DE112013000846B4 - Gluing method and gluing clamping device for a detection plate group - Google Patents

Abstract

Bonding method for a detection plate assembly for an incremental photolithography machine, the detection plate assembly for aligning a detection tag of the photolithography machine in which a silicon wafer is to be automatically aligned to a phase grating, the detection plate assembly including a protective glass (6) for protecting a reference plate (5 ) an adhesive clamping device, a detection reference plate (7) and a protective film (8), characterized in that the method comprises the following steps:
① Set up an ultra-clean study room and table, with the internal temperature (20°C - 26°C) ± 0.1°C and the humidity is 50% to 70%, and with standard atmospheric pressure, the detection plate group and the protective film (8) be pasted on the ultra-clean table;
② the staff wear anti-static gloves and masks, and on the ultra-clean table, use an anti-static wipe suitable for wiping optical glasses dipped in alcohol to wipe the protective glass (6), and during the wiping process, the detection reference plate (7) and the protective glass (6) are placed under 100W light and the dust on their surfaces is closely observed until no dust is visible to the eyes, and the detection reference plate (7) and wiped protective glass (6) are placed in a glass container, to prevent recontamination;
③ taking out the detection reference plate (7) from the glass container and laying it on the table plane horizontally, and with a coating surface of the detection reference plate (7) facing up, and sticking the protective film (8) on the coating surface of the detection reference plate (7). , wherein the protective film (8) is deemed to have been tested if no air bubble is visible when observed with the eyes, in the presence of an air bubble the protective film (8) is reapplied until it is deemed to be tested, and in accordance with the dimension of the detection reference plate (7) excess protective film (8) is cut away with a blade;
④ taking out the protective glass (6) from the glass container and placing it horizontally on the reference plate (5) of the adhesive clamp device so that two side edges of the protective glass (6) closely to two side reference edges (1) of the Adhesive clamping device applied, and wherein the other two side edges of the protective glass (6) are pressed firmly via elastic pressing blocks (4);
⑤ putting the detection reference plate (7) finished pasting with the protective film (8) in step ③ horizontally at the middle position of the protective glass (6) so that the side with the protective film (8) faces down, and with two sides the detection reference plate (7) being tightly fitted to an upper stopper (2) of the adhesive clamp, and the other two sides of the detection reference plate (7) being firmly pressed by the elastic pressing blocks (4);
⑥ where weights (3) are placed horizontally above the detection reference plate (7), and gravity of 5 to 8 kg is applied evenly, and four contacting peripheral edges of the detection reference plate (7) and protective glass (6) are secured with a two- Component epoxy resin adhesive can be adhesively treated so that the width and the height of the adhesive are between 1.5mm and 3mm, and the placement takes 20 to 24 hours continuously to form the detection plate group.

Description

technical field

The present invention relates to a stepper, particularly a bonding method and a bonding clamping device of the detection plate group for steppers with the projection in different steps, the detection plate mainly for aligning the positions of detection marks of the stepper with the projection in different steps, and directly affect the success the automatic alignment of silicon phase gratings in the stepper with the projection in different steps.

State of the art

At present, in the West, the coating method of processing the detection plate is set after the processing of the parts, the processing of the detection plates does not affect the dirt in the area of coating marks, and the gluing of the detection plates does not affect the shape and position of the processing of parts. The requirements of the surface shape of the reference surfaces of 0.003mm and the parallelism of the upper and lower surfaces of less than 0.006mm can be easily met. However, for the plate bodies of the processed detection plates in China, the standard plate bodies need to be purchased in foreign countries after the coating process, the processing process requires very good anti-pollution treatment, which leads to the finished product rate is low and the risk is high, while the requirements can vary cannot be met by 90 nm steppers.

From the US 2011/0043775 A1 a lithographic device is known which is arranged to transfer a pattern from a pattern device onto a substrate, the device being able to measure higher order distortions and/or image plane deviations of the pattern device. From the U.S. 2009/0153830 A1 a device for transmission image detection for use in a lithographic projection device and a method for determining third-order distortions of a structuring device and/or a projection system of such a lithographic device are known. From the US 2011/0090476 A1 a lithographic apparatus and a method for manufacturing a device and methods for patterning a substrate are known. From the JP 2006339600A a method and an apparatus for exposure and a manufacturing method of an electronic device are known.

content of the invention

It is the object of the present invention to provide a bonding method and a bonding clamping device of the detection plate group for steppers with the projection in different steps, whereby a bonding protection against contamination for the reference surface in the area of coating marks is carried out, and the surface shape of the reference surface is improved than 0.003mm, and the parallelism of the top and bottom surfaces is less than 0.006mm, so that the requirement for automatic alignment of stepper phase gratings is met.

• Ein Klebeverfahren für eine Erfassungsplattengruppe für eine schrittweise funktionierende Fotolithographie-Maschine, wobei die Erfassungsplattengruppe zur Ausrichtung eines Erfassungskennzeichens der Fotolithographie-Maschine dient, in der ein Siliziumwafer automatisch zu einem Phasengitter auszurichten ist, wobei die Erfassungsplattengruppe ein Schutzglas (6) zum Schutz einer Bezugsplatte (5) einer Klebeklemmvorrichtung, eine Erfassungsbezugsplatte (7) und einen Schutzfilm (8) umfasst, gekennzeichnet dadurch, dass das Verfahren folgende Schritte beinhaltet:
  • (1) Einrichtung eines ultrasauberen Arbeitszimmers und eines ultrasauberen Tisches, wobei die Innentemperatur (20°C - 26°C) ± 0,1 °C und die Luftfeuchtigkeit 50% bis 70% beträgt, und wobei bei Standardluftdruck die Erfassungsplattengruppe und der Schutzfilm (8) auf dem ultrasauberen Tisch geklebt werden;
  • (2) wobei die Mitarbeiter antistatische Handschuhe und Mundschutz tragen und auf dem ultrasauberen Tisch mit einem in Alkohol getauchten antistatischen Wischtuch, welches für zum Wischen optischer Gläser geeignet ist, das Schutzglas (6) wischen, und wobei während des Wischprozesses die Erfassungsbezugsplatte (7) und das Schutzglas (6) unter Licht von 100 W gelegt werden und der Staub auf ihren Oberflächen gut beobachtet wird, bis kein Staub sichtbar für die Augen ist, und wobei die Erfassungsbezugsplatte (7) und das gewischte Schutzglas (6) in einen Glasbehälter gelegt werden, um die nochmalige Kontamination zu verhindern;
  • (3) wobei die Erfassungsbezugsplatte (7) aus dem Glasbehälter herausgenommen und auf die Tischebene horizontal gelegt wird, und wobei eine Beschichtungsfläche der Erfassungsbezugsplatte (7) sich nach oben richtet, und wobei der Schutzfilm (8) auf die Beschichtungsfläche der Erfassungsbezugsplatte (7) geklebt wird, wobei der Schutzfilm (8) als geprüft gilt, wenn bei Beobachtung mit den Augen keine Luftblase sichtbar ist, wobei beim Vorhandensein einer Luftblase der Schutzfilm (8) nochmals geklebt wird, bis er als geprüft gilt, und wobei in Übereinstimmung mit der Abmessung der Erfassungsbezugsplatte (7) überschüssiger Schutzfilm (8) mit einer Klinge weg geschnitten wird;
  • (4) wobei das Schutzglas (6) aus dem Glasbehälter herausgenommen und horizontal auf die Bezugsplatte (5) der Klebeklemmvorrichtung gelegt wird, so dass zwei Seitenkanten des Schutzglases (6) eng an zwei Seitenbezugskanten (1) der Klebeklemmvorrichtung anliegen, und wobei die anderen zwei Seitenkanten des Schutzglases (6) über elastische Pressblöcke (4) fest gepresst werden;
  • (5) wobei die im Schritt ③ mit dem Schutzfilm (8) fertig geklebte Erfassungsbezugsplatte (7) horizontal an die mittlere Position des Schutzglases (6) gelegt wird, so dass die Seite mit dem Schutzfilm (8) sich nach unten richtet, und wobei zwei Seiten der Erfassungsbezugsplatte (7) eng an einen oberen Anschlag (2) der Klebeklemmvorrichtung anliegen, und wobei die anderen zwei Seiten der Erfassungsbezugsplatte (7) durch die elastischen Pressblöcke (4) fest gepresst werden;
  • (6) wobei oberhalb der Erfassungsbezugsplatte (7) Gewichte (3) horizontal platziert werden, und wobei eine Schwerkraft von 5 bis 8 kg gleichmäßig ausgeübt wird, und wobei vier einander berührende Umfangskanten der Erfassungsbezugsplatte (7) und des Schutzglases (6) mit einem Zwei-Komponenten-Epoxidharzklebstoff klebend behandelt werden, so dass die Breite und die Höhe des Klebstoffs zwischen 1,5 mm und 3 mm betragen, und wobei die Platzierung 20 bis 24 Stunden kontinuierlich dauert, um die Erfassungsplattengruppe zu formen.

The present invention is realized by the following technical solution:

• A bonding method for a detection plate group for an incremental photolithography machine, the detection plate group for aligning a detection mark of the photolithography machine in which a silicon wafer is to be automatically aligned to a phase grating, the detection plate group including a protective glass (6) for protecting a reference plate ( 5) an adhesive clamping device comprising a detection reference plate (7) and a protective film (8), characterized in that the method comprises the following steps:
  • (1) Establishment of an ultra-clean study room and ultra-clean table, with the indoor temperature (20°C - 26°C) ± 0.1°C and the humidity is 50% to 70%, and with standard atmospheric pressure, the detection plate group and the protective film ( 8) be pasted on the ultra-clean table;
  • (2) the staff wearing anti-static gloves and masks, and on the ultra-clean table with an anti-static wipe suitable for optical glass wiping, dipped in alcohol, wipe the protective glass (6), and during the wiping process, the detection reference plate (7) and the protective glass (6) is placed under a 100W light and the dust on their surfaces is closely observed until no dust is visible to the eyes, and the detection reference plate (7) and the wiped protective glass (6) are placed in a glass container to prevent re-contamination;
  • (3) wherein the detection reference plate (7) is taken out from the glass container and placed on the table plane horizontally, and a coating surface of the detection reference plate (7) faces upward, and the protective film (8) is placed on the coating surface of the detection reference plate (7), the protective film (8) being considered checked if no air bubble is visible when observed with the eyes, and if an air bubble is present, the protective film (8) is pasted again until it is considered checked, and wherein excess protective film (8) is cut away with a blade in accordance with the dimension of the detection reference plate (7);
  • (4) taking out the protective glass (6) from the glass container and laying it horizontally on the reference plate (5) of the adhesive clamp so that two side edges of the protective glass (6) closely abut two side reference edges (1) of the adhesive clamp, and the others two side edges of the protective glass (6) are firmly pressed via elastic pressing blocks (4);
  • (5) wherein the detection reference plate (7) finished with the protective film (8) pasted in step ③ is placed horizontally at the middle position of the protective glass (6) so that the side with the protective film (8) faces down, and wherein two sides of the detection reference plate (7) are tightly abutted against an upper stopper (2) of the adhesive clamp, and the other two sides of the detection reference plate (7) are firmly pressed by the elastic pressing blocks (4);
  • (6) above the detection reference plate (7), weights (3) are placed horizontally, and gravity of 5 to 8 kg is applied evenly, and four contacting peripheral edges of the detection reference plate (7) and the protective glass (6) with a Two-component epoxy resin adhesive can be adhesively treated so that the width and the height of the adhesive are between 1.5mm and 3mm, and the placement takes 20 to 24 hours continuously to form the detection plate group.

In the bonding treatment, the two-part epoxy resin adhesive is installed on a glue gun with a twin tube, a protective cover of a discharge port of an adhesive tube is opened, and an adhesive mixing head is installed at the discharge port of the adhesive tube, and the glue gun is moved, whereby the Two-component epoxy resin adhesive is spread continuously and evenly along four peripheral edges, and the adhesive flow rate of the adhesive mixing head is 2g to 3g.

• (7) Abnahme der Gewichte (3), wobei geprüft wird, dass der Epoxidharzklebstoff entlang einem Spalt der Beschichtungsfläche unter der Erfassungsbezugsplatte (7) eine Eindringtiefe von 1 mm bis 3 mm hat, wobei eine Ergänzung des Klebstoffs bei einer Eindringtiefe von unter 1 mm ausgeführt wird, und wobei eine Entfernungsbehandlung bei einer Eindringtiefe von mehr als 3 mm ausgeführt wird und es dann zum Schritt ② zurückkehrt;
• (8) Und wobei die Erfassungsplattengruppe in Wasser getaucht wird, um zu prüfen, ob die Klebeverbindung eine Wasserleckstelle hat, und wobei beim Vorhandensein einer Wasserleckstelle an der Klebefläche eine nochmalige Klebebehandlung an der Leckstelle ausgeführt wird;
• (9) Zusätzliches Kleben der Erfassungsplattengruppe mit einem in Alkohol getauchten antistatischen Wischtuch des optischen Glases die Klebestellen sauber gewischt werden, wobei der Klebstoffmischkopf auf die Klebestellen der Erfassungsplattengruppe ausgerichtet wird, und wobei die Klebepistole bewegt wird, so dass sie entlang vier Umfangskanten kontinuierlich den Klebstoff zusätzlich gleichmäßig aufträgt, und die Breite und die Höhe des Klebstoffs zwischen 2,5 mm und 3,5 mm betragen, und wobei die horizontale Platzierung 20 bis 24 Stunden dauert;
• (10) Wobei für ein verstärktes Kleben der Erfassungsplattengruppe der Klebstoffmischkopf auf die Klebestellen der Erfassungsplattengruppe ausgerichtet wird, wobei die Klebepistole bewegt wird, so dass sie entlang vier Umfangskanten kontinuierlich den Klebstoff zusätzlich gleichmäßig aufträgt, so dass die Breite und die Höhe des Klebstoffs zwischen 4 mm und 5 mm betragen, und wobei die horizontale Platzierung 24 bis 26 Stunden dauert, um die verstärkte Erfassungsplattengruppe zu erzeugen;
• (11) Wobei mit einem drei Koordinaten Messgerät geprüft wird, ob die Parallelität der oberen und unteren Fläche der durch Schritt ⑩ verstärkten Erfassungsplattengruppe und ihre Flächenform den Festlegungen entsprechen;
• (12) Wobei die den Festlegungen entsprechende verstärkte Erfassungsplattengruppe verpackt wird und dann in einem Trockenschrank über 5 Tage ausgehärtet wird.

The procedure further includes the following steps:

• (7) Removal of the weights (3), checking that the epoxy resin adhesive has a penetration depth of 1 mm to 3 mm along a gap of the coating surface under the detection reference plate (7), replenishing the adhesive when the penetration depth is less than 1 mm is carried out, and removing treatment is carried out at a penetration depth of more than 3 mm and then it returns to step ②;
• (8) And wherein the detection plate group is immersed in water to check whether the bonded joint has a water leak, and if there is a water leak on the bonded surface, a re-bonding treatment is performed on the leaked portion;
• (9) Additional gluing of the sensing plate assembly with an alcohol-dipped anti-static optical glass wipe, wiping the splices clean while aiming the adhesive mixing head at the splices of the sensing plate assembly, and moving the glue gun to continuously apply the adhesive along four peripheral edges additionally applied evenly, and the width and the height of the adhesive are between 2.5 mm and 3.5 mm, and the horizontal placement lasts 20 to 24 hours;
• (10) Wherein, for stronger bonding of the detection plate group, the adhesive mixing head is aligned with the bonding points of the detection plate group, moving the glue gun so that it continuously applies the adhesive additionally evenly along four peripheral edges, so that the width and the height of the adhesive are between 4 mm and 5 mm, and horizontal placement takes 24 to 26 hours to create the reinforced sensing plate assembly;
• (11) Using a three-coordinate measuring device, checking whether the parallelism of the upper and lower surfaces of the detection plate group reinforced by step ⑩ and its surface shape are as specified;
• (12) Wherein the reinforced detection plate group conforming to specifications is packed and then cured in an oven for 5 days.

The above point that the detection plate group is immersed in water to check for water leakage of the adhesive joint is detailed as follows: that the detection plate group is immersed in water for 1 minute and then taken out to check whether there are water leaks on the adhesive surface, where in the presence of water leaks, repeated bonding treatment is carried out on the leaks;
that the detection plate group is immersed in water for 10 minutes and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages;
that the detection plate group is immersed in water for 1 hour and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages;
that the detection plate group is immersed in water for 3 hours and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages;
that the detection plate group is immersed in water for 10 hours and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages;
that the detection plate group is immersed in water for 20 to 24 hours and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages; and
that the detection plate group is immersed in water for 120 to 150 hours and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages.
The requirements for the parallelism of the upper and lower surfaces of the reinforced detection plate assembly and its surface shape are that the surface shape is better than 0.003mm and the parallelism of the upper and lower surfaces is less than 0.006mm.

An adhesive clamping device of the detection plate group for a photolithography machine, characterized in that the clamping device has a reference plate (5), a side reference edge (1) being arranged on two adjacent edges of the reference plate (5), and on the outside of the others two edges of the reference plate (5), an elastic press block (4) is arranged in each case, and wherein an upper stop (2) is arranged on the upper inside of the side reference edge (1).

• Bei konventioneller Verarbeitung der Erfassungsplatte wird in der Regel das Filmschutzverfahren verwendet, die Beschichtung der Erfassungsbezugsplatte verhindert die Verschmutzung nur mit Hilfe der Haftkraft der Filme, und der Schutzbereich am Rand der Filme ist klein, somit ist die Verschmutzungsisolation am Rand der Filme schwer sicherzustellen, und die Qualifikationsquote der Verarbeitung wird unmittelbar beeinträchtigt.
  1. 1. Die vorliegende Erfindung löst folgende Probleme:
     • - Durch die Klebverbindung wird der Bereich von Beschichtungskennzeichen der Erfassungsbezugsplatte isoliert und es wird gewährleistet, dass der Bereich von Beschichtungskennzeichen während des Verarbeitungsprozesses keine Verschmutzungsquelle berühren wird;
     • - Unter der Voraussetzung, dass eine ausreichende Klebkraft gewährleistet wird, entspricht der Diffusionsbereich des Klebstoffs den Anforderungen;
     • - Die Klebfläche der Erfassungsplatte ist weitestgehend ohne Verschmutzung oder Verunreinigungen;
     • - Die Herstellungskosten werden reduziert und die Qualifikationsquote des Produkts wird erhöht, und die hohen Qualitätsanforderungen sind erfüllt.
  2. 2. Die im Verfahren der vorliegenden Erfindung geklebte Erfassungsplattengruppe kann es gewährleisten, dass die geklebte Erfassungsplattengruppe die Anforderungen an die automatische Ausrichtung von Siliziumphasengittern in dem Stepper mit verschiedenen Schritten völlig erfüllt.

Compared to the prior art, the present invention has advantages:

• With conventional processing of the detection plate, the film protection method is generally used, the coating of the detection reference plate prevents pollution only with the help of the adhesive force of the films, and the protection area at the edge of the films is small, thus the pollution isolation at the edge of the films is difficult to ensure, and the qualification rate of the processing is directly affected.
  1. 1. The present invention solves the following problems:
     • - Adhesive bonding isolates the area of coating marks of the detection reference plate and ensures that the area of coating marks will not touch any source of contamination during the processing;
     • - Provided that sufficient adhesion is ensured, the diffusion area of the adhesive meets the requirements;
     • - The adhesive surface of the detection plate is largely free of dirt or impurities;
     • - The manufacturing cost is reduced and the product's qualification rate is increased, and the high quality requirements are met.
  2. 2. The sense plate assembly bonded in the method of the present invention can ensure that the sense plate assembly bonded fully meets the requirements for the automatic alignment of silicon phase gratings in the stepper with different steps.

character list

• 1 Fig. 12 is a main view of the clamp device of the detection plate group according to the present invention.
• 2 Fig. 12 is a plan view of the clamp device of the detection plate group according to the present invention.
• 3 Fig. 12 is a main view of the detection plate group.

Reference List

1

page reference edge

2

top stop

3

Weight

4

Elastic press block

5

reference plate

6

Protective glass of the reference plate

7

acquisition reference plate

8th

protective film

Detailed embodiment

The present invention is explained in more detail below in connection with figures and embodiments, but the scope of protection of the present invention is not limited thereby.

A solution to prevent the influence of temperature and humidity in the workroom on gluing

Net internal temperature at 20°C-26°C±0.1°C, humidity at 50%-70%, performed under standard atmospheric pressure.

1. As far as possible, the coating surface of the detection reference plate 7 and the protective glass of the reference plate are made without contamination or contamination;

Solution:

When wiping the open detection reference plate 7 in the clean table in the clean room of at least ten thousand class, the anti-static gloves and mask must be worn, and the detection reference plate 7 and the reference plate protective glass are placed under the light of 100w and the dust on their surfaces will be removed carefully observed until the dust is difficult to see, then the protective films are stuck to the coating surface of the detection reference plate 7, and the detection reference plate 7 stuck with the protective films is placed in a specific glass container to prevent the recontamination.

2. Ensuring the shape and position accuracy of the sensing plate group during the gluing process

The protective glass of the reference plate is laid horizontally on the reference plate 5, its two side edges are closely leaned against two side reference edges 1, and they are pressed tightly with an elastic pressing block 4; the coating detection reference plate 7 pasted with the protective films is laid horizontally on the protective glass 6 of the reference plate, and the surface with the protective films faces downward; the side edges of the protective glass 6 of the reference plate are closely leaned against two upper stops 2, at the same time, an elastic pressing block is used to press firmly; weights are placed horizontally above the detection reference plate 7, and a gravity of 5 to 8 kg is applied evenly, with the epoxy resin adhesive of both combination, the four peripheral edges of the lower coating surface of the detection reference plate 7 and the contact edges of the protective glass of the reference plate are glued with circumferential positioning. With a three-coordinate gauge, the parallelism of the upper and lower surfaces of the bonded assembly of the reinforced detection plates is measured. It is measured and checked whether the parallelism and the surface shape meet the design requirements.

3. Ensuring a firm bonding area without leakage, ensuring the product processing qualification rate

• - dass die Erfassungsplattengruppe im Wasser für 1 Minute getaucht und dann herausgenommen wird, um es zu überprüfen, ob Wasserleckstellen an der Klebfläche bestehen, wobei beim Vorhandensein der Wasserleckstellen eine nochmalige Klebbehandlung an den Leckstellen ausgeführt wird, und wobei eine horizontale Platzierung 20 bis 24 Stunden dauert;
• - dass die Erfassungsplattengruppe im Wasser für 10 Minute getaucht und dann herausgenommen wird, um es zu überprüfen, ob Wasserleckstellen an der Klebfläche bestehen, wobei beim Vorhandensein der Wasserleckstellen eine nochmalige Klebbehandlung an den Leckstellen ausgeführt wird, und wobei eine horizontale Platzierung 20 bis 24 Stunden dauert;
• - dass die Erfassungsplattengruppe im Wasser für 1 Stunde getaucht und dann herausgenommen wird, um es zu überprüfen, ob Wasserleckstellen an der Klebfläche bestehen, wobei beim Vorhandensein der Wasserleckstellen eine nochmalige Klebbehandlung an den Leckstellen ausgeführt wird, und wobei eine horizontale Platzierung 20 bis 24 Stunden dauert;
• - dass die Erfassungsplattengruppe im Wasser für 3 Stunden getaucht und dann herausgenommen wird, um es zu überprüfen, ob Wasserleckstellen an der Klebfläche bestehen, wobei beim Vorhandensein der Wasserleckstellen eine nochmalige Klebbehandlung an den Leckstellen ausgeführt wird, und wobei eine horizontale Platzierung 20 bis 24 Stunden dauert;
• - dass die Erfassungsplattengruppe im Wasser für 10 Stunden getaucht und dann herausgenommen wird, um es zu überprüfen, ob Wasserleckstellen an der Klebfläche bestehen, wobei beim Vorhandensein der Wasserleckstellen eine nochmalige Klebbehandlung an den Leckstellen ausgeführt wird, und wobei eine horizontale Platzierung 20 bis 24 Stunden dauert;
• - dass die Erfassungsplattengruppe im Wasser für 20 bis 24 Stunden getaucht und dann herausgenommen wird, um es zu überprüfen, ob Wasserleckstellen an der Klebfläche bestehen, wobei beim Vorhandensein der Wasserleckstellen eine nochmalige Klebbehandlung an den Leckstellen ausgeführt wird, und wobei eine horizontale Platzierung 20 bis 24 Stunden dauert;
• - dass die Erfassungsplattengruppe im Wasser für 120 bis 150 Stunden getaucht und dann herausgenommen wird, um es zu überprüfen, ob Wasserleckstellen an der Klebfläche bestehen, wobei beim Vorhandensein der Wasserleckstellen eine nochmalige Klebbehandlung an den Leckstellen ausgeführt wird, und wobei eine horizontale Platzierung 20 bis 24 Stunden dauert.

The detection plate group will be glued, the width and the height of the glue will be controlled between 1.5mm and 3mm, after the horizontal placement of 20-24 hours, the following actions will be carried out in sequence:

• - that the detection plate group is immersed in the water for 1 minute and then taken out to check whether there are water leaks at the bonding surface, and if there are water leaks, re-bonding treatment is carried out on the leaks, and horizontal placement is 20 to 24 hours lasts;
• - that the detection plate group is immersed in the water for 10 minutes and then taken out to check whether there are water leaks on the bonding surface, and if there are water leaks, re-bonding treatment is carried out on the leaks, and horizontal placement is 20 to 24 hours lasts;
• - that the detection plate group is immersed in the water for 1 hour and then taken out to check whether there are water leaks at the bonding surface, and if there are water leaks, re-bonding treatment is carried out on the leaks, and horizontal placement is 20 to 24 hours lasts;
• - that the detection plate group is immersed in the water for 3 hours and then taken out to check whether there are water leaks at the bonding surface, and if there are water leaks, re-bonding treatment is carried out on the leaks, and horizontal placement is 20 to 24 hours lasts;
• - that the detection plate group is immersed in the water for 10 hours and then taken out to check whether there are water leaks at the bonding surface, and if there are water leaks, re-bonding treatment is carried out on the leaks, and horizontal placement is 20 to 24 hours lasts;
• - that the detection plate group is immersed in the water for 20 to 24 hours and then taken out to check whether there are water leaks at the bonding surface, in the presence of the water leaks, re-bonding treatment is carried out on the leaks, and horizontal placement 20 to lasts 24 hours;
• - that the detection plate group is immersed in water for 120 to 150 hours and then taken out to check whether there are water leaks at the bonding surface, and if there are water leaks, re-bonding treatment is carried out on the leaks, and horizontal placement 20 to lasts 24 hours.

4. Ensuring a firm bonding area without leakage, increasing the product's qualification rate

• - Der Epoxidharzklebstoff beider Kombination wird an einer Klebepistole des Zwillingsrohrs installiert und ein Klebstoffmischkopf wird zum Kleben installiert;
• - Die vier Umfangskanten der Erfassungsbezugsplatte 7 werden gleichmäßig kontinuierlich geklebt, und die Breite und die Höhe des Klebstoffs werden zwischen 1,5 mm und 3 mm gesteuert, und die horizontale Platzierung dauert 20 bis 24 Stunden;
• - Überprüfen, dass der Epoxidharzklebstoff entlang dem Spalt zwischen der unteren Beschichtungsfläche der Erfassungsbezugsplatte 7 und dem Schutzglas der Bezugsplatte einen Eingriffsbetrag von 1 mm bis 3 mm hat, und eine Ergänzung des Klebstoffs wird bei einem Eingriffsbetrag von unter 1 mm ausgeführt, wenn der Eingriffsbetrag mehr als 3 mm ist, wird die Erfassungsplattengruppe in einen sauberen Behälter gelegt, und die Klebstoff wird mit Entfernungsmittel für Klebstoff entfernt, dann kehrt es zum Schritt (2) zurück;
• - Mit einem im Alkohol getauchten antistatischen Wischtuch des optischen Glases werden die Klebstellen sauber gewischt, der Klebstoffmischkopf wird auf die Klebstellen der Erfassungsplattengruppe ausgerichtet, und die Klebepistole wird bewegt, so dass sie entlang vier Umfangskanten kontinuierlich den Klebstoff zusätzlich gleichmäßig stricht, die Breite und die Höhe des Klebstoffs werden zwischen 2,5 mm und 3,5 mm gesteuert werden, und die horizontale Platzierung dauert 20 bis 24 Stunden;
• - Der Klebstoffmischkopf wird auf die Klebstellen der Erfassungsplattengruppe ausgerichtet, wobei die Klebepistole bewegt wird, so dass sie entlang vier Umfangskanten kontinuierlich den Klebstoff zusätzlich gleichmäßig stricht, so dass die Breite und die Höhe des Klebstoffs zwischen 4 mm und 5 mm gesteuert werden, und wobei die horizontale Platzierung 24 bis 26 Stunden dauert, um die verstärkte Erfassungsplattengruppe zu erzeugen.

In order to ensure that the bonding area is isolated from the outside environment in the subsequent processing, to ensure the bonding quality and to increase the qualification rate of the product, the bonding measures are taken in different steps:

• - The epoxy resin glue of both combination is installed on a glue gun of the twin tube and a glue mixing head is installed for gluing;
• - The four peripheral edges of the detection reference plate 7 are continuously pasted evenly, and the width and height of the glue are controlled between 1.5mm and 3mm, and the horizontal placement takes 20 to 24 hours;
• - Check that the epoxy resin adhesive along the gap between the lower coating surface of the detection reference plate 7 and the protective glass of the reference plate has an engagement amount of 1mm to 3mm, and replenishment of the adhesive is carried out when the engagement amount is less than 1mm if the engagement amount is more than 3 mm, the detection plate group is put in a clean container, and the adhesive is removed with adhesive remover, then it returns to step (2);
• - Using an alcohol-dipped anti-static optical glass cloth to wipe the splices clean, the adhesive mixing head is aligned with the splices of the detection plate assembly, and the glue gun is moved so that it continuously spreads the adhesive evenly along four peripheral edges, the width and the Adhesive height can be controlled between 2.5mm and 3.5mm, and horizontal placement takes 20 to 24 hours;
• - The glue mixing head is aligned with the gluing points of the detection plate group, moving the glue gun so that it continuously strokes the glue along four peripheral edges in addition evenly, so that the width and the height of the glue are controlled between 4mm and 5mm, and where horizontal placement takes 24 to 26 hours to create the reinforced acquisition plate assembly.

1 Fig. 12 is a main view of the clamp device of the detection plate group according to the present invention, 2 Fig. 12 is a plan view of the clamp device of the detection plate group according to the present invention. As shown in figures, an adhesive clamping device of the detection plate group for steppers, comprising the reference plate 5, a side reference edge 1 being arranged on two adjacent edges of the reference plate 5, and an elastic press block being arranged on the outside of the other two edges of the reference plate 5, respectively and an upper stop 2 is arranged on the upper inside of the reference leaning edge 1, and the elastic pressing block 4 has a ¬ shape. The bottom of the elastic press block is for pressing the protective glass 6 of the reference plate firmly, and the top of the elastic press block is for pressing the reference plate 7 for coating detection firmly.

Claims (6)

Bonding method for a detection plate assembly for an incremental photolithography machine, the detection plate assembly for aligning a detection tag of the photolithography machine in which a silicon wafer is to be automatically aligned to a phase grating, the detection plate assembly including a protective glass (6) for protecting a reference plate (5 ) an adhesive clamping device, a detection reference plate (7) and a protective film (8), characterized in that the method comprises the following steps: ① Set up an ultra-clean study room and table, with the internal temperature (20°C - 26°C) ± 0.1°C and the humidity is 50% to 70%, and with standard atmospheric pressure, the detection plate group and the protective film (8) be pasted on the ultra-clean table; ② the staff wear anti-static gloves and masks, and on the ultra-clean table, use an anti-static wipe suitable for wiping optical glasses dipped in alcohol to wipe the protective glass (6), and during the wiping process, the detection reference plate (7) and the protective glass (6) are placed under 100W light and the dust on their surfaces is closely observed until no dust is visible to the eyes, and the detection reference plate (7) and wiped protective glass (6) are placed in a glass container, to prevent recontamination; ③ taking out the detection reference plate (7) from the glass container and laying it on the table plane horizontally, and with a coating surface of the detection reference plate (7) facing up, and sticking the protective film (8) on the coating surface of the detection reference plate (7). , wherein the protective film (8) is deemed to have been tested if no air bubble is visible when observed with the eyes, in the presence of an air bubble the protective film (8) is reapplied until it is deemed to be tested, and in accordance with the dimension of the detection reference plate (7) excess protective film (8) is cut away with a blade; ④ taking out the protective glass (6) from the glass container and placing it horizontally on the reference plate (5) of the adhesive clamp so that two side edges of the protective glass (6) closely abut two side reference edges (1) of the adhesive clamp, and the other two side edges of the protective glass (6) are firmly pressed via elastic press blocks (4); ⑤ putting the detection reference plate (7) finished pasting with the protective film (8) in step ③ horizontally at the middle position of the protective glass (6) so that the side with the protective film (8) faces down, and with two sides the detection reference plate (7) being tightly fitted to an upper stopper (2) of the adhesive clamp, and the other two sides of the detection reference plate (7) being firmly pressed by the elastic pressing blocks (4); ⑥ where weights (3) are placed horizontally above the detection reference plate (7), and gravity of 5 to 8 kg is applied evenly, and four contacting peripheral edges of the detection reference plate (7) and protective glass (6) are secured with a two- Component epoxy resin adhesive can be adhesively treated so that the width and the height of the adhesive are between 1.5mm and 3mm, and the placement takes 20 to 24 hours continuously to form the detection plate group. Gluing method for a detection plate group according to claim 1 , characterized in that in the bonding treatment, the two-part epoxy resin adhesive is installed on a glue gun with a twin tube, a protective cover of a discharge port of an adhesive tube is opened, and an adhesive mixing head is installed at the discharge port of the adhesive tube, and the glue gun is moved whereby the two-part epoxy resin adhesive is spread continuously and evenly along four peripheral edges, and the adhesive flow rate of the adhesive mixing head is 2 g to 3 g. Gluing method for a detection plate group according to claim 1 or 2 , characterized in that the method further includes the steps of: ⑦ removing the weights (3), checking that the epoxy resin adhesive has a penetration depth of 1 mm to 3 mm along a gap of the coating surface under the detection reference plate (7), wherein a replenishment of the adhesive is carried out at a penetration depth of under 1 mm, and removing treatment is carried out at a penetration depth of more than 3 mm, and then it returns to step ②; ⑧ wherein the detection plate group is immersed in water to check whether the bonded joint has a water leak, and if there is a water leak on the bonded surface, a re-bonding treatment is carried out on the leaked point; ⑨ wherein for additional gluing of the detection plate group, using an alcohol-dipped anti-static wipe of the optical glass to wipe the gluing spots clean, aligning the glue mixing head with the gluing spots of the detection plate group, and moving the glue gun so that it can along four peripheral edges continuously the Glue is additionally applied evenly, and the width and height of the glue are between 2.5mm and 3.5mm, and horizontal placement takes 20 to 24 hours; ⑩ whereby, for stronger bonding of the detection plate group, the adhesive mixing head is aligned with the bonding points of the detection plate group, moving the glue gun so that it continuously applies the adhesive additionally evenly along four peripheral edges, so that the width and the height of the adhesive are between 4mm and 5 mm, and horizontal placement takes 24 to 26 hours to complete the ver to create stronger detection plate group; (11) checking with a three-coordinate measuring device whether the parallelism of the upper and lower surfaces of the detection plate group reinforced by step ⑩ and its surface shape are as specified; (12) The reinforced detection panel assembly conforming to specification is packaged and then cured in an oven for 5 days. Gluing method for a detection plate group according to claim 3 , characterized in that the check for water leakage of the adhesive joint is carried out by: immersing the detection plate group in water for 1 minute and then taking it out to check whether there are water leaks at the adhesive surface, and if there are water leaks, re-adhering the leaks is performed; that the detection plate group is immersed in water for 10 minutes and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages; that the detection plate group is immersed in water for 1 hour and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages; that the detection plate group is immersed in water for 3 hours and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages; that the detection plate group is immersed in water for 10 hours and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages; that the detection plate group is immersed in water for 20 to 24 hours and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages; and that the detection plate group is immersed in water for 120 to 150 hours and then taken out to check whether there is water leakage from the bonding surface, and if there is water leakage, re-bonding treatment is carried out on the leakages. Gluing method for a detection plate group according to claim 3 , characterized in that the requirements for the parallelism of the upper and lower surfaces of the reinforced detection plate group and its surface shape are that the surface shape is better than 0.003 mm and the parallelism of the upper and lower surfaces is lower than 0.006 mm. Adhesive clamping device of the detection plate group for a photolithography machine, characterized in that the clamping device has a reference plate (5), a side reference edge (1) being arranged on two adjacent edges of the reference plate (5), and on the outside of the other two An elastic press block (4) is arranged on each edge of the reference plate (5), and an upper stop (2) is arranged on the upper inside of the reference leaning edge (1).

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