DE60238015D1 - Elektronenmikroskop - Google Patents

Elektronenmikroskop

Info

Publication number
DE60238015D1
DE60238015D1 DE60238015T DE60238015T DE60238015D1 DE 60238015 D1 DE60238015 D1 DE 60238015D1 DE 60238015 T DE60238015 T DE 60238015T DE 60238015 T DE60238015 T DE 60238015T DE 60238015 D1 DE60238015 D1 DE 60238015D1
Authority
DE
Germany
Prior art keywords
electron microscope
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60238015T
Other languages
English (en)
Inventor
Eiko Nakazawa
Isao Nagaoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Science Systems Ltd
Original Assignee
Hitachi Ltd
Hitachi Science Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Science Systems Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE60238015D1 publication Critical patent/DE60238015D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
DE60238015T 2001-05-25 2002-05-21 Elektronenmikroskop Expired - Lifetime DE60238015D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001157405A JP2002352762A (ja) 2001-05-25 2001-05-25 電子顕微鏡

Publications (1)

Publication Number Publication Date
DE60238015D1 true DE60238015D1 (de) 2010-12-02

Family

ID=19001270

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60238015T Expired - Lifetime DE60238015D1 (de) 2001-05-25 2002-05-21 Elektronenmikroskop

Country Status (4)

Country Link
US (2) US6875983B2 (de)
EP (1) EP1263019B1 (de)
JP (1) JP2002352762A (de)
DE (1) DE60238015D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002352762A (ja) * 2001-05-25 2002-12-06 Hitachi Ltd 電子顕微鏡
EP1735811B1 (de) 2004-04-02 2015-09-09 California Institute Of Technology Verfahren und system für ein ultraschnelles fotoelektronen-mikroskop
US7358493B2 (en) * 2005-06-08 2008-04-15 Infineon Technologies Richmond, Lp Method and apparatus for automated beam optimization in a scanning electron microscope
JP2008177064A (ja) 2007-01-19 2008-07-31 Hitachi High-Technologies Corp 走査型荷電粒子顕微鏡装置および走査型荷電粒子顕微鏡装置で取得した画像の処理方法
JP5863357B2 (ja) * 2011-09-21 2016-02-16 オリンパス株式会社 拡大観察装置、並びに、拡大観察装置の画像表示方法及び検鏡法切換方法
WO2013119612A1 (en) 2012-02-07 2013-08-15 Board Of Trustees Of Michigan State University Electron microscope
JP7437262B2 (ja) * 2020-07-31 2024-02-22 株式会社日立ハイテク 荷電粒子線装置および電気ノイズの計測方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57212754A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Electron-beam controller for electron microscope
JPH01239743A (ja) 1988-03-19 1989-09-25 Fuji Photo Film Co Ltd 電子顕微鏡像記録読取方法
JPH05343019A (ja) * 1992-06-03 1993-12-24 Hitachi Ltd 荷電粒子線装置およびその観察方法
JPH10283969A (ja) * 1997-04-10 1998-10-23 Jeol Ltd 走査電子顕微鏡
JPH1167136A (ja) * 1997-08-26 1999-03-09 Hitachi Ltd 荷電粒子装置及び荷電粒子装置ネットワークシステム
JPH11146308A (ja) 1997-11-13 1999-05-28 Fuji Photo Film Co Ltd 画像情報記録装置および画像プリントシステム
JP2000023918A (ja) 1998-07-10 2000-01-25 Canon Inc 眼科撮影装置
US6442296B1 (en) * 1998-11-06 2002-08-27 Storage Technology Corporation Archival information storage on optical medium in human and machine readable format
JP2001235438A (ja) 2000-02-24 2001-08-31 Jeol Ltd 像観察方法および走査電子顕微鏡
JP2002352762A (ja) * 2001-05-25 2002-12-06 Hitachi Ltd 電子顕微鏡

Also Published As

Publication number Publication date
JP2002352762A (ja) 2002-12-06
US20020175282A1 (en) 2002-11-28
US20050145792A1 (en) 2005-07-07
EP1263019B1 (de) 2010-10-20
US7041977B2 (en) 2006-05-09
US6875983B2 (en) 2005-04-05
EP1263019A1 (de) 2002-12-04

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