CN209854236U - Feeding mechanism for vacuum evaporation - Google Patents
Feeding mechanism for vacuum evaporation Download PDFInfo
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- CN209854236U CN209854236U CN201920388290.XU CN201920388290U CN209854236U CN 209854236 U CN209854236 U CN 209854236U CN 201920388290 U CN201920388290 U CN 201920388290U CN 209854236 U CN209854236 U CN 209854236U
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Abstract
The utility model provides a feeding mechanism for vacuum evaporation, including anchor clamps unit, arm, coating by vaporization cavity and coating by vaporization light shield, the anchor clamps unit includes mount, first couple, second couple, lateral sliding unit, clamping piece unit and a drive unit. The mechanical arm conveys glass raw materials to be evaporated, glass is placed on the first hook and the second hook, the glass on the first hook and the second hook is clamped tightly through the clamping piece unit, and then the glass is transversely tensioned through the transverse sliding unit. Therefore, when the glass is placed on the evaporation mask, the glass can be kept horizontal to the plane of the evaporation mask, so that the glass is prevented from shifting due to friction when being put down after alignment, and the glass with a thin thickness is prevented from being broken due to overlarge deformation amount in a clamping and stretching mode. After the glass is put down, the clamp unit loosens the glass, then the vacuum-pumping treatment is carried out on the evaporation cavity, and then the evaporation is carried out on the glass, so that the production efficiency and the product quality of the product are improved.
Description
Technical Field
The utility model relates to a vacuum evaporation equipment field especially relates to a feeding mechanism for vacuum evaporation.
Background
An Active-matrix organic light-emitting diode (AMOLED) or an Active-matrix organic light-emitting diode (AMOLED) is currently a mature preparation process, which is an organic vacuum evaporation process, wherein in a vacuum chamber, a crucible containing an organic material is heated to be evaporated into a film.
Specifically, glass is placed on a hook in an evaporation cavity, the glass is placed on an evaporation photomask through movement of the hook, and a specific evaporation pattern is formed on the glass through a through hole in the evaporation photomask. However, the conventional hook is usually only lapped below the glass to support and move the glass, but the glass sags in the middle due to gravity, so that when the glass is aligned with the evaporation mask and put down, the glass is deviated due to friction, tiling movement and the like, and the alignment accuracy is affected. And the thinner glass deformation amount is larger, the larger the deviation of the alignment precision can be caused, even the deformation amount is too large, the fragments are caused, unqualified products are produced by vapor deposition, and the production cost is improved.
SUMMERY OF THE UTILITY MODEL
Therefore, a feeding mechanism for vacuum evaporation is needed to solve the problem of deviation when glass to be evaporated is placed.
In order to achieve the above object, the inventor provides a feeding mechanism for vacuum evaporation, comprising a clamp unit, a mechanical arm, an evaporation cavity and an evaporation mask; the evaporation mask is arranged in the evaporation cavity, the evaporation mask is positioned at an opening above the crucible in the evaporation cavity, and the mechanical arm is arranged on one side of the evaporation cavity; the fixture unit comprises a fixed frame, a first hook, a second hook, a transverse sliding unit, a clamping piece unit and a first driving unit, the fixed frame is arranged on the other side of the evaporation cavity, the transverse sliding unit is arranged between the first hook and the second hook, and the first hook and the second hook are symmetrically arranged on two sides of the transverse sliding unit; first drive unit sets up on the mount, and first drive unit's output shaft sets up on the mount of lateral sliding unit, and the clamping piece unit sets up between first couple and second couple, and the clamping piece unit is located the top of first couple and second couple, first couple and second couple are located the opening top of coating by vaporization cavity, and the arm is used for placing the glass that needs the coating by vaporization on the barb of first couple and the barb of second couple, and the lateral sliding unit is used for driving first couple and second couple lateral shifting.
Further, the clamping piece unit comprises a first clamping plate, a second driving unit and a third driving unit, the second driving unit is arranged on the side face of the first hook, the first clamping plate is arranged on an output shaft of the second driving unit, the first clamping plate is located above the barb of the first hook, the third driving unit is arranged on the side face of the second hook, the second clamping plate is arranged on an output shaft of the third driving unit, and the second clamping plate is located above the barb of the second hook.
Further, the second driving unit and the third driving unit are cylinders, oil cylinders or linear motors.
Further, a tray is arranged at the clamping jaw end of the mechanical arm, and a supporting bulge is arranged on the top surface of the tray.
Further, be provided with the calibration notch in the backup pad of coating by vaporization light shield, the calibration notch is used for carrying on spacingly when placing glass on the coating by vaporization light shield to first couple and second couple.
Further, the lateral sliding unit includes motor, first worm rod connecting rod, second worm rod connecting rod and adapter sleeve, the motor sets up on the lateral surface of adapter sleeve, and the output shaft of motor runs through the lateral wall of adapter sleeve and is provided with the gear, and the link setting of first worm rod connecting rod is on the top of first couple, and the drive end setting of first worm rod connecting rod is in the adapter sleeve, and one side intermeshing of first worm rod connecting rod and gear sets up, and the link setting of second worm rod connecting rod is on the top of second couple, and the drive end setting of second worm rod connecting rod is in the adapter sleeve, and the opposite side intermeshing setting of second worm rod connecting rod and gear.
Further, the first driving unit is a cylinder, an oil cylinder or a linear motor.
Be different from prior art, above-mentioned technical scheme carries the glass raw materials that need the coating by vaporization through the robotic arm to place glass on the barb of first couple and second couple, it is tight with the glass clamp on first couple and the second couple through the clamping piece unit this moment, uses the horizontal slip unit to transversely take up glass then, makes and tightly is being held the glass middle part on first couple and second couple and can not take place the condition of flagging. Therefore, when the glass is placed on the evaporation mask, the glass can be kept horizontal to the plane of the evaporation mask, so that the glass is prevented from shifting due to friction when being put down after alignment, and the glass with a thin thickness is prevented from being broken due to overlarge deformation amount in a clamping and stretching mode. After the glass is put down, the clamp unit loosens the glass, then the vacuum-pumping treatment is carried out on the evaporation cavity, and then the evaporation is carried out on the glass, so that the production efficiency and the product quality of the product are improved.
Drawings
FIG. 1 is a schematic view of a feeding mechanism for vacuum evaporation according to an embodiment;
FIG. 2 is a structural diagram of a feeding mechanism for vacuum evaporation according to an embodiment;
fig. 3 is a partial schematic view of a lateral sliding unit of a feeding mechanism for vacuum evaporation according to an embodiment.
Description of reference numerals:
10. a clamp unit; 11 a fixing frame; 12. a first hook; 13. a second hook;
14. a lateral sliding unit; 15. a clip unit; 16. a first drive unit;
141. an electric motor; 142. a first scroll link; 143. a second scroll link;
144. connecting sleeves; 1411. a gear; 151. a first splint; 152. a second splint;
153. a second driving unit; 154. a third driving unit;
20. a mechanical arm; 21. a tray; 211. a support boss;
30. evaporating a cavity;
40. evaporating a photomask; 41. calibrating the notch;
Detailed Description
To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.
Referring to fig. 1, fig. 2 and fig. 3, the present embodiment provides a feeding mechanism for vacuum evaporation, including a clamp unit 10, a robot arm 20, an evaporation cavity 30 and an evaporation mask 40; the evaporation mask is arranged in the evaporation cavity, the evaporation mask is positioned at an opening above the crucible in the evaporation cavity, and the mechanical arm is arranged on one side of the evaporation cavity; the fixture unit comprises a fixed frame 11, a first hook 12, a second hook 13, a transverse sliding unit 14, a clamping piece unit 15 and a first driving unit 16, the fixed frame is arranged on the other side of the evaporation cavity, the transverse sliding unit is arranged between the first hook and the second hook, and the first hook and the second hook are symmetrically arranged on two sides of the transverse sliding unit; first drive unit sets up on the mount, and first drive unit's output shaft sets up on the mount of lateral sliding unit, and the clamping piece unit sets up between first couple and second couple, and the clamping piece unit is located the top of first couple and second couple, first couple and second couple are located the opening top of coating by vaporization cavity, and the arm is used for placing the glass that needs the coating by vaporization on the barb of first couple and the barb of second couple, and the lateral sliding unit is used for driving first couple and second couple lateral shifting. The first driving unit is a cylinder, an oil cylinder or a linear motor.
Carry the glass that needs the coating by vaporization through the arm in this embodiment, stretch into the coating by vaporization cavity with the arm, place glass on the barb of first couple and second couple, then shift out the arm. At the moment, the glass on the first hook and the second hook is clamped through the clamping piece unit, and the glass is transversely tensioned by the transverse sliding unit, so that the glass and the top surface plane of the evaporation mask are in a parallel state, namely, the condition that the middle part of the glass clamped on the first hook and the second hook cannot sag is ensured, the glass is prevented from being deviated due to friction when being put down after being aligned, and the glass with small thickness is prevented from being broken due to overlarge deformation amount through clamping and stretching. When the alignment is calibrated again, the alignment precision of the glass in the evaporation cavity and the evaporation mask can be effectively improved, the evaporation precision is improved, the evaporation yield is improved, and the production cost is reduced.
After accurate counterpoint, drive first couple through first drive unit, the second couple, lateral sliding unit and clamping piece unit move down together, lean on placing on the coating by vaporization light shield until first couple and second couple top, the placing on the coating by vaporization light shield that flattening glass can counterpoint simultaneously, the glass is loosened to the anchor clamps unit this moment, and shift out whole anchor clamps unit from the coating by vaporization cavity through first drive unit, then carry out evacuation processing to the coating by vaporization cavity, the heating of the organic material in the rethread crucible carries out the coating by vaporization to glass, the production efficiency and the product quality of product have been improved. The glass is conveyed in a clamping and stretching mode, so that the damage of a fine metal mask caused by the breakage of the glass with a thin thickness due to overlarge deformation can be effectively prevented, and the manufacturing cost is reduced.
The clip unit in this embodiment includes a first clip plate 151, a second clip plate 152, a second driving unit 153, and a third driving unit 154, the second driving unit is disposed on a side surface of the first hook, the first clip plate is disposed on an output shaft of the second driving unit, and the first clip plate is located above the barb of the first hook, the third driving unit is disposed on a side surface of the second hook, the second clip plate is disposed on an output shaft of the third driving unit, and the second clip plate is located above the barb of the second hook. The second driving unit and the third driving unit are cylinders, oil cylinders or linear motors.
In this embodiment, the gripper end of the robot arm is provided with a tray 21, and the top surface of the tray is provided with a supporting protrusion 211. In order to avoid the abrasion of the mechanical arm to the glass when the mechanical arm grabs and clamps the glass, the glass is placed on a tray of the mechanical arm in a supporting and lifting mode. The supporting protrusions are arranged on the tray and adopt a local supporting mode to place the glass, so that when the glass is conveyed, the glass is prevented from rubbing with the mechanical arm, the surface of the glass is abraded, and the practicability of the feeding mechanism is improved.
In this embodiment be provided with calibration notch 41 in the backup pad of coating by vaporization light shield, the calibration notch is used for carrying on spacingly when placing glass on the coating by vaporization light shield to first couple and second couple. In order to make when placing first couple and second couple at the coating by vaporization light shield, glass and coating by vaporization light shield can pinpoint, consequently carries on spacingly to first couple and second couple through calibration notch. Namely, set up a notch in the position department of first couple and coating by vaporization light cover line contact, the corresponding position department that also sets up a notch at second couple and coating by vaporization light cover line contact, consequently when descending through first drive unit drive first couple and second couple, first couple and second couple can be to the gomphosis in its notch that corresponds, have guaranteed that glass can laminate on the coating by vaporization light cover.
In this embodiment the lateral sliding unit includes a motor 141, a first scroll rod 142, a second scroll rod 143, and a connecting sleeve 144, the motor is disposed on the outer side surface of the connecting sleeve, an output shaft of the motor is provided with a gear 1411 through a side wall of the connecting sleeve, a connecting end of the first scroll rod is disposed on a top end of the first hook, a driving end of the first scroll rod is disposed in the connecting sleeve, and the first scroll rod and one side of the gear are engaged with each other, a connecting end of the second scroll rod is disposed on a top end of the second hook, a driving end of the second scroll rod is disposed in the connecting sleeve, and the second scroll rod and the other side of the gear are engaged with each other. The starting motor drives the gear to rotate, and the first worm connecting rod and the second worm connecting rod can be driven to transversely move in the connecting sleeve in a worm gear worm mode. For example: drive first scroll bar connecting rod and second scroll bar connecting rod simultaneously and move outwards, and then drive first couple and the removal of second couple, reach and strain the glass of centre gripping on first couple and the second couple, keep the plane horizontally state of glass and coating by vaporization light shield, consequently when placing, can effectually avoid the glass skew, improved the quality of coating by vaporization and production efficiency.
It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, the changes and modifications of the embodiments described herein, or the equivalent structure or equivalent process changes made by the contents of the specification and the drawings of the present invention, directly or indirectly apply the above technical solutions to other related technical fields, all included in the protection scope of the present invention.
Claims (7)
1. A feeding mechanism for vacuum evaporation is characterized by comprising a clamp unit, a mechanical arm, an evaporation cavity and an evaporation mask;
the evaporation mask is arranged in the evaporation cavity, the evaporation mask is positioned at an opening above the crucible in the evaporation cavity, and the mechanical arm is arranged on one side of the evaporation cavity;
the fixture unit comprises a fixed frame, a first hook, a second hook, a transverse sliding unit, a clamping piece unit and a first driving unit, the fixed frame is arranged on the other side of the evaporation cavity, the transverse sliding unit is arranged between the first hook and the second hook, and the first hook and the second hook are symmetrically arranged on two sides of the transverse sliding unit;
first drive unit sets up on the mount, and first drive unit's output shaft sets up on the mount of lateral sliding unit, and the clamping piece unit sets up between first couple and second couple, and the clamping piece unit is located the top of first couple and second couple, first couple and second couple are located the opening top of coating by vaporization cavity, and the arm is used for placing the glass that needs the coating by vaporization on the barb of first couple and the barb of second couple, and the lateral sliding unit is used for driving first couple and second couple lateral shifting.
2. The feeding mechanism for vacuum evaporation as claimed in claim 1, wherein the clamping piece unit includes a first clamping plate, a second driving unit and a third driving unit, the second driving unit is disposed on a side surface of the first hook, the first clamping plate is disposed on an output shaft of the second driving unit, the first clamping plate is located above a barb of the first hook, the third driving unit is disposed on a side surface of the second hook, the second clamping plate is disposed on an output shaft of the third driving unit, and the second clamping plate is located above a barb of the second hook.
3. The feeding mechanism for vacuum evaporation as claimed in claim 2, wherein the second driving unit and the third driving unit are cylinders, oil cylinders or linear motors.
4. The feeding mechanism for vacuum evaporation as claimed in claim 1, wherein a tray is provided at a clamping jaw end of the mechanical arm, and a supporting protrusion is provided on a top surface of the tray.
5. The feeding mechanism for vacuum evaporation as claimed in claim 1, wherein the supporting plate of the evaporation mask is provided with a calibration notch, and the calibration notch is used for limiting the first hook and the second hook when placing glass on the evaporation mask.
6. The feeding mechanism for vacuum evaporation according to claim 1, wherein the lateral sliding unit includes a motor, a first scroll rod, a second scroll rod and a connecting sleeve, the motor is disposed on an outer side surface of the connecting sleeve, an output shaft of the motor is provided with a gear through a side wall of the connecting sleeve, a connecting end of the first scroll rod is disposed on a top end of the first hook, a driving end of the first scroll rod is disposed in the connecting sleeve, the first scroll rod is disposed in a mutually meshed manner with one side of the gear, a connecting end of the second scroll rod is disposed on a top end of the second hook, a driving end of the second scroll rod is disposed in the connecting sleeve, and the second scroll rod is disposed in a mutually meshed manner with the other side of the gear.
7. The feeding mechanism for vacuum evaporation as claimed in claim 1, wherein the first driving unit is a cylinder, an oil cylinder or a linear motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920388290.XU CN209854236U (en) | 2019-03-26 | 2019-03-26 | Feeding mechanism for vacuum evaporation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920388290.XU CN209854236U (en) | 2019-03-26 | 2019-03-26 | Feeding mechanism for vacuum evaporation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209854236U true CN209854236U (en) | 2019-12-27 |
Family
ID=68935169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920388290.XU Active CN209854236U (en) | 2019-03-26 | 2019-03-26 | Feeding mechanism for vacuum evaporation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209854236U (en) |
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2019
- 2019-03-26 CN CN201920388290.XU patent/CN209854236U/en active Active
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