DE112005001120T5 - Austauschbarer Anodenmantel für eine Ionenquelle - Google Patents

Austauschbarer Anodenmantel für eine Ionenquelle Download PDF

Info

Publication number
DE112005001120T5
DE112005001120T5 DE112005001120T DE112005001120T DE112005001120T5 DE 112005001120 T5 DE112005001120 T5 DE 112005001120T5 DE 112005001120 T DE112005001120 T DE 112005001120T DE 112005001120 T DE112005001120 T DE 112005001120T DE 112005001120 T5 DE112005001120 T5 DE 112005001120T5
Authority
DE
Germany
Prior art keywords
anode
ion source
jacket
electron
interior
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112005001120T
Other languages
German (de)
English (en)
Inventor
Robert E. Ellefson
Louis C. Frees
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon Inc
Original Assignee
Inficon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon Inc filed Critical Inficon Inc
Publication of DE112005001120T5 publication Critical patent/DE112005001120T5/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/36—Solid anodes; Solid auxiliary anodes for maintaining a discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
DE112005001120T 2004-05-20 2005-05-18 Austauschbarer Anodenmantel für eine Ionenquelle Withdrawn DE112005001120T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/849,765 2004-05-20
US10/849,765 US7041984B2 (en) 2004-05-20 2004-05-20 Replaceable anode liner for ion source
PCT/US2005/017340 WO2005114701A2 (en) 2004-05-20 2005-05-18 Replaceable anode liner for ion source

Publications (1)

Publication Number Publication Date
DE112005001120T5 true DE112005001120T5 (de) 2007-04-26

Family

ID=35150670

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112005001120T Withdrawn DE112005001120T5 (de) 2004-05-20 2005-05-18 Austauschbarer Anodenmantel für eine Ionenquelle

Country Status (5)

Country Link
US (1) US7041984B2 (https=)
JP (1) JP2007538376A (https=)
DE (1) DE112005001120T5 (https=)
GB (1) GB2434027B (https=)
WO (1) WO2005114701A2 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007157529A (ja) * 2005-12-06 2007-06-21 Ulvac Japan Ltd 四極子形質量分析計用イオン源
US20090014644A1 (en) * 2007-07-13 2009-01-15 Inficon, Inc. In-situ ion source cleaning for partial pressure analyzers used in process monitoring
US7709790B2 (en) * 2008-04-01 2010-05-04 Thermo Finnigan Llc Removable ion source that does not require venting of the vacuum chamber
US8117987B2 (en) * 2009-09-18 2012-02-21 Applied Materials, Inc. Hot wire chemical vapor deposition (CVD) inline coating tool
EP2486582B1 (en) * 2009-10-08 2020-11-25 PerkinElmer Health Sciences, Inc. Coupling devices
JP2014086137A (ja) * 2012-10-19 2014-05-12 Ran Technical Service Kk コールドカソード型イオン源
KR101366781B1 (ko) * 2012-11-12 2014-02-21 한국표준과학연구원 이온원 및 이를 구비하는 질량분석장치
TWI654695B (zh) 2012-12-06 2019-03-21 英福康公司 真空工具及測量該真空工具的客真空室中的氛圍的方法
TWI539154B (zh) 2012-12-19 2016-06-21 英福康公司 雙重偵測殘餘氣體分析器
GB201810823D0 (en) 2018-06-01 2018-08-15 Micromass Ltd An inner source assembly and associated components
US20250360603A1 (en) * 2024-05-21 2025-11-27 Thermo Finnigan Llc Module installation tools and associated methods

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2610165C2 (de) * 1976-03-11 1983-11-10 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Duoplasmatron-Ionenquelle zur Erzeugung mehrfach geladener Ionen
NL7902620A (nl) * 1978-04-05 1979-10-09 Atomic Energy Authority Uk Ionenbron.
JPH0855602A (ja) * 1994-08-16 1996-02-27 Jeol Ltd 質量分析装置用イオン源チャンバ
US5506412A (en) * 1994-12-16 1996-04-09 Buttrill, Jr.; Sidney E. Means for reducing the contamination of mass spectrometer leak detection ion sources
JPH09219169A (ja) * 1996-02-09 1997-08-19 Nissin Electric Co Ltd イオン源
US5889281A (en) * 1997-03-21 1999-03-30 Leybold Inficon, Inc. Method for linearization of ion currents in a quadrupole mass analyzer
GB9722649D0 (en) * 1997-10-24 1997-12-24 Univ Nanyang Cathode ARC source for metallic and dielectric coatings
US6064156A (en) * 1998-09-14 2000-05-16 The United States Of America As Represented By The Administrator Of Nasa Process for ignition of gaseous electrical discharge between electrodes of a hollow cathode assembly
KR20010014842A (ko) * 1999-04-30 2001-02-26 조셉 제이. 스위니 반도체 장치를 제조하기 위한 장치 및 방법
US6765216B2 (en) * 2002-03-04 2004-07-20 Atomic Hydrogen Technologies Ltd. Method and apparatus for producing atomic flows of molecular gases

Also Published As

Publication number Publication date
WO2005114701A2 (en) 2005-12-01
WO2005114701A3 (en) 2006-10-19
GB0622336D0 (en) 2006-12-20
GB2434027B (en) 2010-09-01
JP2007538376A (ja) 2007-12-27
US7041984B2 (en) 2006-05-09
GB2434027A (en) 2007-07-11
US20050258374A1 (en) 2005-11-24

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Legal Events

Date Code Title Description
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20111201