CN106282916A - Shade - Google Patents
Shade Download PDFInfo
- Publication number
- CN106282916A CN106282916A CN201510298783.0A CN201510298783A CN106282916A CN 106282916 A CN106282916 A CN 106282916A CN 201510298783 A CN201510298783 A CN 201510298783A CN 106282916 A CN106282916 A CN 106282916A
- Authority
- CN
- China
- Prior art keywords
- shade
- plate body
- scratch resistant
- cushion block
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
A kind of shade, it comprises a shade plate body and multiple scratch resistant cushion block, forms multiple spaced coated film deposition through hole in this shade plate body, and the distribution of the plurality of scratch resistant cushion block is arranged at the base material of this shade plate body and meets side.Thereby; make this shade can contact substrate with the plurality of scratch resistant cushion block; make in shade laminating base material or the operating process that separates with base material, it is possible to be effectively prevented from sharpened edge scratch substrate side surface or the plated film of substrate side surface deposition of shade plate body, it is ensured that the quality of base material coated film deposition technique.
Description
Technical field
The present invention relates to a kind of shade, particularly relate to one and be applied to such as the coated film deposition such as sputtering process or evaporation
The shade of technology field.
Background technology
As shown in FIG. 6 and 7, in the coated film deposition technique such as sputter or evaporation, for making base material 30 surface
The plated film of precalculated position formation of deposits given shape, i.e. can fill between sources of deposition 20 and base material 30
If a shade 40, use and make deposition in sources of deposition 20 by thermal evaporation or the shock of high energy ion
When atom in material or molecular dissociation, by the control of the shape of through hole set on shade 40 with position,
Make the part in atom that deposition material surface dissociates or molecule by the through hole in shade 40, and deposit
Form the plated film of given shape in corresponding position, base material 30 surface, deposition remaining atom of dissociating of material or
Molecule is then blocked by the plate face bridging effect of shade 40.
Existing shade is the mistake of the shape that produces of thermal expansion deformation and the size reducing coated film deposition technique
Difference, it is however generally that, shade mainly selects the sheet material made by material that the coefficient of expansion is low, such as ferronickel to close
Gold etc..When the shade 40 of metal material uses, for precision control base material 30 surface deposition plated film shape and
Size, the shade 40 of metal material is usually smooth in base material 30 1 side surface to be coated, together horizontal
The coated film deposition step on base material 30 surface is carried out in coated film deposition process equipment.
The most aforementioned shade 40 is applied in base material 30 coated film deposition technique, because of the shade of the materials such as dilval
The plated film that the hardness of 40 has deposited more than hardness or base material 30 side surface of the base material 30 of the materials such as glass
Hardness, and shade 40 each through hole peritreme etc. of metal material is sharpened edge, the shade 40 of metal material
Smooth divide in control oneself base material 30 side surface of deposition plating of base material 30 side surface or metal material shade 40
From operating process in, sharpened edge easy scratch base material 30 side surface of the shade 40 of metal material or base material
The plated film of 30 side surface depositions.
Summary of the invention
A kind of shade of offer is provided, solves asking of existing shade easy scratch substrate surface
Topic.
For taking off purpose before reaching, shade proposed by the invention comprises:
One shade plate body, its opposite sides respectively deposits material and meets side and a base material to meet side, this shade
Plate body is formed multiple spaced coated film deposition through hole；And
Multiple scratch resistant cushion blocks, distribution is arranged at the base material of this shade plate body and meets side.
By front taking off shade invention, it is arranged at shade plate body mainly by the distribution of the plurality of scratch resistant cushion block
Side met by base material, contacts with glass substrate with the plurality of scratch resistant cushion block, makes shade stick to the operation at base material
Cheng Zhong, each coated film deposition through hole peritreme etc. of shade plate body is sharpened edge, smooth in substrate side table at shade
Face or shade in the operating process that substrate side surface separates, shade of the present invention because there being the auxiliary of scratch resistant cushion block,
The sharpened edge that can make shade plate body is difficult to contact scratch substrate side surface or the plated film of substrate side surface deposition,
Guarantee the quality of base material coated film deposition technique.
It is 2 μm～50 μm that shade of the present invention also can control the thickness of scratch resistant cushion block further, thereby controls
The thickness of scratch resistant cushion block, it is to avoid excesssive gap between shade plate body and substrate and affect the deposition plating of substrate side surface
The shape of film and dimensional accuracy.
The parts that shade of the present invention also can make scratch resistant cushion block be photoresist figuration manufacture further, it can be direct
The existing photoresistance forming technique utilizing etching related process conventional forms on shade plate body, and can accurate control
The thickness of described scratch resistant cushion block, the scratch resistant cushion block that described photoresist shapes can be with the shade of the material such as iron-nickel alloy
Plate body has good associativity.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as to the present invention's
Limit.
Accompanying drawing explanation
The cross-sectional schematic of one preferred embodiment of Fig. 1 shade of the present invention；
Fig. 2 is the side-looking floor map of shade preferred embodiment shown in Fig. 1；
Fig. 3 is the cross-sectional schematic of the laminating base material of shade preferred embodiment shown in Fig. 1；
Fig. 4 shade of the present invention is applied to the floor map of evaporation process；
Fig. 5 shade of the present invention is applied to the floor map of sputtering process；
The schematic diagram of the existing evaporation process of Fig. 6；
The schematic diagram of the existing sputtering process of Fig. 7.
Wherein, reference
10 shades
11 shade plate bodys 111 deposit material and meet side
Side 113 coated film deposition through hole met by 112 base materials
12 scratch resistant cushion blocks
20 sources of deposition
30 base materials
40 shades
Detailed description of the invention
Structural principle and operation principle to the present invention are described in detail below in conjunction with the accompanying drawings:
As it is shown in figure 1, disclose a preferred embodiment of shade of the present invention, described shade 10 comprises a shade
Plate body 11 and multiple scratch resistant cushion block 12.
As shown in Figures 1 and 2, side 111 met by described shade plate body 11 opposite sides respectively deposition material
Meet side 112 with a base material, described shade plate body 11 is formed multiple spaced coated film deposition through hole
113, the plurality of coated film deposition through hole 113 is that the deposition material from shade plate body 11 meets side 111 to be through to base
The through hole of side 112 met by material, described coated film deposition through hole 113 in order to provide the interval passed through of deposition material,
The shape of described coated film deposition through hole 113, size and the position etc. being distributed in this shade plate body 11 are to depend on
Base material that coated film deposition technique is used and set accordingly.
As shown in Figures 1 and 2, in this preferred embodiment, described shade plate body 11 can be selected for ferronickel such as and closes
Low-expansion sheet metals such as gold, are only not limited.Described shade plate body 11 also can further in
Deposition material meets all surfaces of side 111 or local surfaces to form coarse shape surface.Described coarse shape surface
Roughness can set according to different deposition materials.
As shown in Figure 1 to Figure 2, the distribution of the plurality of scratch resistant cushion block 12 is arranged at described shade plate body 11
Base material meet side 112, described scratch resistant cushion block 12 to can be selected for photoresist (or claim photoresist) or polytetrafluoro
Parts made by the materials such as ethylene (Polytetrafluoroethene, trade (brand) name Teflon).Described scratch resistant pad
The quantity of block 12, form and dimension size etc. are according to the size of shade plate body 11 reality, and scratch resistant pad
Block 12 is arranged at the base material of shade plate body 11 and meets position on side 112 etc. and set, only must be in response to base material
The thickness of the scratch resistant cushion block of dimensional accuracy demand modeling 12 of coating process.In this preferred embodiment, it it is control
Make the thickness of scratch resistant cushion block 12 and be 2 μm～50 μm are preferred, wherein with 10 μm, 15 μm or 30 μ
M etc. are optimal.Thereby, make shade plate body 11 utilize Altitude control that scratch resistant cushion block 12 frame is high and be in relatively
Good use state.In this preferred embodiment, scratch resistant cushion block 12 is preferred with selection photoresist so that it is can
The existing photoresistance forming technique directly utilizing etch process conventional forms on shade plate body 11, and can be accurate
Control thickness and its geometry of described scratch resistant cushion block 12.
As shown in Figures 3 to 5, shade 10 of the present invention is applied to evaporation or the sputter etc. of the base materials such as glass 30
During coated film deposition equipment, this shade 10 be with the base material of shade plate body 11 meet side 112 towards base material 30,
And stick to, in base material 30 surface, make shade plate body 11 not contact and both with base material 30 with scratch resistant cushion block 12
Between be spaced the gap of corresponding scratch resistant cushion block 12 thickness.The operating process of base material 30 is combined in this shade 10
In, utilize scratch resistant cushion block 12 to contact base material 30 side surface, therefore the sharp keen of shade plate body 11 can be prevented effectively from
The facts of EDGE CONTACT scratch base material 30 side surface.Afterwards, this shade 10 combine base material 30 be positioned plating
In film deposition apparatus, the deposition material of shade plate body 11 meets side 111 towards sources of deposition 20, Ji Nengjin
The coated film deposition techniques such as the evaporation of row base material 30 or sputter.
When carrying out being deposited with or during the coated film deposition technique such as sputter, sources of deposition 20 is via thermal evaporation or high energy
Amount ionic bombardment and produce the deposition atom of material surface or molecular dissociation, the deposition material atom dissociated or point
A part in son by the coated film deposition through hole 113 in shade plate body 11, and can be deposited on base material 30 table
Face ad-hoc location forms plated film, and remaining deposition material atom or molecule are then because of the entity part of shade plate body 11
Cover and be blocked.When the deposition material of shade plate body 11 meets side 111 to have coarse shape surface, then can
Deposition material is made firmly to adhere on it.
After base material 30 completes coated film deposition technique, this shade 10 steams certainly with the base material 30 of deposition plating
The coated film deposition equipment such as plating or sputter take out, when this shade 10 separates with the base material 30 of deposition plating,
Because having scratch resistant cushion block 12 between shade plate body 11 and base material 30, therefore shade plate body 11 can be prevented effectively from
Sharpened edge contact scratch base material 30 side surface deposition plated film.
Certainly, the present invention also can have other various embodiments, without departing substantially from present invention spirit and the feelings of essence thereof
Under condition, those of ordinary skill in the art work as can make various corresponding change and deformation according to the present invention, but
These change accordingly and deform the protection domain that all should belong to appended claims of the invention.
Claims (9)
1. a shade, it is characterised in that comprise:
One shade plate body, its opposite sides respectively deposits material and meets side and a base material to meet side, this shade
Plate body is formed multiple spaced coated film deposition through hole；And
Multiple scratch resistant cushion blocks, distribution is arranged at the base material of this shade plate body and meets side.
Shade the most according to claim 1, it is characterised in that described scratch resistant cushion block is polytetrafluoroethyl-ne
The parts that alkene shapes.
Shade the most according to claim 1, it is characterised in that described scratch resistant cushion block is that photoresist becomes
The parts of shape.
Shade the most according to claim 1, it is characterised in that described scratch resistant cushion block is that photoresist becomes
The parts of shape, described shade plate body is the parts that iron-nickel alloy manufactures.
Shade the most according to any one of claim 1 to 4, it is characterised in that described scratch resistant pad
The thickness of block is 2 μm～50 μm.
Shade the most according to claim 1, it is characterised in that described scratch resistant cushion block is photoresist institute
The parts shaped, the thickness of described scratch resistant cushion block is 10 μm, 15 μm or 30 μm.
Shade the most according to claim 1, it is characterised in that described scratch resistant cushion block is that photoresist becomes
The parts of shape, the thickness of described scratch resistant cushion block is 10 μm, 15 μm or 30 μm, described shade plate body
The parts manufactured for iron-nickel alloy.
8. according to the shade described in claim 1,2,3,4,6 or 7, it is characterised in that this shade
The deposition material of plate body meets side all or local surfaces forms coarse shape surface.
Shade the most according to claim 5, it is characterised in that the deposition material of this shade plate body is met
Side is all or local surfaces forms coarse shape surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510298783.0A CN106282916A (en) | 2015-06-03 | 2015-06-03 | Shade |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510298783.0A CN106282916A (en) | 2015-06-03 | 2015-06-03 | Shade |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106282916A true CN106282916A (en) | 2017-01-04 |
Family
ID=57656294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510298783.0A Pending CN106282916A (en) | 2015-06-03 | 2015-06-03 | Shade |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106282916A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107058945A (en) * | 2017-04-20 | 2017-08-18 | 京东方科技集团股份有限公司 | Mask plate |
| CN107354426A (en) * | 2017-07-21 | 2017-11-17 | 京东方科技集团股份有限公司 | The preparation method of mask plate and mask plate |
| WO2022142989A1 (en) * | 2020-12-28 | 2022-07-07 | 江苏菲沃泰纳米科技股份有限公司 | Coating shielding jig |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1448532A (en) * | 2002-03-01 | 2003-10-15 | 三洋电机株式会社 | Evaporation method and manufacturing method of display device |
| CN102011088A (en) * | 2010-12-01 | 2011-04-13 | 东莞宏威数码机械有限公司 | Mask adsorption structure and method for attaching mask |
| CN202658217U (en) * | 2012-04-19 | 2013-01-09 | 彩虹（佛山）平板显示有限公司 | Mask plate for OLED (Organic Light Emitting Diode) evaporation |
| CN103911585A (en) * | 2013-01-08 | 2014-07-09 | 旭晖应用材料股份有限公司 | Shade cover |
-
2015
- 2015-06-03 CN CN201510298783.0A patent/CN106282916A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1448532A (en) * | 2002-03-01 | 2003-10-15 | 三洋电机株式会社 | Evaporation method and manufacturing method of display device |
| CN102011088A (en) * | 2010-12-01 | 2011-04-13 | 东莞宏威数码机械有限公司 | Mask adsorption structure and method for attaching mask |
| CN202658217U (en) * | 2012-04-19 | 2013-01-09 | 彩虹（佛山）平板显示有限公司 | Mask plate for OLED (Organic Light Emitting Diode) evaporation |
| CN103911585A (en) * | 2013-01-08 | 2014-07-09 | 旭晖应用材料股份有限公司 | Shade cover |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107058945A (en) * | 2017-04-20 | 2017-08-18 | 京东方科技集团股份有限公司 | Mask plate |
| CN107058945B (en) * | 2017-04-20 | 2020-07-07 | 京东方科技集团股份有限公司 | Mask plate |
| CN107354426A (en) * | 2017-07-21 | 2017-11-17 | 京东方科技集团股份有限公司 | The preparation method of mask plate and mask plate |
| CN107354426B (en) * | 2017-07-21 | 2020-04-03 | 京东方科技集团股份有限公司 | Mask and manufacturing method thereof |
| WO2022142989A1 (en) * | 2020-12-28 | 2022-07-07 | 江苏菲沃泰纳米科技股份有限公司 | Coating shielding jig |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170104 |