DE68926167T2 - Hochauflösendes plasmamassenspektrometer - Google Patents

Hochauflösendes plasmamassenspektrometer

Info

Publication number
DE68926167T2
DE68926167T2 DE68926167T DE68926167T DE68926167T2 DE 68926167 T2 DE68926167 T2 DE 68926167T2 DE 68926167 T DE68926167 T DE 68926167T DE 68926167 T DE68926167 T DE 68926167T DE 68926167 T2 DE68926167 T2 DE 68926167T2
Authority
DE
Germany
Prior art keywords
mass spectrometer
plasma mass
resolution plasma
resolution
spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68926167T
Other languages
English (en)
Other versions
DE68926167D1 (de
Inventor
Neil Bradshaw
Neil Sanderson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermo Fisher Scientific Inc
Original Assignee
Fisons Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fisons Ltd filed Critical Fisons Ltd
Publication of DE68926167D1 publication Critical patent/DE68926167D1/de
Application granted granted Critical
Publication of DE68926167T2 publication Critical patent/DE68926167T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/32—Static spectrometers using double focusing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
DE68926167T 1988-06-03 1989-06-05 Hochauflösendes plasmamassenspektrometer Expired - Lifetime DE68926167T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB888813149A GB8813149D0 (en) 1988-06-03 1988-06-03 Mass spectrometer
PCT/GB1989/000622 WO1989012313A1 (en) 1988-06-03 1989-06-05 High resolution plasma mass spectrometer

Publications (2)

Publication Number Publication Date
DE68926167D1 DE68926167D1 (de) 1996-05-09
DE68926167T2 true DE68926167T2 (de) 1996-08-29

Family

ID=10638006

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68926167T Expired - Lifetime DE68926167T2 (de) 1988-06-03 1989-06-05 Hochauflösendes plasmamassenspektrometer

Country Status (7)

Country Link
US (1) US5068534B1 (de)
EP (1) EP0436544B1 (de)
JP (1) JP2724416B2 (de)
CA (1) CA1312680C (de)
DE (1) DE68926167T2 (de)
GB (1) GB8813149D0 (de)
WO (1) WO1989012313A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3819611A1 (de) * 2019-11-05 2021-05-12 Hitachi High-Tech Analytical Science GmbH Leicht verstellbares optisches emissionsspektrometer

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2656926B1 (fr) * 1990-01-05 1993-06-11 Air Liquide Perfectionnement au procede d'analyse elementaire d'un echantillon par spectrometrie de masse couplee a un plasma induit par haute frequence et a l'installation pour la mise en óoeuvre de ce procede.
US5229605A (en) * 1990-01-05 1993-07-20 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for the elementary analysis of a specimen by high frequency inductively coupled plasma mass spectrometry and apparatus for carrying out this process
GB9105073D0 (en) * 1991-03-11 1991-04-24 Vg Instr Group Isotopic-ratio plasma mass spectrometer
JP3215487B2 (ja) * 1992-04-13 2001-10-09 セイコーインスツルメンツ株式会社 誘導結合プラズマ質量分析装置
US5218204A (en) * 1992-05-27 1993-06-08 Iowa State University Research Foundation, Inc. Plasma sampling interface for inductively coupled plasma-mass spectrometry (ICP-MS)
GB9219457D0 (en) * 1992-09-15 1992-10-28 Fisons Plc Reducing interferences in plasma source mass spectrometers
US5402227A (en) * 1993-02-18 1995-03-28 Itt Corporation High resolution multiple channel imaging spectrometer
DE4322102C2 (de) * 1993-07-02 1995-08-17 Bergmann Thorald Flugzeit-Massenspektrometer mit Gasphasen-Ionenquelle
DE4333469A1 (de) * 1993-10-01 1995-04-06 Finnigan Mat Gmbh Massenspektrometer mit ICP-Quelle
US5378895A (en) * 1993-11-12 1995-01-03 Eg&G Idaho, Inc. Gamma neutron assay method and apparatus
US5495107A (en) * 1994-04-06 1996-02-27 Thermo Jarrell Ash Corporation Analysis
DE19520276C2 (de) * 1995-06-02 1999-08-26 Bruker Daltonik Gmbh Vorrichtung für die Einführung von Ionen in ein Massenspektrometer
JPH10241625A (ja) * 1997-02-24 1998-09-11 Hitachi Ltd プラズマイオン源質量分析装置及び方法
US6870153B2 (en) * 1999-02-25 2005-03-22 British Nuclear Fuels Plc Analytical instrument for measurement of isotopes at low concentration and methods for using the same
JP2000311650A (ja) * 1999-02-26 2000-11-07 Hitachi Ltd プラズマイオン源質量分析装置
EP1828743A4 (de) * 2004-12-14 2010-04-28 Ca Nat Research Council Uv-reaktive sprühkammer zur verbesserten probeneinführungseffizienz
US8436318B2 (en) * 2010-04-05 2013-05-07 Varian Semiconductor Equipment Associates, Inc. Apparatus for controlling the temperature of an RF ion source window
WO2018154512A1 (en) * 2017-02-24 2018-08-30 The Governing Council Of The University Of Toronto Argon recycling system for an inductively coupled plasma mass spectrometer
EP3602604A4 (de) * 2017-03-29 2021-01-06 PerkinElmer Health Sciences, Inc. Kühlvorrichtungen und instrumente damit
GB201810824D0 (en) * 2018-06-01 2018-08-15 Micromass Ltd An outer source assembly and associated components
GB2585327B (en) 2018-12-12 2023-02-15 Thermo Fisher Scient Bremen Gmbh Cooling plate for ICP-MS
JP7039096B2 (ja) * 2020-03-31 2022-03-22 アトナープ株式会社 ガス分析装置、プロセスモニタリング装置、ガス分析装置の制御方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5819848A (ja) * 1981-07-29 1983-02-05 Denshi Kagaku Kk 質量分析装置
CA1189201A (en) * 1982-12-08 1985-06-18 Donald J. Douglas Method and apparatus for sampling a plasma into a vacuum chamber
FR2580586B1 (fr) * 1985-04-23 1991-02-08 Kronseder Hermann Dispositif d'application de colle pour machine a etiqueter
CA1246246A (en) * 1985-04-24 1988-12-06 Donald J. Douglas Method and apparatus having rf biasing for sampling a plasma into a vacuum chamber
JPS6220231A (ja) * 1985-07-18 1987-01-28 Seiko Instr & Electronics Ltd Ｉｃｐ質量分析装置
CA1245778A (en) * 1985-10-24 1988-11-29 John B. French Mass analyzer system with reduced drift
GB8602463D0 (en) * 1986-01-31 1986-03-05 Vg Instr Group Mass spectrometer
JPS62202450A (ja) * 1986-02-28 1987-09-07 Yokogawa Electric Corp 高周波誘導結合プラズマ・質量分析計
JPS63308857A (ja) * 1987-06-11 1988-12-16 Yokogawa Electric Corp 誘導結合プラズマ・質量分析計
GB2213636B (en) * 1988-01-07 1993-01-27 Toshiba Kk Apparatus for introducing samples into an inductively coupled,plasma source mass spectrometer
JP2543761B2 (ja) * 1989-03-23 1996-10-16 セイコー電子工業株式会社 誘導結合プラズマ質量分析装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3819611A1 (de) * 2019-11-05 2021-05-12 Hitachi High-Tech Analytical Science GmbH Leicht verstellbares optisches emissionsspektrometer
WO2021089639A1 (en) * 2019-11-05 2021-05-14 Hitachi High-Tech Analytical Science GmbH An easily adjustable optical emission spectrometer

Also Published As

Publication number Publication date
EP0436544B1 (de) 1996-04-03
EP0436544A1 (de) 1991-07-17
CA1312680C (en) 1993-01-12
DE68926167D1 (de) 1996-05-09
JP2724416B2 (ja) 1998-03-09
GB8813149D0 (en) 1988-07-06
JPH03504059A (ja) 1991-09-05
US5068534B1 (en) 1995-02-14
WO1989012313A1 (en) 1989-12-14
US5068534A (en) 1991-11-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: THERMO ELECTRON CORP. (N.D.GESETZEN D. STAATES DEL