DE102017123772B4 - Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt - Google Patents

Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt Download PDF

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Publication number
DE102017123772B4
DE102017123772B4 DE102017123772.0A DE102017123772A DE102017123772B4 DE 102017123772 B4 DE102017123772 B4 DE 102017123772B4 DE 102017123772 A DE102017123772 A DE 102017123772A DE 102017123772 B4 DE102017123772 B4 DE 102017123772B4
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scale
measuring
sensor
magnetic field
film
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DE102017123772A1 (de
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Victor Vasiloiu
Paul Tutzu
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Priority to DE102017123772.0A priority Critical patent/DE102017123772B4/de
Priority to ATA50783/2018A priority patent/AT520709B1/de
Priority to US16/755,202 priority patent/US11512982B2/en
Priority to CN201880080182.4A priority patent/CN111492206B/zh
Priority to EP18792358.6A priority patent/EP3695194B1/de
Priority to DE112018004533.1T priority patent/DE112018004533A5/de
Priority to JP2020521313A priority patent/JP7311500B2/ja
Priority to PCT/AT2018/060240 priority patent/WO2019071284A1/de
Publication of DE102017123772A1 publication Critical patent/DE102017123772A1/de
Publication of DE102017123772B4 publication Critical patent/DE102017123772B4/de
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451—Incremental encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2033—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils controlling the saturation of a magnetic circuit by means of a movable element, e.g. a magnet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2046—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable ferromagnetic element, e.g. a core
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
    • G01D5/2241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils by controlling the saturation of a magnetic circuit by means of a movable element, e.g. a magnet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0094—Sensor arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/063—Magneto-impedance sensors; Nanocristallin sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/04—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE102017123772.0A 2017-10-12 2017-10-12 Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt Active DE102017123772B4 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE102017123772.0A DE102017123772B4 (de) 2017-10-12 2017-10-12 Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt
ATA50783/2018A AT520709B1 (de) 2017-10-12 2018-09-13 Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt
EP18792358.6A EP3695194B1 (de) 2017-10-12 2018-10-09 Elektromagnetisches messsystem für die erfassung von länge und winkel basierend auf dem magnetoimpedanzeffekt
CN201880080182.4A CN111492206B (zh) 2017-10-12 2018-10-09 基于磁阻效应的用于距离或角度测量的电磁测量系统
US16/755,202 US11512982B2 (en) 2017-10-12 2018-10-09 Electromagnetic measuring system for detecting length and angle on the basis of the magnetoimpedance effect
DE112018004533.1T DE112018004533A5 (de) 2017-10-12 2018-10-09 Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt
JP2020521313A JP7311500B2 (ja) 2017-10-12 2018-10-09 磁気インピーダンス効果を利用した距離及び角度を測定するための電磁計測システム
PCT/AT2018/060240 WO2019071284A1 (de) 2017-10-12 2018-10-09 Elektromagnetisches messsystem für die erfassung von länge und winkel basierend auf dem magnetoimpedanzeffekt

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102017123772.0A DE102017123772B4 (de) 2017-10-12 2017-10-12 Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt

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DE102017123772A1 DE102017123772A1 (de) 2019-04-18
DE102017123772B4 true DE102017123772B4 (de) 2019-06-19

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DE102017123772.0A Active DE102017123772B4 (de) 2017-10-12 2017-10-12 Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt
DE112018004533.1T Pending DE112018004533A5 (de) 2017-10-12 2018-10-09 Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt

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DE112018004533.1T Pending DE112018004533A5 (de) 2017-10-12 2018-10-09 Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt

Country Status (4)

Country Link
JP (1) JP7311500B2 (ja)
CN (1) CN111492206B (ja)
AT (1) AT520709B1 (ja)
DE (2) DE102017123772B4 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112747664B (zh) * 2020-12-30 2022-06-17 苏州博古特智造有限公司 一种线性磁阻位置传感器

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AT406715B (de) 1997-09-15 2000-08-25 Newald Herbert Dipl Ing Einrichtung zum erfassen der daten eines magnetisch codierten datenträgers mit einem sensor
US6239594B1 (en) 1998-09-25 2001-05-29 Alps Electric Co., Ltd. Mageto-impedance effect element
EP1164358A1 (de) 2000-06-16 2001-12-19 AMO Automatisierung Messtechnik Optik GmbH Induktives Längenmesssystem
DE19953190C2 (de) 1999-11-05 2002-11-07 Bosch Gmbh Robert Sensoranordnung zur Erfassung eines Drehwinkels
DE102004017191A1 (de) 2004-04-07 2005-10-27 Infineon Technologies Ag Vorrichtung und Verfahren zur Ermittlung einer Richtung eines Objekts
US7791331B2 (en) 2005-02-08 2010-09-07 Continental Automotive France Use of magneto-impedance on a contactless position sensor and corresponding sensor
EP2378253A2 (en) 2010-04-12 2011-10-19 Murata Machinery, Ltd. Magnetic pole detection system and magnetic pole detection method
DE102014201975A1 (de) 2013-08-28 2015-03-05 Micro-Epsilon Messtechnik Gmbh & Co. Kg Sensor mit einem Sensorelement und Verfahren zur Herstellung des Sensorelements

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Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT406715B (de) 1997-09-15 2000-08-25 Newald Herbert Dipl Ing Einrichtung zum erfassen der daten eines magnetisch codierten datenträgers mit einem sensor
US6239594B1 (en) 1998-09-25 2001-05-29 Alps Electric Co., Ltd. Mageto-impedance effect element
DE19953190C2 (de) 1999-11-05 2002-11-07 Bosch Gmbh Robert Sensoranordnung zur Erfassung eines Drehwinkels
EP1164358A1 (de) 2000-06-16 2001-12-19 AMO Automatisierung Messtechnik Optik GmbH Induktives Längenmesssystem
DE102004017191A1 (de) 2004-04-07 2005-10-27 Infineon Technologies Ag Vorrichtung und Verfahren zur Ermittlung einer Richtung eines Objekts
US7791331B2 (en) 2005-02-08 2010-09-07 Continental Automotive France Use of magneto-impedance on a contactless position sensor and corresponding sensor
EP2378253A2 (en) 2010-04-12 2011-10-19 Murata Machinery, Ltd. Magnetic pole detection system and magnetic pole detection method
DE102014201975A1 (de) 2013-08-28 2015-03-05 Micro-Epsilon Messtechnik Gmbh & Co. Kg Sensor mit einem Sensorelement und Verfahren zur Herstellung des Sensorelements

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Publication number Publication date
DE112018004533A5 (de) 2020-05-28
DE102017123772A1 (de) 2019-04-18
CN111492206B (zh) 2022-10-11
AT520709B1 (de) 2020-11-15
JP7311500B2 (ja) 2023-07-19
AT520709A1 (de) 2019-06-15
JP2020537152A (ja) 2020-12-17
CN111492206A (zh) 2020-08-04

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