CN1144069C - 铝反射镜及其制备方法 - Google Patents

铝反射镜及其制备方法 Download PDF

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Publication number
CN1144069C
CN1144069C CNB011194529A CN01119452A CN1144069C CN 1144069 C CN1144069 C CN 1144069C CN B011194529 A CNB011194529 A CN B011194529A CN 01119452 A CN01119452 A CN 01119452A CN 1144069 C CN1144069 C CN 1144069C
Authority
CN
China
Prior art keywords
layer
depositing
protective film
aluminium
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB011194529A
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English (en)
Chinese (zh)
Other versions
CN1327162A (zh
Inventor
ܥ�ڲ���
黑部邦夫
相原进
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujinon Corp
Original Assignee
Fuji Photo Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Optical Co Ltd filed Critical Fuji Photo Optical Co Ltd
Publication of CN1327162A publication Critical patent/CN1327162A/zh
Application granted granted Critical
Publication of CN1144069C publication Critical patent/CN1144069C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors
    • G02B5/0816Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/085Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
    • G02B5/0858Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3618Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3621Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a fluoride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3649Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/3663Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties specially adapted for use as mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14Protective coatings, e.g. hard coatings
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00Optical: systems and elements
    • Y10S359/90Methods

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
CNB011194529A 2000-06-05 2001-06-05 铝反射镜及其制备方法 Expired - Fee Related CN1144069C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000167485A JP4453886B2 (ja) 2000-06-05 2000-06-05 アルミ反射鏡の製造方法およびアルミ反射鏡
JP167485/2000 2000-06-05

Publications (2)

Publication Number Publication Date
CN1327162A CN1327162A (zh) 2001-12-19
CN1144069C true CN1144069C (zh) 2004-03-31

Family

ID=18670635

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB011194529A Expired - Fee Related CN1144069C (zh) 2000-06-05 2001-06-05 铝反射镜及其制备方法

Country Status (6)

Country Link
US (2) US6558741B2 (enExample)
JP (1) JP4453886B2 (enExample)
CN (1) CN1144069C (enExample)
DE (1) DE10126364B9 (enExample)
GB (1) GB2363130B (enExample)
HK (1) HK1041315A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10240598A1 (de) * 2002-08-27 2004-03-25 Carl Zeiss Smt Ag Optisches Abbildungssystem, insbesondere katadioptrisches Reduktionsobjektiv
US7445273B2 (en) * 2003-12-15 2008-11-04 Guardian Industries Corp. Scratch resistant coated glass article resistant fluoride-based etchant(s)
WO2008027288A2 (en) * 2006-08-30 2008-03-06 The Trustees Of Columbia University In The City Of New York Treatment for craniosynostosis by growth factor delivery
US8628820B2 (en) * 2008-03-11 2014-01-14 Ppg Industries Ohio, Inc. Reflective article and method of making a reflective article
CN101788694B (zh) * 2009-12-17 2012-06-27 海洋王照明科技股份有限公司 具有保护膜的反光镜及其制备方法
CN102002671A (zh) * 2010-09-16 2011-04-06 耿学红 一种NdFeB永磁体防蚀方法
CN102052633A (zh) * 2010-12-23 2011-05-11 东莞市宝利节能有限公司 一种纳米反光碗的生产工艺
US9556069B2 (en) 2011-12-28 2017-01-31 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique (C.R.V.C.) Sarl Mirror with optional protective paint layer, and/or methods of making the same
JP5874150B2 (ja) * 2012-01-12 2016-03-02 コニカミノルタ株式会社 レーザー走査光学装置
CN102707350B (zh) * 2012-06-19 2014-01-15 宜兴市晶科光学仪器有限公司 紫外可见波段高反射率高稳定性反射镜及其制备方法
US9365450B2 (en) * 2012-12-27 2016-06-14 Intermolecular, Inc. Base-layer consisting of two materials layer with extreme high/low index in low-e coating to improve the neutral color and transmittance performance
CN107092046A (zh) * 2017-04-26 2017-08-25 上海默奥光学薄膜器件有限公司 一种宽光谱高反光镜
DE102019119692A1 (de) 2019-07-21 2021-01-21 Optics Balzers Ag Verfahren zur Herstellung umweltstabiler Aluminium Spiegel auf Kunststoff
CN114214590B (zh) * 2021-12-16 2024-04-05 西湖大学 一种金属反射镜的制备方法以及金属反射镜

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3107612A1 (de) * 1981-02-27 1982-09-16 Siemens AG, 1000 Berlin und 8000 München Laserspiegel, insbesondere laser-polygonspiegel
DE3543178A1 (de) 1985-12-06 1987-06-11 Leybold Heraeus Gmbh & Co Kg Verfahren zum herstellen von scheiben mit hohem transmissionsverhalten im sichtbaren spektralbereich und mit hohem reflexionsverhalten fuer waermestrahlung sowie durch das verfahren hergestellte scheiben
US5201926A (en) 1987-08-08 1993-04-13 Leybold Aktiengesellschaft Method for the production of coated glass with a high transmissivity in the visible spectral range and with a high reflectivity for thermal radiation
DD299774A7 (de) * 1988-06-14 1992-05-07 Zeiss Jena Veb Carl Verfahren zur Herstellung klimastabiler, laserstrahlungsfester Metallschichtvorderflächenspiegel
JPH02287301A (ja) * 1989-04-27 1990-11-27 Copal Co Ltd 入射角非依存性高反射率誘電体多層膜反射鏡
DE4024308C2 (de) 1989-07-31 1993-12-02 Central Glass Co Ltd Wärmeisolierglas mit dielektrischem Vielschichtenüberzug
US5085904A (en) * 1990-04-20 1992-02-04 E. I. Du Pont De Nemours And Company Barrier materials useful for packaging
JPH04340905A (ja) * 1991-05-17 1992-11-27 Tokyo Tokushu Glass Kk 表面反射鏡
JPH05150105A (ja) 1991-12-02 1993-06-18 Tokyo Tokushu Glass Kk 金属表面鏡およびその製造方法
DE19825100A1 (de) * 1998-06-05 1999-12-16 Merck Patent Gmbh Mittel zur Herstellung von wasserabweisenden Beschichtungen auf optischen Substraten
JP2000171622A (ja) * 1998-12-01 2000-06-23 Canon Inc 内面反射型の光学素子及びその製造方法

Also Published As

Publication number Publication date
DE10126364B4 (de) 2006-02-09
JP4453886B2 (ja) 2010-04-21
DE10126364A1 (de) 2001-12-13
US20020008924A1 (en) 2002-01-24
US6558741B2 (en) 2003-05-06
GB2363130A (en) 2001-12-12
GB2363130B (en) 2002-09-11
US6643078B2 (en) 2003-11-04
DE10126364B9 (de) 2006-07-13
HK1041315A1 (zh) 2002-07-05
CN1327162A (zh) 2001-12-19
US20030152782A1 (en) 2003-08-14
GB0112672D0 (en) 2001-07-18
JP2001350007A (ja) 2001-12-21

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