CN112011766A - Zinc-aluminum composite metallized film evaporator for capacitor - Google Patents

Zinc-aluminum composite metallized film evaporator for capacitor Download PDF

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Publication number
CN112011766A
CN112011766A CN202011017813.3A CN202011017813A CN112011766A CN 112011766 A CN112011766 A CN 112011766A CN 202011017813 A CN202011017813 A CN 202011017813A CN 112011766 A CN112011766 A CN 112011766A
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Prior art keywords
aluminum
zinc
evaporation
evaporation source
metallized film
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Pending
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CN202011017813.3A
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Chinese (zh)
Inventor
刘加彬
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Guangdong Youyue Technology Co.,Ltd.
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Individual
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Priority to CN202011017813.3A priority Critical patent/CN112011766A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/081Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/20Metallic material, boron or silicon on organic substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

The invention discloses a zinc-aluminum composite metallized film evaporator for a capacitor, which comprises a vacuum chamber, wherein a cooling main drum mechanism, an unwinding mechanism and a winding mechanism are arranged in the vacuum chamber, guide rollers are arranged between the cooling main drum mechanism and the unwinding mechanism as well as between the cooling main drum mechanism and the winding mechanism, the cooling main drum mechanism is positioned below the unwinding mechanism and the winding mechanism, a zinc evaporation source is arranged below the cooling main drum mechanism, a first aluminum evaporation source and a second aluminum evaporation source are respectively arranged on two sides of the zinc evaporation source, a second evaporation baffle is arranged above the second aluminum evaporation source, and the second aluminum evaporation source as well as an evaporation baffle are arranged above the second aluminum evaporation sourceAn oxygen spraying mechanism is arranged between the second evaporation baffles. The invention can effectively ensure the evaporation purity of the metallized film, the coating of the evaporated metallized film is uniform, and the aluminum steam evaporated by the second aluminum evaporation source reacts with the oxygen sprayed by the oxygen spraying mechanism to form AL2O3The coating is uniformly plated on the film, so that the metal coating is effectively protected, and the compressive strength of the film is improved.

Description

Zinc-aluminum composite metallized film evaporator for capacitor
Technical Field
The invention relates to the technical field of metallized film processing, in particular to a zinc-aluminum composite metallized film evaporator for a capacitor.
Background
The metallized film capacitor is made up by using organic plastic film (common film material is polyethylene, polypropylene and polycarbonate, etc.) as medium, using metallized film (i.e. one or several layers of metal film are evaporated on the surface of organic plastic film instead of traditional metal foil) as electrode and adopting the processes of winding, etc. it possesses excellent electric property, high stability, long service life and small volume, and can be used in several places. However, the existing metallized film plating equipment has a complex structure, equipment mechanisms are easy to damage films and metal coatings, and the working efficiency is low, meanwhile, the existing metallized film plating equipment needs a large vacuum space due to the complex structure, the burden of a vacuum pump is increased, the energy consumption of vacuumizing is increased, no isolation exists between evaporation sources, and the evaporation effect is influenced. Therefore, there is a need for improvements in the prior art to avoid the disadvantages of the prior art.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide the zinc-aluminum composite metallized film evaporator for the capacitor, which has stable work and high evaporation quality.
The invention is realized by the following technical scheme:
a zinc-aluminum composite metallized film evaporator for a capacitor comprises a vacuum chamber, wherein a cooling main drum mechanism, an unwinding mechanism and a winding mechanism are arranged in the vacuum chamber, guide rollers are arranged between the cooling main drum mechanism and the unwinding mechanism and the winding mechanism, the cooling main drum mechanism is positioned below the unwinding mechanism and the winding mechanism, a zinc evaporation source is arranged below the cooling main drum mechanism, a first aluminum evaporation source and a second aluminum evaporation source are respectively arranged on two sides of the zinc evaporation source, a first aluminum-zinc isolation baffle is arranged between the first aluminum evaporation source and the zinc evaporation source, a second aluminum-zinc isolation baffle is arranged between the second aluminum evaporation source and the zinc evaporation source, the first aluminum-zinc isolation baffle and the second aluminum-zinc isolation baffle are both arranged below the cooling main drum mechanism, a first evaporation baffle is arranged above the first aluminum evaporation source, a second evaporation baffle is arranged above the second aluminum evaporation source, the first aluminum-zinc isolation baffle and the first evaporation baffle form a first aluminum evaporation opening therebetween, the second aluminum-zinc isolation baffle and the second evaporation baffle form a second aluminum evaporation opening therebetween, the first aluminum evaporation source comprises a first boron nitride evaporation boat and a first wire feeding mechanism, the second aluminum evaporation source comprises a second boron nitride evaporation boat and a second wire feeding mechanism, and an oxygen spraying mechanism is arranged between the second aluminum evaporation source and the second evaporation baffle.
Further, aluminum wires are placed on the first boron nitride evaporation boat.
Further, aluminum wires are placed on the second boron nitride evaporation boat.
Furthermore, the zinc evaporation source comprises an iron tank, and a zinc material is placed in the iron tank.
Further, the working temperature of the zinc evaporation source is 600-700 ℃.
Further, the working temperature of the first boron nitride evaporation boat is 1000-1200 ℃.
Further, the working temperature of the second boron nitride evaporation boat is 1000-1200 ℃.
Further, the oxygen spraying mechanism is close to the second aluminum evaporation opening.
Compared with the prior art, the invention has the advantages that the first aluminum evaporation source comprises the first boron nitride evaporation boat and the first wire feeding mechanism, the second aluminum evaporation source comprises the second boron nitride evaporation boat and the second wire feeding mechanism, the first boron nitride evaporation boat and the second boron nitride evaporation boat have stable chemical properties and cannot react with molten metal during high-temperature work, the evaporation purity of the metallized film can be effectively ensured, meanwhile, the evaporation capacity of the first boron nitride evaporation boat and the second boron nitride evaporation boat is stable and controllable, the coating of the evaporated metallized film is uniform and controllable in thickness, and the aluminum steam evaporated by the second aluminum evaporation source and the oxygen sprayed by the oxygen spraying mechanism are mixedReaction to form AL2O3The coating is uniformly plated on the film, so that the metal coating is effectively protected, and the compressive strength of the film is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a Zn-Al composite metallized film evaporator for capacitors according to the present invention.
In the figure: 1-vacuum chamber; 2-cooling the main drum mechanism; 3, an unwinding mechanism; 4-a winding mechanism; 5-a guide roller; 6-zinc evaporation source; 7-a first aluminum evaporation source; 8-a second aluminum evaporation source; 9-a first aluminum zinc isolation baffle; 10-a second aluminum-zinc isolation baffle; 11-a first evaporation baffle; 12-a second evaporation baffle; 13-first aluminum evaporation openings; 14-second aluminum evaporation openings; 15-a first boron nitride evaporation boat; 16-a first wire feeder; 17-a second boron nitride evaporation boat; 18-a second wire feeder; 19-oxygen spraying mechanism.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in figure 1, the zinc-aluminum composite metallized film evaporator for the capacitor comprises a vacuum chamber 1, wherein a cooling main drum mechanism 2, an unreeling mechanism 3 and a reeling mechanism 4 are arranged in the vacuum chamber 1, guide rollers 5 are respectively arranged between the cooling main drum mechanism 2 and the unreeling mechanism 3 as well as between the cooling main drum mechanism 2 and the reeling mechanism 4, and the cooling main drum mechanism 2 is positioned below the unreeling mechanism 3 and the reeling mechanism 4 and cools the main drum mechanismA zinc evaporation source 6 is arranged below the drum mechanism 2, a first aluminum evaporation source 7 and a second aluminum evaporation source 8 are respectively arranged at two sides of the zinc evaporation source 6, a first aluminum-zinc isolation baffle plate 9 is arranged between the first aluminum evaporation source 7 and the zinc evaporation source 6, a second aluminum-zinc isolation baffle plate 10 is arranged between the second aluminum evaporation source 8 and the zinc evaporation source 6, the first aluminum-zinc isolation baffle plate 9 and the second aluminum-zinc isolation baffle plate 10 are both arranged below the cooling main drum mechanism 2, a first evaporation baffle plate 11 is arranged above the first aluminum evaporation source 7, a second evaporation baffle plate 12 is arranged above the second aluminum evaporation source 8, a first aluminum evaporation opening 13 is formed between the first aluminum-zinc isolation baffle plate 9 and the first evaporation baffle plate 11, a second aluminum evaporation opening 14 is formed between the second aluminum-zinc isolation baffle plate 10 and the second evaporation baffle plate 12, the first aluminum evaporation boat 7 comprises a first boron evaporation boat 15 and a first wire feeding mechanism 16, the second aluminum evaporation source 8 includes a second boron nitride evaporation boat 17 and a second wire feeding mechanism 18, and an oxygen spraying mechanism 19 is disposed between the second aluminum evaporation source 8 and the second evaporation baffle plate 12. Through the first aluminum evaporation source 7 including the first boron nitride evaporation boat 15 and the first wire feeding mechanism 16, the second aluminum evaporation source 8 includes the second boron nitride evaporation boat 17 and the second wire feeding mechanism 18, the chemical properties of the first boron nitride evaporation boat 15 and the second boron nitride evaporation boat 17 are stable, the high-temperature working process can not react with molten metal, the evaporation purity of the metallized film can be effectively ensured, meanwhile, the evaporation capacity of the first boron nitride evaporation boat 15 and the second boron nitride evaporation boat 17 is controllable, the evaporated metallized film coating is uniform and controllable in thickness, the aluminum steam evaporated by the second aluminum evaporation source 8 reacts with the oxygen sprayed by the oxygen spraying mechanism 19 to form AL2O3The coating is uniformly plated on the film, so that the metal coating is effectively protected, and the compressive strength of the film is improved.
Aluminum wires are placed on the first boron nitride evaporation boat 15, the aluminum wires on the first boron nitride evaporation boat 15 are heated and melted, aluminum vapor is plated on the base film, and the first wire feeding mechanism 16 sends 8 or 10 aluminum wires to the first boron nitride evaporation boat 15.
Aluminum wires are placed on the second boron nitride evaporation boat 17, the aluminum wires on the second boron nitride evaporation boat 17 are heated and melted, aluminum steam reacts with oxygen sprayed by the oxygen spraying mechanism 19 to form AL2O3, and the Al2O3 is plated on the film, and 8 or 10 aluminum wires are sent to the second boron nitride evaporation boat 17 by the second wire feeding mechanism 18.
The zinc evaporation source 6 comprises an iron tank, zinc materials are placed in the iron tank, a zinc furnace is used for heating the zinc materials in the iron tank, and zinc steam is plated on the base film through a zinc nozzle.
The working temperature of the zinc evaporation source 6 is 600-700 ℃, as a specific implementation mode, the working temperature of the zinc evaporation source 6 is 650 ℃, and zinc materials are uniformly and stably gasified.
The working temperature of the first boron nitride evaporation boat 15 is 1000 ℃ to 1200 ℃, as a specific implementation mode, the working temperature of the first boron nitride evaporation boat 15 is 1100 ℃, and the aluminum wires are uniformly and stably gasified.
The working temperature of the second boron nitride evaporation boat 17 is 1000 ℃ to 1200 ℃, as a specific implementation mode, the working temperature of the second boron nitride evaporation boat 17 is 1100 ℃, and the aluminum wires are uniformly and stably gasified.
The oxygen spraying mechanism 19 is close to the second aluminum evaporation opening 14, the oxygen amount sprayed by the oxygen spraying mechanism 19 is accurately controllable, and the oxygen can be easily and fully reacted with the aluminum vapor evaporated by the second evaporation boat 17 to form uniform AL2O3And (7) plating.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (8)

1. The utility model provides a zinc-aluminum composite metallization film coating machine for condenser, includes real empty room, real empty indoor cooling owner drum mechanism, unwinding mechanism and winding mechanism of being equipped with, all be equipped with the deflector roll between cooling owner drum mechanism and unwinding mechanism, the winding mechanism, cooling owner drum mechanism is located below between unwinding mechanism and the winding mechanism, its characterized in that: a zinc evaporation source is arranged below the cooling main drum mechanism, a first aluminum evaporation source and a second aluminum evaporation source are respectively arranged on two sides of the zinc evaporation source, a first aluminum-zinc isolation baffle plate is arranged between the first aluminum evaporation source and the zinc evaporation source, a second aluminum-zinc isolation baffle plate is arranged between the second aluminum evaporation source and the zinc evaporation source, the first aluminum-zinc isolation baffle plate and the second aluminum-zinc isolation baffle plate are both arranged below the cooling main drum mechanism, a first evaporation baffle plate is arranged above the first aluminum evaporation source, a second evaporation baffle plate is arranged above the second aluminum evaporation source, a first aluminum evaporation opening is formed between the first aluminum-zinc isolation baffle plate and the first evaporation baffle plate, a second aluminum evaporation opening is formed between the second aluminum-zinc isolation baffle plate and the second evaporation baffle plate, the first aluminum evaporation source comprises a first boron nitride evaporation boat and a first wire feeding mechanism, the second aluminum evaporation source comprises a second boron nitride evaporation boat and a second wire feeding mechanism, and an oxygen spraying mechanism is arranged between the second aluminum evaporation source and the second evaporation baffle.
2. The zinc-aluminum composite metallized film evaporator for capacitors as claimed in claim 1, wherein: and the first boron nitride evaporation boat is provided with an aluminum wire.
3. The zinc-aluminum composite metallized film evaporator for capacitors as claimed in claim 1, wherein: and an aluminum wire is placed on the second boron nitride evaporation boat.
4. The zinc-aluminum composite metallized film evaporator for capacitors as claimed in claim 1, wherein: the zinc evaporation source comprises an iron tank, and zinc materials are placed in the iron tank.
5. The zinc-aluminum composite metallized film evaporator for capacitors as claimed in claim 1, wherein: the working temperature of the zinc evaporation source is 600-700 ℃.
6. The zinc-aluminum composite metallized film evaporator for capacitors as claimed in claim 1, wherein: the working temperature of the first boron nitride evaporation boat is 1000-1200 ℃.
7. The zinc-aluminum composite metallized film evaporator for capacitors as claimed in claim 1, wherein: the working temperature of the second boron nitride evaporation boat is 1000-1200 ℃.
8. The zinc-aluminum composite metallized film evaporator for capacitors as claimed in claim 1, wherein: and the oxygen spraying mechanism is close to the second aluminum evaporation opening.
CN202011017813.3A 2020-09-24 2020-09-24 Zinc-aluminum composite metallized film evaporator for capacitor Pending CN112011766A (en)

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Application Number Priority Date Filing Date Title
CN202011017813.3A CN112011766A (en) 2020-09-24 2020-09-24 Zinc-aluminum composite metallized film evaporator for capacitor

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112593202A (en) * 2020-12-31 2021-04-02 无锡光润真空科技有限公司 Winding film coating machine for point evaporation source
CN115064383A (en) * 2022-07-06 2022-09-16 六和电子(江西)有限公司 High-temperature and high-humidity resistant metallized film and preparation method thereof
CN115725951A (en) * 2022-12-16 2023-03-03 江门市兆业科技有限公司 Preparation method of metallized film with two-sided continuous deposition coating

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112593202A (en) * 2020-12-31 2021-04-02 无锡光润真空科技有限公司 Winding film coating machine for point evaporation source
CN115064383A (en) * 2022-07-06 2022-09-16 六和电子(江西)有限公司 High-temperature and high-humidity resistant metallized film and preparation method thereof
CN115725951A (en) * 2022-12-16 2023-03-03 江门市兆业科技有限公司 Preparation method of metallized film with two-sided continuous deposition coating

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