DE102013113351A1 - Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe - Google Patents

Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe Download PDF

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Publication number
DE102013113351A1
DE102013113351A1 DE102013113351.7A DE102013113351A DE102013113351A1 DE 102013113351 A1 DE102013113351 A1 DE 102013113351A1 DE 102013113351 A DE102013113351 A DE 102013113351A DE 102013113351 A1 DE102013113351 A1 DE 102013113351A1
Authority
DE
Germany
Prior art keywords
membrane
piston
vacuum pump
dead center
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102013113351.7A
Other languages
German (de)
English (en)
Other versions
DE102013113351A8 (de
Inventor
Armin Conrad
Sebastian Oberbeck
Wolfgang Söhngen
Peter Vorwerk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51903814&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE102013113351(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to DE102013113351.7A priority Critical patent/DE102013113351A1/de
Priority to EP14192137.9A priority patent/EP2889481B2/de
Priority to JP2014243343A priority patent/JP6154797B2/ja
Publication of DE102013113351A1 publication Critical patent/DE102013113351A1/de
Publication of DE102013113351A8 publication Critical patent/DE102013113351A8/de
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
DE102013113351.7A 2013-12-03 2013-12-03 Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe Pending DE102013113351A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102013113351.7A DE102013113351A1 (de) 2013-12-03 2013-12-03 Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe
EP14192137.9A EP2889481B2 (de) 2013-12-03 2014-11-06 Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe
JP2014243343A JP6154797B2 (ja) 2013-12-03 2014-12-01 メンブラン真空ポンプの較正の為の方法、およびメンブラン真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013113351.7A DE102013113351A1 (de) 2013-12-03 2013-12-03 Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe

Publications (2)

Publication Number Publication Date
DE102013113351A1 true DE102013113351A1 (de) 2015-06-03
DE102013113351A8 DE102013113351A8 (de) 2024-05-08

Family

ID=51903814

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013113351.7A Pending DE102013113351A1 (de) 2013-12-03 2013-12-03 Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe

Country Status (3)

Country Link
EP (1) EP2889481B2 (ja)
JP (1) JP6154797B2 (ja)
DE (1) DE102013113351A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
WO2020253070A1 (zh) * 2019-06-18 2020-12-24 苏州思维医疗科技有限公司 压力真空控制泵
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe
CN113606121A (zh) * 2021-08-31 2021-11-05 常熟市思源压缩机产业协同创新中心 一种隔膜式压缩机

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11002270B2 (en) * 2016-04-18 2021-05-11 Ingersoll-Rand Industrial U.S., Inc. Cooling methods for electrically operated diaphragm pumps
DE102019117729A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1960371A1 (de) 1969-12-02 1971-06-09 Klein Heinrich Georg Anhebungsfreies Krankenaufnahmefaltsystem,Steckquerholm,auswechselbare,fuer Decken,Gurte und Verbindung Kopfstuetze,loser Querholmgleiter und Magnethalter
DE3246731A1 (de) * 1982-12-17 1984-06-20 Wabco Westinghouse Steuerungstechnik GmbH & Co, 3000 Hannover Einrichtung zum erfassen der position des kolbens eines arbeitszylinders
DE69631405T2 (de) * 1995-11-15 2004-12-02 Matsushita Electric Industrial Co., Ltd., Kadoma Vibrierender Kompressor
DE19910920B4 (de) * 1999-03-12 2006-05-11 Rietschle Thomas Memmingen Gmbh Schwingankermembranpumpe
DE60027775T2 (de) * 1999-12-23 2007-05-10 Whirlpool S.A. Verfahren zur regelung und überwachung der kolbenposition in einem verdichter
DE102006044248B3 (de) 2006-09-16 2008-04-03 Thomas Magnete Gmbh Membranpumpe
WO2009153279A1 (de) * 2008-06-20 2009-12-23 BSH Bosch und Siemens Hausgeräte GmbH Linearverdichter

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE859477C (de) 1951-01-30 1952-12-15 Christian Dr Groeber Kolbenverdichter fuer Kaeltemaschinen
JPS534491Y2 (ja) * 1973-01-30 1978-02-04
JPS5512222A (en) * 1978-07-11 1980-01-28 Hitachi Metals Ltd Diaphragm pump
JP2590209B2 (ja) * 1988-06-29 1997-03-12 株式会社長野計器製作所 往復動作動装置
JP2001090662A (ja) * 1999-09-24 2001-04-03 Sanyo Electric Co Ltd リニアコンプレッサ
US7322801B2 (en) * 2003-08-26 2008-01-29 Thomas Industries Inc. Compact linear air pump and valve package
JP4120512B2 (ja) * 2003-08-27 2008-07-16 日産自動車株式会社 内燃機関の可変圧縮比機構及びそのピストン位置較正方法
DE102004010403A1 (de) 2004-03-03 2005-09-22 BSH Bosch und Siemens Hausgeräte GmbH Reversierender Linearantrieb mit Mitteln zur Erfassung einer Ankerposition
DE102005039772A1 (de) † 2005-08-22 2007-03-08 Prominent Dosiertechnik Gmbh Magnetdosierpumpe
SE529328C2 (sv) † 2005-11-15 2007-07-10 Johan Stenberg Styrsystem samt metod för styrning av elektromagnetiskt drivna pumpar
EP2061971A2 (de) * 2006-09-16 2009-05-27 THOMAS MAGNETE GmbH Membranpumpe

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1960371A1 (de) 1969-12-02 1971-06-09 Klein Heinrich Georg Anhebungsfreies Krankenaufnahmefaltsystem,Steckquerholm,auswechselbare,fuer Decken,Gurte und Verbindung Kopfstuetze,loser Querholmgleiter und Magnethalter
DE3246731A1 (de) * 1982-12-17 1984-06-20 Wabco Westinghouse Steuerungstechnik GmbH & Co, 3000 Hannover Einrichtung zum erfassen der position des kolbens eines arbeitszylinders
DE69631405T2 (de) * 1995-11-15 2004-12-02 Matsushita Electric Industrial Co., Ltd., Kadoma Vibrierender Kompressor
DE19910920B4 (de) * 1999-03-12 2006-05-11 Rietschle Thomas Memmingen Gmbh Schwingankermembranpumpe
DE60027775T2 (de) * 1999-12-23 2007-05-10 Whirlpool S.A. Verfahren zur regelung und überwachung der kolbenposition in einem verdichter
DE102006044248B3 (de) 2006-09-16 2008-04-03 Thomas Magnete Gmbh Membranpumpe
WO2009153279A1 (de) * 2008-06-20 2009-12-23 BSH Bosch und Siemens Hausgeräte GmbH Linearverdichter

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
WO2020253070A1 (zh) * 2019-06-18 2020-12-24 苏州思维医疗科技有限公司 压力真空控制泵
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe
CN113606121A (zh) * 2021-08-31 2021-11-05 常熟市思源压缩机产业协同创新中心 一种隔膜式压缩机
CN113606121B (zh) * 2021-08-31 2023-09-15 广东佛燃天高流体机械设备有限公司 一种隔膜式压缩机

Also Published As

Publication number Publication date
DE102013113351A8 (de) 2024-05-08
EP2889481B1 (de) 2018-04-04
EP2889481B2 (de) 2022-10-26
EP2889481A2 (de) 2015-07-01
JP2015117696A (ja) 2015-06-25
EP2889481A3 (de) 2015-10-14
JP6154797B2 (ja) 2017-06-28

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