CN109457221B - Adjustable coating correction plate mechanism - Google Patents
Adjustable coating correction plate mechanism Download PDFInfo
- Publication number
- CN109457221B CN109457221B CN201811032138.4A CN201811032138A CN109457221B CN 109457221 B CN109457221 B CN 109457221B CN 201811032138 A CN201811032138 A CN 201811032138A CN 109457221 B CN109457221 B CN 109457221B
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- Prior art keywords
- correction
- correction plate
- adjusting
- propeller
- plate mechanism
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
The invention discloses an adjustable coating film correction plate mechanism, which comprises: the device comprises a correction plate, a position adjusting assembly and an angle adjusting assembly; the two correction plates are connected to two sides of the rotating bracket by hinges respectively, and can relatively rotate; the position adjusting component is used for adjusting the height position of the correction plate; the angle adjusting component is used for adjusting the mutual included angle of the two correction plates and changing the projection area of the correction plates. The invention can be suitable for the workpieces to be coated with different sizes and shape characteristics, improves the universality of the correction plate, reduces the manufacturing cost and the replacement time of the correction plate, and can also adjust the position of the correction plate in real time and continuously according to the real-time coating thickness error so as to obtain the optimal coating thickness uniformity.
Description
Technical Field
The present invention relates to a coating apparatus, and more particularly, to an adjustable coating correction plate mechanism.
Background
During evaporation, the difference of the coating thickness of the workpiece to be coated can be caused due to the fact that the relative positions of the evaporation source and the workpiece to be coated are different, and uneven coating thickness is a common bad phenomenon in a coating process. Therefore, the vapor deposition apparatus generally provides a correction plate between the workpiece to be coated and the vapor deposition source, thereby correcting the difference in thickness of the film layers on the workpiece to be coated at different positions.
In the prior art, a special correction plate is generally arranged according to different sizes and appearance characteristics of workpieces to be coated, so that the correction plate has the characteristic of poor universality, and is time-consuming and labor-consuming in the replacement process, and the efficiency is affected.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide the adjustable coating film correction plate mechanism which is simple in structure and low in cost, so that the universality of the correction plate is improved, and the manufacturing cost and the replacement time of the correction plate are reduced. The position of the correction plate can be continuously adjusted in real time according to the real-time coating thickness error so as to obtain the optimal coating thickness uniformity.
In order to solve the problems, the technical scheme adopted by the invention is as follows:
an adjustable plating correction plate mechanism comprising: the device comprises a correction plate, a position adjusting assembly and an angle adjusting assembly;
the position adjusting assembly comprises a rotating bracket and a propeller; the propeller is fixed on the bottom plate; one end of the rotary support is a fixed end, and the fixed end is provided with a pin hole which is connected with the bottom plate through a pin; the other end of the rotary support is a free end.
The propeller is connected with the rotating bracket, and the rotating bracket can rotate around the pin under the action of the propeller, so that the height position of the plate is adjusted.
The correction plate is provided with two, uses the hinge to connect in the both sides of runing rest respectively.
The angle adjusting assembly comprises a connecting rod, a movable block and an adjusting rod, wherein supporting seats are respectively arranged at two ends of the adjusting rod and are fixed on the rotating bracket; the movable block is connected with the adjusting rod; the two ends of the connecting rod are respectively provided with a universal joint, wherein the universal joint at one end is connected with the movable block, and the universal joint at the other end is connected with the correction plate; the connecting rods are arranged in two, and are respectively connected with the two correction plates.
Preferably, the two correction plates are symmetrical in structure, and the combined outer contour shape of the two correction plates is fusiform.
Preferably, the movable block is in threaded connection with the adjusting rod.
Preferably, one end of the adjusting rod is provided with a handle, and the outer ring of the handle is provided with concave-convex textures.
Preferably, the adjusting rod is provided with a locking block.
Preferably, the support comprises a rolling bearing.
Preferably, the propeller is one of an electric cylinder or an air cylinder.
Preferably, the propeller is electrically connected with the coating control system.
Compared with the prior art, the invention has the beneficial effects that:
the adjustable coating correction plate mechanism can be suitable for workpieces to be coated with different sizes and shape characteristics, improves the universality of the correction plate, and reduces the manufacturing cost and the replacement time of the correction plate. The position of the correction plate can be continuously adjusted in real time according to the real-time coating thickness error so as to obtain the optimal coating thickness uniformity.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic perspective view of a modified plate;
FIG. 3 is a side view of a correction plate;
FIG. 4 is a top view of the correction plate;
wherein: a position adjustment assembly 10; a propeller 11; a rotating bracket 12; a pin 13; a bottom plate 14; an angle adjustment assembly 40; a link 41; a lock block 42; a support base 43; an adjustment lever 44; a movable block 45; a correction plate 50; a hinge 70; a bottom plate 14;
Detailed Description
In order that the invention may be readily understood, a more complete description of the invention will be rendered by reference to the appended drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," "up," "down," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
The invention will be further described with reference to the accompanying drawings and detailed description below:
as shown in fig. 1 and 2, the adjustable plating correction plate mechanism includes: correction plate 50, position adjustment assembly 10, and angle adjustment assembly 40;
the position adjustment assembly 10 comprises a rotating bracket 12 and a propeller 11; the propeller 11 is fixed on the bottom plate 14; one end of the rotary bracket 12 is a fixed end, and the fixed end is provided with a pin hole which is connected with the bottom plate 14 through a pin 13; the other end of the rotating bracket 12 is a free end.
The propeller 11 is connected with a rotating bracket 12, and the rotating bracket 12 can rotate around a pin 13 under the action of the propeller 11, so that the height position of the plate is corrected.
As shown in fig. 2 and 3, the correction plate 50 is provided with two plates, which are respectively connected to both sides of the rotating bracket 12 using hinges 70.
As shown in fig. 4, further, the two correction plates 50 are symmetrical to each other, and the combined outer contour shape of the two correction plates 50 is spindle-shaped.
As shown in fig. 2 and 3, the angle adjusting assembly 40 includes a connecting rod 41, a movable block 45 and an adjusting rod 44, wherein two ends of the adjusting rod 44 are respectively provided with a supporting seat 43, and the supporting seat 43 is fixed on the rotating bracket 12; the adjustment lever 4 is restrained from movement other than rotational movement along its own axis by the support seat 43; the movable block 45 is connected with the adjusting rod 44, and the movable block 45 can move along the axial direction of the adjusting rod 44; the two ends of the connecting rod 41 are respectively provided with a universal joint, wherein the universal joint at one end is connected with the movable block 45, and the universal joint at the other end is connected with the correction plate 50; the number of the connecting rods 41 is two, and two correction plates 50 are respectively connected.
Further, the movable block 45 is screwed with the adjusting rod 44.
Through the forward and reverse rotation of the adjusting rod 44, the movable block 45 can move forward and backward in the axial direction of the adjusting rod 44, so as to drive the two connecting rods 41 to move simultaneously, further drive the two correction plates 50 to rotate in opposite directions or in opposite directions, change the included angle formed by the two correction plates 50, and change the projection area of the correction plates.
Further, a handle is arranged at one end of the adjusting rod 44, and a concave-convex texture is arranged on the outer ring of the handle; the handle can facilitate the rotation of operators, the concave-convex texture arranged on the outer ring can prevent slipping, and the accuracy is improved.
Further, the adjusting lever 44 is provided with a locking block 42, which can fix the adjusting lever 44 against rotation.
Further, the support seat 43 comprises a rolling bearing; the adjustment lever 44 cooperates with the rolling bearing to provide rotational accuracy.
Further, the propeller 11 is one of an electric cylinder or an air cylinder.
Further, the propeller 11 is electrically connected with a coating control system.
Examples of the use of adjustable coating correction plate mechanisms:
1. an adjustable coating correction plate mechanism is fixed on the coating device, so that the correction plate 50 is positioned between the coating evaporation source and the workpiece to be coated.
2. According to the size and structural characteristics of the workpiece to be coated, the adjusting rod 44 is manually rotated to change the included angle formed by the two correction plates 50, so that the projection area of the correction plates 50 on the workpiece to be coated meets the process requirements.
3. Starting a coating machine, monitoring coating thicknesses of different positions of a workpiece to be coated in a coating process, electrically connecting a propeller 11 with a coating control system, starting the propeller 11 according to the process requirement of the coating thickness and real-time coating thickness error, enabling a rotating bracket 12 to rotate around a pin 13, and further enabling the distance between a correction plate 50 and the workpiece to be coated to be changed. The pusher 11 can perform real-time continuous action according to the coating thickness error, so that the correction plate 50 is at the optimal height to obtain the optimal coating thickness uniformity.
It will be apparent to those skilled in the art from this disclosure that various other changes and modifications can be made which are within the scope of the invention as defined in the appended claims.
Claims (8)
1. Adjustable coating film correction board mechanism, its characterized in that includes: the device comprises a correction plate, a position adjusting assembly and an angle adjusting assembly;
the position adjusting assembly comprises a rotating bracket and a propeller; the propeller is fixed on the bottom plate; one end of the rotary support is a fixed end, and the fixed end is provided with a pin hole which is connected with the bottom plate through a pin; the other end of the rotary bracket is a free end; the propeller is connected with the rotating bracket, and the rotating bracket can rotate around the pin under the action of the propeller;
the two correction plates are connected to two sides of the rotating bracket by hinges respectively, and can relatively rotate;
the position adjusting component is used for adjusting the height position of the correction plate;
the angle adjusting assembly comprises a connecting rod, a movable block and an adjusting rod, wherein supporting seats are respectively arranged at two ends of the adjusting rod and are fixed on the rotating bracket; the movable block is connected with the adjusting rod; the two ends of the connecting rod are respectively provided with a universal joint, wherein the universal joint at one end is connected with the movable block, and the universal joint at the other end is connected with the correction plate; the connecting rods are two in number and are respectively connected with the two correction plates;
the angle adjusting component is used for adjusting the mutual included angle of the two correction plates and changing the projection area of the correction plates.
2. The adjustable plating correction plate mechanism of claim 1, wherein: the two correction plates are symmetrical in structure, and the combined outer contour shape of the two correction plates is spindle-shaped.
3. The adjustable plating correction plate mechanism of claim 1, wherein: the movable block is connected with the adjusting rod by screw threads.
4. The adjustable plating correction plate mechanism of claim 1, wherein: one end of the adjusting rod is provided with a handle, and the outer ring of the handle is provided with concave-convex textures.
5. The adjustable plating correction plate mechanism of claim 1, wherein: the adjusting rod is provided with a locking block.
6. The adjustable plating correction plate mechanism of claim 1, wherein: the support seat comprises a rolling bearing.
7. The adjustable plating correction plate mechanism of claim 1, wherein: the propeller is one of an electric cylinder or an air cylinder.
8. The adjustable plating correction plate mechanism of claim 1, wherein: the propeller is electrically connected with the coating control system.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811032138.4A CN109457221B (en) | 2019-01-23 | 2019-01-23 | Adjustable coating correction plate mechanism |
Applications Claiming Priority (1)
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CN201811032138.4A CN109457221B (en) | 2019-01-23 | 2019-01-23 | Adjustable coating correction plate mechanism |
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CN109457221A CN109457221A (en) | 2019-03-12 |
CN109457221B true CN109457221B (en) | 2023-09-01 |
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CN201811032138.4A Active CN109457221B (en) | 2019-01-23 | 2019-01-23 | Adjustable coating correction plate mechanism |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114657529A (en) * | 2022-03-25 | 2022-06-24 | 中国工程物理研究院激光聚变研究中心 | Free-form surface coating clamping equipment |
CN117721421A (en) * | 2024-02-07 | 2024-03-19 | 成都国泰真空设备有限公司 | Device and method for eliminating layering phenomenon of film-forming spectroscopic curve at low temperature |
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JPH08176820A (en) * | 1994-12-22 | 1996-07-09 | Toshiba Glass Co Ltd | Vacuum vapor deposition device |
CN201212059Y (en) * | 2008-06-27 | 2009-03-25 | 贵州振华云科电子有限公司 | Thickness evenness correcting device of sputter film |
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CN205616945U (en) * | 2016-05-24 | 2016-10-05 | 苏州奥科飞光电科技有限公司 | Board is reviseed to coating film |
CN206052136U (en) * | 2016-08-31 | 2017-03-29 | 苏州京浜光电科技股份有限公司 | A kind of coating apparatus revision board |
CN106863361A (en) * | 2017-03-21 | 2017-06-20 | 芜湖星途机器人科技有限公司 | Robot eyes component with display screen protective cover |
CN207742628U (en) * | 2017-12-06 | 2018-08-17 | 四川智联共创科技有限公司 | A kind of Intelligent notebook computer computer radiating apparatus |
CN208151466U (en) * | 2018-04-18 | 2018-11-27 | 东莞市天瞳电子有限公司 | Revision board, uniform correcting device and its coating machine |
CN208158680U (en) * | 2018-05-30 | 2018-11-27 | 重庆木头木脑文化创意有限公司 | A kind of wooden handset bracket |
CN209098790U (en) * | 2019-01-23 | 2019-07-12 | 天宫真空科技(广州)有限公司 | Adjustable film coating correction plate mechanism |
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2019
- 2019-01-23 CN CN201811032138.4A patent/CN109457221B/en active Active
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH08176820A (en) * | 1994-12-22 | 1996-07-09 | Toshiba Glass Co Ltd | Vacuum vapor deposition device |
JP2009079276A (en) * | 2007-09-27 | 2009-04-16 | Showa Shinku:Kk | Vacuum vapor deposition apparatus |
CN201212059Y (en) * | 2008-06-27 | 2009-03-25 | 贵州振华云科电子有限公司 | Thickness evenness correcting device of sputter film |
TW201317372A (en) * | 2011-10-31 | 2013-05-01 | Hon Hai Prec Ind Co Ltd | Correction mask for coating and coating device |
CN103088298A (en) * | 2011-10-31 | 2013-05-08 | 鸿富锦精密工业(深圳)有限公司 | Coating correction plate and coating device |
CN103993267A (en) * | 2014-04-30 | 2014-08-20 | 光驰科技(上海)有限公司 | Arranging correction method for correction plate in film-plating machine |
CN203960326U (en) * | 2014-05-19 | 2014-11-26 | 红安华州光电科技有限公司 | Vacuum evaporation coating film uniformity setting device |
CN205616945U (en) * | 2016-05-24 | 2016-10-05 | 苏州奥科飞光电科技有限公司 | Board is reviseed to coating film |
CN206052136U (en) * | 2016-08-31 | 2017-03-29 | 苏州京浜光电科技股份有限公司 | A kind of coating apparatus revision board |
CN106863361A (en) * | 2017-03-21 | 2017-06-20 | 芜湖星途机器人科技有限公司 | Robot eyes component with display screen protective cover |
CN207742628U (en) * | 2017-12-06 | 2018-08-17 | 四川智联共创科技有限公司 | A kind of Intelligent notebook computer computer radiating apparatus |
CN208151466U (en) * | 2018-04-18 | 2018-11-27 | 东莞市天瞳电子有限公司 | Revision board, uniform correcting device and its coating machine |
CN208158680U (en) * | 2018-05-30 | 2018-11-27 | 重庆木头木脑文化创意有限公司 | A kind of wooden handset bracket |
CN209098790U (en) * | 2019-01-23 | 2019-07-12 | 天宫真空科技(广州)有限公司 | Adjustable film coating correction plate mechanism |
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