DE112023005086T5 - Al-Legierungs-Bonddraht - Google Patents

Al-Legierungs-Bonddraht

Info

Publication number
DE112023005086T5
DE112023005086T5 DE112023005086.4T DE112023005086T DE112023005086T5 DE 112023005086 T5 DE112023005086 T5 DE 112023005086T5 DE 112023005086 T DE112023005086 T DE 112023005086T DE 112023005086 T5 DE112023005086 T5 DE 112023005086T5
Authority
DE
Germany
Prior art keywords
wire
phase
equal
section
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112023005086.4T
Other languages
German (de)
English (en)
Inventor
Tetsuya OYAMADA
Tomohiro Uno
Daizo Oda
Motoki ETO
Yuya SUTO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Micrometal Corp
Nippon Steel Chemical and Materials Co Ltd
Original Assignee
Nippon Micrometal Corp
Nippon Steel Chemical and Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Micrometal Corp, Nippon Steel Chemical and Materials Co Ltd filed Critical Nippon Micrometal Corp
Publication of DE112023005086T5 publication Critical patent/DE112023005086T5/de
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/02Making non-ferrous alloys by melting
    • C22C1/026Alloys based on aluminium
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C21/00Alloys based on aluminium
    • C22C21/02Alloys based on aluminium with silicon as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C22F1/043Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys with silicon as the next major constituent
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/611Specific applications or type of materials patterned objects; electronic devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/015Manufacture or treatment of bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/015Manufacture or treatment of bond wires
    • H10W72/01551Changing the shapes of bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/521Structures or relative sizes of bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/551Materials of bond wires
    • H10W72/552Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5524Materials of bond wires comprising metals or metalloids, e.g. silver comprising aluminium [Al]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Wire Bonding (AREA)
  • Conductive Materials (AREA)
  • Die Bonding (AREA)
  • Manufacturing & Machinery (AREA)
DE112023005086.4T 2022-12-05 2023-06-30 Al-Legierungs-Bonddraht Pending DE112023005086T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022194009 2022-12-05
JP2022-194009 2022-12-05
PCT/JP2023/024324 WO2024122089A1 (ja) 2022-12-05 2023-06-30 Al合金ボンディングワイヤ

Publications (1)

Publication Number Publication Date
DE112023005086T5 true DE112023005086T5 (de) 2025-10-23

Family

ID=91379118

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112023005086.4T Pending DE112023005086T5 (de) 2022-12-05 2023-06-30 Al-Legierungs-Bonddraht

Country Status (8)

Country Link
US (1) US20250379177A1 (https=)
EP (4) EP4534709A4 (https=)
JP (6) JP7518305B1 (https=)
KR (4) KR20250114537A (https=)
CN (4) CN118660981A (https=)
DE (1) DE112023005086T5 (https=)
TW (4) TW202432852A (https=)
WO (8) WO2024122089A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7600474B1 (ja) * 2022-12-05 2024-12-16 日鉄ケミカル&マテリアル株式会社 Al接続材
JP7600475B1 (ja) * 2022-12-05 2024-12-16 日鉄ケミカル&マテリアル株式会社 Al接続材
DE112023005086T5 (de) * 2022-12-05 2025-10-23 Nippon Micrometal Corporation Al-Legierungs-Bonddraht

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928553A (ja) * 1982-08-11 1984-02-15 Hitachi Ltd 耐食性アルミニウム配線材料
JPS5957440A (ja) 1982-09-27 1984-04-03 Tanaka Kikinzoku Kogyo Kk 半導体素子用ボンデイング素線の製造方法
JPS5967642A (ja) * 1982-10-12 1984-04-17 Hitachi Ltd 半導体装置
JPS59139661A (ja) * 1983-01-31 1984-08-10 Hitachi Ltd 半導体装置
JP2766933B2 (ja) * 1989-06-29 1998-06-18 株式会社日立製作所 電子装置
MY137479A (en) * 2000-09-18 2009-01-30 Nippon Steel Corp Bonding wire for semiconductor device and method for producing the same
JP4633972B2 (ja) * 2001-07-17 2011-02-16 住友電気工業株式会社 耐摩耗性アルミニウム合金長尺体およびその製造方法ならびにカーエアコンディショナ用ピストン
DE102004043020B3 (de) * 2004-09-06 2006-04-27 eupec Europäische Gesellschaft für Leistungshalbleiter mbH Bonddraht und Bondverbindung
JP6272674B2 (ja) 2012-11-30 2018-01-31 日本ピストンリング株式会社 ボンディングワイヤ、接続部構造、並びに半導体装置およびその製造方法
JP5281191B1 (ja) 2012-12-28 2013-09-04 田中電子工業株式会社 パワ−半導体装置用アルミニウム合金細線
CN105331856B (zh) * 2015-12-04 2018-05-22 江苏亨通电力特种导线有限公司 一种微合金化的Al-Si合金及其铝合金杆的制备方法
WO2019031498A1 (ja) * 2017-08-09 2019-02-14 日鉄ケミカル&マテリアル株式会社 半導体装置用Cu合金ボンディングワイヤ
US10790259B2 (en) * 2017-08-09 2020-09-29 Nippon Steel Chemical & Material Co., Ltd. Cu alloy bonding wire for semiconductor device
KR102801396B1 (ko) * 2019-03-13 2025-04-30 닛데쓰마이크로메탈가부시키가이샤 Al 본딩 와이어
JP2020150116A (ja) 2019-03-13 2020-09-17 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
CA3138936A1 (en) * 2019-05-19 2020-11-26 Novelis Inc. Aluminum alloys for fluxless brazing applications, methods of making the same, and uses thereof
CN110205511A (zh) 2019-06-28 2019-09-06 江西理工大学 一种高强Al-Si合金焊丝及其制备方法
CN110656263A (zh) * 2019-11-06 2020-01-07 中国科学院金属研究所 含微量La元素的高性能Al-Si系焊丝合金及其制备方法
JP7784390B2 (ja) * 2021-02-05 2025-12-11 日鉄マイクロメタル株式会社 半導体装置用Alボンディングワイヤ
DE112023005086T5 (de) * 2022-12-05 2025-10-23 Nippon Micrometal Corporation Al-Legierungs-Bonddraht

Also Published As

Publication number Publication date
JP7518305B1 (ja) 2024-07-17
WO2024122380A1 (ja) 2024-06-13
JP7626905B2 (ja) 2025-02-04
JP7626906B2 (ja) 2025-02-04
KR20250114536A (ko) 2025-07-29
WO2024122381A1 (ja) 2024-06-13
CN118660981A (zh) 2024-09-17
JPWO2024122383A1 (https=) 2024-06-13
JP7833550B2 (ja) 2026-03-19
KR20250114537A (ko) 2025-07-29
JPWO2024122382A1 (https=) 2024-06-13
TW202432853A (zh) 2024-08-16
WO2024122384A1 (ja) 2024-06-13
EP4534709A4 (en) 2025-07-23
EP4534709A1 (en) 2025-04-09
EP4632092A1 (en) 2025-10-15
WO2025115258A1 (ja) 2025-06-05
TW202438688A (zh) 2024-10-01
KR20250116123A (ko) 2025-07-31
JP2025108597A (ja) 2025-07-23
CN120303422A (zh) 2025-07-11
TW202430658A (zh) 2024-08-01
US20250379177A1 (en) 2025-12-11
CN120303423A (zh) 2025-07-11
WO2024122089A1 (ja) 2024-06-13
TW202503076A (zh) 2025-01-16
JP2024138348A (ja) 2024-10-08
WO2025115257A1 (ja) 2025-06-05
KR20250114535A (ko) 2025-07-29
EP4632091A1 (en) 2025-10-15
CN120435577A (zh) 2025-08-05
WO2024122382A1 (ja) 2024-06-13
JPWO2024122089A1 (https=) 2024-06-13
TW202432852A (zh) 2024-08-16
WO2024122383A1 (ja) 2024-06-13
TW202438687A (zh) 2024-10-01
JPWO2024122381A1 (https=) 2024-06-13
EP4632090A1 (en) 2025-10-15

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Legal Events

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