CN202948247U - Detection plate group gluing fixture for photoetching machine - Google Patents
Detection plate group gluing fixture for photoetching machine Download PDFInfo
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- CN202948247U CN202948247U CN 201220678987 CN201220678987U CN202948247U CN 202948247 U CN202948247 U CN 202948247U CN 201220678987 CN201220678987 CN 201220678987 CN 201220678987 U CN201220678987 U CN 201220678987U CN 202948247 U CN202948247 U CN 202948247U
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Abstract
The utility model discloses a detection plate group gluing fixture for a photoetching machine. The detection plate group gluing fixture is characterized by comprising a reference plate, wherein the two adjacent edges of the reference plate are respectively provided with a reference leaning edge; the outer sides of the other two edges of the reference plate are respectively provided with an elastic pressing block; and the upper parts of the inner sides of the reference leaning edges are provided with upper baffle blocks. The utility model also provides a gluing method of a detection plate group of the step-projection photoetching machine. The gluing method comprises the following steps of: (1) establishing an ultra-clean working room and an ultra-clean working table; (2) wiping reference plate protection glass meeting requirements on the ultra-clean working table by anti-static optical glass wiping cloth dipped with alcohol; (3) pasting a protective film on the surface of a plating film of a film plating detection reference plate; and (4) gluing the film plating detection reference plate pasted with the plating film and the protective glass reference plate into the waterproof detection plate group. According to the utility model, a film plating marking area can not be in contact with pollution sources during processing, so that the rejection rate is reduced, and the processed detection plate can meet the high-quality requirement of the step-projection photoetching machine.
Description
Technical field
The utility model relates to litho machine, a kind of cementing jig of the detecting plate group for substep projection mask aligner particularly, this detecting plate is mainly used in the position alignment of substep projection mask aligner snoop tag, and this directly has influence on silicon chip in substep projection mask aligner to position grating auto-alignment to achievement.
Background technology
After the filming process of present American-European countries detecting plate processing was arranged in part processing, the impact on part processing morpheme is polluted, glued together to detecting plate processing on the plated film marked region.The reference field face describes and easily reaches 0.003mm, and the top and bottom depth of parallelism is less than the requirement of 0.006mm.And the plate body of domestic processing detecting plate need to be purchased the standard plate body after external plated film, and process requires very high anti-pollution processing, makes processed finished products rate low-risk large, can not satisfy the requirement of 90nm litho machine far away.
The utility model content
The purpose of this utility model is to provide a kind of gluing method and fixture of the detecting plate group for substep projection mask aligner; plated film marked region reference field is carried out anti-pollution gummed protection; processing datum face shape is better than 0.003mm; the top and bottom depth of parallelism makes it to meet litho machine to position grating auto-alignment requirement less than 0.006mm.
Technical solution of the present utility model is as follows:
A kind of gluing method of the detecting plate group for substep projection mask aligner is characterized in that the method comprises the following steps:
1. set up ultra-clean operating room and superclean bench, indoor temperature is 20～26 ℃ ± 0.1 ℃, and humidity is that 50～70% normal atmospheres are depressed the gummed work of carrying out detecting plate diaphragm and drafting board group on superclean bench;
2. at superclean bench, the staff is with antistatic gloves and mouth mask, dip in upper alcohol with electrostatic prevention optical glass cleaning wiping cloth the datum plate cover glass is carried out wiping, in wiping process, plated film is visited under the light that side datum plate and datum plate cover glass be placed on 100w and carefully watched surface dirt, until without the visible dust of human eye, plated film spy side datum plate and the good datum plate cover glass of wiping are placed in glassware, prevent Re-pollution;
3. taking out the accurate plate level of plated film spy side group from described glassware is put on work top, the coated surface that plated film is visited the side datum plate makes progress, diaphragm is attached to plated film to be visited on the coated surface of side datum plate, eyes are observed, as there is no bubble, be qualified, if any bubble, again paste again, until qualified; The size of visiting the side datum plate according to plated film with blade cuts the redundant protection film;
4. taking out datum plate cover glass level from glassware is put on the datum plate of detecting plate cementing jig, make the both sides side of datum plate cover glass near two side reference edges of detecting plate group cementing jig, the other both sides side of datum plate cover glass compresses with elastic press;
5. will go on foot the plated film that Zou posts diaphragm in 3. and survey the centre position that the datum plate level is put into the datum plate cover glass, one of coated with protective film is faced down; Plated film is surveyed the dual-side of datum plate near the upper link stopper of detecting plate group cementing jig, and the other dual-side that plated film is surveyed datum plate compresses with elastic press;
6. survey the datum plate upper horizontal at plated film and place balancing weight; evenly apply 5～8kg gravity; with two combination epoxide-resin glues, plated film is surveyed datum plate and glue together processing with the surrounding that the datum plate cover glass contacts; make the width of colloid and highly be controlled between 1.5～3mm; continue to place 20～24 hours, form the detecting plate group.
Described gummed process be with two associative ring epoxy resins mucilage bindings on double-tube glue is robbed, open packing element outlet over cap, in the packing element outlet, mixed glue head is installed, move double-tube glue and rob along described surrounding continuous uniform gluing, mixed glue head stream gel quantity 2～3g.
The method also comprises step:
7. take off balancing weight, check that epoxide-resin glue is 1～3mm along coated surface gap intrusion amount under plated film detection datum plate; To mend glue to the intrusion amount less than 1mm; 2. the intrusion amount greater than 3mm, after carrying out Transformatin, is turned back to step;
8. glue together with checking in detecting plate group invasion water the situation of leaking, the breakthrough of water is arranged as cemented surface, breakthrough is glued together processing again;
9. the detecting plate group is replenished gummed
Dip in upper wipes of alcohol totally gummed place with electrostatic prevention optical glass cleaning wiping cloth, mixed glue head aligning detecting plate group gummed place, move double-tube glue and rob along gummed surrounding continuous uniform and be coated with benefit glue, the width of colloid and highly be controlled between 2.5～3.5mm horizontal positioned 20～24 hours;
10. the detecting plate group is reinforced gummed
Mixed glue head is aimed at detecting plate group gummed place, moves double-tube glue and robs along gummed surrounding continuous uniform and be coated with benefit glue, makes the width of colloid and highly is controlled between 4～5mm, and horizontal positioned 24～26 hours obtains to reinforce the detecting plate group;
⑾ whether the top and bottom depth of parallelism, the face shape that reinforce the detecting plate group with the three-coordinates measuring machine measuring process 10. be up to specification;
⑿ pack reinforcing detecting plate group up to specification, then is placed on constant temperature oven interior more than five days, it solidified fully rear stand-by.
Describedly will be in detecting plate group invasion water check that gummed leak situation specifically:
With detecting plate group invasion water 1 minute, take out and observe cemented surface anhydrous breakthrough is arranged, when finding the breakthrough of water is arranged, breakthrough is glued together processing again;
With detecting plate group invasion water 10 minutes, take out and observe cemented surface anhydrous breakthrough is arranged, when finding the breakthrough of water is arranged, breakthrough is glued together processing again;
With detecting plate group invasion water 1 hour, take out and observe cemented surface anhydrous breakthrough is arranged, when finding the breakthrough of water is arranged, breakthrough is glued together processing again;
With detecting plate group invasion water 3 hours, take out and observe cemented surface anhydrous breakthrough is arranged, when finding the breakthrough of water is arranged, breakthrough is glued together processing again;
With detecting plate group invasion water 10 hours, take out and observe cemented surface anhydrous breakthrough is arranged, when finding the breakthrough of water is arranged, breakthrough is glued together processing again;
With detecting plate group invasion water 20～24 hours, take out and observe cemented surface anhydrous breakthrough is arranged, when finding the breakthrough of water is arranged, breakthrough is glued together processing again;
With detecting plate group invasion water 120～150 hours, take out and observe cemented surface anhydrous breakthrough is arranged, when finding the breakthrough of water is arranged, breakthrough is glued together processing again.
The top and bottom depth of parallelism of described reinforcing detecting plate group, face shape standard-required are: face shape is better than 0.003mm, and the top and bottom depth of parallelism is less than 0.006mm.
After described gummed, the water Polluted area of the cemented surface of detecting plate gummed group is less than 2mm.
A kind of detecting plate group cementing jig for litho machine, it is characterized in that, this fixture comprises datum plate, and the adjacent both sides of this datum plate are respectively equipped with benchmark and keep to the side, the outside, another both sides of datum plate is respectively equipped with elastic press, is provided with link stopper in the inside upper part that benchmark keeps to the side.
Described elastic press is ┐ shape.
Compared with prior art, the beneficial effects of the utility model are:
The general film protected mode that adopts of common detecting plate processing; plated film is surveyed the protection of datum plate plated film and is relied on adhesion of thin film to prevent from polluting fully; the edge-protected zone of plated film is little, is difficult to guarantee the pollution isolation at plated film edge, directly affects passing rate of processing.
1, the utility model has solved following problem:
★ has isolated plated film by gummed and has surveyed datum plate plated film marked region, has guaranteed that the plated film marked region does not reach pollution source in process;
★ meets the requirements the diffusion area of glue under the prerequisite that ensures enough gummed power;
★ makes the pollution-free or inclusion-free of detecting plate cemented surface as far as possible;
★ reduces production costs and has improved product percent of pass, meets the high-quality requirement.
2, through the detecting plate group of the utility model method gummed, can guarantee that the detecting plate group of gluing together meets steppers fully to position grating auto-alignment requirement.
Description of drawings
Fig. 1 is the front view of the utility model detecting plate group fixture.
Fig. 2 is the vertical view of the utility model detecting plate group fixture.
Fig. 3 detecting plate group front view.
In figure: 1-side reference edge, the upper link stopper of 2-, 3-balancing weight, 4-elastic press, 5-datum plate, 6-datum plate cover glass, 7-plated film are surveyed datum plate, 8-diaphragm.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples, but should not limit protection domain of the present utility model with this.
In order to prevent gluing together residing worker-house temperature and humidity to the solution of the impact of gummed
In clean room, temperature is 20～26 ℃ ± 0.1 ℃, and humidity is 50～70%, and normal atmosphere is depressed and carried out;
1, as much as possible make plated film survey the datum plate coated surface and the datum plate cover glass is pollution-free or inclusion-free;
Solution
Wiping need to be opened plated film detection datum plate in the clean bench in toilet more than at least ten thousand grades; be with antistatic gloves and mouth mask; plated film is surveyed under the light that datum plate and datum plate cover glass be placed on 100w carefully watched surface dirt; until be difficult to find out dust; diaphragm is attached to plated film surveys on the coated surface of datum plate and the plated film that posts film is surveyed datum plate and be placed in specific glassware, prevent Re-pollution.
2, guarantee the form and position tolerance precision of gummed process detecting plate group
Datum plate cover glass level is put on datum plate 5, and dual-side is near two side reference edges 1, and compresses with elastic press 4; The plated film that posts diaphragm is visited side datum plate 7 levels be put on datum plate cover glass 6, diaphragm faces down; Datum plate cover glass 6 sides compress with elastic press simultaneously near two upper link stoppers 2; Visit planar horizontal placement balancing weight on the side datum plate at plated film, evenly apply 5～8kg gravity, with two combination epoxide-resin glues, coated surface surrounding and datum plate cover glass contact edge under plated film spy side datum plate are carried out gluing together around the location.The top and bottom depth of parallelism that adds detecting plate gummed group with the three-coordinates measuring machine measurement.The measurement depth of parallelism, face pictograph close designing requirement.
3, guarantee that gummed is regional firmly without leaking, guarantee the qualification rate of product processing
The detecting plate group is glued together, and the colloid width, highly controls to 1.5～3mm, and horizontal positioned is carried out following measures successively after 20～24 hours:
★ is detecting plate group invasion water 1 minute, takes out to observe cemented surface anhydrous breakthrough is arranged, and breakthrough mended glue, horizontal positioned 20～24 hours when finding to have the breakthrough of water;
★ is detecting plate group invasion water 10 minutes, takes out to observe cemented surface anhydrous breakthrough is arranged, and breakthrough mended glue, horizontal positioned 20～24 hours when finding to have the breakthrough of water;
★ is detecting plate group invasion water 1 hour, takes out to observe cemented surface anhydrous breakthrough is arranged, and breakthrough mended glue, horizontal positioned 20～24 hours when finding to have the breakthrough of water;
★ is detecting plate group invasion water 3 hours, takes out to observe cemented surface anhydrous breakthrough is arranged, and breakthrough mended glue, horizontal positioned 20～24 hours when finding to have the breakthrough of water;
★ is detecting plate group invasion water 10 hours, takes out to observe cemented surface anhydrous breakthrough is arranged, and breakthrough mended glue, horizontal positioned 20～24 hours when finding to have the breakthrough of water;
★ is detecting plate group invasion water 20～24 hours, takes out to observe cemented surface anhydrous breakthrough is arranged, and breakthrough mended glue, horizontal positioned 20～24 hours when finding to have the breakthrough of water;
★ is detecting plate group invasion water 120～150 hours, takes out to observe cemented surface anhydrous breakthrough is arranged, and breakthrough mended glue, horizontal positioned 20～24 hours when finding to have the breakthrough of water.
4, guarantee that gummed is regional firmly without leaking, improve product percent of pass
In order to guarantee that gummed zone is isolated from the outside in the following process process, guarantee bonding quality, we have adopted and have glued together step by step measure to improve product percent of pass:
★ on double-tube glue is robbed, installs mixed glue head gummed with two associative ring epoxy resins mucilage bindings;
The even progressive gluing plated film of ★ is visited side datum plate surrounding, the colloid width, highly controls to 1.5～3mm, horizontal positioned 20～24 hours;
★ checks that epoxide-resin glue is 1～3mm along the gap intrusion amount between coated surface and datum plate cover glass under plated film detection datum plate; The intrusion amount is re-started gummed less than 1mm,, the detecting plate group is put in clean container and remove colloid with adhesive remover greater than 3mm the intrusion amount, change step Zou over to 2.;
★ dips in upper wipes of alcohol totally gummed place with electrostatic prevention optical glass cleaning wiping cloth, and mixed glue head is aimed at detecting plate group gummed place, moves glue and robs along gummed surrounding continuous uniform and be coated with benefit glue, the colloid width, highly controls to 2.5～3.5mm, horizontal positioned 20～24 hours;
The mixed glue head of ★ is aimed at detecting plate group gummed place, moves glue and robs along gummed 4 peripheral continuous uniforms and be coated with benefit glue, the colloid width, highly controls to 4～5mm, and horizontal positioned 24～26 hours obtains to reinforce detecting plate gummed group.
Fig. 1 is the front view of the utility model detecting plate group fixture, Fig. 2 is the vertical view of the utility model detecting plate group fixture, as shown in the figure, a kind of detecting plate group cementing jig for litho machine, comprise datum plate 5, the adjacent both sides of this datum plate 5 are respectively equipped with benchmark and keep to the side 1, and the outside, another both sides of datum plate 5 is respectively equipped with elastic press 4, be provided with link stopper 2 in keep to the side 1 inside upper part of benchmark, elastic press 4 is ┐ shape.The bottom of elastic press is used for compressing datum plate cover glass 6, and the top of elastic press is used for compressing plated film and surveys datum plate 7.
Claims (2)
1. detecting plate group cementing jig that is used for litho machine, it is characterized in that, this fixture comprises datum plate (5), the adjacent both sides of this datum plate (5) are respectively equipped with benchmark keep to the side (1), the outside, another both sides of datum plate (5) is respectively equipped with elastic press (4), and the inside upper part of keep to the side at benchmark (1) is provided with upper link stopper (2).
2. the detecting plate group cementing jig for litho machine according to claim 2, is characterized in that, described elastic press (4) is ┐ shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220678987 CN202948247U (en) | 2012-12-11 | 2012-12-11 | Detection plate group gluing fixture for photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220678987 CN202948247U (en) | 2012-12-11 | 2012-12-11 | Detection plate group gluing fixture for photoetching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202948247U true CN202948247U (en) | 2013-05-22 |
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ID=48423942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220678987 Withdrawn - After Issue CN202948247U (en) | 2012-12-11 | 2012-12-11 | Detection plate group gluing fixture for photoetching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202948247U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102981374A (en) * | 2012-12-11 | 2013-03-20 | 上海现代先进超精密制造中心有限公司 | Detection plate group gluing method and clamp |
-
2012
- 2012-12-11 CN CN 201220678987 patent/CN202948247U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102981374A (en) * | 2012-12-11 | 2013-03-20 | 上海现代先进超精密制造中心有限公司 | Detection plate group gluing method and clamp |
| WO2014089895A1 (en) * | 2012-12-11 | 2014-06-19 | 上海现代先进超精密制造中心有限公司 | Method and clamp for gluing detection board assembly |
| CN102981374B (en) * | 2012-12-11 | 2014-08-20 | 上海现代先进超精密制造中心有限公司 | Detection plate group gluing method and clamp |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130522 Effective date of abandoning: 20140820 |
|
| RGAV | Abandon patent right to avoid regrant |