/DE1159529B/de active Pending
- 1961-09-25 CH CH1113161A patent/CH397803A/de unknown
-
1962
- 1962-01-25 GB GB295362A patent/GB932146A/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE281110C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | ||||
DE895687C (de) * | 1941-11-11 | 1953-11-05 | Siemens Ag | Verfahren zur Herstellung von Schichten aus Metalloxyden |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1590750B1 (de) * | 1965-10-01 | 1971-04-22 | Texas Instruments Inc | Verfahren zur herstellung von isolierschichten fuer elektrischevorrichtungen |
Also Published As
Publication number | Publication date |
---|---|
NL273920A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | |
CH397803A (de) | 1965-08-31 |
GB932146A (en) | 1963-07-24 |
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