DE10197150T1 - LSI-Prüfvorrichtung - Google Patents

LSI-Prüfvorrichtung

Info

Publication number
DE10197150T1
DE10197150T1 DE10197150T DE10197150T DE10197150T1 DE 10197150 T1 DE10197150 T1 DE 10197150T1 DE 10197150 T DE10197150 T DE 10197150T DE 10197150 T DE10197150 T DE 10197150T DE 10197150 T1 DE10197150 T1 DE 10197150T1
Authority
DE
Germany
Prior art keywords
lsi tester
lsi
tester
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10197150T
Other languages
English (en)
Inventor
Yasuo Furukawa
Masahiro Ichinomiya
Masaki Hashidume
Takeomi Tamesada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of DE10197150T1 publication Critical patent/DE10197150T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30—Marginal testing, e.g. by varying supply voltage
    • G01R31/3004—Current or voltage test
    • G01R31/3008—Quiescent current [IDDQ] test or leakage current test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Test And Diagnosis Of Digital Computers (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
DE10197150T 2000-12-28 2001-12-28 LSI-Prüfvorrichtung Withdrawn DE10197150T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000401987A JP3696507B2 (ja) 2000-12-28 2000-12-28 試験装置、試験方法、及び生産方法
PCT/JP2001/011623 WO2002054093A1 (fr) 2000-12-28 2001-12-28 Dispositif de test lsi

Publications (1)

Publication Number Publication Date
DE10197150T1 true DE10197150T1 (de) 2003-12-04

Family

ID=18866348

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10197150T Withdrawn DE10197150T1 (de) 2000-12-28 2001-12-28 LSI-Prüfvorrichtung

Country Status (4)

Country Link
US (3) US6992497B2 (de)
JP (1) JP3696507B2 (de)
DE (1) DE10197150T1 (de)
WO (1) WO2002054093A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4824319B2 (ja) * 2005-01-21 2011-11-30 ルネサスエレクトロニクス株式会社 故障検出装置及び方法、並びに信号抽出回路
US7719295B2 (en) * 2007-01-31 2010-05-18 International Business Machines Corporation Method and apparatus for implementing IC device testing with improved SPQL, reliability and yield performance
US7859288B2 (en) * 2008-09-12 2010-12-28 Advantest Corporation Test apparatus and test method for testing a device based on quiescent current
JP5413349B2 (ja) * 2010-09-30 2014-02-12 富士電機株式会社 半導体試験装置および半導体試験回路の接続装置
CN102307070B (zh) * 2011-05-26 2013-11-27 中国科学院上海微系统与信息技术研究所 毫米波段非接触式传输特性的自动测试系统与测试方法
CN102323531B (zh) * 2011-05-26 2013-11-27 中国科学院上海微系统与信息技术研究所 一种毫米波功率放大器的参数自动测试方法与测试系统
CN103185847B (zh) * 2011-12-29 2015-11-25 英业达股份有限公司 辅助测试装置
JP2013181831A (ja) * 2012-03-01 2013-09-12 Advantest Corp 試験装置
CN104205463A (zh) 2012-04-18 2014-12-10 株式会社Lg化学 电极组件和包含所述电极组件的锂二次电池
US9568540B2 (en) 2014-02-28 2017-02-14 International Business Machines Corporation Method for the characterization and monitoring of integrated circuits
CN108896898A (zh) * 2018-05-30 2018-11-27 西安易恩电气科技有限公司 功率半导体短路测试台

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102978A (en) 1978-01-31 1979-08-13 Nec Home Electronics Ltd Test method for semiconductor element
JPH06308197A (ja) * 1993-04-27 1994-11-04 Fujitsu Ltd Ｉｃ素子試験装置
JP3472971B2 (ja) * 1994-07-15 2003-12-02 株式会社アドバンテスト Ｉｃ不良解析方法及び不良解析装置
JP2814953B2 (ja) 1995-06-30 1998-10-27 日本電気株式会社 故障モードの特定方法
JPH11211788A (ja) * 1998-01-20 1999-08-06 Toshiba Corp 半導体装置
JP2000074986A (ja) * 1998-08-31 2000-03-14 Ando Electric Co Ltd デバイス試験装置
JP2000258490A (ja) * 1999-03-09 2000-09-22 Ando Electric Co Ltd デバイステストシステム
US6658581B1 (en) * 1999-03-29 2003-12-02 Agency Of Industrial Science & Technology Timing adjustment of clock signals in a digital circuit
US6400173B1 (en) * 1999-11-19 2002-06-04 Hitachi, Ltd. Test system and manufacturing of semiconductor device
US6339338B1 (en) * 2000-01-18 2002-01-15 Formfactor, Inc. Apparatus for reducing power supply noise in an integrated circuit
US6717428B1 (en) * 2000-11-02 2004-04-06 Intel Corporation Method and apparatus for detecting defects in a circuit using spectral analysis of transient power supply voltage

Also Published As

Publication number Publication date
JP3696507B2 (ja) 2005-09-21
US20060232293A1 (en) 2006-10-19
WO2002054093A1 (fr) 2002-07-11
JP2002202343A (ja) 2002-07-19
US20050099200A1 (en) 2005-05-12
US7327156B2 (en) 2008-02-05
US6992497B2 (en) 2006-01-31
US7075326B2 (en) 2006-07-11
US20060066341A1 (en) 2006-03-30

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
R016 Response to examination communication
R016 Response to examination communication
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20120703