WO2014089895A1 - Method and clamp for gluing detection board assembly - Google Patents

Method and clamp for gluing detection board assembly Download PDF

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Publication number
WO2014089895A1
WO2014089895A1 PCT/CN2013/000808 CN2013000808W WO2014089895A1 WO 2014089895 A1 WO2014089895 A1 WO 2014089895A1 CN 2013000808 W CN2013000808 W CN 2013000808W WO 2014089895 A1 WO2014089895 A1 WO 2014089895A1
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WO
WIPO (PCT)
Prior art keywords
glue
plate
leakage point
water
detection
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PCT/CN2013/000808
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French (fr)
Chinese (zh)
Inventor
顾亚平
魏向荣
黄克飞
Original Assignee
上海现代先进超精密制造中心有限公司
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Application filed by 上海现代先进超精密制造中心有限公司 filed Critical 上海现代先进超精密制造中心有限公司
Priority to DE112013000846.7T priority Critical patent/DE112013000846B4/en
Publication of WO2014089895A1 publication Critical patent/WO2014089895A1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting

Definitions

  • the present invention relates to a lithography machine, and more particularly to a gluing method and a jig for a detection plate set of a step-and-step projection lithography machine, the detection plate being mainly used for positional alignment of a detection mark of a step-and-step projection lithography machine.
  • the result directly affects the automatic alignment of the silicon wafer to the bit grating in the step-and-step projection lithography machine.
  • the coating process of the detection plate processing in Europe and the United States is arranged after the parts are processed, and the processing of the detection plate does not affect the contamination of the coating mark area and the influence of gluing on the shape of the parts.
  • the reference surface shape is easy to reach 0. 003 ⁇ , the upper and lower parallelism is less than 0. 006mm.
  • the plate body of the domestic processing detection board needs to purchase the standard plate body after coating abroad, and the processing process requires high anti-pollution treatment, which makes the processing yield low and the risk is far from meeting the requirements of the 90nm optical engraving machine. Summary of the invention
  • a gluing method for a detection plate set of a step-and-step projection lithography machine characterized in that the method comprises the following steps:
  • the staff wear anti-static gloves and masks, with anti-static light Learn to wipe the glass of the reference plate with alcohol on the glass cloth.
  • the coating side reference plate and the reference plate protection glass under the lOOw light to carefully watch the surface dust until the unmarked dust is visible.
  • the side reference plate and the wiped reference plate cover glass are placed in the glassware to prevent re-contamination;
  • the gluing treatment is to install the double-combined epoxy resin glue on the double-tube adhesive, open the rubber tube outlet protection cover, install the rubber mixing head at the rubber tube outlet, and move the double-tube rubber to continue along the four surrounding areas. Evenly coating the glue, mixing the rubber head out of the glue amount of 2 ⁇ 3g.
  • the method also includes the steps of:
  • Wipe the cloth with an anti-static optical glass cloth rub the glue on the glue, and mix the rubber head to the glue of the detection plate group.
  • the width and height of the glue are controlled at 2. 5 ⁇ 3. 5mm, horizontally placed for 20 ⁇ 24 hours;
  • the rubber mixing head is aligned with the glued part of the detecting plate group, and the double-tube glue is continuously glued along the periphery of the glued four, so that the width and height of the colloid are controlled between 4 and 5, and horizontally placed for 24 to 26 hours. Reinforce the detection board set;
  • step 10 strengthens the upper and lower parallelism and the shape of the detecting plate group to meet the requirements;
  • the intrusion of the detection plate group into the water to check the glue leakage is specifically - injecting the detection plate group into the water for 1 minute, and taking out the observation that the glue surface has no water leakage point, and if there is a water leakage point, the osmosis The leaking point is glued again;
  • the detector plate group is intruded into the water for 10 minutes, and the leakage point where there is no water on the cemented surface is taken out. If the water leakage point is found, the leakage point is again glued;
  • the detector plate group is intruded into the water for 1 hour, and the leakage point on the glue surface is observed to be removed. If the water leakage point is found, the leakage point is again glued;
  • the detector plate group is intruded into the water for 3 hours, and the leakage point where there is no water on the cemented surface is taken out. If the water leakage point is found, the leakage point is again glued;
  • the detection plate group is intruded into the water for 10 hours, and the leakage point of the glue surface is observed to be removed. If the water leakage point is found, the leakage point is again glued;
  • the detector plate group is intruded into the water for 20 to 24 hours, and the leakage point where there is no water on the cemented surface is taken out. If the water leakage point is found, the leakage point is again glued;
  • the detection plate group is intruded into the water for 120 to 150 hours, and the leakage point where there is no water on the cemented surface is taken out. If the leakage point of the water is found, the leakage point is again glued; 006 ⁇
  • the upper and lower parallelism is less than 0. 006mm, the upper and lower parallelism is less than 0. 006mm.
  • a detecting plate set bonding jig for a lithography machine wherein the jig includes a reference plate, the adjacent sides of the reference plate are respectively provided with a reference abutting edge, and the other two sides of the reference plate are respectively provided with elastic pressing blocks.
  • An upper block is provided on the inner upper portion of the reference abutment.
  • the elastic compact has a "! shape.
  • the processing of the detection plate is generally protected by a thin film.
  • the coating protection of the coating detection plate relies entirely on the adhesion of the film to prevent contamination.
  • the protective edge of the coating is small, and it is difficult to ensure the contamination isolation of the edge of the coating, which directly affects the processing yield.
  • the present invention solves the following problems:
  • the coating mark area of the coating detection reference plate is separated by gluing, which ensures that the coating mark area is not in contact with the pollution source during the processing;
  • the diffusion area of the glue meets the requirements; the female makes the glued surface of the detection board as non-polluting or impurity-free as possible;
  • the detection plate set glued by the method of the invention ensures that the glued detection plate set fully meets the automatic alignment requirements of the stepwise lithography machine.
  • Figure 1 is a front elevational view of a probe plate assembly fixture of the present invention.
  • FIG. 2 is a top plan view of the probe plate assembly jig of the present invention.
  • Figure 3 Main view of the probe board group.
  • the net indoor temperature is 20 ⁇ 26°C ⁇ 0. 1 °C, the humidity is 50 ⁇ 70%, and the standard atmospheric pressure is performed;
  • the coating surface of the coating detection reference plate and the reference plate protection glass are free from pollution or impurities
  • the reference plate protection glass is placed horizontally on the reference plate 5, the two sides are abutted against the two side reference edges 1, and are pressed by the elastic pressing block 4; the coated detection side reference plate 7 with the protective film attached is horizontally placed on the reference plate On the protective glass 6, the protective film faces downward; the side of the reference plate protective glass 6 abuts against the two upper blocks 2, and is simultaneously pressed by the elastic pressing block; the weight is placed horizontally on the coated detecting reference plate, and uniformly applied 5 ⁇ 8kg gravity, using double-bonded epoxy resin glue to carry out the circumferential positioning and bonding of the four sides of the coating surface under the coating side reference plate and the contact glass of the reference plate.
  • the upper and lower parallelism of the gluing group of the probe plate was measured by a coordinate measuring machine. The measurement of the parallelity and surface shape meets the design requirements.
  • the detection plate set is glued, and the width and height of the glue are controlled to 1. 5 ⁇ 3mm. After horizontally placing for 20 ⁇ 24 hours, the following measures are carried out in sequence:
  • the detection board should be The group is placed in a clean container to remove the colloid with a degumming agent, and transferred to step 2; Women's anti-static optical glass wiping cloth ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ 3.
  • a probe plate assembly glue fixture for a lithography machine includes a reference plate 5, The adjacent sides of the reference plate 5 are respectively provided with a reference abutment 1 , and the other two sides of the reference plate 5 are respectively provided with an elastic pressing block 4 , and an upper block 2 is provided at an inner upper portion of the reference abutting edge 1 , and the elastic pressing block 4 is formed as ⁇ 1 shape.
  • the lower part of the elastic clamp is used to press the reference plate to protect the glass.
  • the upper part of the elastic block is used to press the coating detection reference plate 7.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Adhesives Or Adhesive Processes (AREA)

Abstract

A method and clamp for gluing a detection board assembly. The method for gluing a detection board assembly includes: ① setting an ultraclean workroom and an ultraclean workbench; ② wiping a reference board protective glass cover (6) satisfying requirements on the ultraclean workbench with a piece of antistatic optical glass wiping cloth dipped with ethanol; ③ bonding a protective film (8) onto the coated surface of a coated detection reference board (7); and ④ gluing the coated detection reference board (7) bonded with the protective film (8) and the reference board protective glass cover (6) into a waterproof detection board assembly. The method and clamp for gluing a detection board assembly ensure that a coating mark region is in no contact with a contamination source in the machining process, reducing the reject rate; and the machined detection board meets the high quality requirement of a stepper.

Description

探测板组的胶合方法和夹具  Gluing method and fixture of detecting plate group
技术领域 Technical field
本发明涉及光刻机， 特别是一种用于分步投影光刻机的探测板组 的胶合方法和夹具，该探测板主要用于分步投影光刻机探测标记的位 置对准，该向成果直接影响到分步投影光刻机里的硅片向位光栅自动 对准。 背景技术  The present invention relates to a lithography machine, and more particularly to a gluing method and a jig for a detection plate set of a step-and-step projection lithography machine, the detection plate being mainly used for positional alignment of a detection mark of a step-and-step projection lithography machine. The result directly affects the automatic alignment of the silicon wafer to the bit grating in the step-and-step projection lithography machine. Background technique
目前欧美国家探测板加工的镀膜工序安排在零件加工之后，探测 板加工没有对镀膜标记区域污染、胶合对零件加工形位的影响。基准 面面形容易达到 0. 003匪， 上下面平行度小于 0. 006mm的要求。 而国 内加工探测板的板体需要采购国外镀膜后的标准板体，加工过程要求 很高防污染处理， 使得加工成品率低风险大， 远远不能满足 90nm光 刻机的要求。 发明内容  At present, the coating process of the detection plate processing in Europe and the United States is arranged after the parts are processed, and the processing of the detection plate does not affect the contamination of the coating mark area and the influence of gluing on the shape of the parts. The reference surface shape is easy to reach 0. 003 匪, the upper and lower parallelism is less than 0. 006mm. The plate body of the domestic processing detection board needs to purchase the standard plate body after coating abroad, and the processing process requires high anti-pollution treatment, which makes the processing yield low and the risk is far from meeting the requirements of the 90nm optical engraving machine. Summary of the invention
本发明的目的在于提供一种用于分步投影光刻机的探测板组的 胶合方法和夹具， 对镀膜标记区域基准面进行防污染胶合保护， 加工 基准面面形优于 0. 003mm， 上下面平行度小于 0. 006mm， 使之符合光 刻机向位光栅自动对准要求。  003mm,上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上上The following parallelism is less than 0. 006mm, which is in line with the automatic alignment requirements of the lithography machine.
本发明的技术解决方案如下：  The technical solution of the present invention is as follows:
一种用于分步投影光刻机的探测板组的胶合方法，其特征在于， 该方法包括下列步骤：  A gluing method for a detection plate set of a step-and-step projection lithography machine, characterized in that the method comprises the following steps:
①建立超净工作室和超净工作台，室内温度为 20〜26°C ± 0. 1 °C， 湿度为 50〜70%标准大气压下超净工作台上进行探测板保护膜和测板 组的胶合工作；  1 Establish ultra-clean studio and ultra-clean workbench, indoor temperature is 20~26°C ± 0. 1 °C, humidity is 50~70%, standard atmospheric pressure is used on the ultra-clean workbench to detect the protective film and test board Gluing work;
②在超净工作台，工作人员带上防静电手套和口罩， 用防静电光 学玻璃擦拭布蘸上酒精对基准板保护玻璃进行擦拭，在擦拭过程中把 镀膜探侧基准板和基准板保护玻璃放在 lOOw的灯光下仔细观看表面 灰尘， 直到无人眼可见灰尘， 把镀膜探侧基准板和擦拭好的基准板保 护玻璃放在玻璃器皿中， 防止再次污染； 2 In the ultra-clean workbench, the staff wear anti-static gloves and masks, with anti-static light Learn to wipe the glass of the reference plate with alcohol on the glass cloth. In the process of wiping, place the coating side reference plate and the reference plate protection glass under the lOOw light to carefully watch the surface dust until the unmarked dust is visible. The side reference plate and the wiped reference plate cover glass are placed in the glassware to prevent re-contamination;
③从所述的玻璃器皿中取出镀膜探侧基准板水平放到工作台面 上， 镀膜探侧基准板的镀膜面向上， 将保护膜贴到镀膜探侧基准板的 镀膜面上， 眼睛观察， 如没有气泡， 则为合格， 如有气泡， 则重新再 贴， 直到合格为止； 用刀片按照镀膜探侧基准板的尺寸大小切去多余 保护膜；  3 Remove the coating side reference plate from the glassware and place it on the work surface horizontally. The coating side of the coating side reference plate is facing upward, and the protective film is attached to the coating surface of the coating side reference plate, and the eye is observed, such as If there is no air bubble, it is qualified. If there is air bubble, re-stick it until it is qualified; use the blade to cut off the excess protective film according to the size of the coating side reference plate;
④从玻璃器皿中取出基准板保护玻璃水平放到探测板胶合夹具 的基准板上，使基准板保护玻璃的两侧侧边紧靠探测板组胶合夹具的 两个侧基准边， 基准板保护玻璃的另外两侧侧边用弹性压块压紧； 4Remove the reference plate from the glassware. Place the protective glass horizontally on the reference plate of the detection plate gluing fixture so that the sides of the reference plate protection glass abut the two side reference edges of the detection plate assembly gluing fixture. The other sides of the other sides are pressed by elastic clamps;
⑤将步聚③中贴好保护膜的镀膜探测基准板水平放到基准板保 护玻璃的中间位置， 使贴有保护膜的一面向下； 镀膜探测基准板的两 侧边紧靠探测板组胶合夹具的上档块，镀膜探测基准板的另外两侧边 用弹性压块压紧； 5 Place the coating detection reference plate with the protective film attached in the step 3 horizontally to the middle position of the protection glass of the reference plate, so that the side with the protective film attached downward; the both sides of the coating detection reference plate are glued against the detection plate group. The upper block of the clamp, the other sides of the coating detection reference plate are pressed by the elastic pressing block;
⑥在镀膜探测基准板上方水平放置配重块， 均匀施加 5〜8kg重 力，用双组合环氧树脂胶对镀膜探测基准板与基准板保护玻璃接触的 四周边进行胶合处理， 使胶体的宽度和高度控制在 1. 5〜3mm之间， 持续放置 20〜24小时， 形成探测板组。  6 Place the weights horizontally above the coating detection reference plate, uniformly apply 5~8kg of gravity, and glue the four sides of the coating detection reference plate and the reference plate protection glass with double-bond epoxy resin to make the width of the colloid and The height is controlled between 1. 5~3mm, and is continuously placed for 20~24 hours to form a detection board group.
所述的胶合处理是将双组合环氧树脂胶装在双管胶抢上，打开胶 筒出口保护盖， 在胶筒出口安装混胶头， 搬动双管胶抢沿所述的四周 边连续均匀涂胶， 混胶头流出胶量 2〜3g。  The gluing treatment is to install the double-combined epoxy resin glue on the double-tube adhesive, open the rubber tube outlet protection cover, install the rubber mixing head at the rubber tube outlet, and move the double-tube rubber to continue along the four surrounding areas. Evenly coating the glue, mixing the rubber head out of the glue amount of 2~3g.
该方法还包括步骤：  The method also includes the steps of:
⑦取下配重块，检査环氧树脂胶沿镀膜探测基准板下镀膜面间隙 侵入量为 l〜3mm;对侵入量小于 1顯是进行补胶；对侵入量大于 3匪， 进行去除处理后， 返回到步骤②； 7 Remove the weight block and check that the intrusion amount of the epoxy resin glue along the coating surface of the coating detection plate is l~3mm ; the intrusion amount is less than 1; the intrusion is greater than 3匪, and the removal is performed. After that, return to step 2;
⑧将探测板组侵入水中检查胶合漏水情况，如胶合面有水的渗漏 点， 对渗漏点再次进行胶合处理； 8 Investigate the detection plate group into the water to check the glue leakage, such as water leakage on the glue surface Point, glue the leak point again;
⑨探测板组补充胶合  9 detection plate group added glue
用防静电光学玻璃擦拭布蘸上酒精擦干净胶合处，混胶头对准探 测板组胶合处， 搬动双管胶抢沿胶合四周边连续均匀涂补胶， 胶体的 宽度和高度控制在 2. 5〜3. 5mm之间， 水平放置 20〜24小时；  Wipe the cloth with an anti-static optical glass cloth, rub the glue on the glue, and mix the rubber head to the glue of the detection plate group. Move the double-tube glue to continuously apply the glue along the periphery of the glue. The width and height of the glue are controlled at 2. 5~3. 5mm, horizontally placed for 20~24 hours;
⑩探测板组加固胶合  10 detection board group reinforcement bonding
混胶头对准探测板组胶合处，搬动双管胶抢沿胶合四周边连续均 匀涂补胶， 使胶体的宽度和高度控制在 4〜5醒之间， 水平放置 24〜 26小时， 获得加固探测板组；  The rubber mixing head is aligned with the glued part of the detecting plate group, and the double-tube glue is continuously glued along the periphery of the glued four, so that the width and height of the colloid are controlled between 4 and 5, and horizontally placed for 24 to 26 hours. Reinforce the detection board set;
(11)用三坐标测量仪测量步骤⑩加固探测板组的上下面平行度、面 形是否符合规定；  (11) Using the coordinate measuring device of the coordinate measuring device, step 10 strengthens the upper and lower parallelism and the shape of the detecting plate group to meet the requirements;
(1 对符合规定的加固探测板组进行包装，然后放在恒温箱内五天 以上， 使其完全固化后待用。  (1) Pack the reinforced test board group that meets the requirements, and then put it in the incubator for more than five days, so that it is fully cured and ready for use.
所述的将探测板组侵入水中检査胶合漏水情况具体是- 将探测板组侵入水 1分钟， 取出观察胶合面有无水的渗漏点， 如 发现有水的渗漏点时， 对渗漏点再次进行胶合处理；  The intrusion of the detection plate group into the water to check the glue leakage is specifically - injecting the detection plate group into the water for 1 minute, and taking out the observation that the glue surface has no water leakage point, and if there is a water leakage point, the osmosis The leaking point is glued again;
将探测板组侵入水 10分钟， 取出观察胶合面有无水的渗漏点， 如发现有水的渗漏点时， 对渗漏点再次进行胶合处理；  The detector plate group is intruded into the water for 10 minutes, and the leakage point where there is no water on the cemented surface is taken out. If the water leakage point is found, the leakage point is again glued;
将探测板组侵入水 1小时， 取出观察胶合面有无水的渗漏点， 如 发现有水的渗漏点时， 对渗漏点再次进行胶合处理；  The detector plate group is intruded into the water for 1 hour, and the leakage point on the glue surface is observed to be removed. If the water leakage point is found, the leakage point is again glued;
将探测板组侵入水 3小时， 取出观察胶合面有无水的渗漏点， 如 发现有水的渗漏点时， 对渗漏点再次进行胶合处理；  The detector plate group is intruded into the water for 3 hours, and the leakage point where there is no water on the cemented surface is taken out. If the water leakage point is found, the leakage point is again glued;
将探测板组侵入水 10小时， 取出观察胶合面有无水的渗漏点， 如发现有水的渗漏点时， 对渗漏点再次进行胶合处理；  The detection plate group is intruded into the water for 10 hours, and the leakage point of the glue surface is observed to be removed. If the water leakage point is found, the leakage point is again glued;
将探测板组侵入水 20〜24小时， 取出观察胶合面有无水的渗漏 点， 如发现有水的渗漏点时， 对渗漏点再次进行胶合处理；  The detector plate group is intruded into the water for 20 to 24 hours, and the leakage point where there is no water on the cemented surface is taken out. If the water leakage point is found, the leakage point is again glued;
将探测板组侵入水 120〜150小时， 取出观察胶合面有无水的渗 漏点， 如发现有水的渗漏点时， 对渗漏点再次进行胶合处理； 所述的加固探测板组的上下面平行度、面形标准要求为： 面形优 于 0. 003mm, 上下面平行度小于 0. 006mm。 The detection plate group is intruded into the water for 120 to 150 hours, and the leakage point where there is no water on the cemented surface is taken out. If the leakage point of the water is found, the leakage point is again glued; 006毫米。 The upper and lower parallelism is less than 0. 006mm, the upper and lower parallelism is less than 0. 006mm.
所述的胶合后探测板胶合组的胶合面的水污染区域小于 2皿。 一种用于光刻机的探测板组胶合夹具， 其特征在于， 该夹具包括 基准板， 该基准板的相邻两边分别设有基准靠边， 基准板的另两边外 侧分别设有弹性压块， 在基准靠边的内侧上部设有上档块。  The water-contaminated area of the glued surface of the glued detection board after the gluing is less than 2 dishes. A detecting plate set bonding jig for a lithography machine, wherein the jig includes a reference plate, the adjacent sides of the reference plate are respectively provided with a reference abutting edge, and the other two sides of the reference plate are respectively provided with elastic pressing blocks. An upper block is provided on the inner upper portion of the reference abutment.
所述的弹性压块呈"！形。  The elastic compact has a "! shape.
与现有技术相比， 本发明的有益效果是：  Compared with the prior art, the beneficial effects of the present invention are:
通常的探测板加工一般采用薄膜保护方式，镀膜探测基准板镀膜 保护完全依靠薄膜的附着力来进行防止污染， 镀膜边缘保护区域小， 很难确保镀膜边缘的污染隔离， 直接影响加工合格率。  Generally, the processing of the detection plate is generally protected by a thin film. The coating protection of the coating detection plate relies entirely on the adhesion of the film to prevent contamination. The protective edge of the coating is small, and it is difficult to ensure the contamination isolation of the edge of the coating, which directly affects the processing yield.
1、 本发明解决了如下问题：  1. The present invention solves the following problems:
★通过胶合隔离了镀膜探测基准板镀膜标记区域，保证了在加工 过程中镀膜标记区域接触不到污染源；  ★ The coating mark area of the coating detection reference plate is separated by gluing, which ensures that the coating mark area is not in contact with the pollution source during the processing;
★在保证有足够胶合力的前提下， 使胶水的扩散面积符合要求； 女尽可能使探测板胶合面无污染或者无杂质；  ★ Under the premise of ensuring sufficient glue strength, the diffusion area of the glue meets the requirements; the female makes the glued surface of the detection board as non-polluting or impurity-free as possible;
★降低生产成本提高了产品合格率， 符合高质量要求。  ★ Reduce production costs and improve product qualification rate, in line with high quality requirements.
2、 经本发明方法胶合的探测板组， 可确保胶合的探测板组完全 符合分步光刻机向位光栅自动对准要求。 附图说明  2. The detection plate set glued by the method of the invention ensures that the glued detection plate set fully meets the automatic alignment requirements of the stepwise lithography machine. DRAWINGS
图 1 是本发明探测板组夹具的主视图。  BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a front elevational view of a probe plate assembly fixture of the present invention.
图 2是本发明探测板组夹具的俯视图。  2 is a top plan view of the probe plate assembly jig of the present invention.
图 3探测板组主视图。  Figure 3 Main view of the probe board group.
图中： 1一侧基准边、 2—上档块， 3—配重块、 4-弹性压块、 5 - 基准板、 6-基准板保护玻璃、 7-镀膜探测基准板、 8-保护膜。 具体实施方式 下面结合附图和实施例对本发明作进一步说明，但不应以此限制 本发明的保护范围。 In the figure: 1 side reference edge, 2 - upper block, 3 - weight, 4-elastic block, 5 - reference plate, 6-reference plate protective glass, 7-coated detection reference plate, 8-protective film . detailed description The invention will be further described with reference to the accompanying drawings and embodiments, but should not be construed as limiting the scope of the invention.
为了防止胶合所处的工房温度和湿度对胶合的影响的解决方案 净室内温度为 20〜26°C ±0. 1 °C， 湿度为 50〜70%， 标准大气压下进 行；  Solution to prevent the influence of the temperature and humidity of the work chamber on the gluing. The net indoor temperature is 20~26°C ±0. 1 °C, the humidity is 50~70%, and the standard atmospheric pressure is performed;
1、 尽最大可能使镀膜探测基准板镀膜面和基准板保护玻璃无污染或 者无杂质；  1. As far as possible, the coating surface of the coating detection reference plate and the reference plate protection glass are free from pollution or impurities;
解决方案 solution
擦拭需要在至少万级以上洁净室里的洁净工作台内打开镀膜探 测基准板， 要带上防静电手套和口罩，把镀膜探测基准板和基准板保 护玻璃放在 lOOw的灯光下仔细观看表面灰尘， 直到很难看出灰尘， 将保护膜贴到镀膜探测基准板的镀膜面上并把贴好膜的镀膜探测基 准板放在特定的玻璃器皿中， 防止再次污染。  Wipe the coating detection reference plate in a clean workbench in at least 10,000 clean rooms. Wear anti-static gloves and a mask. Place the coating detection reference plate and the reference plate protective glass under the lOOw light to carefully watch the surface dust. Until it is difficult to see the dust, attach the protective film to the coating surface of the coating detection reference plate and place the film-coated coating detection reference plate in a specific glassware to prevent re-contamination.
2、 保证胶合过程探测板组的形位公差精度  2. Ensure the accuracy of the shape and position tolerance of the detection plate group in the gluing process
将基准板保护玻璃水平放到基准板 5上，两侧边紧靠两个侧基准 边 1， 并用弹性压块 4压紧； 将贴好保护膜的镀膜探侧基准板 7水平 放到基准板保护玻璃 6上， 保护膜面向下； 基准板保护玻璃 6侧边紧 靠两个上档块 2， 用弹性压块同时压紧； 在镀膜探侧基准板上平面水 平放置配重块， 均匀施加 5〜8kg重力， 用双组合环氧树脂胶对镀膜 探侧基准板下镀膜面四周边与基准板保护玻璃接触边进行环绕定位 胶合。用三坐标测量仪测量加探测板胶合组的上下面平行度。测量平 行度、 面形符合设计要求。  The reference plate protection glass is placed horizontally on the reference plate 5, the two sides are abutted against the two side reference edges 1, and are pressed by the elastic pressing block 4; the coated detection side reference plate 7 with the protective film attached is horizontally placed on the reference plate On the protective glass 6, the protective film faces downward; the side of the reference plate protective glass 6 abuts against the two upper blocks 2, and is simultaneously pressed by the elastic pressing block; the weight is placed horizontally on the coated detecting reference plate, and uniformly applied 5~8kg gravity, using double-bonded epoxy resin glue to carry out the circumferential positioning and bonding of the four sides of the coating surface under the coating side reference plate and the contact glass of the reference plate. The upper and lower parallelism of the gluing group of the probe plate was measured by a coordinate measuring machine. The measurement of the parallelity and surface shape meets the design requirements.
3、 保证胶合区域牢固无泄漏， 确保产品加工的合格率  3. Ensure that the glued area is firm and leak-free, and ensure the qualified rate of product processing.
探测板组进行胶合， 胶体宽度、 高度控制到 1. 5〜3mm， 水平放置 20〜24小时后依次进行以下措施：  The detection plate set is glued, and the width and height of the glue are controlled to 1. 5~3mm. After horizontally placing for 20~24 hours, the following measures are carried out in sequence:
★将探测板组侵入水 1分钟， 取出观察胶合面有无水的渗漏点， 如发现有水的渗漏点时对渗漏点进行补胶， 水平放置 20〜24 小时； ★将探测板组侵入水 10分钟，取出观察胶合面有无水的渗漏点， 如发现有水的渗漏点时对渗漏点进行补胶， 水平放置 20〜24 小时； ★Inject the detection plate group into the water for 1 minute, take out the leakage point where there is no water on the glue surface, and fill the leakage point when there is a leak point of water, and place it horizontally for 20~24 hours; ★Inject the detection plate group into the water for 10 minutes, take out the leakage point where there is no water on the glue surface, and fill the leakage point when the water leakage point is found, and place it horizontally for 20~24 hours;
★将探测板组侵入水 1小时， 取出观察胶合面有无水的渗漏点， 如发现有水的渗漏点时对渗漏点进行补胶， 水平放置 20〜24 小时；  ★Inject the detection plate group into the water for 1 hour, take out the leakage point where there is no water on the glue surface, and fill the leak point when the water leakage point is found, and place it horizontally for 20~24 hours;
★将探测板组侵入水 3小时， 取出观察胶合面有无水的渗漏点， 如发现有水的渗漏点时对渗漏点进行补胶， 水平放置 20〜24 小时；  ★Inject the detection plate group into the water for 3 hours, take out the leakage point where there is no water on the glue surface, and fill the leakage point when there is a leak point of water, and place it horizontally for 20~24 hours;
★将探测板组侵入水 10小时，取出观察胶合面有无水的渗漏点， 如发现有水的渗漏点时对渗漏点进行补胶， 水平放置 20〜24 小时；  ★Inject the detection plate group into the water for 10 hours, take out the leakage point where there is no water on the glue surface, and fill the leak point when the water leakage point is found, and place it horizontally for 20~24 hours;
★将探测板组侵入水 20〜24小时， 取出观察胶合面有无水的渗 漏点， 如发现有水的渗漏点时对渗漏点进行补胶， 水平放置 20〜24小时；  ★Inject the detection plate group into the water for 20~24 hours, take out the leakage point where there is no water on the glue surface, and fill the leakage point when there is a leak point of water, and place it horizontally for 20~24 hours;
★将探测板组侵入水 120〜150小时， 取出观察胶合面有无水的 渗漏点， 如发现有水的渗漏点时对渗漏点进行补胶， 水平放 置 20〜24小时。  ★Inject the detection plate into the water for 120~150 hours. Take out the leaking point where there is no water on the glue surface. If there is any leak point of water, fill the leak point and place it horizontally for 20~24 hours.
4、 保证胶合区域牢固无泄漏， 提高产品合格率 4. Ensure that the glued area is firm and leak-free, and improve product yield.
为了保证胶合区域在后续加工过程中与外界隔离，保证胶合质量， 提高产品合格率我们采用了分步胶合措施：  In order to ensure that the gluing area is isolated from the outside during the subsequent processing, to ensure the quality of the gluing and to improve the product qualification rate, we have adopted a step-by-step gluing measure:
★用双组合环氧树脂胶装在双管胶抢上， 安装混胶头胶合； ★ Use double-layer epoxy resin glue to mount on double-tube glue, and install rubber mixing head;
★均匀连续胶合镀膜探侧基准板四周边， 胶体宽度、 高度控制 到 1. 5〜3mm， 水平放置 20〜24小时； ★ Uniform continuous gluing coating on the side of the reference plate, the width and height of the colloid are controlled to 1. 5~3mm, horizontally placed for 20~24 hours;
★检查环氧树脂胶沿镀膜探测基准板下镀膜面与基准板保护玻 璃之间的间隙侵入量为 1〜3匪； 对侵入量小于 1mm重新进行 胶合，对侵入量大于 3mm，要将探测板组放到洁净的容器中用 除胶剂去除胶体， 转入步聚②； 女用防静电光学玻璃擦拭布蘸上酒精擦干净胶合处， 混胶头对 准探测板组胶合处， 搬动胶抢沿胶合四周边连续均匀涂补胶， 胶体宽度、 高度控制到 2. 5〜3. 5mm， 水平放置 20〜24小时； ★混胶头对准探测板组胶合处， 搬动胶抢沿胶合 4周边连续均 匀涂补胶， 胶体宽度、 高度控制到 4〜5mm， 水平放置 24〜26 小时， 获得加固探测板胶合组。 ★Check the gap between the coating surface of the epoxy resin glue along the coating detection reference plate and the reference plate protection glass to 1~3匪; re-bond the intrusion amount less than 1mm, and the intrusion amount is greater than 3mm, the detection board should be The group is placed in a clean container to remove the colloid with a degumming agent, and transferred to step 2; Women's anti-static optical glass wiping cloth 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 酒精 女 女 女~3. 5mm, horizontally placed for 20~24 hours; ★The rubber mixing head is aligned with the glue part of the detection board group, and the moving glue is continuously applied evenly along the periphery of the glue 4. The width and height of the glue are controlled to 4~5mm, horizontally placed. 24 to 26 hours, obtain a reinforced probe board glued group.
图 1 是本发明探测板组夹具的主视图， 图 2是本发明探测板组 夹具的俯视图， 如图所示， 一种用于光刻机的探测板组胶合夹具， 包 括基准板 5， 该基准板 5的相邻两边分别设有基准靠边 1， 基准板 5 的另两边外侧分别设有弹性压块 4， 在基准靠边 1的内侧上部设有上 档块 2， 弹性压块 4呈~1形。 弹性压块的下部用于压紧基准板保护 玻璃 6， 弹性压块的上部用于压紧镀膜探测基准板 7。  1 is a front view of a probe plate assembly fixture of the present invention, and FIG. 2 is a top view of the probe plate assembly fixture of the present invention. As shown, a probe plate assembly glue fixture for a lithography machine includes a reference plate 5, The adjacent sides of the reference plate 5 are respectively provided with a reference abutment 1 , and the other two sides of the reference plate 5 are respectively provided with an elastic pressing block 4 , and an upper block 2 is provided at an inner upper portion of the reference abutting edge 1 , and the elastic pressing block 4 is formed as ~1 shape. The lower part of the elastic clamp is used to press the reference plate to protect the glass. The upper part of the elastic block is used to press the coating detection reference plate 7.

Claims

权 利 要 求 书 Claims
1、 一种用于分步投影光刻机的探测板组的胶合方法， 其特征在 于， 该方法包括下列步骤：  A method of gluing a detection plate set for a step-and-step projection lithography machine, the method comprising the steps of:
①建立超净工作室和超净工作台，室内温度为 20〜26°C±0.1°C， 湿度为 50〜70%标准大气压下超净工作台上进行探测板保护膜和探测 板组的胶合工作；  1 Establish ultra-clean studio and ultra-clean workbench, indoor temperature is 20~26°C±0.1°C, humidity is 50~70%, standard atmosphere pressure is used on the ultra-clean workbench to detect the protective film and the detection plate set. jobs;
②在超净工作台，工作人员带上防静电手套和口罩， 用防静电光 学玻璃擦拭布蘸上酒精对基准板保护玻璃 （6) 进行擦拭， 在擦拭过 程中把镀膜探侧基准板 （7) 和基准板保护玻璃 （6) 放在 lOOw的灯 光下仔细观看表面灰尘，直到无人眼可见灰尘，把镀膜探侧基准板（7) 和擦拭好的基准板保护玻璃 （6) 放在玻璃器皿中， 防止再次污染； 2 In the ultra-clean workbench, the staff wear anti-static gloves and a mask, wipe the cloth with the anti-static optical glass, rub the alcohol against the reference plate protection glass (6), and apply the coating side reference plate during the wiping process. ) and the reference plate protection glass (6). Under the lOOw light, carefully watch the surface dust until no dust is visible to the eye. Place the coating side reference plate (7) and the wiped reference plate protection glass (6) on the glass. In the vessel, to prevent re-contamination;
③从所述的玻璃器皿中取出镀膜探侧基准板 （7) 水平放到工作 台面上， 镀膜探侧基准板（7) 的镀膜面向上， 将保护膜（8)贴到镀 膜探侧基准板（7) 的镀膜面上， 眼睛观察， 如没有气泡， 则为合格， 如有气泡， 则重新再贴， 直到合格为止； 用刀片按照镀膜探侧基准板3 Remove the coated side reference plate (7) from the glassware and place it on the work surface horizontally. The coating side of the coated side reference plate (7) is facing up, and the protective film (8) is attached to the coated side reference plate. (7) on the coated surface, if observed by eyes, if there is no air bubble, it is qualified. If there is air bubble, re-stick it until it is qualified; use the blade according to the coating side reference plate
(7) 的尺寸大小切去多余保护膜； (7) size and size to remove excess protective film;
④从玻璃器皿中取出基准板保护玻璃 （6) 水平放到探测板胶合 夹具的基准板（5)上， 使基准板保护玻璃（6) 的两侧侧边紧靠探测 板组胶合夹具的两个侧基准边 （1)， 基准板保护玻璃 （6) 的另外两 侧侧边用弹性压块 （4) 压紧；  4 Remove the reference plate protective glass (6) from the glassware. Place it horizontally on the reference plate (5) of the probe plate gluing fixture, so that the sides of the reference plate protection glass (6) are close to the two of the detection plate set gluing fixtures. One side reference edge (1), the other side sides of the reference plate protection glass (6) are pressed by the elastic pressing block (4);
⑤将步聚③中贴好保护膜的镀膜探测基准板 （7) 水平放到基准 板保护玻璃 （6) 的中间位置， 使贴有保护膜的一面向下； 镀膜探测 基准板 （7) 的两侧边紧靠探测板组胶合夹具的上档块 （2)， 镀膜探 测基准板 （7) 的另外两侧边用弹性压块 （4) 压紧；  5 Place the coating detection reference plate (7) with the protective film attached in step 3 horizontally to the middle of the reference plate protective glass (6) so that the side with the protective film attached downward; the coating detection reference plate (7) The two sides are abutted against the upper block (2) of the gluing fixture of the detecting plate group, and the other two sides of the coating detecting reference plate (7) are pressed by the elastic pressing block (4);
⑥在镀膜探测基准板 （7) 上方水平放置配重块 （3)， 均匀施加 5〜8kg重力， 用双组合环氧树脂胶对鍍膜探测基准板 （7) 与基准板 保护玻璃 （6) 接触的四周边进行胶合处理， 使胶体的宽度和高度控 制在 1.5〜3讓之间， 持续放置 20〜24小时， 形成探测板组。 2、 根据权利要求 1所述的用于分步投影光刻机的探测板组的胶 合方法， 其特征在于， 所述的胶合处理是将双组合环氧树脂胶装在双 管胶抢上， 打开胶筒出口保护盖， 在胶筒出口安装混胶头， 搬动双管 胶抢沿所述的四周边连续均匀涂胶， 混胶头流出胶量 2〜3g。 6 Place the weight (3) horizontally above the coating detection reference plate (7), apply 5~8kg of gravity evenly, and contact the coating detection reference plate (7) with the reference plate protection glass (6) with double combination epoxy resin glue. The four periphery is glued, so that the width and height of the colloid are controlled between 1.5 and 3, and the mixture is continuously placed for 20 to 24 hours to form a detection plate group. 2. The gluing method for a probe plate set for a step-and-step projection lithography machine according to claim 1, wherein the gluing process is to mount a double-combined epoxy resin glue on a double-tube adhesive. Open the rubber tube outlet protection cover, install the rubber mixing head at the rubber tube outlet, and move the double tube rubber to continuously and evenly apply glue along the four circumferences. The mixing rubber head discharges the glue amount 2~3g.
3、 根据权利要求 1或 2所述的用于分步投影光刻机的探测板组 的胶合方法， 其特征在于， 该方法还包括步骤：  3. The method of bonding a probe plate assembly for a step-and-step projection lithography machine according to claim 1 or 2, wherein the method further comprises the steps of:
⑦取下配重块 （3 )， 检査环氧树脂胶沿镀膜探测基准板 （7 ) 下 镀膜面间隙侵入量为 1〜3醒； 对侵入量小于 1mm是进行补胶； 对侵 入量大于 3mm， 进行去除处理后， 返回到步骤②；  7 Remove the weight (3) and check that the intrusion of the epoxy resin glue along the coating detection reference plate (7) is 1~3; the intrusion is less than 1mm; the intrusion is greater than 3mm, after the removal process, return to step 2;
⑧将探测板组侵入水中检査胶合漏水情况，如胶合面有水的渗漏 点， 对渗漏点再次进行胶合处理；  8 Investigate the detection plate group into the water to check the glue leakage, such as the water leakage point on the glue surface, and glue the leakage point again;
⑨探测板组补充胶合  9 detection plate group added glue
用防静电光学玻璃擦拭布蘸上酒精擦干净胶合处，混胶头对准探 测板组胶合处， 搬动双管胶抢沿胶合四周边连续均匀涂补胶， 胶体的 宽度和高度控制在 2. 5〜3. 5醒之间， 水平放置 20〜24小时；  Wipe the cloth with an anti-static optical glass cloth, rub the glue on the glue, and mix the rubber head to the glue of the detection plate group. Move the double-tube glue to continuously apply the glue along the periphery of the glue. The width and height of the glue are controlled at 2. 5~3. 5 awake between, horizontally placed for 20~24 hours;
⑩探测板组加固胶合  10 detection board group reinforcement bonding
混胶头对准探测板组胶合处，搬动双管胶抢沿胶合四周边连续均 匀涂补胶， 使胶体的宽度和高度控制在 4〜5mra之间， 水平放置 24〜 26小时， 获得加固探测板组；  The rubber mixing head is aligned with the glue of the detecting plate group, and the double-tube glue is continuously glued along the periphery of the glued four, so that the width and height of the colloid are controlled between 4 and 5 mra, and horizontally placed for 24 to 26 hours to obtain reinforcement. Probe board set;
(11)用三坐标测量仪测量步骤⑩加固探测板组的上下面平行度、面 形是否符合规定；  (11) Using the coordinate measuring device of the coordinate measuring device, step 10 strengthens the upper and lower parallelism and the shape of the detecting plate group to meet the requirements;
(12)对符合规定的加固探侧板组进行包装，然后放在恒温箱内五天 以上， 使其完全固化后待用。  (12) Pack the reinforced reinforced side panel group that meets the requirements, and then put it in the incubator for more than five days, so that it is fully cured and ready for use.
4、 根据权利要求 3所述的用于分步投影光刻机的探测板组的胶 合方法， 其特征在于， 所述的将探测板组侵入水中检査胶合漏水情况 具体是：  4. The method of bonding a detection plate set for a step-and-step projection lithography machine according to claim 3, wherein said injecting the detection plate group into the water to check for glue leakage is specifically:
将探测板组侵入水 1分钟， 取出观察胶合面有无水的渗漏点， 如 发现有水的渗漏点时， 对渗漏点再次进行胶合处理； 将探测板组侵入水 10分钟， 取出观察胶合面有无水的渗漏点， 如发现有水的渗漏点时， 对渗漏点再次进行胶合处理； The detector plate group is intruded into the water for 1 minute, and the leakage point where there is no water on the cemented surface is taken out. If the water leakage point is found, the leakage point is again glued; The detector plate group is intruded into the water for 10 minutes, and the leakage point on the glue surface is observed to be removed. If the water leakage point is found, the leakage point is again glued;
将探测板组侵入水 1小时， 取出观察胶合面有无水的渗漏点， 如 发现有水的渗漏点时， 对渗漏点再次进行胶合处理；  The detector plate group is intruded into the water for 1 hour, and the leakage point on the glue surface is observed to be removed. If the water leakage point is found, the leakage point is again glued;
将探测板组侵入水 3小时， 取出观察胶合面有无水的渗漏点， 如 发现有水的渗漏点时， 对渗漏点再次进行胶合处理；  The detector plate group is intruded into the water for 3 hours, and the leakage point where there is no water on the cemented surface is taken out. If the water leakage point is found, the leakage point is again glued;
将探测板组侵入水 10小时， 取出观察胶合面有无水的渗漏点， 如发现有水的渗漏点时， 对渗漏点再次进行胶合处理；  The detection plate group is intruded into the water for 10 hours, and the leakage point of the glue surface is observed to be removed. If the water leakage point is found, the leakage point is again glued;
将探测板组侵入水 20〜24小时， 取出观察胶合面有无水的渗漏 点， 如发现有水的渗漏点时， 对渗漏点再次进行胶合处理；  The detector plate group is intruded into the water for 20 to 24 hours, and the leakage point where there is no water on the cemented surface is taken out. If the water leakage point is found, the leakage point is again glued;
将探测板组侵入水 120〜150小时， 取出观察胶合面有无水的渗 漏点， 如发现有水的渗漏点时， 对渗漏点再次进行胶合处理。  The detector plate group is intruded into the water for 120 to 150 hours, and the leakage point of the glue surface is observed to be removed. If the water leakage point is found, the leakage point is again glued.
5、 根据权利要求 3所述的用于分步投影光刻机的探测板组的胶 合方法， 其特征在于， 所述的加固探测板组的上下面平行度、 面形标 准要求为： 面形优于 0. 003mm， 上下面平行度小于 0. 006mm。  The method for bonding a detection plate set for a step-and-step projection lithography machine according to claim 3, wherein the upper and lower parallelism and surface standard requirements of the reinforced detection plate group are: 006毫米。 The upper and lower parallelism is less than 0. 006mm.
6、 根据权利要求 3所述的探测板组的胶合方法， 其特征在于所 述的胶合后探测板胶合组的胶合面的水污染区域小于 2mm。  6. The method of gluing a probe plate assembly according to claim 3, wherein the glued surface of the glued probe plate assembly has a water contamination area of less than 2 mm.
7、 一种用于光刻机的探测板组胶合夹具， 其特征在于， 该夹具 包括基准板（5 )， 该基准板（5 ) 的相邻两边分别设有基准靠边（1 )， 基准板 （5 ) 的另两边外侧分别设有弹性压块 （4)， 在基准靠边 （1 ) 的内侧上部设有上档块 （2 )。  7. A detecting plate assembly bonding jig for a lithography machine, characterized in that the jig comprises a reference plate (5), and adjacent sides of the reference plate (5) are respectively provided with a reference edge (1), a reference plate (5) The outer side of the other two sides is provided with an elastic pressing block (4), and the upper side of the reference abutting side (1) is provided with an upper block (2).
8、 根据权利要求 7所述的用于光刻机的探测板组胶合夹具， 其 特征在于， 所述的弹性压块 （4 ) 呈 ~"1形。  The detecting plate assembly bonding jig for a lithography machine according to claim 7, wherein the elastic pressing block (4) has a shape of "1".
PCT/CN2013/000808 2012-12-11 2013-07-01 Method and clamp for gluing detection board assembly WO2014089895A1 (en)

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