CN112593202A - Winding film coating machine for point evaporation source - Google Patents
Winding film coating machine for point evaporation source Download PDFInfo
- Publication number
- CN112593202A CN112593202A CN202011623760.XA CN202011623760A CN112593202A CN 112593202 A CN112593202 A CN 112593202A CN 202011623760 A CN202011623760 A CN 202011623760A CN 112593202 A CN112593202 A CN 112593202A
- Authority
- CN
- China
- Prior art keywords
- evaporation source
- vacuum chamber
- point
- bumps
- baffle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 title claims abstract description 35
- 238000001704 evaporation Methods 0.000 title claims abstract description 35
- 238000004804 winding Methods 0.000 title claims abstract description 15
- 239000007888 film coating Substances 0.000 title description 7
- 238000009501 film coating Methods 0.000 title description 7
- 238000000576 coating method Methods 0.000 claims abstract description 21
- 239000011248 coating agent Substances 0.000 claims abstract description 20
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 4
- 239000007769 metal material Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to the technical field of coating machines, in particular to a point evaporation source winding coating machine. The invention comprises a movable trolley, wherein a vacuum chamber is arranged on one side of the movable trolley, a winding system is arranged in the vacuum chamber, an evaporation source is arranged on the bottom surface in the vacuum chamber, and a correction baffle plate is arranged above the evaporation source in the vacuum chamber. The invention has reasonable and simple structure and convenient and fast operation, the movable trolley and the vacuum chamber form a vacuum system, the coiled coating base material is unfolded and rewound through the winding system, and the correction baffle plate is arranged above the evaporation source, so that the coating can be uniformly coated on the whole width, and the coating effect is greatly improved.
Description
Technical Field
The invention relates to the technical field of coating machines, in particular to a point evaporation source winding coating machine.
Background
The evaporation source used by the existing evaporation winding coating is basically a strip-shaped evaporation source, the evaporation area is large, the evaporation source can only be used for metal materials or a few non-metal materials with lower melting points, for the non-metal materials with higher melting points, a point-shaped evaporation source such as an electron gun is needed to be used as a working source, and because the point-shaped evaporation source presents point-shaped radial evaporation, the uniformity is poor, and the coating effect is greatly reduced.
The above problems are problems that the art needs to solve.
Disclosure of Invention
The invention aims to solve the technical problem of providing a point evaporation source winding film coating machine, which can carry out uniform film coating in a wide-width direction by taking the point evaporation source as a working source, thereby solving the problem of uniform film coating of high-melting-point materials on a coiled material.
In order to solve the technical problem, the invention provides the following scheme: a point evaporation source winding coating machine comprises a moving trolley, wherein a vacuum chamber is arranged on one side of the moving trolley, a winding system is arranged in the vacuum chamber, an evaporation source is arranged on the bottom surface in the vacuum chamber, and a correction baffle plate is arranged above the evaporation source in the vacuum chamber.
As a further improvement of the invention, the correction baffle comprises a fixed block, a positioning block is arranged on the fixed block, a supporting rod is arranged on the positioning block, and a baffle is arranged on the supporting rod.
As a further development of the invention, the baffle is oval.
As a further improvement of the present invention, the baffle includes first bumps symmetrically disposed, and second bumps are disposed between the first bumps, and the height of the second bumps is lower than that of the first bumps.
As a further improvement of the invention, the positioning block is provided with a mounting hole connected with the supporting rod, and arc-shaped grooves are uniformly arranged on the positioning block around the mounting hole.
As a further improvement of the invention, the baffle is made of stainless steel.
As a further improvement of the invention, a coating roller is arranged above the correction baffle.
As a further improvement of the invention, vacuum systems are arranged on two sides of the vacuum chamber.
The invention has the beneficial effects that:
the invention has reasonable and simple structure and convenient and fast operation, the movable trolley and the vacuum chamber form a vacuum system, the coiled coating base material is unfolded and rewound through the winding system, and the correction baffle plate is arranged above the evaporation source, so that the coating can be uniformly coated on the whole width, and the coating effect is greatly improved.
Drawings
FIG. 1 is a front view of the present invention;
FIG. 2 is a side view of the present invention;
FIG. 3 is a front view of the correction baffle of the present invention;
FIG. 4 is a top view of a correction baffle of the present invention;
FIG. 5 is a top view of a modified baffle according to a second embodiment of the present invention;
fig. 6 is a front view of the locating block of the present invention.
Reference numerals: 1. moving the trolley; 2. a vacuum chamber; 3. a winding system; 4. an evaporation source; 5. correcting the baffle; 501. a fixed block; 502. positioning blocks; 5021. mounting holes; 5022. an arc-shaped slot; 503. a support bar; 504. a baffle plate; 5041. a first bump; 5042. a second bump; 6. coating a film roller; 7. a vacuum system.
Detailed Description
The present invention is further described below in conjunction with the following figures and specific examples so that those skilled in the art may better understand the present invention and practice it, but the examples are not intended to limit the present invention.
Referring to fig. 1, a first embodiment of the present invention includes a moving trolley 1, a vacuum chamber 2 is disposed on one side of the moving trolley 1, a winding system 3 is disposed inside the vacuum chamber 2, an evaporation source 4 is disposed on a bottom surface inside the vacuum chamber 2, a correction baffle 5 is disposed above the evaporation source 4 inside the vacuum chamber 2, the correction baffle 5 includes a fixed block 501, a positioning block 502 is disposed on the fixed block 501, a support rod 503 is disposed on the positioning block 502, and a baffle 504 is disposed on the support rod 503, wherein when there is only one evaporation source 4, the baffle 504 is elliptical, so that the width direction is more uniform, and the film coating effect is greatly improved.
In this embodiment, the locating piece 502 is last to open has the mounting hole 5021 of being connected with bracing piece 503, evenly is provided with arc groove 5022 around locating hole 5021 on the locating piece 502, rotates locating piece 502, uses the bolt to pass arc groove 5022 and is connected with fixed block 501 to can adjust the inclination of baffle 504 as required.
In this embodiment, the baffle 504 is made of stainless steel, so that the baffle 504 can be cut conveniently and the stability of no deformation after long-time working can be ensured.
In this embodiment, the coating roller 6 is disposed above the correction baffle 5, and can provide cooling for the substrate, so that the substrate is not deformed in the coating process.
In this embodiment, the vacuum system 7 is provided on both sides of the vacuum chamber 2, and can provide and maintain a vacuum state inside the vacuum chamber 2.
In the second embodiment, when there are two evaporation sources 4 and the remaining parts are the same as those in the first embodiment, the baffle 504 includes first bumps 5041 symmetrically disposed, second bumps 5042 are disposed between the first bumps 5041, and the height of the second bumps 5042 is lower than that of the first bumps 5041; the problem of uniformity in the width direction of the machine can be effectively solved, and therefore the film coating effect is improved.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. The equivalent substitution or change made by the technical personnel in the technical field on the basis of the invention is all within the protection scope of the invention. The protection scope of the invention is subject to the claims.
Claims (8)
1. The point evaporation source winding coating machine is characterized by comprising a movable trolley (1), wherein a vacuum chamber (2) is arranged on one side of the movable trolley (1), a winding system (3) is arranged in the vacuum chamber (2), an evaporation source (4) is arranged on the bottom surface in the vacuum chamber (2), and a correction baffle plate (5) is arranged above the evaporation source (4) in the vacuum chamber (2).
2. The point evaporation source coil coating machine according to claim 1, wherein the correction baffle (5) comprises a fixed block (501), a positioning block (502) is disposed on the fixed block (501), a support rod (503) is disposed on the positioning block (502), and a baffle (504) is disposed on the support rod (503).
3. The point evaporation source roll coater according to claim 2, wherein the baffle plate (504) is elliptical.
4. The point evaporation source roll coater according to claim 2, wherein the baffle plate (504) comprises first bumps (5041) symmetrically arranged, second bumps (5042) are arranged between the first bumps (5041), and the height of the second bumps (5042) is lower than that of the first bumps (5041).
5. The point evaporation source coil coating machine according to claim 2, wherein the positioning block (502) is provided with a mounting hole (5021) connected with the supporting rod (503), and arc-shaped grooves (5022) are uniformly formed on the positioning block (502) around the mounting hole (5021).
6. The point-source evaporation source roll coater according to claim 2, wherein the baffle plate (504) is made of stainless steel.
7. The point-source evaporation-source roll coater according to claim 1, wherein a coating roller (6) is disposed above the correction shutter (5).
8. The point evaporation source roll coater according to claim 1, wherein a vacuum system (7) is provided on both sides of the vacuum chamber (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011623760.XA CN112593202A (en) | 2020-12-31 | 2020-12-31 | Winding film coating machine for point evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011623760.XA CN112593202A (en) | 2020-12-31 | 2020-12-31 | Winding film coating machine for point evaporation source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112593202A true CN112593202A (en) | 2021-04-02 |
Family
ID=75206456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011623760.XA Pending CN112593202A (en) | 2020-12-31 | 2020-12-31 | Winding film coating machine for point evaporation source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112593202A (en) |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1441081A (en) * | 2003-03-30 | 2003-09-10 | 吉林大学 | Small substrate baffle for organic luminous film plating machine with automatic recognition function |
| JP2005149924A (en) * | 2003-11-17 | 2005-06-09 | Toray Ind Inc | Vapor deposition device, method for recovering and reusing vapor deposition material, and method for manufacturing organic electroluminescent device |
| CN101457349A (en) * | 2007-12-10 | 2009-06-17 | 鸿富锦精密工业（深圳）有限公司 | Film coating correction plate |
| CN101586231A (en) * | 2008-05-21 | 2009-11-25 | 鸿富锦精密工业（深圳）有限公司 | Film deposition device |
| JP2009280851A (en) * | 2008-05-21 | 2009-12-03 | Seiko Epson Corp | Film deposition apparatus and film deposition method, and method of manufacturing light emitting apparatus |
| CN201495277U (en) * | 2009-06-22 | 2010-06-02 | 杭州晶鑫镀膜包装有限公司 | Vacuum winding type aluminum film coating device |
| CN204529959U (en) * | 2015-03-26 | 2015-08-05 | 青州市宝丰镀膜科技有限公司 | Double-open type induction heating coating equipment |
| CN106435484A (en) * | 2016-12-21 | 2017-02-22 | 京东方科技集团股份有限公司 | Evaporation plating equipment |
| CN206872929U (en) * | 2017-05-22 | 2018-01-12 | 张家港康得新光电材料有限公司 | Evaporation source and vacuum coating system |
| CN208151466U (en) * | 2018-04-18 | 2018-11-27 | 东莞市天瞳电子有限公司 | Revision board, uniform correcting device and its coating machine |
| CN109554669A (en) * | 2019-02-12 | 2019-04-02 | 浙江德佑新材料科技有限公司 | A kind of roll-to-roll vacuum coating equipment of continuity |
| CN210560704U (en) * | 2019-06-29 | 2020-05-19 | 杰莱特（苏州）精密仪器有限公司 | Film thickness correction baffle plate of magnetron sputtering coating machine radio frequency ion source system |
| CN112011766A (en) * | 2020-09-24 | 2020-12-01 | 刘加彬 | Zinc-aluminum composite metallized film evaporator for capacitor |
| CN214060633U (en) * | 2020-12-31 | 2021-08-27 | 无锡光润真空科技有限公司 | Winding film coating machine for point evaporation source |
-
2020
- 2020-12-31 CN CN202011623760.XA patent/CN112593202A/en active Pending
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1441081A (en) * | 2003-03-30 | 2003-09-10 | 吉林大学 | Small substrate baffle for organic luminous film plating machine with automatic recognition function |
| JP2005149924A (en) * | 2003-11-17 | 2005-06-09 | Toray Ind Inc | Vapor deposition device, method for recovering and reusing vapor deposition material, and method for manufacturing organic electroluminescent device |
| CN101457349A (en) * | 2007-12-10 | 2009-06-17 | 鸿富锦精密工业（深圳）有限公司 | Film coating correction plate |
| CN101586231A (en) * | 2008-05-21 | 2009-11-25 | 鸿富锦精密工业（深圳）有限公司 | Film deposition device |
| JP2009280851A (en) * | 2008-05-21 | 2009-12-03 | Seiko Epson Corp | Film deposition apparatus and film deposition method, and method of manufacturing light emitting apparatus |
| CN201495277U (en) * | 2009-06-22 | 2010-06-02 | 杭州晶鑫镀膜包装有限公司 | Vacuum winding type aluminum film coating device |
| CN204529959U (en) * | 2015-03-26 | 2015-08-05 | 青州市宝丰镀膜科技有限公司 | Double-open type induction heating coating equipment |
| CN106435484A (en) * | 2016-12-21 | 2017-02-22 | 京东方科技集团股份有限公司 | Evaporation plating equipment |
| CN206872929U (en) * | 2017-05-22 | 2018-01-12 | 张家港康得新光电材料有限公司 | Evaporation source and vacuum coating system |
| CN208151466U (en) * | 2018-04-18 | 2018-11-27 | 东莞市天瞳电子有限公司 | Revision board, uniform correcting device and its coating machine |
| CN109554669A (en) * | 2019-02-12 | 2019-04-02 | 浙江德佑新材料科技有限公司 | A kind of roll-to-roll vacuum coating equipment of continuity |
| CN210560704U (en) * | 2019-06-29 | 2020-05-19 | 杰莱特（苏州）精密仪器有限公司 | Film thickness correction baffle plate of magnetron sputtering coating machine radio frequency ion source system |
| CN112011766A (en) * | 2020-09-24 | 2020-12-01 | 刘加彬 | Zinc-aluminum composite metallized film evaporator for capacitor |
| CN214060633U (en) * | 2020-12-31 | 2021-08-27 | 无锡光润真空科技有限公司 | Winding film coating machine for point evaporation source |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10787730B2 (en) | Mask assembly with support bar configured to support back plate, installation thereof and evaporation apparatus | |
| JP4729122B2 (en) | Coater with large area assembly of rotatable magnetron | |
| JP5895179B2 (en) | Substrate transport roller, thin film manufacturing apparatus, and thin film manufacturing method | |
| JP2020128591A (en) | Vapor deposition mask device, mask support mechanism and method for manufacturing vapor deposition mask device | |
| CN214060633U (en) | Winding film coating machine for point evaporation source | |
| JPWO2009072242A1 (en) | Thin film forming apparatus and thin film forming method | |
| US8431493B2 (en) | Replaceable substrate masking on carrier and method for processing a substrate | |
| CN112593202A (en) | Winding film coating machine for point evaporation source | |
| JP2014517146A (en) | Gas system for reactive deposition processes | |
| JP2014184364A (en) | Drying unit, drying device, and film forming system | |
| US20120247952A1 (en) | Film forming method by sputtering apparatus and sputtering apparatus | |
| JP2013142195A (en) | Vapor deposition mask | |
| JP4948155B2 (en) | Stripe coating apparatus, stripe coating method, and blade rotation mechanism | |
| KR101099597B1 (en) | Take-up type vacuum filming device | |
| US11072854B2 (en) | Substrate fixing carrier, evaporation device and evaporation method | |
| JP7221238B2 (en) | SUBSTRATE SUPPORT STRUCTURE AND VACUUM DEPOSITION APPARATUS AND METHOD INCLUDING THE SAME | |
| JP3371454B2 (en) | Continuous vacuum deposition equipment | |
| JP6662192B2 (en) | Glass ribbon film forming apparatus and glass ribbon film forming method | |
| KR102353744B1 (en) | Coating device | |
| JPH11288708A (en) | Double end cutting device for slurry applied tape | |
| CN209923420U (en) | Evaporation deposition equipment | |
| CN219991719U (en) | Vacuum chamber structure for pp film vacuum coating equipment of substrate | |
| JP2012201895A (en) | Vapor deposition apparatus and vapor deposition method | |
| JP2780898B2 (en) | Applicator for coating liquid on long strip metal sheet | |
| JPH03263312A (en) | Manufacturing equipment of electrode material for electrolytic capacitor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |