DE10126364B9 - Aluminium-Reflexionsspiegel und Verfahren zu dessen Herstellung - Google Patents
Aluminium-Reflexionsspiegel und Verfahren zu dessen Herstellung Download PDFInfo
- Publication number
- DE10126364B9 DE10126364B9 DE10126364A DE10126364A DE10126364B9 DE 10126364 B9 DE10126364 B9 DE 10126364B9 DE 10126364 A DE10126364 A DE 10126364A DE 10126364 A DE10126364 A DE 10126364A DE 10126364 B9 DE10126364 B9 DE 10126364B9
- Authority
- DE
- Germany
- Prior art keywords
- layer
- deposition
- aluminum
- mgf
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 75
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title description 5
- 239000010410 layer Substances 0.000 claims abstract description 137
- 238000000151 deposition Methods 0.000 claims abstract description 61
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 230000008021 deposition Effects 0.000 claims abstract description 30
- 239000011521 glass Substances 0.000 claims abstract description 28
- 229910004298 SiO 2 Inorganic materials 0.000 claims abstract description 23
- 239000011241 protective layer Substances 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 11
- 238000005520 cutting process Methods 0.000 claims abstract 2
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000005137 deposition process Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 102
- 230000001681 protective effect Effects 0.000 description 54
- 239000012788 optical film Substances 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 9
- 230000007613 environmental effect Effects 0.000 description 8
- 150000003839 salts Chemical class 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 241001136792 Alle Species 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000007719 peel strength test Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3621—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a fluoride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/3663—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties specially adapted for use as mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/90—Methods
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00-167485 | 2000-06-05 | ||
| JP2000167485A JP4453886B2 (ja) | 2000-06-05 | 2000-06-05 | アルミ反射鏡の製造方法およびアルミ反射鏡 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE10126364A1 DE10126364A1 (de) | 2001-12-13 |
| DE10126364B4 DE10126364B4 (de) | 2006-02-09 |
| DE10126364B9 true DE10126364B9 (de) | 2006-07-13 |
Family
ID=18670635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10126364A Expired - Fee Related DE10126364B9 (de) | 2000-06-05 | 2001-05-30 | Aluminium-Reflexionsspiegel und Verfahren zu dessen Herstellung |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6558741B2 (enExample) |
| JP (1) | JP4453886B2 (enExample) |
| CN (1) | CN1144069C (enExample) |
| DE (1) | DE10126364B9 (enExample) |
| GB (1) | GB2363130B (enExample) |
| HK (1) | HK1041315A1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10240598A1 (de) * | 2002-08-27 | 2004-03-25 | Carl Zeiss Smt Ag | Optisches Abbildungssystem, insbesondere katadioptrisches Reduktionsobjektiv |
| US7445273B2 (en) * | 2003-12-15 | 2008-11-04 | Guardian Industries Corp. | Scratch resistant coated glass article resistant fluoride-based etchant(s) |
| US20100034892A1 (en) * | 2006-08-30 | 2010-02-11 | The Trustees Of Columbia University In The City Of New York | Treatment for bone formation disorders by growth factor delivery |
| US8628820B2 (en) * | 2008-03-11 | 2014-01-14 | Ppg Industries Ohio, Inc. | Reflective article and method of making a reflective article |
| CN101788694B (zh) * | 2009-12-17 | 2012-06-27 | 海洋王照明科技股份有限公司 | 具有保护膜的反光镜及其制备方法 |
| CN102002671A (zh) * | 2010-09-16 | 2011-04-06 | 耿学红 | 一种NdFeB永磁体防蚀方法 |
| CN102052633A (zh) * | 2010-12-23 | 2011-05-11 | 东莞市宝利节能有限公司 | 一种纳米反光碗的生产工艺 |
| US9556069B2 (en) * | 2011-12-28 | 2017-01-31 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique (C.R.V.C.) Sarl | Mirror with optional protective paint layer, and/or methods of making the same |
| JP5874150B2 (ja) * | 2012-01-12 | 2016-03-02 | コニカミノルタ株式会社 | レーザー走査光学装置 |
| CN102707350B (zh) * | 2012-06-19 | 2014-01-15 | 宜兴市晶科光学仪器有限公司 | 紫外可见波段高反射率高稳定性反射镜及其制备方法 |
| US9365450B2 (en) * | 2012-12-27 | 2016-06-14 | Intermolecular, Inc. | Base-layer consisting of two materials layer with extreme high/low index in low-e coating to improve the neutral color and transmittance performance |
| CN107092046A (zh) * | 2017-04-26 | 2017-08-25 | 上海默奥光学薄膜器件有限公司 | 一种宽光谱高反光镜 |
| DE102019119692A1 (de) | 2019-07-21 | 2021-01-21 | Optics Balzers Ag | Verfahren zur Herstellung umweltstabiler Aluminium Spiegel auf Kunststoff |
| CN114214590B (zh) * | 2021-12-16 | 2024-04-05 | 西湖大学 | 一种金属反射镜的制备方法以及金属反射镜 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02287301A (ja) * | 1989-04-27 | 1990-11-27 | Copal Co Ltd | 入射角非依存性高反射率誘電体多層膜反射鏡 |
| DD299774A7 (de) * | 1988-06-14 | 1992-05-07 | Zeiss Jena Veb Carl | Verfahren zur Herstellung klimastabiler, laserstrahlungsfester Metallschichtvorderflächenspiegel |
| JPH04340905A (ja) * | 1991-05-17 | 1992-11-27 | Tokyo Tokushu Glass Kk | 表面反射鏡 |
| JPH05150105A (ja) * | 1991-12-02 | 1993-06-18 | Tokyo Tokushu Glass Kk | 金属表面鏡およびその製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3107612A1 (de) * | 1981-02-27 | 1982-09-16 | Siemens AG, 1000 Berlin und 8000 München | Laserspiegel, insbesondere laser-polygonspiegel |
| DE3543178A1 (de) | 1985-12-06 | 1987-06-11 | Leybold Heraeus Gmbh & Co Kg | Verfahren zum herstellen von scheiben mit hohem transmissionsverhalten im sichtbaren spektralbereich und mit hohem reflexionsverhalten fuer waermestrahlung sowie durch das verfahren hergestellte scheiben |
| US5201926A (en) | 1987-08-08 | 1993-04-13 | Leybold Aktiengesellschaft | Method for the production of coated glass with a high transmissivity in the visible spectral range and with a high reflectivity for thermal radiation |
| US5073451A (en) | 1989-07-31 | 1991-12-17 | Central Glass Company, Limited | Heat insulating glass with dielectric multilayer coating |
| US5085904A (en) * | 1990-04-20 | 1992-02-04 | E. I. Du Pont De Nemours And Company | Barrier materials useful for packaging |
| DE19825100A1 (de) * | 1998-06-05 | 1999-12-16 | Merck Patent Gmbh | Mittel zur Herstellung von wasserabweisenden Beschichtungen auf optischen Substraten |
| JP2000171622A (ja) * | 1998-12-01 | 2000-06-23 | Canon Inc | 内面反射型の光学素子及びその製造方法 |
-
2000
- 2000-06-05 JP JP2000167485A patent/JP4453886B2/ja not_active Expired - Fee Related
-
2001
- 2001-05-17 US US09/858,460 patent/US6558741B2/en not_active Expired - Fee Related
- 2001-05-24 GB GB0112672A patent/GB2363130B/en not_active Expired - Fee Related
- 2001-05-30 DE DE10126364A patent/DE10126364B9/de not_active Expired - Fee Related
- 2001-06-05 CN CNB011194529A patent/CN1144069C/zh not_active Expired - Fee Related
-
2002
- 2002-04-22 HK HK02102999.5A patent/HK1041315A1/zh unknown
-
2003
- 2003-03-12 US US10/385,625 patent/US6643078B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD299774A7 (de) * | 1988-06-14 | 1992-05-07 | Zeiss Jena Veb Carl | Verfahren zur Herstellung klimastabiler, laserstrahlungsfester Metallschichtvorderflächenspiegel |
| JPH02287301A (ja) * | 1989-04-27 | 1990-11-27 | Copal Co Ltd | 入射角非依存性高反射率誘電体多層膜反射鏡 |
| JPH04340905A (ja) * | 1991-05-17 | 1992-11-27 | Tokyo Tokushu Glass Kk | 表面反射鏡 |
| JPH05150105A (ja) * | 1991-12-02 | 1993-06-18 | Tokyo Tokushu Glass Kk | 金属表面鏡およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001350007A (ja) | 2001-12-21 |
| US20030152782A1 (en) | 2003-08-14 |
| GB2363130B (en) | 2002-09-11 |
| JP4453886B2 (ja) | 2010-04-21 |
| DE10126364A1 (de) | 2001-12-13 |
| HK1041315A1 (zh) | 2002-07-05 |
| CN1327162A (zh) | 2001-12-19 |
| US6643078B2 (en) | 2003-11-04 |
| DE10126364B4 (de) | 2006-02-09 |
| US20020008924A1 (en) | 2002-01-24 |
| US6558741B2 (en) | 2003-05-06 |
| CN1144069C (zh) | 2004-03-31 |
| GB2363130A (en) | 2001-12-12 |
| GB0112672D0 (en) | 2001-07-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE10126364B9 (de) | Aluminium-Reflexionsspiegel und Verfahren zu dessen Herstellung | |
| DE3787949T2 (de) | Sichtvorrichtung und Verfahren zu ihrer Herstellung. | |
| DE60132914T2 (de) | Niedertemperaturverfahren zur Herstellung einer Antireflexionsbeschichtung | |
| DE69503896T2 (de) | Transparenter gegenstand mit siliciumnitrid-schutzschicht | |
| DE69212126T2 (de) | Hochtemperaturbeständige Zerstäuberbeschichtung auf Glas | |
| EP0564709B1 (de) | Beschichtetes transparentes Substrat, Verwendung hiervon, Verfahren und Anlage zur Herstellung der Schichten, und Hafnium-Oxinitrid (HfOxNy) mit 1,5 x/y 3 und 2,6 n 2,8 | |
| DE69128192T2 (de) | Verfahren zur abscheidung von nioboxid enthaltenden optischen beschichtungen mittels reaktiver gleichstromzerstäubung | |
| EP0671641B1 (de) | Mehrlagige Beschichtung | |
| DE102015102496A1 (de) | Temperatur- und korrosionsstabiler Oberflächenreflektor | |
| DE19948839A1 (de) | Leitende transparente Schichten und Verfahren zu ihrer Herstellung | |
| DE3789468T2 (de) | Verfahren zur Herstellung einer Kathodenstrahlröhre und Kathodenstrahlröhre nach diesem Herstellungsverfahren. | |
| DE3927087C2 (enExample) | ||
| EP0620456A1 (de) | Hochreflektierender Silberspiegel | |
| DE102006024524A1 (de) | Infrarotstrahlung reflektierendes, transparentes Schichtsystem | |
| DE3009533A1 (de) | Verfahren zur herstellung eines reflexverminderndenmehrschichtenbelages und optischer koerper mit reflexverminderndem mehrschichtenbelag | |
| DE102015103494B4 (de) | Verfahren zur Herstellung eines Reflektorelements und Reflektorelement | |
| DE10353776B4 (de) | Reflexionsspiegel | |
| DE102017105372B4 (de) | Transparentes Element mit einer Antireflex-Beschichtung und Verfahren zu dessen Herstellung | |
| DE10101017A1 (de) | Reflexionsminderungsbeschichtung für Ultraviolettlicht | |
| DE3909654C2 (de) | Reflexionsvermindernder Film für optische Teile aus Kunststoff | |
| DE102017104523B4 (de) | Verfahren zur Herstellung eines transparenten Elements mit einer Antireflex-Beschichtung mit stabiler Reflektivität und Farbe unter Winkel und unter Abrasion sowie nach dem Verfahren hergestelltes transparentes Element | |
| DE2407363C2 (de) | Halbreflektierende Verglasung und Verfahren zu deren Herstellung | |
| DE19541014B4 (de) | Antireflexschichtsystem und Verfahren zur Herstellung eines Antireflexschichtsystems | |
| WO2010049012A1 (de) | Hafnium- oder zirkoniumoxid-beschichtung | |
| EP1424315A1 (de) | Sonnenschutzglas |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8127 | New person/name/address of the applicant |
Owner name: FUJINON CORP., SAITAMA, JP |
|
| 8397 | Reprint of erroneous patent document | ||
| 8364 | No opposition during term of opposition | ||
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee | ||
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |
Effective date: 20141202 |