DE1090002B - Verfahren zur Herstellung der reversiblen Ansprechbarkeit von Halbleiterelementen auf Gase od. dgl. und Messeinrichtung zum Untersuchen von Gasen od. dgl. - Google Patents
Verfahren zur Herstellung der reversiblen Ansprechbarkeit von Halbleiterelementen auf Gase od. dgl. und Messeinrichtung zum Untersuchen von Gasen od. dgl.Info
- Publication number
- DE1090002B DE1090002B DEM39483A DEM0039483A DE1090002B DE 1090002 B DE1090002 B DE 1090002B DE M39483 A DEM39483 A DE M39483A DE M0039483 A DEM0039483 A DE M0039483A DE 1090002 B DE1090002 B DE 1090002B
- Authority
- DE
- Germany
- Prior art keywords
- current
- measuring device
- semiconductor element
- gas
- gases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 title claims description 146
- 239000004065 semiconductor Substances 0.000 title claims description 100
- 230000002441 reversible effect Effects 0.000 title claims description 30
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- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 230000008859 change Effects 0.000 claims description 54
- 239000012298 atmosphere Substances 0.000 claims description 52
- 239000002245 particle Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 239000003990 capacitor Substances 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 4
- 230000009467 reduction Effects 0.000 claims description 3
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- 230000008030 elimination Effects 0.000 claims 1
- 238000003379 elimination reaction Methods 0.000 claims 1
- 230000000717 retained effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 31
- 230000035945 sensitivity Effects 0.000 description 22
- 230000006641 stabilisation Effects 0.000 description 19
- 238000011105 stabilization Methods 0.000 description 19
- 230000000694 effects Effects 0.000 description 18
- 239000010410 layer Substances 0.000 description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000011835 investigation Methods 0.000 description 7
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- 229910052732 germanium Inorganic materials 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000000969 carrier Substances 0.000 description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000000087 stabilizing effect Effects 0.000 description 3
- MPCRDALPQLDDFX-UHFFFAOYSA-L Magnesium perchlorate Chemical compound [Mg+2].[O-]Cl(=O)(=O)=O.[O-]Cl(=O)(=O)=O MPCRDALPQLDDFX-UHFFFAOYSA-L 0.000 description 2
- 206010070834 Sensitisation Diseases 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
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- 230000006870 function Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- KMUONIBRACKNSN-UHFFFAOYSA-N potassium dichromate Chemical compound [K+].[K+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KMUONIBRACKNSN-UHFFFAOYSA-N 0.000 description 2
- 230000008313 sensitization Effects 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- NIOPZPCMRQGZCE-WEVVVXLNSA-N 2,4-dinitro-6-(octan-2-yl)phenyl (E)-but-2-enoate Chemical compound CCCCCCC(C)C1=CC([N+]([O-])=O)=CC([N+]([O-])=O)=C1OC(=O)\C=C\C NIOPZPCMRQGZCE-WEVVVXLNSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229940095564 anhydrous calcium sulfate Drugs 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229940095672 calcium sulfate Drugs 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 210000003608 fece Anatomy 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 150000002290 germanium Chemical class 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000005612 types of electricity Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/129—Diode type sensors, e.g. gas sensitive Schottky diodes
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1213120D FR1213120A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1957-05-06 | ||
| US657271A US2965842A (en) | 1957-05-06 | 1957-05-06 | Detection of ambient components by semiconductors |
| DEM39483A DE1090002B (de) | 1957-05-06 | 1958-11-03 | Verfahren zur Herstellung der reversiblen Ansprechbarkeit von Halbleiterelementen auf Gase od. dgl. und Messeinrichtung zum Untersuchen von Gasen od. dgl. |
| GB2153860D GB909414A (en) | 1957-05-06 | 1958-11-12 | Apparatus for the detection of electrically active components in an ambient |
| GB36448/58A GB909413A (en) | 1957-05-06 | 1958-11-12 | Apparatus for the detection of electrically active components in an ambient |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US657271A US2965842A (en) | 1957-05-06 | 1957-05-06 | Detection of ambient components by semiconductors |
| DEM39483A DE1090002B (de) | 1957-05-06 | 1958-11-03 | Verfahren zur Herstellung der reversiblen Ansprechbarkeit von Halbleiterelementen auf Gase od. dgl. und Messeinrichtung zum Untersuchen von Gasen od. dgl. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1090002B true DE1090002B (de) | 1960-09-29 |
Family
ID=25986836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEM39483A Pending DE1090002B (de) | 1957-05-06 | 1958-11-03 | Verfahren zur Herstellung der reversiblen Ansprechbarkeit von Halbleiterelementen auf Gase od. dgl. und Messeinrichtung zum Untersuchen von Gasen od. dgl. |
Country Status (4)
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1201094B (de) | 1962-03-07 | 1965-09-16 | Mine Safety Appliances Co | Verfahren zur Ermittlung von Rechenwerten fuer Gas-Konzentrationsbestimmungen und Geraet zur Anzeige der Konzentration einer Komponente eines Gas- oder Dampfgemisches |
| DE1202033B (de) | 1962-03-07 | 1965-09-30 | Mine Safety Appliances Co | Detektorvorrichtungen fuer Geraete zur Anzeige von Gaskonzentrationen, die auf der Messung von Halbleiterstroemen beruhen |
| DE2462607C2 (de) * | 1974-06-12 | 1988-09-08 | Sachs Systemtechnik Gmbh, 8720 Schweinfurt | Atemalkoholmeßgerät |
| EP4379366A1 (de) * | 2022-12-02 | 2024-06-05 | Technische Universität Dresden Körperschaft des öffentlichen Rechts | Aktive messschaltung und verfahren zum betreiben einer aktiven messschaltung |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3039053A (en) * | 1959-04-10 | 1962-06-12 | Mine Safety Appliances Co | Means and methods for gas detection |
| US3233174A (en) * | 1960-12-06 | 1966-02-01 | Merck & Co Inc | Method of determining the concentration of active impurities present in a gaseous decomposable semiconductor compound |
| US3144629A (en) * | 1961-06-05 | 1964-08-11 | William A Curby | Transducer temperature-sensing unit |
| US3194053A (en) * | 1962-09-18 | 1965-07-13 | Gen Precision Inc | Identification of chemical substances |
| US3260104A (en) * | 1962-10-22 | 1966-07-12 | Exxon Research Engineering Co | Apparatus for fluid analysis |
| US3357232A (en) * | 1964-08-21 | 1967-12-12 | Sun Oil Co | Analyzing apparatus with pressure-actuated fluid valving system |
| US3868846A (en) * | 1973-07-02 | 1975-03-04 | Ford Motor Co | Circuit for converting a temperature dependent input signal to a temperature independent output signal |
| US4063446A (en) * | 1974-05-08 | 1977-12-20 | Hans Fuhrmann | Method of and apparatus for automatically detecting traces of organic solvent vapors in air |
| US4011745A (en) * | 1974-07-26 | 1977-03-15 | Massachusetts Institute Of Technology | Semiconductor sensors |
| US4414839A (en) * | 1979-04-12 | 1983-11-15 | Board Of Trustees, A Constitutional Corporation Operating Michigan State University | Gas sensing apparatus and method |
| US4410632A (en) * | 1979-04-12 | 1983-10-18 | Board Of Trustees Operating Michigan State University | Gas sensing apparatus and method |
| US4420722A (en) * | 1980-11-14 | 1983-12-13 | Rca Corporation | Testing semiconductor furnaces for heavy metal contamination |
| US4795968A (en) * | 1986-06-30 | 1989-01-03 | Sri International | Gas detection method and apparatus using chemisorption and/or physisorption |
| US5223783A (en) * | 1992-05-01 | 1993-06-29 | Willis Technologies International, Inc. | Method and device for detecting reducing gas using semiconductor gas sensor |
| US5429727A (en) * | 1993-09-30 | 1995-07-04 | Arch Development Corporation | Electrocatalytic cermet gas detector/sensor |
| JPH08122287A (ja) * | 1994-10-24 | 1996-05-17 | Ngk Insulators Ltd | ガス成分の濃度の測定装置および方法 |
| US5772863A (en) * | 1996-05-01 | 1998-06-30 | University Of Chicago | Electrocatalytic cermet sensor |
| NZ549588A (en) * | 2004-02-24 | 2009-03-31 | Microdose Technologies Inc | Directional flow sensor inhaler |
| US7418855B2 (en) * | 2004-09-03 | 2008-09-02 | Honda Motor Co., Ltd. | Gas sensor and control method therefor |
| US8575950B2 (en) * | 2010-10-29 | 2013-11-05 | Ningbo University | Static/dynamic resistance measuring apparatus and method |
| EP3163299B1 (en) * | 2015-10-29 | 2019-05-15 | Inficon GmbH | Gas detection using gas modulation |
| CN110346615B (zh) * | 2019-08-27 | 2022-10-11 | 内蒙古工业大学 | 一种低温交/直流电学性质测试装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2676228A (en) * | 1951-10-06 | 1954-04-20 | Bell Telephone Labor Inc | Conditioning of semiconductor translators |
| US2711511A (en) * | 1952-05-23 | 1955-06-21 | Bell Telephone Labor Inc | Electrical hygrometer |
-
0
- FR FR1213120D patent/FR1213120A/fr not_active Expired
-
1957
- 1957-05-06 US US657271A patent/US2965842A/en not_active Expired - Lifetime
-
1958
- 1958-11-03 DE DEM39483A patent/DE1090002B/de active Pending
- 1958-11-12 GB GB36448/58A patent/GB909413A/en not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1201094B (de) | 1962-03-07 | 1965-09-16 | Mine Safety Appliances Co | Verfahren zur Ermittlung von Rechenwerten fuer Gas-Konzentrationsbestimmungen und Geraet zur Anzeige der Konzentration einer Komponente eines Gas- oder Dampfgemisches |
| DE1202033B (de) | 1962-03-07 | 1965-09-30 | Mine Safety Appliances Co | Detektorvorrichtungen fuer Geraete zur Anzeige von Gaskonzentrationen, die auf der Messung von Halbleiterstroemen beruhen |
| DE2462607C2 (de) * | 1974-06-12 | 1988-09-08 | Sachs Systemtechnik Gmbh, 8720 Schweinfurt | Atemalkoholmeßgerät |
| EP4379366A1 (de) * | 2022-12-02 | 2024-06-05 | Technische Universität Dresden Körperschaft des öffentlichen Rechts | Aktive messschaltung und verfahren zum betreiben einer aktiven messschaltung |
Also Published As
| Publication number | Publication date |
|---|---|
| GB909413A (en) | 1962-10-31 |
| FR1213120A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1960-03-29 |
| US2965842A (en) | 1960-12-20 |
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