DE112005001928T5 - Selbstreinigender unterer Kontakt - Google Patents

Selbstreinigender unterer Kontakt Download PDF

Info

Publication number
DE112005001928T5
DE112005001928T5 DE112005001928T DE112005001928T DE112005001928T5 DE 112005001928 T5 DE112005001928 T5 DE 112005001928T5 DE 112005001928 T DE112005001928 T DE 112005001928T DE 112005001928 T DE112005001928 T DE 112005001928T DE 112005001928 T5 DE112005001928 T5 DE 112005001928T5
Authority
DE
Germany
Prior art keywords
contact
contact element
housing
component
extendable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112005001928T
Other languages
German (de)
English (en)
Inventor
Douglas J. Beaverton Garcia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electro Scientific Industries Inc
Original Assignee
Electro Scientific Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scientific Industries Inc filed Critical Electro Scientific Industries Inc
Publication of DE112005001928T5 publication Critical patent/DE112005001928T5/de
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • B07C5/344Sorting according to other particular properties according to electric or electromagnetic properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06705Apparatus for holding or moving single probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
DE112005001928T 2004-08-09 2005-08-08 Selbstreinigender unterer Kontakt Withdrawn DE112005001928T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/916,063 US7402994B2 (en) 2004-08-09 2004-08-09 Self-cleaning lower contact
US10/916,063 2004-08-09
PCT/US2005/028160 WO2006020578A2 (en) 2004-08-09 2005-08-08 Self-cleaning lower contact

Publications (1)

Publication Number Publication Date
DE112005001928T5 true DE112005001928T5 (de) 2007-07-12

Family

ID=35756796

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112005001928T Withdrawn DE112005001928T5 (de) 2004-08-09 2005-08-08 Selbstreinigender unterer Kontakt

Country Status (9)

Country Link
US (2) US7402994B2 (https=)
JP (1) JP5393029B2 (https=)
KR (1) KR101176776B1 (https=)
CN (1) CN101023528B (https=)
DE (1) DE112005001928T5 (https=)
GB (1) GB2431057B (https=)
SG (1) SG155199A1 (https=)
TW (1) TWI358330B (https=)
WO (1) WO2006020578A2 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7905471B2 (en) * 2004-11-22 2011-03-15 Electro Scientific Industries, Inc. Vacuum ring designs for electrical contacting improvement
US7819235B2 (en) * 2007-01-29 2010-10-26 Electro Scientific Industries, Inc. Venturi vacuum generator on an electric component handler
KR101451499B1 (ko) * 2013-02-07 2014-10-17 삼성전기주식회사 전자부품 검사장치
CN104880658B (zh) * 2013-07-23 2018-09-07 苏州固锝电子股份有限公司 用于加速度传感器的测试装置
KR101871698B1 (ko) * 2014-06-04 2018-06-27 가부시키가이샤 무라타 세이사쿠쇼 반송 장치
DE202014105151U1 (de) * 2014-10-28 2016-01-29 Ptr Messtechnik Gmbh & Co. Kommanditgesellschaft Federkontaktvorrichtung
JP6459882B2 (ja) * 2015-10-06 2019-01-30 株式会社村田製作所 通電装置
JP7107589B2 (ja) 2020-08-28 2022-07-27 株式会社ヒューモラボラトリー チップ電子部品検査用のローラ電極接触子を備えた装置
TWI805218B (zh) * 2022-02-10 2023-06-11 萬潤科技股份有限公司 電子零件測試裝置及其測試板構造、測試板製造方法
TWI800405B (zh) * 2022-06-14 2023-04-21 國巨股份有限公司 測試探針與測試探針固定裝置
JP2026000255A (ja) 2024-06-17 2026-01-05 株式会社村田製作所 測定装置

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3340727A (en) * 1962-03-30 1967-09-12 Emedio M Bracalente Ablation probe
US3915850A (en) * 1973-11-14 1975-10-28 Gti Corp Component handler and method and apparatus utilizing same
JPS6242377Y2 (https=) * 1980-12-27 1987-10-30
US4574236A (en) * 1983-10-27 1986-03-04 At&T Technologies, Inc. High frequency test fixture
DE3604717A1 (de) * 1986-02-14 1987-08-27 Nixdorf Computer Ag Kontaktstiftanordnung
EP0256541A3 (de) * 1986-08-19 1990-03-14 Feinmetall Gesellschaft mit beschrÀ¤nkter Haftung Kontaktiervorrichtung
US5034749A (en) * 1988-10-06 1991-07-23 Electro Scientific Industries, Inc. Sliding contact test apparatus
EP0418454A3 (en) 1989-09-21 1992-11-04 Electro Scientific Industries, Inc. Sliding contact test apparatus
US5172473A (en) * 1990-05-07 1992-12-22 International Business Machines Corporation Method of making cone electrical contact
US5118299A (en) * 1990-05-07 1992-06-02 International Business Machines Corporation Cone electrical contact
US5936421A (en) * 1994-10-11 1999-08-10 Virginia Panel Corporation Coaxial double-headed spring contact probe assembly and coaxial surface contact for engagement therewith
US5842579A (en) * 1995-11-16 1998-12-01 Electro Scientific Industries, Inc. Electrical circuit component handler
DE19718637A1 (de) * 1997-05-02 1998-11-05 Atg Test Systems Gmbh Vorrichtung und Verfahren zum Prüfen von Leiterplatten
US5764072A (en) * 1996-12-20 1998-06-09 Probe Technology Dual contact probe assembly for testing integrated circuits
US6118289A (en) * 1997-03-10 2000-09-12 Canon Kabushiki Kaisha Cleaning method and cleaning device and cleaning tool for board electrical-test probes, and board electrical-test device and method
TW377482B (en) * 1997-04-08 1999-12-21 Tokyo Electron Ltd Cleaner with protuberances for inspection, inspection apparatus and inspection method for integrated circuits
US6040705A (en) 1997-08-20 2000-03-21 Electro Scientific Industries, Inc. Rolling electrical contactor
JP3557887B2 (ja) * 1998-01-14 2004-08-25 日立ハイテク電子エンジニアリング株式会社 Icデバイスのコンタクト装置
JP2000338156A (ja) * 1999-05-31 2000-12-08 Nitto Kogyo Co Ltd チップの測定端子
JP2003014779A (ja) 2001-07-02 2003-01-15 Nhk Spring Co Ltd 導電性接触子
US6714028B2 (en) * 2001-11-14 2004-03-30 Electro Scientific Industries, Inc. Roller contact with conductive brushes
US6710611B2 (en) 2002-04-19 2004-03-23 Ceramic Component Technologies, Inc. Test plate for ceramic surface mount devices and other electronic components
TWI223084B (en) 2002-04-25 2004-11-01 Murata Manufacturing Co Electronic component characteristic measuring device
US6677772B1 (en) * 2002-08-21 2004-01-13 Micron Technology, Inc. Contactor with isolated spring tips

Also Published As

Publication number Publication date
US7402994B2 (en) 2008-07-22
GB2431057A8 (https=) 2008-08-20
WO2006020578A2 (en) 2006-02-23
GB2431057B (en) 2009-04-08
WO2006020578A3 (en) 2006-08-24
CN101023528A (zh) 2007-08-22
US20060028224A1 (en) 2006-02-09
JP5393029B2 (ja) 2014-01-22
CN101023528B (zh) 2010-12-29
US20080252315A1 (en) 2008-10-16
GB0702152D0 (en) 2007-03-14
KR101176776B1 (ko) 2012-08-23
GB2431057A (en) 2007-04-11
JP2008509423A (ja) 2008-03-27
SG155199A1 (en) 2009-09-30
KR20070048721A (ko) 2007-05-09
US7592823B2 (en) 2009-09-22
TWI358330B (en) 2012-02-21
TW200605969A (en) 2006-02-16

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Legal Events

Date Code Title Description
R005 Application deemed withdrawn due to failure to request examination

Effective date: 20120809