CN109457221A - Adjustable film coating correction plate mechanism - Google Patents
Adjustable film coating correction plate mechanism Download PDFInfo
- Publication number
- CN109457221A CN109457221A CN201811032138.4A CN201811032138A CN109457221A CN 109457221 A CN109457221 A CN 109457221A CN 201811032138 A CN201811032138 A CN 201811032138A CN 109457221 A CN109457221 A CN 109457221A
- Authority
- CN
- China
- Prior art keywords
- revision
- film coating
- correction plate
- plate mechanism
- revision board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
The invention discloses a kind of adjustable film coating correction plate mechanisms, comprising: revision board, position adjustment component and angle regulation component；There are two the revision board settings, and respectively using the two sides for being hingedly coupled to runing rest, two revision boards can relative rotary motion；The position adjustment component is used to adjust the height and position of revision board；The angle regulation component is used to adjust the mutual angle of two revision boards, changes the projected area of revision board.Present invention may apply to the workpiece to be coated of different size and shape features, improve the versatility of revision board, reduce the manufacturing cost and replacing construction of revision board, it can also be according to real-time coating film thickness error, in real time, the position of revision board is adjusted, continuously to obtain optimal coating film thickness uniformity.
Description
Technical field
The present invention relates to a kind of coating apparatus, more particularly to a kind of adjustable film coating correction plate mechanism.
Background technique
When vapor deposition, since evaporation source is different from the relative position of workpiece to be coated, the plating film thickness of workpiece to be coated will lead to
Degree has differences, and coating film thickness is unevenly bad phenomenon common in coating process.Therefore, evaporated device is usually to be plated
Revision board is set between film workpiece and evaporation source, to correct the thicknesses of layers difference on the workpiece to be coated of different location.
In the prior art, dedicated revision board, tool are set generally directed to different workpiece sizes to be coated and resemblance
There is the characteristics of poor universality, and time-consuming and laborious in replacement process, influences efficiency.
Summary of the invention
For overcome the deficiencies in the prior art, it is an object of that present invention to provide a kind of structure is simple, at low cost is adjustable
Film coating correction plate mechanism, improve the versatility of revision board, reduce the manufacturing cost and replacing construction of revision board.It can also basis
Real-time coating film thickness error adjusts the position of revision board, in real time, continuously to obtain optimal coating film thickness uniformity.
To solve the above problems, the technical solution adopted in the present invention is as follows:
Adjustable film coating correction plate mechanism, comprising: revision board, position adjustment component and angle regulation component；
The position adjustment component includes runing rest and propeller；In the propeller fixation and bottom plate；The one of the bracket
End is fixing end, and fixing end is provided with pin hole, and the pin is connect by pin hole with bottom plate；The other end of the bracket is
Free end.
The propeller is connect with bracket, and under the action of propeller, bracket can be around pin rotary motion, to rebuild
The height and position of positive plate.
There are two the revision board settings, respectively using the two sides for being hingedly coupled to runing rest.
The angle regulation component includes connecting rod, movable block and adjustment bar, and the both ends of the adjustment bar are respectively arranged with branch
Seat is supportted, support base is fixed on bracket；The movable block is connect with adjustment bar；The both ends of the connecting rod are respectively arranged with universal pass
Section, wherein the gimbal suspension of one end is connect with movable block, and other end of gimbal suspension is connect with revision board；The connecting rod is set altogether
There are two setting, it is separately connected two revision boards.
Preferably, the structure of two revision boards is mutually symmetrical, and the outer contour shape after two revision board combinations is spindle.
Preferably, the movable block is threadedly coupled with adjustment bar use.
Preferably, one end of the adjustment bar is provided with handle, and the outer ring of handle is provided with Z-Correct bump mapping Z-correct.
Preferably, latch segment is provided on the adjustment bar.
Preferably, the support base includes rolling bearing.
Preferably, the propeller is one of electric cylinders or cylinder.
Preferably, the propeller is electrically connected with plated film control system.
Compared with prior art, the beneficial effects of the present invention are:
Adjustable film coating correction plate mechanism of the invention can be adapted for the workpiece to be coated of different size and shape features, mention
The versatility of high revision board reduces the manufacturing cost and replacing construction of revision board.Can also according to real-time coating film thickness error,
In real time, the position of revision board is adjusted, continuously to obtain optimal coating film thickness uniformity.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the stereoscopic schematic diagram for modifying plate；
Fig. 3 is the side view of revision board；
Fig. 4 is the top view of revision board；
Wherein: position adjusts component 10；Propeller 11；Runing rest 12；Pin 13；Bottom plate 14；Angle regulation component 40；Connecting rod
41；Latch segment 42；Support base 43；Adjust bar 44；Movable block 45；Revision board 50；Hinge 70；Bottom plate 80；
Specific embodiment
To facilitate the understanding of the present invention, a more comprehensive description of the invention is given in the following sections with reference to the relevant attached drawings.In attached drawing
Give preferred embodiment of the invention.But the invention can be realized in many different forms, however it is not limited to herein
Described embodiment.On the contrary, purpose of providing these embodiments is keeps the understanding to the disclosure more saturating
It is thorough comprehensive.
It should be noted that it can directly on the other element when element is referred to as " being fixed on " another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it, which can be, is directly connected to
To another element or it may be simultaneously present centering elements.Term as used herein " vertical ", " horizontal ", " left side ",
" right side ", "upper", "lower" and similar statement are for illustrative purposes only.
Unless otherwise defined, all technical and scientific terms used herein and belong to technical field of the invention
The normally understood meaning of technical staff is identical.Term as used herein in the specification of the present invention is intended merely to description tool
The purpose of the embodiment of body, it is not intended that in the limitation present invention.Term " and or " used herein includes one or more phases
Any and all combinations of the listed item of pass.
In the following, being described further in conjunction with attached drawing and specific embodiment to the present invention:
As shown in Figure 1, 2, adjustable film coating correction plate mechanism, comprising: revision board 50, position adjustment component 10 and angle adjustment
Component 40；
The position adjustment component 10 includes runing rest 12 and propeller 11；In the fixation of propeller 11 and bottom plate 14；Institute
The one end for stating bracket 12 is fixing end, and fixing end is provided with pin hole, and the pin 13 is connect by pin hole with bottom plate 14；Institute
The other end for stating bracket 12 is free end.
The propeller 11 is connect with bracket 12, and under the action of propeller 11, bracket 12 can be rotated around pin 13 to be transported
It is dynamic, thus the height and position of whole revision board.
As shown in Figure 2,3, there are two the settings of revision board 50, the two of runing rest 12 are connected to using hinge 70 respectively
Side.
As indicated at 4, further, the structure of two revision boards 50 is mutually symmetrical, and the outer contour shape after 50 combinations is to spin
Capitate.
As shown in Figure 2,3, the angle regulation component 40 includes connecting rod 41, movable block 45 and adjustment bar 44, the adjustment
The both ends of bar 44 are respectively arranged with support base 43, and support base 43 is fixed on bracket 12；The adjustment bar 4 is supported the limitation of seat 43
Movement in addition to along its own axis rotation；The movable block 45 is connect with adjustment bar 44, and movable block 45 can be along tune
The axial movement of whole bar 44；The both ends of the connecting rod 41 are respectively arranged with gimbal suspension, wherein the gimbal suspension of one end and activity
Block 45 connects, and other end of gimbal suspension is connect with revision board 50；The connecting rod 41 there are two settings, is separately connected two altogether
Revision board 50.
Further, the movable block 45 is threadedly coupled with adjustment 44 use of bar.
Bar 44 is adjusted by positive and negative rotation, the moving axially back and forth in adjustment bar 44 of movable block 45 can be made, drive two
Connecting rod 41 moves simultaneously, further to drive two revision boards 50 opposite or reversely rotate, and changes the mutual of two revision boards 50
The corner dimension of composition changes the projected area of revision board.
Further, one end of the adjustment bar 44 is provided with handle, and the outer ring of handle is provided with Z-Correct bump mapping Z-correct；Pass through hand
Handle can be convenient operator and rotate, and the Z-Correct bump mapping Z-correct of outer ring setting can be anti-skidding, improve accuracy.
Further, it is provided with latch segment 42 on the adjustment bar 44, can be fixed by adjustment bar 44, it prevents from rotating.
Further, the support base 43 includes rolling bearing；It adjusts bar 44 and rolling bearing cooperates, rotation can be provided
Precision.
Further, the propeller 11 is one of electric cylinders or cylinder.
Further, the propeller 11 is electrically connected with plated film control system.
The use of adjustable film coating correction plate mechanism is illustrated:
1. by the fixed coating apparatus of adjustable film coating correction plate mechanism, make revision board 50 be in coating evaporation source with it is to be plated
Between film workpiece.
2. can be manually rotated adjustment bar 44 according to the size of workpiece to be coated, structure feature, changing two revision boards 50
The corner dimension mutually formed makes revision board 50 obtain the projected area for meeting technique requirement on workpiece to be coated.
3. starting coating machine, the coating film thickness that the different location of film-coating workpiece is treated in coating process is monitored, pushes away
It is electrically connected into device 11 with plated film control system, is required according to the technique of coating film thickness and coating film thickness error, starting push away in real time
Into device 11, rotates bracket 12 around pin 13, change revision board 50 at a distance from workpiece to be coated.Propeller 11
Real-time continuous movement can be carried out according to coating film thickness error, so that revision board 50 is in optimum height, to obtain optimal plating film thickness
Spend uniformity.
It will be apparent to those skilled in the art that can make various other according to the above description of the technical scheme and ideas
Corresponding change and deformation, and all these changes and deformation all should belong to the protection scope of the claims in the present invention
Within.
Claims (10)
1. adjustable film coating correction plate mechanism characterized by comprising revision board, position adjustment component and angle adjustment group
Part；
There are two the revision board settings, and respectively using the two sides for being hingedly coupled to runing rest, two revision boards can opposite rotation
Transhipment is dynamic；
The position adjustment component is used to adjust the height and position of revision board；
The angle regulation component is used to adjust the mutual angle of two revision boards, changes the projected area of revision board.
2. adjustable film coating correction plate mechanism as described in claim 1, it is characterised in that: the position adjusts component and includes
Runing rest and propeller；In the propeller fixation and bottom plate；One end of the bracket is fixing end, and fixing end is provided with pin
Nail hole, the pin are connect by pin hole with bottom plate；The other end of the bracket is free end；The propeller and bracket connect
It connects, under the action of propeller, bracket can be around pin rotary motion.
3. adjustable film coating correction plate mechanism as described in claim 1, it is characterised in that: the angle regulation component includes
The both ends of connecting rod, movable block and adjustment bar, the adjustment bar are respectively arranged with support base, and support base is fixed on bracket；It is described
Movable block is connect with adjustment bar；The both ends of the connecting rod are respectively arranged with gimbal suspension, wherein the gimbal suspension of one end and activity
Block connection, other end of gimbal suspension are connect with revision board；There are two the connecting rod is arranged altogether, it is separately connected two amendments
Plate.
4. adjustable film coating correction plate mechanism as described in claim 1, it is characterised in that: the structure of two revision boards is each other
Symmetrically, the outer contour shape after two revision board combinations is spindle.
5. adjustable film coating correction plate mechanism as claimed in claim 3, it is characterised in that: the movable block makes with adjustment bar
It is threadedly coupled.
6. adjustable film coating correction plate mechanism as claimed in claim 3, it is characterised in that: one end setting of the adjustment bar
There is handle, the outer ring of handle is provided with Z-Correct bump mapping Z-correct.
7. adjustable film coating correction plate mechanism as claimed in claim 3, it is characterised in that: be provided with lock on the adjustment bar
Tight block.
8. adjustable film coating correction plate mechanism as claimed in claim 3, it is characterised in that: the support base includes the axis of rolling
It holds.
9. adjustable film coating correction plate mechanism as claimed in claim 2, it is characterised in that: the propeller is electric cylinders or gas
One of cylinder.
10. adjustable film coating correction plate mechanism as claimed in claim 2, it is characterised in that: the propeller and plated film control
System electrical connection processed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811032138.4A CN109457221B (en) | 2019-01-23 | 2019-01-23 | Adjustable coating correction plate mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811032138.4A CN109457221B (en) | 2019-01-23 | 2019-01-23 | Adjustable coating correction plate mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109457221A true CN109457221A (en) | 2019-03-12 |
| CN109457221B CN109457221B (en) | 2023-09-01 |
Family
ID=65606512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811032138.4A Active CN109457221B (en) | 2019-01-23 | 2019-01-23 | Adjustable coating correction plate mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109457221B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114657529A (en) * | 2022-03-25 | 2022-06-24 | 中国工程物理研究院激光聚变研究中心 | Free-form surface coating clamping equipment |
| CN117721421A (en) * | 2024-02-07 | 2024-03-19 | 成都国泰真空设备有限公司 | Device and method for eliminating layering phenomenon of film-forming spectroscopic curve at low temperature |
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| CN208158680U (en) * | 2018-05-30 | 2018-11-27 | 重庆木头木脑文化创意有限公司 | A kind of wooden handset bracket |
| CN209098790U (en) * | 2019-01-23 | 2019-07-12 | 天宫真空科技(广州)有限公司 | Adjustable film coating correction plate mechanism |
-
2019
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| JP2009079276A (en) * | 2007-09-27 | 2009-04-16 | Showa Shinku:Kk | Vacuum vapor deposition apparatus |
| CN201212059Y (en) * | 2008-06-27 | 2009-03-25 | 贵州振华云科电子有限公司 | Thickness evenness correcting device of sputter film |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114657529A (en) * | 2022-03-25 | 2022-06-24 | 中国工程物理研究院激光聚变研究中心 | Free-form surface coating clamping equipment |
| CN117721421A (en) * | 2024-02-07 | 2024-03-19 | 成都国泰真空设备有限公司 | Device and method for eliminating layering phenomenon of film-forming spectroscopic curve at low temperature |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109457221B (en) | 2023-09-01 |
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