DE112011102835T8 - Wasserreaktives, Al-basiertes Verbundsmaterial, wasserreaktiver, Al-basierter,thermisch gespritzter Film, Verfahren für die Herstellung eines solchen Al-basierten, thermisch gespritzten Films und Bestandteil für eine Filmbildungskammer - Google Patents

Wasserreaktives, Al-basiertes Verbundsmaterial, wasserreaktiver, Al-basierter,thermisch gespritzter Film, Verfahren für die Herstellung eines solchen Al-basierten, thermisch gespritzten Films und Bestandteil für eine Filmbildungskammer Download PDF

Info

Publication number
DE112011102835T8
DE112011102835T8 DE112011102835T DE112011102835T DE112011102835T8 DE 112011102835 T8 DE112011102835 T8 DE 112011102835T8 DE 112011102835 T DE112011102835 T DE 112011102835T DE 112011102835 T DE112011102835 T DE 112011102835T DE 112011102835 T8 DE112011102835 T8 DE 112011102835T8
Authority
DE
Germany
Prior art keywords
reactive
water
film
thermally sprayed
sprayed film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112011102835T
Other languages
English (en)
Other versions
DE112011102835T5 (de
DE112011102835B4 (de
Inventor
Yutaka Kadowaki
Tomoko Saitou
Katsuhiko Mushiake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of DE112011102835T5 publication Critical patent/DE112011102835T5/de
Publication of DE112011102835T8 publication Critical patent/DE112011102835T8/de
Application granted granted Critical
Publication of DE112011102835B4 publication Critical patent/DE112011102835B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D1/00—Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
DE112011102835.0T 2010-08-27 2011-08-12 Wasserreaktives, Al-basiertes Verbundmaterial, wasserreaktiver, Al-basierter,thermisch gespritzter Film, Verfahren für die Herstellung eines solchen Al-basierten, thermisch gespritzten Films und Bestandteil für eine Filmbildungskammer Active DE112011102835B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010-191408 2010-08-27
JP2010191408 2010-08-27
PCT/JP2011/068443 WO2012026349A1 (ja) 2010-08-27 2011-08-12 水反応性Ａｌ複合材料、水反応性Ａｌ溶射膜、このＡｌ溶射膜の製造方法、及び成膜室用構成部材

Publications (3)

Publication Number Publication Date
DE112011102835T5 DE112011102835T5 (de) 2013-06-13
DE112011102835T8 true DE112011102835T8 (de) 2013-07-04
DE112011102835B4 DE112011102835B4 (de) 2015-02-12

Family

ID=45723352

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112011102835.0T Active DE112011102835B4 (de) 2010-08-27 2011-08-12 Wasserreaktives, Al-basiertes Verbundmaterial, wasserreaktiver, Al-basierter,thermisch gespritzter Film, Verfahren für die Herstellung eines solchen Al-basierten, thermisch gespritzten Films und Bestandteil für eine Filmbildungskammer

Country Status (9)

Country Link
US (1) US8945296B2 (de)
JP (1) JP5517371B2 (de)
KR (1) KR101502253B1 (de)
CN (1) CN103228814B (de)
DE (1) DE112011102835B4 (de)
MY (1) MY157422A (de)
SG (1) SG188239A1 (de)
TW (1) TWI473885B (de)
WO (1) WO2012026349A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2468116C2 (ru) * 2008-04-30 2012-11-27 Улвак, Инк. СПОСОБ ПОЛУЧЕНИЯ РЕАГИРУЮЩЕЙ С ВОДОЙ Al ПЛЕНКИ И СОСТАВЛЯЮЩИЙ ЭЛЕМЕНТ ПЛЕНКООБРАЗУЮЩЕЙ КАМЕРЫ
ITBA20130034A1 (it) * 2013-04-30 2014-10-31 Mrs S R L Metodo per la pulizia di superfici in apparati di deposizione di film sottili da fase vapore e per il recupero del materiale rimosso
JP5899387B1 (ja) * 2014-09-05 2016-04-06 株式会社アルバック 水反応性Ａｌ複合材料、水反応性Ａｌ合金溶射膜、このＡｌ合金溶射膜の製造方法、及び成膜室用構成部材
JP6418854B2 (ja) * 2014-09-05 2018-11-07 株式会社アルバック 水反応性Ａｌ合金溶射膜の製造方法
JP6726523B2 (ja) * 2016-05-10 2020-07-22 株式会社アルバック 水分検出素子製造方法、水崩壊性配線膜製造方法、水崩壊性薄膜製造方法、水分検出素子
CN106702319A (zh) * 2017-03-30 2017-05-24 京东方科技集团股份有限公司 一种蒸镀方法
CN109457206A (zh) * 2018-11-30 2019-03-12 沈阳工程学院 一种生物质锅炉受热面防护涂层的制备方法
CN109576648A (zh) * 2018-12-29 2019-04-05 福建华佳彩有限公司 一种防着板

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1112727A (ja) * 1997-06-26 1999-01-19 Sumitomo Chem Co Ltd アルミニウム合金単結晶ターゲット
JP2002161325A (ja) * 2000-11-20 2002-06-04 Ulvac Japan Ltd アルミニウム合金、水素ガス発生方法、水素ガス発生器及び発電機
JP4215965B2 (ja) * 2001-04-27 2009-01-28 エヌデーシー株式会社 軸受用アルミニウム基粉末焼結複合材料とその製造方法
JP4653406B2 (ja) 2004-03-10 2011-03-16 株式会社アルバック 水崩壊性Ａｌ複合材料、水崩壊性Ａｌ溶射膜、及び水崩壊性Ａｌ粉の製造方法、並びに成膜室用構成部材及び成膜材料の回収方法
US7393440B2 (en) * 2005-05-09 2008-07-01 National Research Council Of Canada Hydrogen generation system
MY152964A (en) * 2008-04-30 2014-12-15 Ulvac Inc Water-reactive al composite material for thermal spray, water-reactive thermally sprayed al film, process for the production of the thermally sprayed al film, and constituent member for film-forming chamber
CN102016099B (zh) * 2008-04-30 2012-10-10 株式会社爱发科 水反应性Al膜的制造方法及成膜室用构成部件
JP5481492B2 (ja) 2009-10-29 2014-04-23 株式会社アルバック 水反応性Ａｌ複合材料、水反応性Ａｌ膜、このＡｌ膜の製造方法、及び成膜室用構成部材

Also Published As

Publication number Publication date
DE112011102835T5 (de) 2013-06-13
KR101502253B1 (ko) 2015-03-12
WO2012026349A1 (ja) 2012-03-01
CN103228814A (zh) 2013-07-31
TWI473885B (zh) 2015-02-21
MY157422A (en) 2016-06-15
US8945296B2 (en) 2015-02-03
SG188239A1 (en) 2013-04-30
TW201224167A (en) 2012-06-16
DE112011102835B4 (de) 2015-02-12
JPWO2012026349A1 (ja) 2013-10-28
KR20130065698A (ko) 2013-06-19
CN103228814B (zh) 2015-04-01
JP5517371B2 (ja) 2014-06-11
US20130145961A1 (en) 2013-06-13

Similar Documents

Publication Publication Date Title
DE112011102835T8 (de) Wasserreaktives, Al-basiertes Verbundsmaterial, wasserreaktiver, Al-basierter,thermisch gespritzter Film, Verfahren für die Herstellung eines solchen Al-basierten, thermisch gespritzten Films und Bestandteil für eine Filmbildungskammer
SG11201408656WA (en) Powder coating composition, process for producing cured film and coated article
EP2781567B8 (de) Bewuchshemmende beschichtungszusammensetzung, bewuchshemmender beschichtungsfilm, bewuchshemmendes basismaterial und verfahren zur herstellung eines bewuchshemmenden basismaterials
EP2407521A4 (de) Beschichtungszusammensetzung, beschichtungsfilm, laminat und verfahren zur herstellung des laminats
EP2236283A4 (de) Glieder mit einem korrosionsbeständigen beschichtungsfilm, verfahren zu dessen herstellung und beschichtungszusammensetzung für dessen herstellung
SG11201508319QA (en) Antifouling coating composition, antifouling coating film, antifouling substrate, and method for producing antifouling substrate
EP2857464A4 (de) Wässrige beschichtungszusammensetzung, verfahren zur herstellung einer mehrlagigen beschichtungsfolie und artikel mit mehrlagiger beschichtungsfolie
SE0801909L (sv) Sätt att framställa föremål innehållande nanometall eller kompositmetall
EG26585A (en) His way to install the film and the resulting product
EP2816047A4 (de) Fluorhaltige etherverbindung, fluorhaltige etherzusammensetzung und beschichtungsflüssigkeit sowie substrat mit oberflächenbehandelter schicht und verfahren zur herstellung des besagten substrats
BRPI0817752A2 (pt) método de formação de produtos compósitos através de pressão, produtos relacionados e aparelho
SG11201500155XA (en) Polyester resin for antifouling coating material, method for producing same, antifouling coating material composition, antifouling coating film, and antifouling base
EP2816046A4 (de) Fluorhaltige etherverbindung, fluorhaltige etherzusammensetzung und beschichtungsflüssigkeit sowie substrat mit oberflächenbehandelter schicht und verfahren zur herstellung des besagten substrats
EP2679644A4 (de) Beschichtungszusammensetzung zur formung einer gasbarriereschicht, gasbarrierefilm und verfahren zur herstellung des gasbarrierefilms
PL2594614T3 (pl) Przeciwodblaskowa i przeciwoślepieniowa kompozycja powlekająca, folia przeciwodblaskowa i przeciwoślepieniowa oraz sposób ich wytwarzania
BR112014001620A2 (pt) composição de revestimento, película fina anti-impressão digital, e produto eletrônico
EP2832807A4 (de) Unterschichtfilmbildende zusammensetzung für selbstaufbauende filme
EP2816045A4 (de) Fluorhaltige etherverbindung, fluorhaltige etherzusammensetzung und beschichtungsflüssigkeit sowie substrat mit oberflächenbehandelter schicht und verfahren zur herstellung des besagten substrats
EP2677004A4 (de) Llchthärtbare filmbildende zusammensetzung und verfahren zur herstellung eines gehärteten films
EP2703465A4 (de) Zusammensetzung aus einem wasserabweisenden und einem ölabweisenden mittel, herstellungsverfahren dafür und artikel daraus
EP2792665A4 (de) Wasserabweisende verbindung, wasserabweisendes polymer, härtbare zusammensetzung, beschichtungszusammensetzung, artikel mit einem gehärteten film, artikel mit einem muster mit einer lyophilen und einer wasserabweisenden region sowie herstellungsverfahren dafür
WO2011103479A3 (en) Polylactide hydrosol and articles made therefrom
WO2012175431A3 (de) Herstellung von folien mit flexiblen barrierebeschichtungen enthaltend schichtsilicate
EP2940025A4 (de) Aluminiumverbindung, dünnschichtbildendes rohmaterial und verfahren zur herstellung einer dünnschicht
PT3000857T (pt) Composição de pintura anti-incrustação, película de pintura anti-incrustação, substrato que tem uma película de pintura anti-incrustação e método de produção para o referido substrato

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R018 Grant decision by examination section/examining division
R020 Patent grant now final