CN206872929U - Evaporation source and vacuum coating system - Google Patents
Evaporation source and vacuum coating system Download PDFInfo
- Publication number
- CN206872929U CN206872929U CN201720572428.2U CN201720572428U CN206872929U CN 206872929 U CN206872929 U CN 206872929U CN 201720572428 U CN201720572428 U CN 201720572428U CN 206872929 U CN206872929 U CN 206872929U
- Authority
- CN
- China
- Prior art keywords
- evaporation source
- plate body
- baffle plate
- web frame
- grid web
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model provides a kind of evaporation source and vacuum coating system, wherein, evaporation source includes：Evaporation source crucible, for carrying simultaneously heating evaporation material；Evaporation source baffle plate, evaporation source baffle plate are movably disposed at the top of evaporation source crucible；Evaporation source baffle plate includes：Plate body, plate body have the block surface for being used for blocking evaporated material；Cleaning portion is stored, storage cleaning portion is arranged on plate body, and storage cleaning portion includes grid web frame, and grid structure setting is on block surface to prevent the evaporated material deposited on plate body from falling into evaporation source crucible.The utility model solves the problems, such as evaporation source poor work stability of the prior art.
Description
Technical field
Technical field of vacuum plating is the utility model is related to, in particular to a kind of evaporation source and vacuum coating system.
Background technology
Vacuum coating system is used to carry out plated film to the surface of base material, and evaporation source is the Vacuum Deposition for having evaporation coating function
A kind of necessaries in membranous system, it has carrying coating materials and the work(for being heated to coating materials and making coating materials form evaporated material
Energy.
, it is necessary to be melted in advance to coating materials using evaporation source before plated film operation is carried out, in the process, still suffer from few
Amount is evaporated by coating materials and goes out to form the evaporated material of vapor state, in order to avoid the vapor concentration because of evaporated material does not meet plated film
Standard and influence to base material carry out plated film operation effect, it is necessary to block the ascending path of evaporated material with evaporation source baffle plate and keep away
Exempt from evaporated material to contact with base material；And evaporation source baffle plate necessarily has evaporated material at it when blocking the ascending path of evaporated material
Surface deposits；Moreover, in plated film operation process, evaporation source baffle plate needs constantly to carry out folding fortune vacuum coating system
Dynamic and evaporated material is formed multiple-contact in substrate surface, during this, evaporated material is still constantly in evaporation source baffle plate
Surface deposition.
The evaporated material of deposition is more and more, when evaporation source baffle plate deficiency provides enough tables with the evaporated material for deposition
During the adhesive force of face, the open and close movement of evaporation source baffle plate easily causes evaporated material to drop, time for being dropped due to evaporated material and
Position all occurs at random, therefore, is connect when evaporated material is dropped in the evaporation source crucible of evaporation source with electron gun filament
When touching, electron gun filament open circuit can be caused and cause evaporation source normally can not be heated to coating materials, so as to reduce evaporation source
Job stability, and then cause vacuum coating system can not reliably continuous service.
Utility model content
Main purpose of the present utility model is to provide a kind of evaporation source and vacuum coating system, to solve in the prior art
Evaporation source poor work stability the problem of.
To achieve these goals, according to one side of the present utility model, there is provided a kind of evaporation source, including：Evaporation
Source crucible, for carrying simultaneously heating evaporation material；Evaporation source baffle plate, evaporation source baffle plate are movably disposed at evaporation source crucible
Top；Evaporation source baffle plate includes：Plate body, plate body have the block surface for being used for blocking evaporated material；Store cleaning portion, storage cleaning
Portion is arranged on plate body, and storage cleaning portion includes grid web frame, and grid structure setting is on block surface to prevent on plate body
The evaporated material of deposition is fallen into evaporation source crucible.
Further, block surface is plane, and grid web frame is bonded setting with block surface；Or block surface is curved surface, grid
The edge of web frame and plate body connects.
Further, grid web frame is multiple that multiple grid web frames are stacked along the thickness direction of plate body.
Further, grid web frame is made of stainless steel.
Further, grid web frame is detachably connected with plate body by bolt；Or grid web frame welds with plate body.
Further, plate body also has the second surface being oppositely arranged along its thickness direction and block surface, storage cleaning portion
Also include vibrational structure, vibrational structure is set on a second surface.
Further, evaporation source baffle plate also includes control unit, and vibrational structure is multiple, and multiple vibrational structures divide at intervals
On a second surface, control unit electrically connects cloth with multiple vibrational structures.
Further, vibrational structure is vibrator.
Further, evaporation source baffle plate opens steaming with the blocking position and avoidance blocked at the ascending path of evaporated material
The avoidance position of the ascending path of stimulating food matter, when evaporation source baffle plate, which is in, avoids position, control unit control vibrational structure work
So that the evaporant deposited on plate body is fallen to outside evaporation source crucible.
Further, multiple coating materials caves are offered on evaporation source crucible, evaporation source also includes heating electron gun, heats electronics
Rifle is arranged on evaporation source crucible and evaporated material is heated positioned at the lower section in multiple coating materials caves.
According to another aspect of the present utility model, there is provided a kind of vacuum coating system, for being evaporated plating to base material
Film, including：Shell, shell have Vacuum Deposition membrane cavity；Evaporation source, evaporation source are arranged on vacuum coating intracavitary and to Vacuum Deposition membrane cavities
Interior release evaporated material is with the surface of base material formation film layer；Ion gun, ion gun are arranged on vacuum coating intracavitary and to vacuum
Plated film intracavitary discharges ion to improve the consistency of film layer；Wherein, evaporation source is above-mentioned evaporation source.
Using the technical solution of the utility model, because the storage cleaning portion being arranged on plate body includes grid web frame,
Grid structure setting is on block surface to prevent the evaporated material deposited on plate body from falling into evaporation source crucible.So, lattice
Wire-grid structure can play certain barrier effect to the evaporated material being deposited on plate body, be held so as to increase evaporation source baffle plate
The amount of evaporated material is carried, and the setting of grid web frame can also improve the attachment that evaporated material is attached on evaporation source baffle plate
Power, the evaporated material of deposition is stably moved with the motion of evaporation source baffle plate, greatly reduce evaporated material from
The probability to be dropped on evaporation source baffle plate, avoid evaporated material and fall into evaporation source crucible and influence the normal of evaporation source crucible
Work, and then improve evaporation source job stability.
Brief description of the drawings
The Figure of description for forming the part of the application is used for providing further understanding to of the present utility model, this practicality
New schematic description and description is used to explain the utility model, does not form to improper restriction of the present utility model.
In the accompanying drawings：
Fig. 1 is shown to be blocked according to a kind of alternative embodiment of the present utility model when the evaporation source baffle plate of evaporation source is in
During position, the structural representation of evaporation source；
Fig. 2 show in Fig. 1 when evaporation source evaporation source baffle plate be in avoid position when, the structural representation of evaporation source
Figure；
Fig. 3 shows the structure of the grid web frame of the evaporation source baffle plate according to a kind of alternative embodiment of the present utility model
Schematic diagram.
Wherein, above-mentioned accompanying drawing marks including the following drawings：
1st, evaporation source crucible；2nd, evaporation source baffle plate；10th, plate body；11st, second surface；12nd, coating materials cave；20th, storage cleaning
Portion；21st, grid web frame；22nd, vibrational structure.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.The description only actually at least one exemplary embodiment is illustrative to be never used as to this practicality below
New and its application or any restrictions used.Based on the embodiment in the utility model, those of ordinary skill in the art are not having
There is the every other embodiment made and obtained under the premise of creative work, belong to the scope of the utility model protection.
It should be noted that term used herein above is merely to describe embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when in this manual using term "comprising" and/or " bag
Include " when, it indicates existing characteristics, step, operation, device, component and/or combinations thereof.
Unless specifically stated otherwise, the part and positioned opposite, the digital table of step otherwise illustrated in these embodiments
Up to the unlimited the scope of the utility model processed of formula and numerical value.Simultaneously, it should be appreciated that each shown in accompanying drawing for the ease of description
The size of individual part is not to be drawn according to the proportionate relationship of reality.For skill known to person of ordinary skill in the relevant
Art, method and apparatus may be not discussed in detail, but in the appropriate case, the technology, method and apparatus should be considered as awarding
Weigh part for specification.In shown here and discussion all examples, any occurrence should be construed as merely example
Property, not as limitation.Therefore, the other examples of exemplary embodiment can have different values.It should be noted that：It is similar
Label and letter similar terms is represented in following accompanying drawing, therefore, once be defined in a certain Xiang Yi accompanying drawing, then with
It need not be further discussed in accompanying drawing afterwards.
In description of the present utility model, it is to be understood that the noun of locality such as " forward and backward, upper and lower, left and right ", " horizontal,
Vertically, vertically, it is horizontal " and " pushing up, bottom " etc. indicated by orientation or position relationship be normally based on orientation or position shown in the drawings
Relation is put, description the utility model is for only for ease of and simplifies description, in the case where not making opposite explanation, these nouns of locality
Do not indicate that and imply that the device of meaning or element there must be specific orientation or with specific azimuth configuration and operation, because
This is it is not intended that limitation to scope of protection of the utility model；The noun of locality " inside and outside " refers to the wheel relative to each part in itself
Wide is inside and outside.
For the ease of description, space relative terms can be used herein, as " ... on ", " ... top ",
" ... upper surface ", " above " etc., for describing such as a device shown in the figure or feature and other devices or spy
The spatial relation of sign.It should be appreciated that space relative terms are intended to comprising the orientation except device described in figure
Outside different azimuth in use or operation.For example, if the device in accompanying drawing is squeezed, it is described as " in other devices
It will be positioned as " under other devices or construction after the device of part or construction top " or " on other devices or construction "
Side " or " under other devices or construction ".Thus, exemplary term " ... top " can include " ... top " and
" in ... lower section " two kinds of orientation.The device can also other different modes positioning (being rotated by 90 ° or in other orientation), and
And respective explanations are made to the relative description in space used herein above.
Furthermore, it is necessary to explanation, limits parts, it is only for be easy to using the word such as " first ", " second "
Corresponding parts to be distinguished, do not have Stated otherwise such as, above-mentioned word does not have particular meaning, therefore it is not intended that to this
The limitation of utility model protection scope.
In order to solve the problems, such as evaporation source poor work stability of the prior art, the utility model provides a kind of evaporation
Source and vacuum coating system；Wherein, vacuum coating system is used to be evaporated base material plated film, and vacuum coating system includes outer
Shell, evaporation source and ion gun, shell have a Vacuum Deposition membrane cavity, and evaporation source is arranged on vacuum coating intracavitary and to vacuum coating intracavitary
Evaporated material is discharged to form film layer on the surface of base material, and ion gun is arranged on vacuum coating intracavitary and released to vacuum coating intracavitary
Ion is put to improve the consistency of film layer and refractive index, evaporation source is above-mentioned and following ion gun.
It should be noted that a part of evaporated material that evaporation source is discharged into vacuum coating intracavitary can be with evaporation source baffle plate 2
Contact and adhesion deposition on evaporation source baffle plate 2, evaporation source constantly discharges evaporated material, the steaming deposited on evaporation source baffle plate 2
Stimulating food matter can be more and more.
As shown in Figure 1 to Figure 3, evaporation source includes evaporation source crucible 1 and evaporation source baffle plate 2, and evaporation source crucible 1 is used to carry
And heating evaporation material, evaporation source baffle plate 2 are movably disposed at the top of evaporation source crucible 1；Evaporation source baffle plate 2 includes plate body
10 have the block surface for being used for blocking evaporated material with storage cleaning portion 20, plate body 10, and storage cleaning portion 20 is arranged on plate body 10
On, storage cleaning portion 20 includes grid web frame 21, and grid web frame 21 is arranged on block surface to prevent from depositing on plate body 10
Evaporated material fall into evaporation source crucible 1.
Because the storage cleaning portion 20 being arranged on plate body 10 includes grid web frame 21, grid web frame 21 is arranged on screening
To prevent the evaporated material deposited on plate body 10 from falling into evaporation source crucible 1 on block face.So, grid web frame 21 can be right
The evaporated material being deposited on plate body 10 plays certain barrier effect, and evaporated material is carried so as to increase evaporation source baffle plate 2
Amount, and the setting of grid web frame 21 can also improve the adhesive force that evaporated material is attached on evaporation source baffle plate 2, make deposition
Evaporated material can stably be moved with the motion of evaporation source baffle plate 2, greatly reduce evaporated material from evaporation source keep off
The probability to be dropped on plate 2, avoid evaporated material and fall into evaporation source crucible 1 and influence the normal work of evaporation source crucible 1,
And then improve evaporation source job stability.
Alternatively, block surface is plane, and grid web frame 21 is bonded setting with block surface；Or block surface is curved surface, grid
Web frame 21 is connected with the edge of plate body 10.
In Fig. 1 of the present utility model into the alternative embodiment shown in Fig. 3, block surface is plane, grid web frame 21 with
Block surface fitting is set.So, the connective stability between grid web frame 21 and plate body 10, and grid are not only increased
The fenestral fabric of structure 21 can effectively increase evaporation source baffle plate 2 towards the surface area of the side of evaporation source crucible 1, so that
More evaporated materials can be stably adhered on grid web frame 21.
Certainly, in an alternative embodiment (not shown) of the present utility model, block surface is curved surface, grid web frame 21
It is connected with the edge of plate body 10.So, block surface in curved surface has larger radius of curvature, so as to increase the table of block surface
Face tension force and provide bigger surface adhesion force to be deposited on evaporated material on block surface, moreover, plate body 10 and grid
Receiving space is formed between structure 21, when evaporated material on block surface by dropping, grid web frame 21 can also be played to evaporation
The backstop action of material, substantial amounts of evaporated material is avoided to fall into evaporation source crucible 1.
Block what evaporation source crucible 1 evaporated for the ease of being processed to manufacture and improve evaporation source baffle plate 2 to evaporation source
The validity of the ascending path of evaporated material, alternatively, evaporation source baffle plate 2 are rounded, and the area of evaporation source baffle plate 2 be more than or
Equal to the area of the evaporating surface of evaporation source crucible 1.
Alternatively, in order to further improve barrier effect of the grid web frame 21 to evaporated material, evaporation source baffle plate 2 is ensured
To the bearing capacity of evaporated material, evaporated material is avoided to drop in evaporation source crucible 1, grid web frame 21 is multiple to be multiple
Thickness direction of the grid web frame 21 along plate body 10 is stacked.
Preferably, grid web frame 21 is more than or equal to 1 and less than or equal to 3.
Alternatively, in order to avoid grid web frame 21 is by the corrosion oxidation of evaporated material, ensure that grid web frame 21 is grown
Phase is effectively worked, and grid web frame 21 is made of stainless steel.
As shown in figure 3, grid web frame 21 is to be formed by the braiding of more stainless steel metal wires, grid web frame 21 be with
Multiple more grid of meshes shape structures of purpose.
It should be noted that mesh is granularity unit, i.e., opened up in the area of 1 square feet (25.4mm × 25.4mm)
Mesh number.
Alternatively, grid web frame 21 is detachably connected by bolt and plate body 10；Or grid web frame 21 and plate body
10 welding.So, the connective stability of grid web frame 21 and plate body 10 in high temperature environments, and grid not only be ensure that
Structure 21 is repaired, cleaned or changed by bolt and the detachably connected plaid matching wire-grid structure 21 that is also convenient for of plate body 10, from
And improve the reliability of evaporation source work.
As depicted in figs. 1 and 2, plate body 10 also has the second surface 11 being oppositely arranged along its thickness direction and block surface,
Storage cleaning portion 20 also includes vibrational structure 22, and vibrational structure 22 is arranged on second surface 11.
Because storage cleaning portion 20 also includes vibrational structure 22, vibrational structure 22 is arranged on the second surface 11 of plate body 10.
So, the setting of vibrational structure 22 can all drive plate body 10 to vibrate, so that when evaporation source baffle plate 2 moves to appropriate position,
The evaporated material deposited on plate body 10 and/or grid web frame 21 is shaken, the effect cleared up evaporation source baffle plate 2 is played, keeps away
Exempt from evaporated material constantly to deposit on evaporation source baffle plate 2, when significantly reducing the motion of evaporation source baffle plate 2, evaporation source baffle plate 2
On the probability that falls into evaporation source crucible 1 of evaporated material, improve the job stability of evaporation source.
As depicted in figs. 1 and 2, evaporation source baffle plate 2 also includes control unit, and vibrational structure 22 is multiple, multiple vibrational structures
22 are distributed on second surface 11 at intervals, and control unit electrically connects with multiple vibrational structures 22.In such manner, it is possible to according to evaporation source
The amount of the evaporated material deposited on baffle plate 2 and position, different one or more vibration knots are pointedly selected by control unit
Structure 22 works, and so as to effectively evaporated material shake from evaporation source baffle plate 2, and avoids because of vibration amplitude
The region area that is scattered of evaporated material that is excessive and making to shake is excessive and enters in evaporation source crucible 1.
Alternatively, vibrational structure 22 is vibrator.
Specifically, as depicted in figs. 1 and 2, evaporation source baffle plate 2, which has, blocks blocking at the ascending path of evaporated material
Position and the avoidance position for avoiding the ascending path for opening evaporated material, when evaporation source baffle plate 2, which is in, avoids position, control unit control
Vibrational structure 22 processed works so that the evaporant deposited on plate body 10 is fallen to outside evaporation source crucible 1.In such manner, it is possible in evaporation source
While the steam of source release evaporated material carries out plated film operation, the evaporated material deposited on evaporation source baffle plate 2 is cleaned out, and
Avoid and fall into evaporation source crucible 1 and influence the normal work of evaporation source.
Wherein, Fig. 1 is shown when the evaporation source baffle plate of evaporation source is in blocking position, the structural representation of evaporation source；
Fig. 2 show when evaporation source evaporation source baffle plate be in avoid position when, the structural representation of evaporation source.
Alternatively, in an alternative embodiment (not shown) of the present utility model, vacuum coating system include one from
Component and two evaporation sources, the distribution triangular in shape in same level of an ion gun and two evaporation sources, two evaporation sources
For evaporating to be plated to using the coating materials of unlike material as evaporated material film is formed positioned at the surface of the base material of vacuum coating intracavitary
Layer.Certainly, it can also be multiple according to different film layer demands, evaporation source, multiple evaporation sources are used to carry evaporation one species
Or different types of coating materials.
As depicted in figs. 1 and 2, in order to improve heating effect of the evaporation source crucible 1 to coating materials, evaporation source crucible 1 is enable
Adaptively the coating materials of unlike material is heated, multiple coating materials caves 12 are offered on evaporation source crucible 1, evaporation source also includes
Electron gun is heated, heating electron gun is arranged on evaporation source crucible 1 and positioned at the lower section in multiple coating materials caves 12 with to evaporated material
Heated.
It should be noted that in order that the film layer that substrate surface plates reaches expected compactness effect or stronger refraction
Rate, so as to form the film layer with high-quality, film layer usually requires multiple plated film, and in multiple plated film, evaporation source baffle plate 2 needs
Constantly to be moved between blocking position and avoidance position, the steaming that just will easily be deposited in the process on evaporation source baffle plate 2
Stimulating food matter is got rid of and drops into evaporation source crucible 1 and influence the normal work of evaporation source；By in the top of evaporation source crucible 1
Evaporation source baffle plate 2 of the present utility model is set, evaporated material can not only be efficiently solved in the motion of evaporation source baffle plate 2
The problem of got rid of, and make evaporation source baffle plate 2 that there is the ability cleared up automatically, evaporation source baffle plate 2 can be in avoidance position
When putting, the evaporated material deposited thereon is shaken and falls on the outside of evaporation source crucible 1, and do not interfere with the normal work of evaporation source.
It should be noted that term used herein above is merely to describe embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when in this manual using term "comprising" and/or " bag
Include " when, it indicates existing characteristics, step, work, device, component and/or combinations thereof.
It should be noted that term " first " in the description and claims of this application and above-mentioned accompanying drawing, "
Two " etc. be for distinguishing similar object, without for describing specific order or precedence.It should be appreciated that so use
Data can exchange in the appropriate case, so that presently filed embodiment described herein can be with except illustrating herein
Or the order beyond those of description is implemented.
Preferred embodiment of the present utility model is the foregoing is only, is not limited to the utility model, for this
For the technical staff in field, the utility model can have various modifications and variations.It is all in the spirit and principles of the utility model
Within, any modification, equivalent substitution and improvements made etc., it should be included within the scope of protection of the utility model.
Claims (11)
- A kind of 1. evaporation source, it is characterised in that including：Evaporation source crucible (1), for carrying simultaneously heating evaporation material；Evaporation source baffle plate (2), the evaporation source baffle plate (2) are movably disposed at the top of the evaporation source crucible (1)；It is described Evaporation source baffle plate (2) includes plate body (10) and storage cleaning portion (20), and the plate body (10), which has, to be used to block the evaporant The block surface of matter, storage cleaning portion (20) are arranged on the plate body (10), and storage cleaning portion (20) includes grid Web frame (21), the grid web frame (21) are arranged on the block surface to prevent the evaporation deposited on the plate body (10) Material is fallen into the evaporation source crucible (1).
- 2. evaporation source according to claim 1, it is characterised in thatThe block surface is plane, and the grid web frame (21) is bonded setting with the block surface；OrThe block surface is curved surface, and the grid web frame (21) is connected with the edge of the plate body (10).
- 3. evaporation source according to claim 1, it is characterised in that the grid web frame (21) is multiple described to be multiple Thickness direction of the grid web frame (21) along the plate body (10) is stacked.
- 4. evaporation source according to claim 1, it is characterised in that the grid web frame (21) is made of stainless steel.
- 5. evaporation source according to claim 1, it is characterised in thatThe grid web frame (21) is detachably connected by bolt and the plate body (10)；OrThe grid web frame (21) is welded with the plate body (10).
- 6. evaporation source according to claim 1, it is characterised in that the plate body (10) also has along its thickness direction and institute The second surface (11) that block surface is oppositely arranged is stated, storage cleaning portion (20) also includes vibrational structure (22), the vibration Structure (22) is arranged on the second surface (11).
- 7. evaporation source according to claim 6, it is characterised in that the evaporation source baffle plate (2) also includes control unit, described Vibrational structure (22) is multiple, and multiple vibrational structures (22) are distributed on the second surface (11) at intervals, described Control unit electrically connects with multiple vibrational structures (22).
- 8. evaporation source according to claim 6, it is characterised in that the vibrational structure (22) is vibrator.
- 9. evaporation source according to claim 7, it is characterised in that the evaporation source baffle plate (2), which has, blocks in the steaming Blocking position and avoidance at the ascending path of stimulating food matter open the avoidance position of the ascending path of the evaporated material, when the steaming When the baffle plate (2) that rises is in the avoidance position, the control unit controls vibrational structure (22) work so that the plate body (10) evaporant deposited on falls to the evaporation source crucible (1) outside.
- 10. evaporation source according to claim 1, it is characterised in that offer multiple coating materials on the evaporation source crucible (1) Cave (12), the evaporation source also include heating electron gun, and the heating electron gun is arranged on the evaporation source crucible (1) and position In the lower section of multiple coating materials caves (12) to be heated to the evaporated material.
- A kind of 11. vacuum coating system, for being evaporated plated film to base material, it is characterised in that including：Shell, the shell have Vacuum Deposition membrane cavity；Evaporation source, the evaporation source be arranged on the vacuum coating intracavitary and to the vacuum coating intracavitary discharge evaporated material with Film layer is formed on the surface of the base material；Ion gun, the ion gun are arranged on the vacuum coating intracavitary and discharge ion to the vacuum coating intracavitary to improve The consistency of the film layer；Wherein, the evaporation source is the evaporation source any one of claim 1 to 10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720572428.2U CN206872929U (en) | 2017-05-22 | 2017-05-22 | Evaporation source and vacuum coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720572428.2U CN206872929U (en) | 2017-05-22 | 2017-05-22 | Evaporation source and vacuum coating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206872929U true CN206872929U (en) | 2018-01-12 |
Family
ID=61340004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720572428.2U Active CN206872929U (en) | 2017-05-22 | 2017-05-22 | Evaporation source and vacuum coating system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206872929U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110257777A (en) * | 2019-07-30 | 2019-09-20 | 云谷（固安）科技有限公司 | Vapor deposition cover and evaporated device |
| CN112593202A (en) * | 2020-12-31 | 2021-04-02 | 无锡光润真空科技有限公司 | Winding film coating machine for point evaporation source |
| CN113463189A (en) * | 2021-06-21 | 2021-10-01 | 湖南烁科晶磊半导体科技有限公司 | Double-shutter molecular beam epitaxy source furnace system and molecular beam epitaxy equipment |
-
2017
- 2017-05-22 CN CN201720572428.2U patent/CN206872929U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110257777A (en) * | 2019-07-30 | 2019-09-20 | 云谷（固安）科技有限公司 | Vapor deposition cover and evaporated device |
| CN110257777B (en) * | 2019-07-30 | 2021-11-02 | 云谷（固安）科技有限公司 | Evaporation cover and evaporation equipment |
| CN112593202A (en) * | 2020-12-31 | 2021-04-02 | 无锡光润真空科技有限公司 | Winding film coating machine for point evaporation source |
| CN113463189A (en) * | 2021-06-21 | 2021-10-01 | 湖南烁科晶磊半导体科技有限公司 | Double-shutter molecular beam epitaxy source furnace system and molecular beam epitaxy equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206872929U (en) | Evaporation source and vacuum coating system | |
| CN206872935U (en) | Ion gun and vacuum coating system | |
| CN205999474U (en) | Vacuum deposition apparatus | |
| KR100225312B1 (en) | A | |
| JP2012178349A (en) | Conductive particulate and substrate constituent | |
| KR102451743B1 (en) | Compound droplet injection and separation apparatus | |
| JP6927253B2 (en) | Storage container | |
| CN109376454A (en) | A kind of random hole defect material discrete Meta Model method based on hyperelliptic equation | |
| CN208390560U (en) | Rack for cleaning | |
| US20120090825A1 (en) | Nanofiber covered micro components and methods for micro component cooling | |
| KR20080036294A (en) | Multi-slit type circular nozzle source for thermal evaporation process | |
| CN101721854A (en) | Filter and exhaust device using the filter, and manufacture method and device of the filter | |
| CN110819940A (en) | Evaporation plating mechanism | |
| CN106917133B (en) | A kind of basket plating hanger | |
| CN206706198U (en) | Magnetic control sputtering device and magnetron sputtering apparatus | |
| CN106435484A (en) | Evaporation plating equipment | |
| CN101597727A (en) | The treatment process of copper target material surface | |
| CN106524825A (en) | Method and system for scale prevention and descaling of film type evaporator | |
| TW201443259A (en) | Deposition source and deposition apparatus having the same | |
| CN203030515U (en) | Tea separation device | |
| CN205904106U (en) | Filter equipment is used in coating processing | |
| CN109007724A (en) | A kind of honey water-vaporizer | |
| CN216947166U (en) | Vacuum evaporation machine with double-crucible structure | |
| JP5108456B2 (en) | Conductive fine particles | |
| CN201437549U (en) | Vapor plating device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20190121 Granted publication date: 20180112 |
|
| PD01 | Discharge of preservation of patent | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20220121 Granted publication date: 20180112 |