DE10190535D2 - Emissionselektronenmikroskop - Google Patents

Emissionselektronenmikroskop

Info

Publication number
DE10190535D2
DE10190535D2 DE10190535T DE10190535T DE10190535D2 DE 10190535 D2 DE10190535 D2 DE 10190535D2 DE 10190535 T DE10190535 T DE 10190535T DE 10190535 T DE10190535 T DE 10190535T DE 10190535 D2 DE10190535 D2 DE 10190535D2
Authority
DE
Germany
Prior art keywords
electron microscope
emission electron
emission
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10190535T
Other languages
English (en)
Other versions
DE10190535B4 (de
Inventor
Krzysztof Grzelakowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE10190535D2 publication Critical patent/DE10190535D2/de
Application granted granted Critical
Publication of DE10190535B4 publication Critical patent/DE10190535B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/29—Reflection microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06383—Spin polarised electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24495—Signal processing, e.g. mixing of two or more signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/285—Emission microscopes
    • H01J2237/2857—Particle bombardment induced emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
DE10190535T 2000-02-20 2001-02-05 Emissionselektronenmikroskop Expired - Fee Related DE10190535B4 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
PL00338538A PL338538A1 (en) 2000-02-20 2000-02-20 Emission-type electron microscope
PLP.338538 2000-02-20
DE10164895A DE10164895B4 (de) 2000-02-20 2001-02-05 Emissionselektronenmikroskop mit zwei umschaltbaren Abbildungssytemen
PCT/PL2001/000010 WO2001061725A1 (de) 2000-02-20 2001-02-05 Emissionselektronenmikroskop

Publications (2)

Publication Number Publication Date
DE10190535D2 true DE10190535D2 (de) 2003-02-20
DE10190535B4 DE10190535B4 (de) 2007-09-20

Family

ID=20076088

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10190535T Expired - Fee Related DE10190535B4 (de) 2000-02-20 2001-02-05 Emissionselektronenmikroskop
DE10164895A Expired - Fee Related DE10164895B4 (de) 2000-02-20 2001-02-05 Emissionselektronenmikroskop mit zwei umschaltbaren Abbildungssytemen

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE10164895A Expired - Fee Related DE10164895B4 (de) 2000-02-20 2001-02-05 Emissionselektronenmikroskop mit zwei umschaltbaren Abbildungssytemen

Country Status (5)

Country Link
US (1) US6667477B2 (de)
AU (1) AU2001230639A1 (de)
DE (2) DE10190535B4 (de)
PL (1) PL338538A1 (de)
WO (1) WO2001061725A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10252129A1 (de) * 2002-11-04 2004-05-27 Omicron Nano Technology Gmbh Energiefilter für elektrisch geladene Teilchen und Verwendung des Energiefilters
US7456401B2 (en) * 2004-01-14 2008-11-25 Nikon Corporation Projection electron microscope, electron microscope, specimen surface observing method and micro device producing method
PL368785A1 (pl) * 2004-06-28 2006-01-09 Krzysztof Grzelakowski Obrazujący filtr energii dla elektronów i innych elektrycznie naładowanych cząstek oraz sposób filtrowania energii elektronów i innych elektrycznie naładowanych cząstek w urządzeniach elektrooptycznych za pomocą obrazującego filtru energii
GB2428868B (en) * 2005-10-28 2008-11-19 Thermo Electron Corp Spectrometer for surface analysis and method therefor
KR102493760B1 (ko) * 2017-09-28 2023-02-06 에이에스엠엘 네델란즈 비.브이. 보상 렌즈를 갖는 광학 시스템
CN110993473A (zh) * 2019-11-29 2020-04-10 河南河大科技发展有限公司 一种透射电子显微镜高压电子枪系统倒置的装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1047333B (de) * 1955-03-28 1958-12-24 Leitz Ernst Gmbh Verfahren und Vorrichtung zur elektronenmikroskopischen Abbildung von elektrischen Potentialfeldern und/oder Oberflaechen
NL7105978A (de) * 1971-04-30 1972-11-01
US4096386A (en) * 1977-04-04 1978-06-20 Taylor-Kincaid Company Light reflecting electrostatic electron lens
DE2842527C3 (de) * 1978-09-29 1981-12-17 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Elektrostatische Emissionslinse
US4564758A (en) * 1984-02-01 1986-01-14 Cameca Process and device for the ionic analysis of an insulating sample
JPH0754684B2 (ja) * 1987-08-28 1995-06-07 株式会社日立製作所 電子顕微鏡
DE3904032A1 (de) * 1989-02-10 1990-08-16 Max Planck Gesellschaft Elektronenmikroskop zur untersuchung von festkoerperoberflaechen
DE3943211C2 (de) * 1989-12-28 1995-02-02 Max Planck Gesellschaft Abbildendes elektronenoptisches Gerät
DE19543652C1 (de) * 1995-11-23 1997-01-09 Focus Gmbh Reflexionselektronenmikroskop
US6011262A (en) * 1997-03-26 2000-01-04 Nikon Corporation Object observing apparatus and method for adjusting the same
WO1999009582A1 (fr) * 1997-08-19 1999-02-25 Nikon Corporation Dispositif et procede servant a observer un objet
US5973323A (en) * 1997-11-05 1999-10-26 Kla-Tencor Corporation Apparatus and method for secondary electron emission microscope
JP3403036B2 (ja) * 1997-11-14 2003-05-06 株式会社東芝 電子ビーム検査方法及びその装置
JP3724949B2 (ja) * 1998-05-15 2005-12-07 株式会社東芝 基板検査装置およびこれを備えた基板検査システム並びに基板検査方法
WO2000036630A1 (en) * 1998-12-17 2000-06-22 Philips Electron Optics B.V. Particle-optical apparatus involving detection of auger electrons

Also Published As

Publication number Publication date
WO2001061725B1 (de) 2001-11-22
US6667477B2 (en) 2003-12-23
US20030010915A1 (en) 2003-01-16
DE10190535B4 (de) 2007-09-20
DE10164895B4 (de) 2007-10-04
PL338538A1 (en) 2001-08-27
WO2001061725A1 (de) 2001-08-23
AU2001230639A1 (en) 2001-08-27

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