CN203960326U - Vacuum evaporation coating film uniformity setting device - Google Patents
Vacuum evaporation coating film uniformity setting device Download PDFInfo
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- CN203960326U CN203960326U CN201420253844.2U CN201420253844U CN203960326U CN 203960326 U CN203960326 U CN 203960326U CN 201420253844 U CN201420253844 U CN 201420253844U CN 203960326 U CN203960326 U CN 203960326U
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- setting device
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- shaped workpiece
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Abstract
The utility model discloses a kind of vacuum evaporation coating film uniformity setting device, vacuum evaporating coating machine comprises vacuum-pumping system, point evaporation source vapo(u)rization system, arc-shaped workpiece frame and thicknesses of layers test macro, the test point of thicknesses of layers test macro is arranged on the turning axle of arc-shaped workpiece frame, described homogeneity setting device is arranged between the some evaporation source and arc-shaped workpiece frame of vacuum evaporating coating machine, described homogeneity setting device is installed near arc-shaped workpiece frame, described homogeneity setting device comprises mount pad, back up pad and correction slide block, setting in a certain angle between described mount pad and described back up pad, multiple described correction slide block parallel arranged are arranged on the both sides of described back up pad, multiple described correction slide block width one length difference of making peace.The utility model provides a kind of vacuum evaporation coating film uniformity setting device, is the homogeneity setting device being repeatedly used, and can carry out adjustment repeatedly to membrane uniformity, and the shape of at every turn adjusting is retained.
Description
Technical field
The utility model relates to a kind of vacuum point-like evaporation source evaporating and coating equipment, relates in particular to a kind of vacuum evaporation coating film uniformity setting device.
Background technology
Vacuum vapor plating has been widely used in decoration film coating and optical coating field, is especially widely used in optical coating field.In high-end optical coating industry, optical film is very strong to the susceptibility of coating film thickness, and in the process of producing at plated film plated film, the homogeneity of optical film thickness has determined yield rate and the product quality of time production by the gross.But due to the arc-shaped workpiece frame that evaporation coating adopts, the evaporation migration distance of point-like evaporation source will produce difference along with the position of evaporation source, cause in evaporative process deposit thickness poor, thereby caused product quality inhomogeneous.
Therefore in actual production, current most of method is to adopt the method that block deposition region to adjust, and be all generally that practitioner oneself carries out manual setting according to detected result, although this inflation method is original, but very effective, but its problem is there is no fixing inflation method, but by virtue of experience adjusts.In order to solve such a problem, the design provides a kind of homogeneity setting device that can be repeatedly used, and can carry out adjustment repeatedly to membrane uniformity, and the shape of at every turn adjusting is retained, and therefore has optimizable feature.
Utility model content
The purpose of this utility model is just to provide in order to address the above problem a kind of vacuum evaporation coating film uniformity setting device.
The utility model is achieved through the following technical solutions above-mentioned purpose:
Vacuum evaporation coating film uniformity setting device, vacuum evaporating coating machine comprises vacuum-pumping system, point evaporation source vapo(u)rization system, arc-shaped workpiece frame and thicknesses of layers test macro, the test point of thicknesses of layers test macro is arranged on the turning axle of arc-shaped workpiece frame, described homogeneity setting device is arranged between the some evaporation source and arc-shaped workpiece frame of vacuum evaporating coating machine, described homogeneity setting device is installed near arc-shaped workpiece frame, described homogeneity setting device comprises mount pad, back up pad and correction slide block, setting in a certain angle between described mount pad and described back up pad, multiple described correction slide block parallel arranged are arranged on the both sides of described back up pad, multiple described correction slide block width one length difference of making peace.
Between mount pad and back up pad, there is certain angle, for installing and support correction slide block; Revising slide block parallel arranged is arranged on the both sides of back up pad, have for locking and the chute of slip effect, form different occlusion shapes by adjusting each release or the indent of revising slide block, thereby revise the thicknesses of layers of plated film rete corresponding position on described work rest; The correction slide block of parallel arranged has certain width and different length, and parallel arranged is arranged on the both sides in back up pad successively, forms and have initial adjustment shape together with back up pad; The correction slide block of parallel arranged all has certain release or indent, can realize repeatedly optimizing and revising forming different adjustment shapes.
Particularly, the installation straight line parallel of described homogeneity setting device is in spherical work-piece frame substrate put area line.
Further, between the installation straight line of described homogeneity setting device and described substrate put area line, distance is 100mm-200mm.
Further, described homogeneity setting device is non-magnet material.
The beneficial effects of the utility model are:
The utility model provides vacuum evaporation coating film uniformity setting device, is the homogeneity setting device being repeatedly used, and can carry out adjustment repeatedly to membrane uniformity, and the shape of at every turn adjusting is retained.
Brief description of the drawings
Fig. 1 is the front view of the utility model vacuum evaporation coating film uniformity setting device;
Fig. 2 is the side-view of the utility model vacuum evaporation coating film uniformity setting device.
In figure: 1-revises slide block, 2-back up pad, 3-mount pad.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail:
As depicted in figs. 1 and 2, the utility model vacuum evaporation coating film uniformity setting device, homogeneity setting device is non-magnet material, vacuum evaporating coating machine comprises vacuum-pumping system, point evaporation source vapo(u)rization system, arc-shaped workpiece frame and thicknesses of layers test macro, the test point of thicknesses of layers test macro is arranged on the turning axle of arc-shaped workpiece frame, homogeneity setting device is arranged between the some evaporation source and arc-shaped workpiece frame of vacuum evaporating coating machine, homogeneity setting device is installed near arc-shaped workpiece frame, homogeneity setting device comprises mount pad 3, back up pad 2 and correction slide block 1, setting in a certain angle between mount pad 3 and back up pad 2, multiple correction slide block 1 parallel arranged are arranged on the both sides of back up pad 2, multiple correction slide block 1 width one length difference of making peace.Between mount pad 3 and back up pad 2, there is certain angle, for installing and support correction slide block 1; Revising slide block 1 parallel arranged is arranged on the both sides of back up pad 2, have for locking and the chute of slip effect, form different occlusion shapes by adjusting each release or the indent of revising slide block 1, thereby revise the thicknesses of layers of plated film rete corresponding position on work rest; The correction slide block 1 of parallel arranged has certain width and different length, and parallel arranged is arranged on the both sides in back up pad 2 successively, forms and has initial adjustment shape together with back up pad 2; The correction slide block 1 of parallel arranged all has certain release or indent, can realize repeatedly optimizing and revising forming different adjustment shapes.
The installation straight line parallel of homogeneity setting device is in spherical work-piece frame substrate put area line.Between the installation straight line of homogeneity setting device and substrate put area line, distance is 100mm-200mm.
Be converted to according to initial film layer thickness profile:
Revise slide block 1 and have certain width, its width can carry out appropriate selection according to the actual disposition of coating equipment, and selects its central point to carry out thicknesses of layers test.
Embodiment is above described preferred implementation of the present utility model; not scope of the present utility model is limited; design under spiritual prerequisite not departing from the utility model; various distortion and improvement that the common engineering technical personnel in this area make technical solutions of the utility model, all should fall in the definite protection domain of claims of the present utility model.
Claims (4)
1. vacuum evaporation coating film uniformity setting device, vacuum evaporating coating machine comprises vacuum-pumping system, point evaporation source vapo(u)rization system, arc-shaped workpiece frame and thicknesses of layers test macro, the test point of thicknesses of layers test macro is arranged on the turning axle of arc-shaped workpiece frame, it is characterized in that: described homogeneity setting device is arranged between the some evaporation source and arc-shaped workpiece frame of vacuum evaporating coating machine, described homogeneity setting device is installed near arc-shaped workpiece frame, described homogeneity setting device comprises mount pad, back up pad and correction slide block, setting in a certain angle between described mount pad and described back up pad, multiple described correction slide block parallel arranged are arranged on the both sides of described back up pad, multiple described correction slide block width one length difference of making peace.
2. vacuum evaporation coating film uniformity setting device according to claim 1, is characterized in that: the installation straight line parallel of described homogeneity setting device is in spherical work-piece frame substrate put area line.
3. vacuum evaporation coating film uniformity setting device according to claim 2, is characterized in that: between the installation straight line of described homogeneity setting device and described substrate put area line, distance is 100mm-200mm.
4. vacuum evaporation coating film uniformity setting device according to claim 1, is characterized in that: described homogeneity setting device is non-magnet material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420253844.2U CN203960326U (en) | 2014-05-19 | 2014-05-19 | Vacuum evaporation coating film uniformity setting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420253844.2U CN203960326U (en) | 2014-05-19 | 2014-05-19 | Vacuum evaporation coating film uniformity setting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203960326U true CN203960326U (en) | 2014-11-26 |
Family
ID=51920934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420253844.2U Expired - Fee Related CN203960326U (en) | 2014-05-19 | 2014-05-19 | Vacuum evaporation coating film uniformity setting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203960326U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109457221A (en) * | 2019-01-23 | 2019-03-12 | 天宫真空科技(广州)有限公司 | Adjustable film coating correction plate mechanism |
-
2014
- 2014-05-19 CN CN201420253844.2U patent/CN203960326U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109457221A (en) * | 2019-01-23 | 2019-03-12 | 天宫真空科技(广州)有限公司 | Adjustable film coating correction plate mechanism |
| CN109457221B (en) * | 2019-01-23 | 2023-09-01 | 广州北辰工业自动化有限公司 | Adjustable coating correction plate mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141126 Termination date: 20160519 |