CN208151466U - Revision board, uniform correcting device and its coating machine - Google Patents
Revision board, uniform correcting device and its coating machine Download PDFInfo
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- CN208151466U CN208151466U CN201820565363.3U CN201820565363U CN208151466U CN 208151466 U CN208151466 U CN 208151466U CN 201820565363 U CN201820565363 U CN 201820565363U CN 208151466 U CN208151466 U CN 208151466U
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- revision board
- umbrella stand
- support arm
- correcting device
- film
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Abstract
The utility model discloses the utility model to provide a kind of revision board, and the revision board is in bending structure, and the bending structure forms arcwall face；The structure of the revision board of the utility model is simple, uniform convenient for forming thickness；The invention also discloses a kind of uniform correcting devices with above-mentioned revision board, it includes revision board and supporting mechanism, the revision board is as described above, the supporting mechanism includes support arm and roll shaft, one end of the support arm connects the revision board, the other end of the support arm connects the roll shaft, and the support arm is in the relative altitude for adjusting the revision board swung up and down by axle center of the roll shaft；The invention also discloses a kind of coating machines with above-mentioned uniform correcting device.
Description
Technical field
The utility model relates to evaporation coating techniques field more particularly to a kind of revision boards, uniform correcting device and its plating
Film machine.
Background technique
Currently, manufacturing optical thin film using coating machine in optical thin film industry, principle is by by optical film materials
Gas injection after gasification ingredient minor structure is to the umbrella stand for offering film coating unit, and umbrella stand is by constantly rotating so that gasify
Optical film materials afterwards solidify in film coating unit generates optical thin film.However, since umbrella stand is umbrella-shaped structure, the light after gasification
Learning when thin-film material sprays has initial velocity, and the distance that the optical film materials after gasification reach each point of umbrella stand is different, makes
The quantity that optical film materials after must gasifying reach each point of umbrella stand is different, causes same film coating unit and different plated film lists
The optical thin film generated between member it is in uneven thickness, leverage the precision of optical thin film.In the prior art, production process
Also the revision board of slab construction can be used to stop the optical film materials after gasification to be directly injected to umbrella stand, to reduce because of gasification
With the in uneven thickness of optical thin film caused by different initial velocity when optical film materials spray afterwards.But due to plate
Each point of the revision board of structure to umbrella stand each point distance it is inconsistent, can still make the uneven thickness of optical thin film
It is even, it is still unable to satisfy requirement of the prior art to high-precision optical film, constrains the development of optical thin film industry significantly.
Therefore, need a kind of simple structure, the revision board convenient for forming film in homogeneous thickness, uniform correcting device and
Its coating machine.
Utility model content
The simple, amendment convenient for forming film in homogeneous thickness that the purpose of this utility model is to provide a kind of structures
Plate.
The another object of the utility model be to provide a kind of structure it is simple, convenient for forming the equal of film in homogeneous thickness
Even correcting device.
The further object of the utility model is to provide that a kind of structure is simple, the plating convenient for forming film in homogeneous thickness
Film machine.
To achieve the above object, the utility model provides a kind of revision board, and the revision board is in bending structure, described curved
Folded structure forms arcwall face.
Preferably, the revision board is provided with reinforcing rib.
Preferably, the reinforcing rib and the revision board are integrally formed.
Preferably, the olive shape structure that the revision board is wide in the narrow centre in both ends.
Correspondingly, the utility model additionally provides a kind of uniform correcting device comprising revision board and supporting mechanism, it is described
For revision board as described above, the supporting mechanism includes support arm and roll shaft, one end of the support arm connects the revision board, institute
The other end for stating support arm connects the roll shaft, and the support arm is repaired using the roll shaft as axle center in described in the adjusting swung up and down
The relative altitude of positive plate.
Preferably, the supporting mechanism further includes connector, the connector is connected to the revision board and the support
Between arm.
Preferably, the connector is vertically installed on the support arm.
Correspondingly, the utility model additionally provides a kind of coating machine comprising shell, umbrella stand and uniformly repairs as described above
Equipment, the shell form vapor deposition chamber in hollow structure, and the umbrella stand is set to intracavitary, the umbrella of the vapor deposition in rotation
Frame is in umbrella-shaped structure, and the umbrella-shaped structure forms spherical, and the spherical is in several film coating units of formation of hollow out, described equal
The arcwall face of even correcting device is corresponding with the spherical, and the roll shaft is articulated on the side wall of the plating membrane cavity, plating
The gas that the revision board stops the evaporation source below umbrella stand to be formed when film is directly injected on umbrella stand, and the gas is by described
Revision board is in forming film in homogeneous thickness in the film coating unit.
Preferably, the curvature of the arcwall face is equal to the curvature of the spherical.
Preferably, the coating machine includes the two uniform correcting devices being symmetrical set, the both ends of the revision board
It is located at the center of the umbrella stand and the underface at edge.
Compared with prior art, the coating machine of the utility model includes umbrella stand and uniform correcting device, uniform correcting device
Including revision board and supporting mechanism, revision board is in bending structure to form arcwall face, the spherical phase of the arcwall face and umbrella stand
Match, when gas is sprayed towards umbrella stand, effectively stops gas straight by the matching of the spherical of the arcwall face and umbrella stand of revision board
Injection is connect to keep away in umbrella stand so that gas can uniformly form film in homogeneous thickness in the film coating unit of revision board
Gas is exempted from towards when umbrella stand injection, the distance of the various pieces of spherical when spraying due to gas apart from umbrella stand is different, same
The time that the gas of initial velocity reaches the various pieces of the spherical of umbrella stand is different, leads to same film coating unit and different plated film lists
Uneven film thickness between member is even, effectively increases the optical accuracy of film；One end connection of the support arm of supporting mechanism is repaired
Positive plate, the other end connect roll shaft, swing up and down support arm using roll shaft as axle center to drive swinging up and down for revision board, adjustment amendment
The arcwall face of plate to umbrella stand spherical distance, convenient for rationally corrected according to actual production demand the relative altitude of arcwall face with
Optimization forms film in homogeneous thickness.
Detailed description of the invention
Fig. 1 is the structural block diagram of the coating machine of the utility model.
Fig. 2 is the structural block diagram of the uniform correcting device of the utility model.
Fig. 3 is the front view of Fig. 2.
Fig. 4 is the structural schematic diagram in olivary revision board.
Specific embodiment
The embodiments of the present invention are described referring now to the drawings, similar element numbers represent similar member in attached drawing
Part.
Refering to Figure 1, the utility model provides a kind of coating machine 100, the thickness of the film manufactured is equal
It is even, it can be used for manufacturing the optical thin film in the first-class optical instrument of such as high-definition camera, provide the light of high quality for optical instrument
Learn film.Wherein, which includes shell 10, umbrella stand 30 and uniform correcting device 40.Specifically, shell 10 is in hollow
Structure forms vapor deposition chamber 11, which is a vacuum chamber, provides the reliably working environment of vacuum for the generation of film, avoids
Film is interfered in generating process by the pollution of the impurity such as dust.Umbrella stand 30 is set in vapor deposition chamber 11 in rotation, umbrella stand
30 be in umbrella-shaped structure, and umbrella-shaped structure forms spherical 31, and spherical 31 forms several plated film lists formed for film in hollow out
Member 32.It is evaporation source immediately below umbrella stand 30, which is for making the material of plated film after high-temperature gasification is molecular structure
Gas, evaporation source, which is gasificated into after the gas of molecular structure towards umbrella stand 30, sprays.It should be noted that the present embodiment is deposited
The pyrolytic in source is by the way that in placing an equipment for gasification 20 being located at immediately below umbrella stand 30 in vapor deposition chamber 11, the equipment for gasification 20 is high
Temperature decomposes evaporation source, and the evaporation source to gasify as gas is sprayed towards umbrella stand 30, and certainly, equipment for gasification 20 can also be placed outside
It is deposited outside chamber 11, opens a nozzle being connected to equipment for gasification in the underface that vapor deposition chamber 11 is located at umbrella stand 30, it is direct by nozzle
External generation volume gas is sprayed towards umbrella stand 30, this will not be repeated here.Vapor deposition chamber 11 is symmetrical set to be corrected there are two uniform
Device 40, to provide comprehensive blocking protection for umbrella stand 30.When work, when equipment for gasification 20 sprays gas towards umbrella stand 30, umbrella
For frame 30 when at the uniform velocity rotation above chamber 22 is deposited, equipment for gasification 20 sprays gas towards umbrella stand 30 in synchronous, and gas is in plated film
Film is formed by curing on unit 32, and uniformly correcting device 40 stops gas to be directly injected on umbrella stand 30, avoids arriving because of gas
The in uneven thickness of film is caused up to the distance of same film coating unit 32 and different film coating units 32 difference.It needs to illustrate
It is that the quantity of the uniform correcting device 40 of the present embodiment is set as two, certainly, the quantity of uniform correcting device 40 can also be set
It is set to one, three or four etc., the quantity of uniform correcting device 40 is set according to the uniform required precision of actual film, herein
It does not repeat them here.The specific structure of the uniform correcting device 40 of the present embodiment is described more fully below.
It please referring to shown in Fig. 1-Fig. 4, the uniform correcting device 40 of the present embodiment includes revision board 41 and supporting mechanism 42,
In, revision board 41 is in bending structure, which forms arcwall face 411, it is preferred that the curvature of the arcwall face 411 is equal to ball
The curvature in shape face 31, to guarantee that the distance between arcwall face 411 and spherical 31 are equal, so that gas is corrected the resistance of plate 41
After gear, the gas after being blocked can uniformly be distributed in spherical 31, uniformly solidify shape in film coating unit 32 from forming
At film.Revision board 41 is provided with reinforcing rib 412, which is shaped in revision board 41 to promote reinforcement revision board
41 hardness prevents revision board 41 from influencing the curvature of arcwall face 411 because of temperature distortion, influences the coating machine 100 of the present embodiment
Operating accuracy.Further, revision board 41 is set as the olive shape structure wide in the narrow centre in both ends as shown in Figure 4, due to
In umbrella-shaped structure when gas is ejected from equipment for gasification 20, the revision board 41 of the olive shape structure in practice can be more
It is effective that gas is stopped to be directly injected on umbrella stand 30, so that the uniformity of the thickness of the film formed in film coating unit 32 is more
It is good.Further, the both ends of revision board 41 are located at the center of umbrella stand 30 and the underface at edge, so that in symmetrically setting up separately
Blocking gas that can be comprehensive in two revision boards 41 of two uniform correcting devices 40 of vapor deposition chamber 11 is directly injected into umbrella stand 30
On, to further promote the uniformity of the thickness of film.
It please refers to shown in Fig. 1-Fig. 3, the supporting mechanism 42 of the present embodiment includes support arm 421 and roll shaft 422, support arm
421 one end connects revision board 41, and the other end of support arm 421 connects roll shaft 422, and support arm 421 is in for axle center with roll shaft 422
The relative altitude of the adjusting revision board 41 swung up and down.Wherein, supporting mechanism 42 further includes connector 423, and connector 423 is distinguished
Connect revision board 41 and support arm 421, it is preferred that connector 423 is vertically installed on support arm 421.Roll shaft 422 is articulated in plating
On the side wall of membrane cavity, support arm 421 is swung up and down, since connector 423 and support arm 421 are vertically arranged, so that support arm 421
Revision board 41 is able to drive in upper and lower swing, to adjust the distance that revision board 41 arrives umbrella stand 30.Specifically, the arc of revision board 41
Shape face 411 is corresponding with the spherical 31 of umbrella stand 30, and revision board 41 can guarantee arcwall face during swinging up and down always
Each point of 411 to spherical 31 is equidistant, and when equipment for gasification 20 sprays gas towards umbrella stand 30, revision board 41 can hinder
Gear gas is directly injected into umbrella stand 30, and gas is formed by revision board 41 in same film coating unit 32 and different film coating units 32
Film in homogeneous thickness.
In conjunction with shown in Fig. 1-Fig. 4, the coating machine 100 of the utility model correcting device 40 including umbrella stand 30 and uniformly, uniformly
Correcting device 40 includes revision board 41 and supporting mechanism 42, and revision board 41 is in bending structure to form arcwall face 411, the arcwall face
411 match with the spherical 31 of umbrella stand 30, when gas is sprayed towards umbrella stand 30, by the arcwall face 411 and umbrella of revision board 41
The matching of the spherical 31 of frame 30 and effectively stop gas to be directly injected into umbrella stand 30 so that gas can repaired uniformly
Film in homogeneous thickness is formed in the film coating unit 32 of positive plate 41, when avoiding gas and spraying towards umbrella stand 30, since gas sprays
When spherical 31 apart from umbrella stand 30 various pieces distance it is different, the gas of same initial velocity reaches the spherical of umbrella stand 30
The time of 31 various pieces is different, leads to the uneven film thickness between same film coating unit 32 and different film coating units 32
It is even, effectively increase the optical accuracy of film；One end of the support arm 421 of supporting mechanism 42 connects revision board 41, and the other end connects
Roll shaft 422 is connect, is that axle center swings up and down support arm 421 to drive swinging up and down for revision board 41 with roll shaft 422, adjusts revision board
41 arcwall face 411 to umbrella stand 30 spherical 31 distance, convenient for according to actual production demand rationally correct arcwall face 411 in
The relative distance of spherical 31 is with the formation optimized film in homogeneous thickness.
It above disclosure is merely preferred embodiments of the utility model, certainly cannot be practical new to limit this with this
The interest field of type, therefore equivalent variations made according to the patent scope of the utility model still belong to the utility model and are covered
Range.
Claims (10)
1. a kind of revision board, which is characterized in that the revision board is in bending structure, and the bending structure forms arcwall face.
2. revision board as described in claim 1, which is characterized in that the revision board is provided with reinforcing rib.
3. revision board as claimed in claim 2, which is characterized in that the reinforcing rib and the revision board are integrally formed.
4. revision board as described in claim 1, which is characterized in that the revision board olive shape knot wide in the narrow centre in both ends
Structure.
5. a kind of uniform correcting device, which is characterized in that including revision board and supporting mechanism, the revision board such as claim 1-
Described in any one of 4, the supporting mechanism includes support arm and roll shaft, and one end of the support arm connects the revision board, institute
The other end for stating support arm connects the roll shaft, and the support arm is repaired using the roll shaft as axle center in described in the adjusting swung up and down
Positive plate is to adjust the relative altitude of the arcwall face.
6. uniform correcting device as claimed in claim 5, which is characterized in that the supporting mechanism further includes connector, described
Connector is connected between the revision board and the support arm.
7. uniform correcting device as claimed in claim 6, which is characterized in that the connector is vertically installed in the support arm
On.
8. a kind of coating machine comprising shell and umbrella stand, the shell form vapor deposition chamber in hollow structure, and the umbrella stand is in rotation
To be set to the vapor deposition intracavitary, the umbrella stand is in umbrella-shaped structure, and the umbrella-shaped structure forms spherical, and the spherical is in engraving
Empty several film coating units of formation, which is characterized in that the coating machine further includes uniform correcting device, the uniform correcting device
As described in any one of claim 5-7, the arcwall face is corresponding with the spherical, and the roll shaft is articulated in the plated film
On the side wall of chamber, when plated film the revision board gas that stops the evaporation source below umbrella stand to be formed be directly injected on umbrella stand, institute
Gas is stated by the revision board in forming film in homogeneous thickness in the film coating unit.
9. coating machine as claimed in claim 8, which is characterized in that the curvature of the arcwall face is equal to the song of the spherical
Rate.
10. coating machine as claimed in claim 8, which is characterized in that the coating machine include two be symmetrical set it is described
Even correcting device, the both ends of the revision board are located at the center of the umbrella stand and the underface at edge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820565363.3U CN208151466U (en) | 2018-04-18 | 2018-04-18 | Revision board, uniform correcting device and its coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820565363.3U CN208151466U (en) | 2018-04-18 | 2018-04-18 | Revision board, uniform correcting device and its coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208151466U true CN208151466U (en) | 2018-11-27 |
Family
ID=64379829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820565363.3U Active CN208151466U (en) | 2018-04-18 | 2018-04-18 | Revision board, uniform correcting device and its coating machine |
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| Country | Link |
|---|---|
| CN (1) | CN208151466U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109457221A (en) * | 2019-01-23 | 2019-03-12 | 天宫真空科技(广州)有限公司 | Adjustable film coating correction plate mechanism |
| CN109518134A (en) * | 2018-12-29 | 2019-03-26 | 湖南宇诚精密科技有限公司 | A kind of horizontal correcting device of coating machine |
| CN111394699A (en) * | 2020-02-27 | 2020-07-10 | 成都国泰真空设备有限公司 | Coating machine of single electron beam evaporation source |
| CN112593202A (en) * | 2020-12-31 | 2021-04-02 | 无锡光润真空科技有限公司 | Winding film coating machine for point evaporation source |
-
2018
- 2018-04-18 CN CN201820565363.3U patent/CN208151466U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109518134A (en) * | 2018-12-29 | 2019-03-26 | 湖南宇诚精密科技有限公司 | A kind of horizontal correcting device of coating machine |
| CN109518134B (en) * | 2018-12-29 | 2023-12-26 | 湖南宇晶机器股份有限公司 | Horizontal correction device of coating machine |
| CN109457221A (en) * | 2019-01-23 | 2019-03-12 | 天宫真空科技(广州)有限公司 | Adjustable film coating correction plate mechanism |
| CN109457221B (en) * | 2019-01-23 | 2023-09-01 | 广州北辰工业自动化有限公司 | Adjustable coating correction plate mechanism |
| CN111394699A (en) * | 2020-02-27 | 2020-07-10 | 成都国泰真空设备有限公司 | Coating machine of single electron beam evaporation source |
| CN111394699B (en) * | 2020-02-27 | 2022-09-27 | 成都国泰真空设备有限公司 | Coating machine of single electron beam evaporation source |
| CN112593202A (en) * | 2020-12-31 | 2021-04-02 | 无锡光润真空科技有限公司 | Winding film coating machine for point evaporation source |
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