DE112022001601T5 - Halbleiterbauteil und herstellungsverfahren für das halbleiterbauteil - Google Patents

Halbleiterbauteil und herstellungsverfahren für das halbleiterbauteil Download PDF

Info

Publication number
DE112022001601T5
DE112022001601T5 DE112022001601.9T DE112022001601T DE112022001601T5 DE 112022001601 T5 DE112022001601 T5 DE 112022001601T5 DE 112022001601 T DE112022001601 T DE 112022001601T DE 112022001601 T5 DE112022001601 T5 DE 112022001601T5
Authority
DE
Germany
Prior art keywords
terminal
sealing resin
semiconductor component
semiconductor
exposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112022001601.9T
Other languages
German (de)
English (en)
Inventor
Koshun SAITO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Publication of DE112022001601T5 publication Critical patent/DE112022001601T5/de
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/121Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by multiple encapsulations, e.g. by a thin protective coating and a thick encapsulation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/456Materials
    • H10W70/457Materials of metallic layers on leadframes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/464Additional interconnections in combination with leadframes
    • H10W70/466Tape carriers or flat leads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/481Leadframes for devices being provided for in groups H10D8/00 - H10D48/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • H10W74/016Manufacture or treatment using moulds
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/811Multiple chips on leadframes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/421Shapes or dispositions
    • H10W70/424Cross-sectional shapes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/853On the same surface
    • H10W72/868Die-attach connectors and strap connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/886Die-attach connectors and strap connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/761Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors
    • H10W90/766Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
DE112022001601.9T 2021-04-19 2022-04-04 Halbleiterbauteil und herstellungsverfahren für das halbleiterbauteil Pending DE112022001601T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-070259 2021-04-19
JP2021070259 2021-04-19
PCT/JP2022/017044 WO2022224811A1 (ja) 2021-04-19 2022-04-04 半導体装置、および半導体装置の製造方法

Publications (1)

Publication Number Publication Date
DE112022001601T5 true DE112022001601T5 (de) 2024-01-11

Family

ID=83722212

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112022001601.9T Pending DE112022001601T5 (de) 2021-04-19 2022-04-04 Halbleiterbauteil und herstellungsverfahren für das halbleiterbauteil

Country Status (5)

Country Link
US (1) US20230395451A1 (https=)
JP (1) JPWO2022224811A1 (https=)
CN (1) CN117121191A (https=)
DE (1) DE112022001601T5 (https=)
WO (1) WO2022224811A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118380338A (zh) * 2024-04-26 2024-07-23 强茂电子(无锡)有限公司 一种无引脚半导体封装器件的制作方法
CN221885104U (zh) * 2024-04-26 2024-10-22 强茂电子(无锡)有限公司 一种无引脚半导体引线框架

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020027850A (ja) 2018-08-10 2020-02-20 ローム株式会社 半導体装置および半導体装置の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3920753B2 (ja) * 2002-10-18 2007-05-30 株式会社ルネサステクノロジ 半導体装置及びそれを組み込んだ電子装置
US6927483B1 (en) * 2003-03-07 2005-08-09 Amkor Technology, Inc. Semiconductor package exhibiting efficient lead placement
JP2010010581A (ja) * 2008-06-30 2010-01-14 Sanken Electric Co Ltd 半導体装置及びその製造方法
JP6636846B2 (ja) * 2016-04-14 2020-01-29 ローム株式会社 半導体装置および半導体装置の製造方法
EP3624180A4 (en) * 2017-05-09 2020-04-01 Mitsubishi Electric Corporation SEMICONDUCTOR COMPONENT AND METHOD FOR THE PRODUCTION THEREOF
JP7089388B2 (ja) * 2018-03-29 2022-06-22 ローム株式会社 半導体装置および半導体装置の製造方法
US11887916B2 (en) * 2020-09-09 2024-01-30 Amkor Technology Singapore Holding Pte. Ltd. Semiconductor devices and methods of manufacturing semiconductor devices
JP7621130B2 (ja) * 2021-02-09 2025-01-24 エイブリック株式会社 半導体装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020027850A (ja) 2018-08-10 2020-02-20 ローム株式会社 半導体装置および半導体装置の製造方法

Also Published As

Publication number Publication date
JPWO2022224811A1 (https=) 2022-10-27
US20230395451A1 (en) 2023-12-07
WO2022224811A1 (ja) 2022-10-27
CN117121191A (zh) 2023-11-24

Similar Documents

Publication Publication Date Title
DE10254910B4 (de) Schaltkreisbildende Einheit und Verfahren zu deren Herstellung
DE112011105247B4 (de) Leistungsmodul
DE69735361T2 (de) Harzverkapselte halbleiteranordnung und herstellungsverfahren dafür
DE102006050291B4 (de) Elektronische Baugruppe und Verfahren, um diese zu bestücken
DE69308691T2 (de) Halbleiterbauelement mit reduzierter Schaltinduktanz und Verfahren zu seiner Herstellung
DE10238037B4 (de) Halbleitereinrichtung mit Gehäuse und Halterung
DE102009033321A1 (de) Leistungshalbleitervorrichtung
DE102005049687B4 (de) Leistungshalbleiterbauteil in Flachleitertechnik mit vertikalem Strompfad und Verfahren zur Herstellung
DE112015000513T5 (de) Elektrodenanschluss, Halbleitereinrichtung für elektrische Energie sowie Verfahren zur Herstellung einer Halbleitereinrichtung für elektrische Energie
DE102004060935B4 (de) Leistungshalbleitervorrichtung
DE112015000733T5 (de) Schaltungsbaugruppe, Struktur aus verbundenen Sammelschienen und elektrischer Verteiler
DE102008062514A1 (de) Halbleitermodul-Montagekonstruktion
DE102020125705A1 (de) Leistungs-Halbleitervorrichtung
DE212021000205U1 (de) Halbleiterbauteil
DE112022001601T5 (de) Halbleiterbauteil und herstellungsverfahren für das halbleiterbauteil
DE102020204406A1 (de) Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung
DE102019135373A1 (de) Halbleitervorrichtung und Verfahren zum Herstellen derselben
DE112022005438T5 (de) Halbleiterbauteil und Verfahren zur Herstellung des Halbleiterbauteils
DE102019121229B4 (de) Elektronische Vorrichtungen mit elektrisch isolierten Lastelektroden und zugehörige Herstellungsverfahren
DE112023000279T5 (de) Verfahren zum Herstellen eines Halbleitermoduls, einer Halbleitervorrichtung und einer Halbleitervorrichtung
DE112022004864T5 (de) Halbleitermodul und halbleiterbauteil
DE112022003555T5 (de) Halbleiterbauteil
DE102021006617A1 (de) Verfahren zur Herstellung eines Leistungshalbbrückenmoduls, Leistungshalbbrückenmodul, Leistungsinverter mit einem Leistungshalbbrückenmodul
DE112017002029T5 (de) Leiterplatte, Schaltungsanordnung und Herstellungsverfahren für eine Leiterplatte
DE112021005246T5 (de) Halbleiterbauelement und verfahren zur herstellung eines halbleiterbauelements

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: H01L0023480000

Ipc: H10W0072000000