DE10314811B4 - Verfahren und Vorrichtung zum Kalibrieren eines Netzwerkanalysators - Google Patents
Verfahren und Vorrichtung zum Kalibrieren eines Netzwerkanalysators Download PDFInfo
- Publication number
- DE10314811B4 DE10314811B4 DE10314811A DE10314811A DE10314811B4 DE 10314811 B4 DE10314811 B4 DE 10314811B4 DE 10314811 A DE10314811 A DE 10314811A DE 10314811 A DE10314811 A DE 10314811A DE 10314811 B4 DE10314811 B4 DE 10314811B4
- Authority
- DE
- Germany
- Prior art keywords
- measuring
- reflection
- test
- pairs
- ports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims abstract description 71
- 238000012360 testing method Methods 0.000 claims abstract description 132
- 230000005540 biological transmission Effects 0.000 claims abstract description 88
- 238000005259 measurement Methods 0.000 claims description 120
- 230000004044 response Effects 0.000 claims description 24
- 238000012546 transfer Methods 0.000 claims description 21
- 230000006978 adaptation Effects 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 4
- 239000000523 sample Substances 0.000 claims 2
- 238000003491 array Methods 0.000 description 36
- 239000011159 matrix material Substances 0.000 description 25
- 238000004364 calculation method Methods 0.000 description 14
- 230000009897 systematic effect Effects 0.000 description 10
- 230000014509 gene expression Effects 0.000 description 9
- 238000012512 characterization method Methods 0.000 description 7
- 230000008054 signal transmission Effects 0.000 description 7
- 230000001419 dependent effect Effects 0.000 description 5
- 230000019491 signal transduction Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 102100023444 Centromere protein K Human genes 0.000 description 3
- 101000907931 Homo sapiens Centromere protein K Proteins 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 230000006399 behavior Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000009885 systemic effect Effects 0.000 description 2
- 238000007728 cost analysis Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000013179 statistical model Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/28—Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/294317 | 2002-11-14 | ||
| US10/294,317 US6853198B2 (en) | 2002-11-14 | 2002-11-14 | Method and apparatus for performing multiport through-reflect-line calibration and measurement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE10314811A1 DE10314811A1 (de) | 2004-06-03 |
| DE10314811B4 true DE10314811B4 (de) | 2005-08-18 |
Family
ID=23132879
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10314811A Expired - Lifetime DE10314811B4 (de) | 2002-11-14 | 2003-04-01 | Verfahren und Vorrichtung zum Kalibrieren eines Netzwerkanalysators |
| DE20305226U Expired - Lifetime DE20305226U1 (de) | 2002-11-14 | 2003-04-01 | Vorrichtung zum Durchführen einer Mehrfachtor-Durchgangelement-, Reflexionselement-, Leitungselement-Kalibrierung und -Messung |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE20305226U Expired - Lifetime DE20305226U1 (de) | 2002-11-14 | 2003-04-01 | Vorrichtung zum Durchführen einer Mehrfachtor-Durchgangelement-, Reflexionselement-, Leitungselement-Kalibrierung und -Messung |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6853198B2 (enExample) |
| JP (1) | JP2004163395A (enExample) |
| DE (2) | DE10314811B4 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8126670B2 (en) | 2006-06-21 | 2012-02-28 | Rohde & Schwarz Gmbh & Co. Kg | Method and device for calibrating a network analyzer for measuring at differential connections |
Families Citing this family (67)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5345170A (en) | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
| US6380751B2 (en) | 1992-06-11 | 2002-04-30 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US6232789B1 (en) | 1997-05-28 | 2001-05-15 | Cascade Microtech, Inc. | Probe holder for low current measurements |
| US5561377A (en) | 1995-04-14 | 1996-10-01 | Cascade Microtech, Inc. | System for evaluating probing networks |
| US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
| US6002263A (en) | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
| US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
| US6578264B1 (en) | 1999-06-04 | 2003-06-17 | Cascade Microtech, Inc. | Method for constructing a membrane probe using a depression |
| US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US6838890B2 (en) | 2000-02-25 | 2005-01-04 | Cascade Microtech, Inc. | Membrane probing system |
| US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
| DE20114544U1 (de) | 2000-12-04 | 2002-02-21 | Cascade Microtech, Inc., Beaverton, Oreg. | Wafersonde |
| AU2002327490A1 (en) | 2001-08-21 | 2003-06-30 | Cascade Microtech, Inc. | Membrane probing system |
| US6836135B2 (en) | 2001-08-31 | 2004-12-28 | Cascade Microtech, Inc. | Optical testing device |
| US6777964B2 (en) | 2002-01-25 | 2004-08-17 | Cascade Microtech, Inc. | Probe station |
| EP1509776A4 (en) | 2002-05-23 | 2010-08-18 | Cascade Microtech Inc | PROBE TO TEST ANY TESTING EQUIPMENT |
| US7019535B2 (en) * | 2002-09-16 | 2006-03-28 | Agilent Technologies, Inc. | Method and system for calibrating a measurement device path and for measuring a device under test in the calibrated measurement device path |
| US6847219B1 (en) | 2002-11-08 | 2005-01-25 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
| US6724205B1 (en) | 2002-11-13 | 2004-04-20 | Cascade Microtech, Inc. | Probe for combined signals |
| US7250779B2 (en) | 2002-11-25 | 2007-07-31 | Cascade Microtech, Inc. | Probe station with low inductance path |
| US6861856B2 (en) | 2002-12-13 | 2005-03-01 | Cascade Microtech, Inc. | Guarded tub enclosure |
| JP3992715B2 (ja) * | 2003-02-24 | 2007-10-17 | 富士通株式会社 | ケーブルアセンブリの電気特性測定装置、ケーブルアセンブリの電気特性測定プログラムおよびケーブルアセンブリの電気特性測定方法 |
| US7130756B2 (en) * | 2003-03-28 | 2006-10-31 | Suss Microtec Test System Gmbh | Calibration method for carrying out multiport measurements on semiconductor wafers |
| US7221172B2 (en) | 2003-05-06 | 2007-05-22 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
| US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
| WO2006017078A2 (en) | 2004-07-07 | 2006-02-16 | Cascade Microtech, Inc. | Probe head having a membrane suspended probe |
| US7068049B2 (en) * | 2003-08-05 | 2006-06-27 | Agilent Technologies, Inc. | Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration |
| JP4274462B2 (ja) * | 2003-09-18 | 2009-06-10 | 株式会社アドバンテスト | 誤差要因取得用装置、方法、プログラムおよび記録媒体 |
| US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
| US7013229B2 (en) * | 2003-11-13 | 2006-03-14 | Agilent Technologies, Inc. | Obtaining calibration parameters for a three-port device under test |
| US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
| DE112004002554T5 (de) | 2003-12-24 | 2006-11-23 | Cascade Microtech, Inc., Beaverton | Active wafer probe |
| EP1754072A2 (en) | 2004-06-07 | 2007-02-21 | CASCADE MICROTECH, INC. (an Oregon corporation) | Thermal optical chuck |
| US7330041B2 (en) | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
| DE102005005056B4 (de) * | 2004-09-01 | 2014-03-20 | Rohde & Schwarz Gmbh & Co. Kg | Verfahren zum Kalibrieren eines Netzwerkanalysators |
| DE202005021435U1 (de) | 2004-09-13 | 2008-02-28 | Cascade Microtech, Inc., Beaverton | Doppelseitige Prüfaufbauten |
| US7068046B2 (en) * | 2004-11-18 | 2006-06-27 | Anritsu Company | Calibration techniques for simplified high-frequency multiport differential measurements |
| US7030625B1 (en) * | 2005-01-18 | 2006-04-18 | Agilent Technologies, Inc. | Method and apparatus for performing a minimum connection multiport through-reflect-line calibration and measurement |
| US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
| US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
| US7449899B2 (en) | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
| WO2006137979A2 (en) | 2005-06-13 | 2006-12-28 | Cascade Microtech, Inc. | Wideband active-passive differential signal probe |
| DE112007001399T5 (de) | 2006-06-09 | 2009-05-07 | Cascade Microtech, Inc., Beaverton | Messfühler für differentielle Signale mit integrierter Symmetrieschaltung |
| US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
| US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
| US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
| US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
| DE102007028725A1 (de) * | 2007-06-21 | 2008-12-24 | Rohde & Schwarz Gmbh & Co. Kg | Verfahren und Vorrichtung zur Kalibrierung von Netzwerkanalysatoren mit einem Kammgenerator |
| US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
| US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
| US8410806B2 (en) | 2008-11-21 | 2013-04-02 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
| US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
| US8706438B2 (en) * | 2010-02-01 | 2014-04-22 | Teledyne Lecroy, Inc. | Time domain network analyzer |
| EP2363719A1 (en) * | 2010-02-12 | 2011-09-07 | ATE Systems, Inc | Method and apparatus for calibrating a test system for measuring a device under test |
| JP6055215B2 (ja) * | 2012-06-29 | 2016-12-27 | キーサイト テクノロジーズ， インク． | インピーダンス測定方法及び測定装置 |
| CN103076589B (zh) * | 2013-01-29 | 2015-08-05 | 绍兴电力局 | 一种数字万用表自动检定装置及其检定方法 |
| CN104569885B (zh) * | 2013-10-21 | 2017-07-25 | 哈尔滨飞机工业集团有限责任公司 | 一种实现同步发送器/解析器现场校准的方法 |
| US10794837B2 (en) | 2017-07-12 | 2020-10-06 | Rohde & Schwarz Gmbh & Co. Kg | On-wafer calibration device |
| US10938490B1 (en) * | 2018-10-31 | 2021-03-02 | Christos Tsironis | Calibration method for coupler-tuner assembly |
| CN111983431B (zh) * | 2020-08-31 | 2022-11-15 | 中电科思仪科技股份有限公司 | 一种提高矢量网络分析仪端口反射系数模拟精度的方法 |
| CN112051534B (zh) * | 2020-08-31 | 2023-08-25 | 中电科思仪科技股份有限公司 | 一种提高微波网络测量与校准精度的外置式装置及方法 |
| JP2022160356A (ja) * | 2021-04-06 | 2022-10-19 | ローム株式会社 | 周波数特性測定装置 |
| CN112986888B (zh) * | 2021-04-25 | 2021-08-06 | 武汉磐电科技股份有限公司 | 一种变压器短路阻抗测试仪的检定方法及检定装置 |
| WO2023104314A1 (en) * | 2021-12-09 | 2023-06-15 | Advantest Corporation | Electronic circuit, automated test equipment, method and computer program for mitigating an influence of a mismatch loss in a measurement setup |
| CN118625241B (zh) * | 2024-08-12 | 2024-12-10 | 深圳市鼎阳科技股份有限公司 | 一种电子校准件和一种矢量网络分析仪的端口校准方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19736897A1 (de) * | 1996-09-30 | 1998-04-02 | Rohde & Schwarz | Verfahren zur Kalibrierung eines vektoriellen Netzwerkanalysators |
| DE19755659A1 (de) * | 1997-12-15 | 1999-06-17 | Rohde & Schwarz | Anordnung zum Kalibrieren eines Netzwerkanalysators zur industriellen Serienmessung von n-Tor-Netzwerken |
| US20030173975A1 (en) * | 2002-03-14 | 2003-09-18 | Adamian Vahe?Apos; A. | Method, apparatus, and article of manufacture for characterizing a device and predicting electrical behavior of the device in a circuit |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5467021A (en) * | 1993-05-24 | 1995-11-14 | Atn Microwave, Inc. | Calibration method and apparatus |
| US5434511A (en) * | 1993-05-24 | 1995-07-18 | Atn Microwave, Inc. | Electronic microwave calibration device |
| US5793213A (en) * | 1996-08-01 | 1998-08-11 | Motorola, Inc. | Method and apparatus for calibrating a network analyzer |
| US5825669A (en) * | 1996-12-17 | 1998-10-20 | Wiltron Company | Method of updating automatic calibration to provide a perceived perfect through connection |
| US6188968B1 (en) * | 1998-05-18 | 2001-02-13 | Agilent Technologies Inc. | Removing effects of adapters present during vector network analyzer calibration |
| US6300775B1 (en) * | 1999-02-02 | 2001-10-09 | Com Dev Limited | Scattering parameter calibration system and method |
| US6421624B1 (en) * | 1999-02-05 | 2002-07-16 | Advantest Corp. | Multi-port device analysis apparatus and method and calibration method thereof |
| US6614237B2 (en) * | 2000-09-18 | 2003-09-02 | Agilent Technologies, Inc. | Multiport automatic calibration device for a multiport test system |
| US6757625B2 (en) * | 2002-04-22 | 2004-06-29 | Agilent Technologies, Inc. | Method, apparatus, and article of manufacture for predicting electrical behavior of a multiport device having balanced device ports |
-
2002
- 2002-11-14 US US10/294,317 patent/US6853198B2/en not_active Expired - Lifetime
-
2003
- 2003-04-01 DE DE10314811A patent/DE10314811B4/de not_active Expired - Lifetime
- 2003-04-01 DE DE20305226U patent/DE20305226U1/de not_active Expired - Lifetime
- 2003-05-12 JP JP2003132583A patent/JP2004163395A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19736897A1 (de) * | 1996-09-30 | 1998-04-02 | Rohde & Schwarz | Verfahren zur Kalibrierung eines vektoriellen Netzwerkanalysators |
| DE19755659A1 (de) * | 1997-12-15 | 1999-06-17 | Rohde & Schwarz | Anordnung zum Kalibrieren eines Netzwerkanalysators zur industriellen Serienmessung von n-Tor-Netzwerken |
| US20030173975A1 (en) * | 2002-03-14 | 2003-09-18 | Adamian Vahe?Apos; A. | Method, apparatus, and article of manufacture for characterizing a device and predicting electrical behavior of the device in a circuit |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8126670B2 (en) | 2006-06-21 | 2012-02-28 | Rohde & Schwarz Gmbh & Co. Kg | Method and device for calibrating a network analyzer for measuring at differential connections |
| DE102007027142B4 (de) * | 2006-06-21 | 2020-03-19 | Rohde & Schwarz GmbH & Co. Kommanditgesellschaft | Verfahren und Vorrichtung zur Kalibrierung eines Netzwerkanalysators für Messungen an differentiellen Anschlüssen |
Also Published As
| Publication number | Publication date |
|---|---|
| US6853198B2 (en) | 2005-02-08 |
| US20040095145A1 (en) | 2004-05-20 |
| DE20305226U1 (de) | 2003-05-28 |
| DE10314811A1 (de) | 2004-06-03 |
| JP2004163395A (ja) | 2004-06-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US |
|
| R082 | Change of representative |
Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER & PAR, DE |
|
| R081 | Change of applicant/patentee |
Owner name: KEYSIGHT TECHNOLOGIES, INC. (N.D.GES.D.STAATES, US Free format text: FORMER OWNER: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES DELAWARE), SANTA CLARA, CALIF., US Effective date: 20141028 |
|
| R082 | Change of representative |
Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER, SCHE, DE Effective date: 20141028 Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER & PAR, DE Effective date: 20141028 |
|
| R071 | Expiry of right |